Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 Current Applied Physics Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

NSIP와 BOOP의 고해상전산화단층촬영 소견과 비교

백상현,박재성,차장규,홍현숙,김대호,박성진,조준희,이혜경,최진수 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Purpose: BOOP and NSIP also share similar clinical features such as subacute flu-like illness, the finding of bronchoalveolar lavage, the result of pulmonary function test and more favourable outcome than usual interstitial pneumonia(UIP). The author try to compare the HRCT findings of NSIP with BOOP by pattern and distribution of diseases. Materials and Methods: HRCT findings of histopathologically proven NSIP(Group Ⅰ; 6, Group Ⅱ; 7, Group Ⅲ; 2) in 15 patients(5 male, 10 female, age range, 39-69 years; mean age, 53 years), BOOP in 15 patients(6 male, 9 female, age range, 26-76 years; mean age, 52 years) were reviewed retrospectively. Results: The common pattern of the two diseases was admixed consolidation, ground glass attenuation & reticular densities with/without architectural distortion(NSIP; 53.3%, BOOP; 46.7%). The main component of the pattern wan predominantly consolidation(NSIP; 46.7%, BOOP; 73.3%) and ground glass attenuation(NSIP; 40.0%, BOOP;20.0%). Architectural distotion was more provinent finding with NSIP(mild ; 3, moderate ; 4, severe; 2) compared with BOOP(mild; 7, moderate; 2, severe; 0). The predominant overall distribution was lower lung, peribronchovascular & peripheral lung field in both of the two entities(NSIP;73.3%, BOOP; 73.3%). Peribronchovascular involvement was more common with NSIP(100%) than BOOP(80%), whereas peripheral involvement was more common with BOOP(93.3%) than NSIP(80%). Conclusion: The HRCT findings of NSIP and BOOP were similar in pattern and distribution. But NIP manifested more frequently ground-glass attenuation, whereas BOOP showed more frequently consolidation. Architectural distortion was more severe with NSIP than BOOP. NSIP invoved more frequently peribronchovascular space and BOOP were more common in peripheral lung field.

소득계층요인에 따른 자연녹지와 도시공원의 접근성 분석

임유라(Lim Yu-Ra),추장민(Chu Jang-Min),신지영(Shin Ji-Young),배현주(Bae Hyun-Joo),박창석(Park Chang-Seok) 대한국토·도시계획학회 2009 國土計劃 Vol.44 No.4

Natural greenspace and urban parks provide places for people to experience nature and engage in physical activity. For these reasons, greenspace and urban parks can be an index of environmental benefits. An equity mapping analysis was used to evaluate the area and the accessibility to the greenspace and urban parks by socioeconomic status. This study analyzed the accessibility of greenspace and urban parks in Seongnam-si, according to their locations using a Geographic Information System (GIS). In Seongnam-si, we found patterns of inequity in the distribution of urban parks and greenspace. This inequity can cause environmental inequity due to the lack of opportunity to use the greenspace and urban parks. The study shows how a GIS-based buffer analysis in conjunction with statistical analysis of socioeconomic data can be used to analyse the equity of access to community greenspace and urban parks. The results can be used to inform the local planning process and the GIS approach can be expanded into other local authority domains.

지능형 자동차 주변 감시 시스템 설계 방안

장시웅(Si-woong Jang),박영식(Young-sik Park),성현용(Hyun-yong Sung),곽길봉(Gil-bong Kwak),김선남(Seon-nam Kim),김경진(Kyeoung-jin Kim) 한국정보기술학회 2009 Proceedings of KIIT Conference Vol.2009 No.-

