HSS STI-CMP적용을 위한이중 패드의 최적화

서용진,박성우,김철복,정소용,이경진,김기욱,박창준 대불대학교 2002 大佛大學校大學院 硏究論文集 Vol.- No.1

As the device geometry shrinks to the deep submicron region, chemical mechanical polishing(CMP) planarization become a more essential technique of advanced ULSI process. Also, CMP process was required for the global planarization of inter-metal dielectric(IMD), inter-level dielectric(ILD) layers and interconnections with free-defect. Especially, the complete global planarization of IMD, ILD and interconnections can be achieved only with the CMP process. However, as the IMD and ILD layer gets thinner, several problems were found in the CMP process. It does have various problems such as dishing effect, torn oxide defects and nitride residues in oxide. So, it leads to severe circuit failure, which affects yield. In this paper, we studied the characteristics of polishing pad, which can apply STI-CMP process for global planarization of multilevel interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was defected less than 2 on JR111 pad. Through the above result, we can select optimum polishing pad, so we can expect the improvement of throughput and device yield.

CMP 공정의 재현성 확보를 위한 공정제어 범위의 결정

서용진,정소영,김철복,박성우,이경진,김기욱,박창준 대불대학교 2002 大佛大學校大學院 硏究論文集 Vol.- No.1

To achieve the ULSI goals of higher density and greater performance, STI(shallow trench isolation)-CMP(chemical mechanical polishing) process has been attracted. Recently, the direct STI-CMP process without the conventional complex reverse moat etch process has established by using slurry additive with the high selectivity between SiO2 and Si3N4 films for the purpose of process simplification and in-situ EPD(end point detection). However, STI-CMP process has various defects such as nitride residue, torn oxide and demage of silicon active region. Also, it was difficult to assure the suitable process margin in the STI-CMP process. To solve these problems, in this paper, we discussed to determine the control limit of process, which can entirely remove the oxide on nitride film from the most area of high density as reducing the damage of dense moat area and minimizing dishing effect in the large field area. We, also, evaluated the wafer-to-wafer thickness variation and the day-by-day reproducibility of STI-CMP process after repeatable tests.

모바일인터넷 서비스 게시판의 내용분석을 통해 본 소비자의 정보요구와 불만족

서정희,김효철 울산대학교 2004 생활과학논문집 Vol.6 No.1

본 연구는 최근 급성장하고 있는 모바일 인터넷 서비스의 인터넷 게시판의 내용을 통해서 소비자들이 요구하는 정보와 불만족에 대한 내용을 알아보았다. 인터넷 게시판에 나타난 모바일 인터넷 사용자들의 사용목적은 엔터테인먼트로써, 주로 벨소리와 배경스크린, 사진의 다운로드가 많았으며, 음악 및 MP3의 다운로드도 많았다. 인터넷 게시판에 나타난 모바일 인터넷 사용자들은 이동통신회사에서 제공되는 콘텐츠와 요금제도에 대한 불만이 높았다. 인터넷 게시판에 나타난 모바일 인터넷 사용자들이 요구하는 정보는 요금제도와 서비스에 대한 정보가 많았다. The purpose of this article was to explore the information needs and dissatisfaction of the consumer. The content analysis was used. The data were articles on the mobile internet bulletin board. The most frequent use of the mobile internet by consumers was entertainment. Among entertainment The first largest use were the ring-tone and character downloading. The second largest use were the music and MP3 downloading. The mobile internet consumers dissatisfied with the contents of multimedia mobile communication service and the customer change system. The most important needs of mobile internet users are the informations of customer change and services.

자동차차체 및 부품제조업 산업장의 작업환경실태에 관한 조사 연구

서준호,문덕환,김정호,이채관,황용식,손병철,김대환,이창희,김휘동,이채언 인제대학교 백병원 2002 仁濟醫學 Vol.23 No.5

Objectives: For the purpose of preparing the fundamental data and control the working environment and assessing the status of working environmental in manufacturing industry of bodies for motor car and of parts. Methods and Materials: Accessories for motor car and its engines the auther measured the noise level, concentration of dust, heavymetals, organic solvents, chemicals to 99 industries(24 working processes) form Feb. 2000 to Oec. 2000. Results: The results were as follows : 1. Mean noise level cutting, grinding, pressing, foundries and shot-blast was exceeded to threshold limit value(TLV) of noise. 2. Mean concentration of total dust was not exceeded to TLV. 3. Mean concentration of Mn in welding process and Pb in drying, welding, fabricating, rolling was exceeded to TLV. 4. Mean concentration for chemicals and organic solvents were not exceeded to TLV. 5. Mean concentration of dust and heavymetals were statistical significant difference between with local ventilation system and without local ventilation system. Conclusion: Above results, author suggest to prepare more passively control to working environment where exceeded the TLV.

