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      • Clinical impact of admission hyperglycemia on in-hospital mortality in acute myocardial infarction patients

        Kim, Eun Jung,Jeong, Myung Ho,Kim, Ju Han,Ahn, Tae Hoon,Seung, Ki Bae,Oh, Dong Joo,Kim, Hyo-Soo,Gwon, Hyeon Cheol,Seong, In Whan,Hwang, Kyung Kuk,Chae, Shung Chull,Kim, Kwon-Bae,Kim, Young Jo,Cha, Kwa Elsevier 2017 INTERNATIONAL JOURNAL OF CARDIOLOGY Vol.236 No.-

        <P><B>Abstract</B></P> <P><B>Background</B></P> <P>Acute hyperglycemia on admission is common in acute myocardial infarction (AMI) patients regardless of diabetic status, and is known as one of prognostic factors. However, the effect of hyperglycemia on non-diabetic patients is still on debate.</P> <P><B>Methods</B></P> <P>A total of 12,625 AMI patients (64.0±12.6years, 26.1% female) who were enrolled in Korea Acute Myocardial Infarction Registry-National Institute of Health between November 2011 and December 2015, were classified into 4367 diabetes (65.4±11.6years, 30.4% female) and 8228 non-diabetes (63.3±13years, 23.9% female). Patients were analyzed for in-hospital clinical outcome according to admission hyperglycemic status.</P> <P><B>Results</B></P> <P>In diabetic patients, independent predictors of in-hospital mortality were old age, high HbA<SUB>1</SUB>C, pre-Thrombolysis In Myocardial Infarction (TIMI) flow 0, left ventricle ejection fraction<40%, cardiogenic shock and ventricular tachycardia. In non-diabetic patients, independent predictors of in-hospital mortality were old age, high admission glucose (≥200mg/dL), pre TIMI flow 0, failed percutaneous coronary intervention, low left ventricle ejection fraction<40%, cardiogenic shock, stent thrombosis and decreased Hb≥5g/dL. In hospital mortality was significantly higher in diabetic patients compared to non-diabetic patients (5.0% vs. 3.4%, <I>p</I> <0.001). However, non-diabetic patients with hyperglycemia have significantly higher mortality compared to diabetic patients (17.4% vs. 7.2%, <I>p</I> <0.001). Comorbidity including cardiogenic shock (<I>p</I> <0.001), cerebral hemorrhage (<I>p</I> =0.012), decreased Hb≥5g/dL (<I>p</I> =0.013), atrioventricular block (<I>p</I> <0.001) and ventricular tachycardia (<I>p</I> =0.007) was higher in non-diabetic with hyperglycemia than in diabetic patients.</P> <P><B>Conclusions</B></P> <P>These findings underscore clinical significance of admission hyperglycemia on in-hospital mortality in non-diabetic AMI patients.</P>

      • KCI등재

        부산·울산·경남지역 직업병 감시체계

        김정일,김병권,김정원,채창호,이철호,강동묵,김지홍,김진하,김영욱,이영하,이지호,김정호,윤형렬,유철인,정백근,장태원,김운규,윤동영,강진욱,김종은,안진홍,이동준,장준호,이광영,송혜란,최영희,이용환,조병만,최홍렬,고상백,김은아,이유진,홍영습,정갑열,김정만,김준연 大韓産業醫學會 2004 대한직업환경의학회지 Vol.16 No.1

        Objective: Occupational medicine specialists in the Busan, Ulsan and Kyung-Nam areas established an area-based occupational disease surveillance system and used this system to collected case information for the purpose of preventing occupational diseases Methods: l l hospital participated in this system. The authors selected five main diseases, which were hand-arm vibration syndrome (HAVS), work-related musculoskeletal disorder (WRMSD), occupational asthma, occupational skin disease and occupational and occupational lung cancer and established their case definitions. All cases were reported on the web, and real time analysis was conducted. Results: Between April 2001 and April 2003, 192 cases of HAVS, 118 cases of WRMSD, 33 cases of occupational asthma, 17 cases of occupational skin disease and 17 cases of occupational lung cancer (for a total of 377 cases of these five main diseases) were reported. most of the HAVS cases came from shipbuilding, and 172 of them (92.7%) were associated with grinding. Of the four main types of WRMSD, carpal tunnel syndrome (CTS) was the most prevalent with 46 cases and shipbuilding was also the main industry involved (83.9%). The ergonomic risk factors involved mainly associated with the hand. In 19 (57.6%) and 4 (12.1%) cases of occupational asthma, the agents involved. The causative agents of occupational lung cancer included Cr, welding fume, PAH, Ni, etc. 10(58.8%) of the cases were diagnosed as squamous cell carcinoma and 5(29.4%) as adenoma. Conclusion: This result showed that an area-based occupational disease surveillance system might provide an effective method of evaluating the prevalence of such diseases, however the Busan, Ulsan and Kyung-Nam provinces are too large to be treated as individual areas. Therefore, the authors suggest that each province should establish its own surveillance system.

