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CMP 공정의 재현성 확보를 위한 공정제어 범위의 결정
서용진,정소영,김철복,박성우,이경진,김기욱,박창준 대불대학교 2002 大佛大學校大學院 硏究論文集 Vol.- No.1
To achieve the ULSI goals of higher density and greater performance, STI(shallow trench isolation)-CMP(chemical mechanical polishing) process has been attracted. Recently, the direct STI-CMP process without the conventional complex reverse moat etch process has established by using slurry additive with the high selectivity between SiO2 and Si3N4 films for the purpose of process simplification and in-situ EPD(end point detection). However, STI-CMP process has various defects such as nitride residue, torn oxide and demage of silicon active region. Also, it was difficult to assure the suitable process margin in the STI-CMP process. To solve these problems, in this paper, we discussed to determine the control limit of process, which can entirely remove the oxide on nitride film from the most area of high density as reducing the damage of dense moat area and minimizing dishing effect in the large field area. We, also, evaluated the wafer-to-wafer thickness variation and the day-by-day reproducibility of STI-CMP process after repeatable tests.
서용진,박성우,김철복,정소용,이경진,김기욱,박창준 대불대학교 2002 大佛大學校大學院 硏究論文集 Vol.- No.1
As the device geometry shrinks to the deep submicron region, chemical mechanical polishing(CMP) planarization become a more essential technique of advanced ULSI process. Also, CMP process was required for the global planarization of inter-metal dielectric(IMD), inter-level dielectric(ILD) layers and interconnections with free-defect. Especially, the complete global planarization of IMD, ILD and interconnections can be achieved only with the CMP process. However, as the IMD and ILD layer gets thinner, several problems were found in the CMP process. It does have various problems such as dishing effect, torn oxide defects and nitride residues in oxide. So, it leads to severe circuit failure, which affects yield. In this paper, we studied the characteristics of polishing pad, which can apply STI-CMP process for global planarization of multilevel interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was defected less than 2 on JR111 pad. Through the above result, we can select optimum polishing pad, so we can expect the improvement of throughput and device yield.
방사성 페기물 처리장의 지하수 온도 측정을 위한 광섬유 센서의 제작 및 특성 분석
서정기,유욱재,장경원,조동현,신상훈,이봉수 제주대학교 방사선응용과학연구소 2008 방사선응용과학연구소논문집 Vol.22 No.-
Fiber-optic temperature sensing technology can alternative to classical measurement techniques in nuclear environment, Its advantages allow low cost, a long distance measurement and real-time, In this study, we have measured the optical power of power meter and the output voltage of photodiode according to change temperature of water.
고층사무소건물의 매스구성을 위한 전문가 시스템의 개발에 관한 연구
서정훈,박상현,권종욱 영남대학교 환경문제연구소 2000 環境硏究 Vol.20 No.1
건축에서의 전문가 시스템은 설계자에게 많은 가상적인 해결안을 반복해서 수집해야할 수고를 줄여주고 모델링이나 정보제공과 같은 정형적인 측면과 설계의 판단, 상황별 특성과 같은 비정형적인 측면을 연결시키는 도구로 작용한다. 본 연구는 고층사무소건물의 설계과정 중 매스 구성 단계에서 중요한 역할을 하는 요소를 찾아내고, 그 요소들의 정형화 및 표준화 작업을 통해 고층사무소건물의 매스구성을 보조하는 전문가 시스템을 개발하는데 그 목적을 두었다. 본 연구에서 얻어진 결론을 요약해보면 다음과 같다. 건축설계작업 중 매스구성 단계를 제한조건을 만족시켜나가는 제한조건 만족모델로 인식할 수 있었으며, 이 제한조건의 일부를 체계화하여 건물의 매스구성을 보조할 수 있는 시스템을 개발하는 것이 가능하였다. 또, 개발된 시스템을 실제 사례를 통해 평가해 본 결과 타당성 있는 결과물을 산출할 수 있었다. In architecture, the expert system helps architects reduce unnecessarily repeated process. It also serves as a tool of linking patterned processes such as medeling and information provision, with unpatterned processes like decision-making process which can produce different results depending on the situation. This study is devoted to develop an expert system which is helpful to find out the important factors in massing process and to assist the massing of high-rise office buildings through patternization and standardization. The conclusion from the study as follows; It is definitely possible to make the expert system recognize the massing process as a process of meeting all the constraints on a step-by-step basis. So, the developed expert system can assist the massing process by systemizing parts of the constraints. It also proved that the developed knowledge-based system can produce proper outputs as its test showed during the study.