본 연구는 차량 주변을 지능적으로 감시하는 자동차 주변 감시시스템에 관한 것으로, 자동차의 주행 및 주차 시 속도의 변화나 운전자의 요청에 의해 자동차 주변 지역에 관한 시야를 상황에 따라 달리하여 모니터링 함으로써 운전자가 안전한 주행 및 주차를 수행할 수 있게 하기 위한 것이다. 그러한 목적을 달성하기 위하여 본 연구에서는 차량의 주변부를 감시하기 위하여 차량의 외곽에 설치된 카메라의 각도가 지면으로부터 차량의 상부를 향하는 방향으로 변경될 수 있도록 제어하는 제어부, 카메라의 영상을 입력받아 차량주변의 영상을 생성하는 영상처리모듈, 영상처리모듈에서 생성된 영상을 출력하는 디스플레이를 포함하는 것을 특징으로 하는 지능형 자동차 주변 감시시스템을 제안한다. This study is on a vehicle surroundings monitoring system, which enables a driver to travel and park safely by monitoring vehicle surroundings, depending on the speed of vehicle and driver's control when traveling and parking. To achieve the aforementioned purpose, we propose an intelligent vehicle surroundings monitoring system, which consists of a control part, an image processing module and display module. Hence, the control module controls angle of camera to turn upward from the bottom to monitor vehicle surroundings. The image processing module merges the received images from cameras with the original vehicle image to display the vehicle’s surroundings in real time as if looking down from the sky.

40세 이하 관상동맥 질환자에서 장기적 임상 관찰

이승욱,정명호,박종철,박형욱,조상희,김원,김계훈,이상현,강경태,조장현,김남호,김건형,안영근,조정관,박종춘,강정채 全南大醫大 2001 전남의대학술지 Vol.37 No.2

개에서 이중 결찰법을 통한 동맥관 개존증의 완치 예

윤헌영,정순욱,박희명,박철,정만복,김준영,한현정,황민,노병국,박상혁,장하영,박정윤 한국임상수의학회 2004 한국임상수의학회지 Vol.21 No.1

A ten months old, female Yorkshire terrier weighing 2.88 kg referred to veterinary teaching hospital of college of veterinary medicine, Konkuk University because of syncope, cough and dyspnea. First hematological and serum chemical test revealed thrombocytopenia, mild anemia, and increase of concentration of ALP (195 U/L). On 57 days later, second hematological and serum chemical test revealed polycythemia, increase of concentration of ALP (211 U/L), and Tchol (387 mg/dl). Right atrium enlargement, main pulmonary artery bulge and cardiomegaly (VHS = 11.5) were observed in radiographic findings. Ultrasonographic images showed both right and left ventricular dilation and turbulent flow between the descending aorta and the main pulmonary artery in color Doppler imaging. ECG showed left ventricular enlargement, SA block, and electrical alternant. Thoracotomy was performed through left fourth intercostal incision under isoflurane anesthesia. Patent ductus arteriosus was double ligated with 1-0 silk. Cough and dyspnea disappeared on 5 days after operation. Turbulent flow was not found in color doppler imaging of ultrasonography on 10 days after operation. Ten months later after the operation, syncope could not exist any more.

한의진단명과 진단요건의 표준화 연구 II (표준화 실례) : 2차년도 연구결과 중간 보고

양기상,최선미,최승훈,안규석,박경모,박종현,김성우,신승호,정우열,전병훈,고현,김정범,신상우,김성훈,김동희,권영규,엄현섭,장혜옥 한국한의학연구원 1996 한국한의학연구원논문집 Vol.2 No.1

The diagnostic requirements were suggested and explained regarding the systems of differentiation of symptoms and signs in the second year study of standardization and unification of the terms and conditions used for diagnosis in oriental medicine. The systems were as follows; - differential diagnosis according to condition of body fluid, differentiation of syndromes according to the state of qi and blood, differential diagnosis according to relative excessiveness or deficiency of yin and yang(氣血陰陽津液辨證) - differentiation of diseases according to pathological changes of the viscera and their interrelation - analyzing and differentiating of febrile diseases in accordance with the theory of the six channels(傷寒辨證) The individual diagnosis pattern was arranged by the diagnostic requirements in the following order : another name(異名), notion of diagnosis pattern, index of differentiation of symptoms and signs(辨證指標), the main point of diagnosis, analysis of diagnosis pattern(證候分析), discrimination of diagnosis pattern(證候鑑別), a way of curing a diseases(治法), prescription(處方), herb in common use(常用藥物), diseases appearing the diagnosis pattern(常見疾病), documents(文獻調査). This study was carried out on the basis of the Chinese documents and references.