복합레진을 이용한 전치 파절편의 재부착 증례

서정일,조공철 조선대학교 구강생물학연구소 2002 口腔生物學硏究 Vol.26 No.2

Trauma to anterior teeth is relatively common among children and teenagers : it has been estimated that approximately one quarter of the population under the age of 18 years sustain traumatic injury in the form of anterior crown fracture. Crown fractures are the most frequent form of acute dental injury. Crown fractures of permanent incisors represent 18% to 22% of all trauma to dental hard tissues. The use of enamel-dentin adhesives, which have already been widely used for the reconstruction of anterior teeth, has enabled development of a technique to reattach the fractured dental fragment and simplified the reattachment of fractured dentinal fragments. The use of enamel-dentin adhesives and composite resin to reattach the fractured dental fragment was introduced at the end of the 1970s. These techniques clearly eliminates problems of different wear of restorative material. unmatched shades, and difficulty of contour and texture reproduction associated procedures are also reduced because there is no need to spend time on tooth buildup with resin composite or impression taking for cast restoration. This article presents a systematic approach for evaluation and treatment of patient with anterior tooth fracture involving dislocation of the tooth fragment, Two clinical cases illustrated the spectrum of clinical techniques, including the use of dentin-bonding adhesive and resin composite, for reliable reattachment of fractured tooth fragments.

분자역학적 방법을 이용한 부산시내 대형건물 냉각탑수의 레지오넬라균의 형별 분류

김정만,정석훈,서대영,박은희,송은주,최재철,이은엽,장철훈 대한임상미샐물학회 2004 Annals of clinical microbiology Vol.7 No.1

재발성 류마티즘 환자에서 발작의 유발인자

주유철,이동민,양종태,신병철,임태영,서정균,정기영,최동헌,김원,조영신,고희관 조선대학교 2001 The Medical Journal of Chosun University Vol.26 No.2

Background and Objectives : Palindromic rheumatism (PR) is known to be triggered without any obviously inciting events in most patients, although, in a few cases, attacks have been noted to relate to another events such as weather change, childbirth, ingestion of certain foods, or over-exercise. The aim of this study was to characterize the triggering factors on palindromic attacks. Materials and Methods : We evaluated sixty-four patients with PR for the presence of triggering factors and the relationship between attacks and triggering factors by interview of patients. We considered that there was an probable association between episodes and PR, if episodes within 24 hours prior to PR had triggered at least 50% of all attacks and a definite association between episodes and PR, if episodes within 24 hours prior to PR had triggered 100% of all attacks. Results : In 15 patients (35.9%), there was a possible association between episodes of PR and initiating events. In 8 patients (12.5%), there was a definite association between episodes of PR and initiating events. The triggering factors were physical over-activity including exercise (19/64: 29.7%), foods, such as rawfish, crab, and chicken, including alcohol (19/96: 19.8%). However, there were no difference between the groups with and without the triggering factor in sex ratio, duration and onset of PR, the positive rate of rheumatoid factor and involved sites. Conclusion : Our observations showed that PR was triggered by physical over-activity more than in previous reports and hypersensitivity to foods was a causative factor in some patients with PR. However, patients with triggering factors had a similiar clinical profile to patients without triggering factors.

