Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 CURRENT APPLIED PHYSICS Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

NSIP와 BOOP의 고해상전산화단층촬영 소견과 비교

백상현,박재성,차장규,홍현숙,김대호,박성진,조준희,이혜경,최진수 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Purpose: BOOP and NSIP also share similar clinical features such as subacute flu-like illness, the finding of bronchoalveolar lavage, the result of pulmonary function test and more favourable outcome than usual interstitial pneumonia(UIP). The author try to compare the HRCT findings of NSIP with BOOP by pattern and distribution of diseases. Materials and Methods: HRCT findings of histopathologically proven NSIP(Group Ⅰ; 6, Group Ⅱ; 7, Group Ⅲ; 2) in 15 patients(5 male, 10 female, age range, 39-69 years; mean age, 53 years), BOOP in 15 patients(6 male, 9 female, age range, 26-76 years; mean age, 52 years) were reviewed retrospectively. Results: The common pattern of the two diseases was admixed consolidation, ground glass attenuation & reticular densities with/without architectural distortion(NSIP; 53.3%, BOOP; 46.7%). The main component of the pattern wan predominantly consolidation(NSIP; 46.7%, BOOP; 73.3%) and ground glass attenuation(NSIP; 40.0%, BOOP;20.0%). Architectural distotion was more provinent finding with NSIP(mild ; 3, moderate ; 4, severe; 2) compared with BOOP(mild; 7, moderate; 2, severe; 0). The predominant overall distribution was lower lung, peribronchovascular & peripheral lung field in both of the two entities(NSIP;73.3%, BOOP; 73.3%). Peribronchovascular involvement was more common with NSIP(100%) than BOOP(80%), whereas peripheral involvement was more common with BOOP(93.3%) than NSIP(80%). Conclusion: The HRCT findings of NSIP and BOOP were similar in pattern and distribution. But NIP manifested more frequently ground-glass attenuation, whereas BOOP showed more frequently consolidation. Architectural distortion was more severe with NSIP than BOOP. NSIP invoved more frequently peribronchovascular space and BOOP were more common in peripheral lung field.

지능형 자동차 주변 감시 시스템 설계 방안

장시웅(Si-woong Jang),박영식(Young-sik Park),성현용(Hyun-yong Sung),곽길봉(Gil-bong Kwak),김선남(Seon-nam Kim),김경진(Kyeoung-jin Kim) 한국정보기술학회 2009 Proceedings of KIIT Conference Vol.2009 No.-

본 연구는 차량 주변을 지능적으로 감시하는 자동차 주변 감시시스템에 관한 것으로, 자동차의 주행 및 주차 시 속도의 변화나 운전자의 요청에 의해 자동차 주변 지역에 관한 시야를 상황에 따라 달리하여 모니터링 함으로써 운전자가 안전한 주행 및 주차를 수행할 수 있게 하기 위한 것이다. 그러한 목적을 달성하기 위하여 본 연구에서는 차량의 주변부를 감시하기 위하여 차량의 외곽에 설치된 카메라의 각도가 지면으로부터 차량의 상부를 향하는 방향으로 변경될 수 있도록 제어하는 제어부, 카메라의 영상을 입력받아 차량주변의 영상을 생성하는 영상처리모듈, 영상처리모듈에서 생성된 영상을 출력하는 디스플레이를 포함하는 것을 특징으로 하는 지능형 자동차 주변 감시시스템을 제안한다. This study is on a vehicle surroundings monitoring system, which enables a driver to travel and park safely by monitoring vehicle surroundings, depending on the speed of vehicle and driver's control when traveling and parking. To achieve the aforementioned purpose, we propose an intelligent vehicle surroundings monitoring system, which consists of a control part, an image processing module and display module. Hence, the control module controls angle of camera to turn upward from the bottom to monitor vehicle surroundings. The image processing module merges the received images from cameras with the original vehicle image to display the vehicle’s surroundings in real time as if looking down from the sky.

개에서 이중 결찰법을 통한 동맥관 개존증의 완치 예

윤헌영,정순욱,박희명,박철,정만복,김준영,한현정,황민,노병국,박상혁,장하영,박정윤 한국임상수의학회 2004 한국임상수의학회지 Vol.21 No.1

A ten months old, female Yorkshire terrier weighing 2.88 kg referred to veterinary teaching hospital of college of veterinary medicine, Konkuk University because of syncope, cough and dyspnea. First hematological and serum chemical test revealed thrombocytopenia, mild anemia, and increase of concentration of ALP (195 U/L). On 57 days later, second hematological and serum chemical test revealed polycythemia, increase of concentration of ALP (211 U/L), and Tchol (387 mg/dl). Right atrium enlargement, main pulmonary artery bulge and cardiomegaly (VHS = 11.5) were observed in radiographic findings. Ultrasonographic images showed both right and left ventricular dilation and turbulent flow between the descending aorta and the main pulmonary artery in color Doppler imaging. ECG showed left ventricular enlargement, SA block, and electrical alternant. Thoracotomy was performed through left fourth intercostal incision under isoflurane anesthesia. Patent ductus arteriosus was double ligated with 1-0 silk. Cough and dyspnea disappeared on 5 days after operation. Turbulent flow was not found in color doppler imaging of ultrasonography on 10 days after operation. Ten months later after the operation, syncope could not exist any more.