유방암의 위와 대장전이

유현아,김은영,서민지,정은,조민정,오현진,장지혜,박지찬,이정의,박석영 이화여자대학교 의과학연구소 2014 EMJ (Ewha medical journal) Vol.37 No.2

Gastric metastasis from breast cancer is rare and only six cases have been reported in Korea. Colon metastasis is more rare than gastric metastasis. We report a 63-year-old woman with gastric and colon metastases of invasive lobular carcinoma of breast. She was diagnosed as right breast cancer, received right modified radical mastectomy 10 years ago and has been treated with chemotherapy and hormone therapy. Investigating for melena and a small caliber of stool, we found gastric and colon metastases. The diagnosis of metastatic breast cancer was made through gross pathologic and immunohistochemistry staining. We report a case with gastric and colon metastases from breast cancer and a review of the associated six case reports in Korea.

예·체능 전공 대학생들의 여가실태와 개선방향에 관한 연구

박장근,정수현,임란희 명지대학교 예체능연구소 2003 藝體能論集 Vol.14 No.-

The objective of this research which investigates the leisure activity form and a satisfactory degree of physical training and art university students and there is a place where it presents the improvement plan for this field In order to attain the objective of the research We executed self-admistration method question of the collection from 2001 May 21st until 2001 August 31st to 370 people physical traning subject 100 person, fine arts subject 100 person music 100 person baduk subject 70 person university students who are located in the H, K university in seoul and M, Y university in Kyonggi-Do It reveals from the research the following conclusion. 1. the leisure activity participation which it follows in personal quality and form quality analysis(1) views from result of the participation form the appreciation 27.3%, sports 26.8%, playing and amusement 26.8% it appeared the fact that it is the difference which considers form the sex the subject, the religion and the family economic leave. (2) According to the results of participation for one month, from the fourth to the sixth of attendance was 27.1 percent and from the third to the fourth of attendance was 24.1 percent. However, there were some differences in two items as major add religion. (3) From the result of the participation form due to the dwelling duration, from two hours to three hours was 35.7% percent. But there were some differences in gender as well. (4) From the result of the participation form due to the duration, over three years was 49.2 percent and there was no difference in this part. (5) From the result of the participation form due to the companion, a friend was 65.9%, other sex friend was 15.4% However, There were some differences in two items as major and grade. (6) From the result of the participation for due to the pocket money in one month, from 200,000 to 300,000 was 35.1 percent , from 100,000 to 200,000 was 23.0 percent, there were also some differences in two items as grade and the family economic level. (7) The result of the participation form which it follows in activity consuming expense is appeared that 10-30 thousand won below 48.1% and 10 thousand won 24.1%. It appeared the fact that there is the difference un the grad the family economic level. (8) The result of the participation form which it follows in hindrance activity, there are 39.7% economic power 30.8% It appeared the fact that there is the difference insufficient time in the subject the family economic level. 2. The evaluation scale regarding a leisure activity satisfactory analysis satisfactory degree is like that very at 5 scales of the Likert, (5 pieces), it is like that, (4 pieces), it is an usual, (3 pieces), it is not like that, (2 pieces), it is not like that very, (1 piece) with it evaluated, When it sees a leisure activity satisfactory moral investigation result, it appers Order broad way that stress solution average 3,87 (sd=.96) with to appear most highly ,friendship planning average 3.55 (sd=1.07) using of knowledge 3,29 (sd=.99) study ability improvement 3,09 (sd=1.10) physical strength increase 3.05(sd=1.23).