정신분열병 환자에서의 한국어판 사회적응 척도의 개발 : 신뢰도 및 타당도 연구

김철권,서지민,김상수,조진석,하준선,김정옥,변원탄 大韓神經精神醫學會 1999 신경정신의학 Vol.38 No.6

연구목적: 정신분열병 환자의 사회적응 정도를 측정하는데 사용되는 사회적응 척도의 한국어판을 개발하기 위함이다. 방 법: 사회적응 척도를 번역한 후 정신분열병 환자 67명과 정상인 78명을 대상으로 신뢰도와 타당도를 검증하였다. 결 과: 자료분석 결과 검사-재검사 신뢰도는 0.85, 검사자간 신뢰도는 0.89, 내적 일치도는 0.87로 높은 수치였다. 변별 타당도를 검증하기 위하여 정신분열병 환자군과 정상 대조군을 비교한 결과 정신분열병 환자군에서 사회적응 정도가 유의하게 낮았다. 구성 타당도를 알아보기 위하여 10개 영역간의 상관관계를 측정한 결과 성적적응 영역을 제외한 모든 영역들에서 유의한 상관관계를 보였다. 본 척도의 전반적 평가 영역 결과와 GAF 결과간의 상관성을 통해 간접적으로 검증한 공존 타당도 역시 유의하였다. 결 론: 한국판 사회적응 척도는 우수한 신뢰도와 타당도가 입증되었고 나아가 정신분열병 환자의 사회적응 정도를 평가하는데 유용하게 사용되어질 수 있을 것이다. Objectives: The purpose of this study was to develop the Korean version of the Social Adjustment Scale Ⅱ-Revised Version(KSAS Ⅱ-RV) in the schizophrenics. Methods: KSAS Ⅱ-RV was administered to 67 schizophrenic patients and 78 matched normal controls for examining the reliability and validity. Results: Data analysis showed statistically significant reliabilities and validities of KSAS Ⅱ-RV. The test-retest reliability, inter-rater reliability, and internal consistency for total scores of KSAS Ⅱ-RV were 0.85, 0.89. and 0.87, respectively. Evidence for discriminant validity of KSAS Ⅱ-RV comes from the results that the mean scores of schizophrenic patients were significantly high than those of normal controls. Construct validity was assessed by calculating the 10 inter-subareas correlations of the KSAS Ⅱ-RV, and all except the sexual adjustment area were statistically significant. Significant correlations between the global area scores of KSAS Ⅱ-RV and those of Global Assessment of Functioning Scale lend support for the concurrent validity of this instrument indirectly. Conclusions: KSAS Ⅱ-RV was found to be a valid and reliable instrument which can be used to evaluate the degree of social adjustment in the schizophrenic patients.

단편화된 서식지공간 연결을 위한 에코브릿지 조성계획

안현철,조현서,강호철,이정환 진주산업대학교 농업기술연구소 2001 農業技術硏究所報 Vol.14 No.-

This study was focused on fragmentation of habitat by the human activities which is road construct, forest road, cities, industry, rail road, a power cable tower, and forest fire etc. in the Gyeongsangnam-do Province. Forests provide the basic habitat for wildlife, which may be specific forest type such as a broad leaf or mixed forest. Fragmentation of forest stands is creating concern among persons involved with wildlife. Agricultural and urban developments have sometimes disruped contiguous stands of forest into isolated patch. The road and developments in the forest area adjacent to the habitat have broken up into a few patches. Ecobridge project connect the fragmentation of habitat and allow wildlife to access food, water and move among habitat patches in disturbed area. In the Gyeongsangnam-do Province be having to 76 path road in which 6 highway route, 22 national road and 48 province road, respectively. On fragmentation of habitat by the road, highway, nat'l and province road were disrupted in 36, 62 and 57 sites , respectively. Among them 16, 29 and 30 sites were necessitates a eocbridge construction highway, nat'l and province road, respectively The goal of the Eco-bridge project is to maintain a nearly contiguous green network for wildlife. Some developments in the habitats are divided because of existing roadways, dam, cities, farm land, recreation and leisure town, etc. and environmental issues which are interposed between the habitats.

REVERSE MOAT 식각 공정 유·무에 따른 STI-CMP 공정의 평탄화 특성

김철복,박성우,정소영,서용진 대불대학교 2001 論文集 Vol.7 No.1

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for deep sub-micron technology. The rise throughput and the stability in the device fabrication can be obtained by applying CMP process to shallow trench isolation (STI) structure in 0.18㎛ semiconductor device. The reverse moat process has been added to employ in STI-CMP. Thus the process became complex and the defects were seriously increased. Removal rates of each thin films in STI-CMP was not equal, hence the devices must to be effected, that is, the damage was occurred in the device area for the case of excessive CMP process and the nitride film was remained on the device area for the case of insufficient CMP process than these defects affect the device characteristics. In this work, the high selectivity slurry(HSS) was developed to perform the direct global planarization without reverse moat etch step, and the planarization characteristics of STI-CMP process with and without reverse moat etch step were studied.