40세 이하 관상동맥 질환자에서 장기적 임상 관찰

이승욱,정명호,박종철,박형욱,조상희,김원,김계훈,이상현,강경태,조장현,김남호,김건형,안영근,조정관,박종춘,강정채 全南大醫大 2001 전남의대학술지 Vol.37 No.2

한의진단명과 진단요건의 표준화 연구 II (표준화 실례) : 2차년도 연구결과 중간 보고

양기상,최선미,최승훈,안규석,박경모,박종현,김성우,신승호,정우열,전병훈,고현,김정범,신상우,김성훈,김동희,권영규,엄현섭,장혜옥 한국한의학연구원 1996 한국한의학연구원논문집 Vol.2 No.1

The diagnostic requirements were suggested and explained regarding the systems of differentiation of symptoms and signs in the second year study of standardization and unification of the terms and conditions used for diagnosis in oriental medicine. The systems were as follows; - differential diagnosis according to condition of body fluid, differentiation of syndromes according to the state of qi and blood, differential diagnosis according to relative excessiveness or deficiency of yin and yang(氣血陰陽津液辨證) - differentiation of diseases according to pathological changes of the viscera and their interrelation - analyzing and differentiating of febrile diseases in accordance with the theory of the six channels(傷寒辨證) The individual diagnosis pattern was arranged by the diagnostic requirements in the following order : another name(異名), notion of diagnosis pattern, index of differentiation of symptoms and signs(辨證指標), the main point of diagnosis, analysis of diagnosis pattern(證候分析), discrimination of diagnosis pattern(證候鑑別), a way of curing a diseases(治法), prescription(處方), herb in common use(常用藥物), diseases appearing the diagnosis pattern(常見疾病), documents(文獻調査). This study was carried out on the basis of the Chinese documents and references.

국내골프산업의 현황과 발전방향에 대한 고찰

박태근,장현철 京畿專門大學 2001 京畿專門大學 論文集 Vol.- No.29

This study aims to analyze the present conditions of the domestic golf industry and present the possible ways of its development for the 21st century For this study a golf course industry and golf supplies industry were industries in terms of the national and social policy have led to the following conclusion. First, it is needed to change people's recognition of golf for the popularization of the golf industry. Second, the government needs to take a consistent policy in relation to the golf industry so that it can assist make the golf industry more popular. Third, the golf course industry is required to employ a marketing strategy which attempts to reduce the cost and enable the customers to use the facilities much more conveniently through the mechanization and automatization of its facilities. Fourth, the golf supplies industries should concentrate on improving their products' quality with the awareness of golf supplies as high value added articles. In addition, the government is demanded to support the golf industry by providing the policy of giving benefits to its tax system.

원광 뇌졸중 등록 자료를 통한 허혈성 뇌졸중의 임상 양상과 위험인자

박현영,장혁,박성욱,김요식,조광호 圓光大學校 醫科學硏究所 1999 圓光醫科學 Vol.15 No.2

Background: To investigate clinical features and risk factors of stroke patients who lived in Korean rural area, we analysis Wonkwang Stroke Registry and compared with other studies. Methods: We filled out Stroke Registry in the consecutive patients with acute ischemic stroke from march 1997 to February 1999. We analyzed demographic data, risk factors and subtypes of stroke. All patients were divied into 3 groups according to their age. Stroke subtype was classified into large artery atherosclerosis(LAA),small vessel occlusion(SVO), cardioembolism(CE), stroke of other determined etiology(SOE), and stroke of undetermined etiology(SUE) by TOAST(Trial of Org 10172 in Actue Stroke Treatment). Results: Five hundred nine patients were included in Wonkwang Stroke Registry from march 1997 to February 1999. Mean age was 65.47±0.48 years old. The ratio of males to females was 1 : 0.78. SVO was the most frequent subtype(49%) of ischemic stroke, and then followed by LAA(27.5%), CE(7%), SOE(8.1%), and SUE(8.4%). The internal carotid artery(ICA) territory was involved in 59.3% patients. Vertebrobasilar artery territory involvement was noted in 37.5%, and 3.2% of patients showed multiple artery territory involvement. All patients had risk factor of ischemic stroke except for 14 patients. Mean number of risk factors was 1.7/patient. Hypertension(62.1%) was the most frequent risk factor, and follwed by smoking(26.3%), diabetes mellitus(25.9%), and hyperlipidemia(25.55%). Conclusions: These results showed that the proportion of ischemic stroke subtype was not concordant with other studies. It may be caused by different mode of living and ethnic difference. This study may afford further information on the characteristics of Korean rural area stroke.