일부 소규모 시계조립 사업장의 상지 누적외상성장애의 유병률

장은철,김현주,권영준,박시복,이수진,송재철 大韓産業醫學會 2000 대한직업환경의학회지 Vol.12 No.4

목적 : 단순 반복작업을 하는 시계조립 사업장 근로자를 대상으로 상지 누적외상성장애의 자각증상 유병률과 상지 누적외상성장애 유병률을 파악하고자 하였다. 방 법 : 인구학적 특성, 상지의 자각증상, 사회심리적 요인은 자가 설문지법으로, 인간공학적 특성은 점검표를 이용한 면담법으로 조사하였다. 상지의 자각증상 조사와 사회심리적 요인은 각각, N10SH (1993) 설문지와 Karasek(1979)의 Job strain model을 번역하여 조사하였다. 상지 누적외상성장애 판정은 의사가 작업 현장에서 직접 환자 면담과 이학적 검사를 수행한 후, 연구에서 규정한 증례정의에 의해 수행하였다. 수집된 자료는 x2 teat와 exact test로 단별량 분석을 하였고, 이중 의미있는 변수와 위험 인자로 알려진 변수들로 다중 로지스틱 회귀분석을 시행하였다. 결 과 : 대상자들의 자각증상 유병률은 54.2 %였고, 부위별로는 목 34.9 %, 손/손목 31.3 %, 어깨 30.1 %, 팔/팔꿈치 18.0 %순이었다. 상지 누적외상성장애의 유병률은 45.8 %였고, 근막동통증후군이 26명으로 가장 많았고, De Quervain씨 병 8명, 수부/전완부의 건염 및 건활막영 8명, 수근관 증후군 5명, 이두건염 5명, 척골 신경병증 5명, 내상과 염 4명, 외상과염 2명, 경추 디스크 질환 2명, 흥곽 출구 증후군 1명순으로 나타났다. 단변량 분석시 자각증상 유병률은 작업부서 중 완성 부에서, 상지 누적외상성장애 유병률은 여자와 완성 부에서 통계학적으로 유의하게 높았다. 다중 로지스틱 회귀분석 결과 완성부와 근무긴장도가 높은 군이 상지 누적외상 성장애와 통계학적으로 유의한 결과를 보였다. 결 론 : 이 연구에서 상지 누적외상성장애 유병률은 45.8 %으로서 저강도의 단순 반복작업을 하는 시계조립 사업장 근로자에서도 누적외상성장애의 위험이 있는 것으로 생각된다. 또한, 사회심리적 요인과 작업 부서별 공정 및 환경이 유병률에 영향을 미치는 주요 요인으로 생각되며, 향후 이들에 관한 다양한 연구가 진행되어야 할 것이다. 산업보건 현장에서는 시계조립 사업장과 같이 저 강도의 단순 반복작업을 위주로 하는 사업장에 대한 지속적인 관심과 각 사업장별 위험요인을 파악하여 적절한 예방 및 관리 대책을 세워야 할 것이다. Objectives : The prevalence of cumulative trauma disorders of upper extremities mons watch assembly workers in small-scaled industry was studied. Methods. In 83 workers at five watch assembly factories, symptoms and psychosocial questionnaire, ergonomic Interview, physical examination were conducted. Results : Prevalence of self-reported symptoms was 54.2% and neck 34.9%, wrist/hand 31.3%, shoulder 30.1%, elbow/arm 18.0% by anatomical site. Prevalence of cumulative trauma disorders was 45.8%. Most common disease was myofascial pain syndrome (31.3%). The other diseases were De Quervain disease (9.6%), tenosynovitis/tendinitis at wrist/hand (9.6%), bicipital tendinitis(6.0%), fat. epicondylitis(4.8%), meIn. epicondylitis(2.4%), and cervical disc disease(2.4%). As result of ergonomic interview, repetitiveness was 79(98.8%). There were no differences in the prevalence of self-reported symptoms and cumulative trauma disorders for age, sex, marital status, duration of work In the study, The significant factors of cumulative trauma disorders were occupational task and psychosocial stress in the study. The prevalence of cumulative trauma disorders in high strain group was hlgher (68.4%) than other three groups. The prevalence of self-reported symptoms and cumulative trauma disorders in assembly task was higher (70.0%, 64.0%) than other two tasks. Conclusions : Prevalence of self-reported symptoms was 54.2%, prevalence of cumulative trauma disorders was 45.8% in watch assembly workers. In this study, factor related to self-reported symptoms was occupational task and factors relaxed to cumulative trauma disorders were occupational task and psychosocial stress. This results suggest that differences of ergonomics and environment in occupational task cause differences of prevalence of self-reported symptoms and cumulatlve trauma disorders.