길안천(경북 안동)의 저서성대형무척추동물 군집변동 및 생물학적 수질평가
조희욱,김경호,노상은,박진영,서을원,이종은 7개 국립대학교 환경연구 논문집 공동발행 위원회 2004 공업기술연구 Vol.4 No.-
A biological assessment of water quality was carried out in Giran stream from May 203 to January 2004. The benthic macroinvertebrates collected seasonally from 5 field sites were identified mostly up to species level. The benthic macroinvertebrates collected from the surveyed sites were composed of 88 species, 68 genera,42 families, 14 orders, 5 class and 4 phyla. The dominance index (DI) showed the high-est as 0.802 at site 5 and the lowest as 1.643 at site 3. Ecological score of benthic macroinvertebrate (ESB) showed the highest as 103 at site 2 and the lowest as 63 at site 3. All surveyed sites were Oligosaprobic that the water quality estimated by ecological score of benthic macroinvertebratc community.
광섬유 집합체 센서를 이용한 6MV 광자선의 반음영 및 심부선량백분율 측정
신상훈,장경원,조동현,유욱재,서정기,이봉수,문주현,박병기 제주대학교 방사선응용과학연구소 2008 방사선응용과학연구소논문집 Vol.22 No.-
In this study, a fiber-optic bundle sensor has been developed using water-equivalent organic scintillating fibers for photon beam measurement. Beam penumbra and percent depth doses(PDD) are measured according to the depth of the photon beam. This sensor has many advantages such as high resolution, real-time measurement and ease of calibration over conventional radiation measurement devices.
위치결정 스테이지의 정밀위치결정을 위한 가상모드 입력성형기 응용에 관한 연구
장준원,박상원,서용규,홍성욱 한국공작기계학회 2008 한국공작기계학회 춘계학술대회논문집 Vol.2008 No.-
This paper deals with precise positioning of positioning stage by input shaping, Input shaping is well known to be a very effective tool for suppressing the residual vibration of flexible structures. However, the input shaping tends to increase the rise time of the system. This problem often degrades the performance of system, In order to improve this problem, this paper proposes an input shaping method using the virtual mode concept for positioning stage. The virtual-mode input shaper is proved effective through experiments.
최영식,이상용,김유훈,조갑래,이봉우,양경무,정낙은,서중석,이한영,이원태,강현욱 大韓法醫學會 2000 대한법의학회지 Vol.24 No.2
Disposal of a homicide victim by dismemberment is rare, but individual cases are on record in most major medicolegal departments. Recognition of postmortem mutilation may be of importance in the interpretation of certain murders committed by sexual perverts and other mentally deranged individuals and sometimes performed for the sole reason of easier disposal of the body. Postmortem dismemberment is usually readily recognizable as such; The edges of the injuries are dry and lack evidence of bleeding. The joints may be disarticulated without fracture, or the use of an axe or saw may be evident from examination of bones. Parallel horizontal or oblique furrows in the bone surface are caused by skipping of the saw prior to establishing depth. Such patterns on the bone may assist in identifying the particular saw involved. So we report 25 dismembered corpses that autopsied in National Institute of Scientific Investigation. This paper can help in attempting to establish not only the first criminal investigation steps but also the medicolegal approach methods in unidentified and dismembered deaths.