Bone-supported pendulum을 이용한 상악대구치 원심이동

장용걸,박호원,이주현,서현우 大韓小兒齒科學會 2009 大韓小兒齒科學會誌 Vol.36 No.3

상악 대구치의 원심이동이 요구되는 경우, 구외견인, Wilson distalizing arches, 가철식 스프링 장치 그리고 Schwarz plate-type 장치 등을 사용 할 수 있다. 그러나 이러한 전통적인 대구치의 원심이동 장치들로 치료에 성공하기 위해서는 환자의 협조가 필수적이기 때문에 많은 소아치과 의사들은 환자 의존성을 최소화하고 임상가가 통제 할 수 있는 장치들로 전환하고 있다. 이 중 가장 일반적인 것이 pendulum 장치인데, 고정원이 되는 전방치아의 원하지 않는 이동과 고정원 소실, 그리고 구개부 고정원이 좋지 않은 경우 원하는 정도의 구치부 원심이동을 얻기 어렵다는 단점이 있다. 이와 같은 전통적인 pendulum의 단점을 해결하고자, SAS(Skeletal Anchorage System)를 pendulum에 접목하여 골에서 직접 지지를 얻는 변형된 형태의 pendulum, 즉 bone supported pendulum을 제작하여 장착 시킨 후 주기적인 관찰을 시행하였다. 본 증례는 혼합치열기 환자를 대상으로 bone supported pendulum을 사용하여 안정된 고정원 유지, 원치 않는 치아이동의 최소화 및 양호한 상악 대구치 원심이동 등을 관찰하였기에 이를 보고하는 바이다. To distalize the maxillary molars. the traditional techniques such as extra-oral traction. Wilson distalizing arches. removable spring appliances and Schwarz plate-type appliances have been used. But, these need considerable patient cooperation. For minimal patient compliance. many practitioners use the pendulum appliances. Several clinical studies demonstrated pendulum is effective molar distalization appliance in the growing patient(using the premolars and the palate as anchorage). But unfortunately, maxillary anterior teeth also shift mesially as the molar moves distally. As a result anchorage loss is occurred. To overcome these disadvantages, we used bone-supported pendulum, combined the conventional pendulum with Skeletal Anchorage System(SAS). The miniscrew was implanted in the anterior paramedian region of the median palatal suture, which has comparatively sufficient bone thickness and is low risk to damage on the dental follicles. We report three cases, using bone-supported pendulum for the maxillary molar distalization in children. After treatment, we find out anchorage stability, minimal unfavorable anterior tooth movement and sufficient molar distalization.

국소 광적응 기능을 가지는 윤곽검출용 32×32 방사형 CMOS 시각칩의 설계 및 제조

박대식,박종호,김경문,이수경,김현수,김정환,이민호,신장규 한국센서학회 2002 센서학회지 Vol.11 No.2

국소 광적응 기능을 가지는 윤곽검출용 시각칩을 픽셀수 32x32의 방사형 구조로 CMOS 공정기술을 이용하여 설계 및 제조하였다. 생체의 망막은 넓은 범위의 입력 광강도에 대해서 물체의 윤곽을 검출할 수 있다. 본 연구에서는 시세포, 수평세포, 쌍극세포로 이루어진 망막의 윤곽검출 기능을 모델링하여 윤곽검출용 인공시각칩을 설계하였다. 국소 광적응을 위해, 입력 광강도에 따라 수용야의 크기를 국소적으로 바뀌게 하였다. 아울러 단위셀을 방사형으로 배치함으로써 영상데이터의 양을 감소시킴과 동시에 칩의 중심부분으로 갈수록 해상도가 높아지도록 설계하였다. 설계된 칩은 0.6 ㎛ double-poly triple-metal 표준 CMOS 공정기술을 이용하여 제조되었으며. HSPICE 시뮬레이션으로 성능을 최적화 시켰다. A 32x32 pixels foveated (linear-polar) stucture retina chip with the function of local-light adaptation for edge detection has been designed and fabricated using CMOS technology. Human retina can detect a wide range of light intensity. In this study, we use the biologically-inspired visual signal processing mechanism that consists of photoreceptors, horizontal cells, and bipolar cells in order to implement the function of edge detection in the retina chip. For a local-light adaptive function, the size of receptive field is changed locally according to the input light intensity. The spatial distribution of sensing pixels in the foveated retina chip has the advantages of selective reduction of image data and good resolution in central part to carry out the elaborate image processing with still enough resolution in the outer parts. The designed chip has been fabricated using standard 0.6 ㎛ double-poly triple-metal CMOS technology and optimized using HSPICE simulator.