      • 관상동맥 스텐트 시술 후의 재협착에 관한 연구

        김윤철,이정우,김보영,강정아,임대승,이민수,김정희,성보영,최성준,성인환,전은석 충남대학교 의과대학 지역사회의학연구소 2000 충남의대잡지 Vol.27 No.1

        Coronary stent implacement is known as an effective treatment in the intimal dissection after percutaneous transluminal coronary angioplasty and the prevention of restenosis. However, In-stent restenosis still remains a major concern in clinical stenting. The stents were placed in 103 patients from July 1996 to March 1999 and performed follow-up coronary angiograms in 59(57.3%) patients. To identify the clinical, angiographic and procedurerelated variables 'which predict late restenosis within the stented artery, 59 patients(58.3±9.9, M:F= 41:18) were studied. The clinical characteristics of the patients were stable angina in 23(39.0%), unstable angina in 14(23.7%), acute myocardial infarction in 21(35.6%) and old myocardial infarction in 1(1.7%). Coronary stenting was performed in 1 patient(1.7%) for primary lesion, 50 patients(84.7%) for suboptimal results after PTCA, 6 patients(10.2%) for bail-out procedure, and 2 patients(3.4%) for restenotic lesions. All patients were treated with aspirin and ticlopidinc. The follow-up angiograms were obtained at 7±4 months. The overall in-stent restenosis rate was 27.1%. The coronary angiographic findings were 32 single vessel(54.2%), 19 two vessel(32.2%) and 8 three vessel disease(13.6%). The angiographic morphological characteristics were type A in 33(55.9%), type B in 14(23.7%), type C in 12(20. 3%) cases. Variables of 16 patients with restenosis were compared with those of 43 patients without restenosis. Previously known predictors for in-stent restenosis were multiple stenting, stenting for restenotic lesions, residual stenosis after stenting, stenting for total occlusion lesions, reference diameter, balloon to vessel ratio, acute gain and minimal luminal diameter after procedure, design and characteristics of stents, ostial lesion of aorta, high pressure method for stenting, lesion length, diabetes mellitus, size of artheroma, saphenous vein grafts, ulcerlating lesions and calcified lesions. In this study, Reference diameter before stenting(2.43±0.54mm vs. 2.88±0.65mm, p=0.016) and balloon-to-artery ratio(1.28±0.26 vs. 1.11±0.18, p=0.006) were predictors for in-stent restenosis. 1) The overall in-stent restenosis rate was 27.1%. 2) In the analysis of predictors for in-stent restenosis, there was no significant differences in clinical, angiographic factors between group with restenosis and without restenosis. But, Only reference diameter before stenting and balloon-toartery ratio were predictors of late in-stent restenosis. In conclusion, stenting is effective revascularisation method for selected patients with ischemic heart disease, and to minimize in-stent restenosis rate, stent implanting is achieved in a large vessel on the basis of an artery-to-stnet ration of 1:1, if possible.

      • KCI등재후보

        한국인 알코올 의존 환자에서 알코올 대사 효소 유전자형 빈도의 남녀 차이

        김성곤,김철민,이덕기,황인복,이현숙,김성연,전은숙,송영상,박제민,최병무,김명정 大韓神經精神醫學會 2005 신경정신의학 Vol.44 No.2

        Objectives : There are a number of preceding epidemiological studies reporting gender differences in the genetic etiology of alcohol dependence. The author investigated gender difference in the frequencies of ADH2 and ALDH2 genoypes between the patients with alcohol dependence and normal control. Methods : The subjects were 141 alcohol dependent patients (104 males, 37 females) and 138 normal control (79 males, 59 females). The frequencies of 1/1 and 1/2+2/2 (2+ afterward) genotypes for ADH2 and ALDH2 were investigated in male and female between alcohol dependence and normal control group. DNA was extracted from WBC in peripheral venous blood and PCR-RFLP method was used out for genotyping. Results : First, the frequency of ADH2 1/1 genotype was significantly higher in alcohol dependent patients than normal control in both genders. Second, while there was no gender difference in the frequency of ADH2 1/1 genotype in normal controls, in the patient group however, the frequency was significantly higher in females than males. Third, in male subjects with alcohol dependence, the frequency of ALDH2 1/1 genotype was significantly higher than in male normal control subjects. On the other hand, in female subjects with alcohol dependence, the frequency of ALDH2 2+ genotype was significantly higher than in female normal control subjects. Conclusion : These results suggest that while the risk of alcohol dependence is predominantly affected by ALDH2 1/1 geno-type in male, the female ADH2 1/1 genotype is mainly associated with the risk of alcohol dependence. This means that there are gender differences in the genetic etiology of alcohol dependence.

      • 의료방사선관리의 국제화 연구 : 핵의학분야의 의료방사선관리

        김인규,오헌진,김혁주,오현주,박기정,이광용,이병영,정승환,강영규,이현구,김귀야,한상용,김연교,양현규,이명철 식품의약품안전청 2001 식품의약품안전청 연보 Vol.5 No.-

        의료방사선은 인간의 질병진료와 예밤에 활용되어 각종 질병으로부터의 적절한 진단 및 의학발전에 중대한 역할을 담당하고 띤다. 또한 인공방사선원중 가장 큰 비중을 차지하고 있으며, 방사선원을 이웅한 이득과 손실을 생각쌀 때 피폭선량의 최소화 및 곡률적영향의 최소화를 위해 이득을 최대화하는 노력을 하고 있다. 진단뿐만 아니라 치료에도 사응하고 있는 인공방사선원의 적절한 관리를 위한 조사 및 연구는 국내에서는 아픽까진 실시되지 않았으며, 국외에서는 이미 활발한 조사 덴 연구가 이루어 지 고 있다. 일반적으로 의료기관의 핵의학분야에서 환자의 진단 및 치료에 사용되는 방사성의약품으로는 Tc-99in, Ga-67, 1-131, 71-201 등이 있으며 이를 이용한 방사능측정웅장비 및 치료뭉장비에는 Gamma Camera, 감마선재측기, 베타선계측기, Dose CaTibrator, PET(양전자방출전산화단층촬영장치)등이 있다. 이어 식푿의약품안전청f"서는 핵의학분야의 방사선보건학적 연구를 위해 핵의학분야의 진료와 관련된 인력, 시설, 장비, 방사성의약품의 사응, 핵의학적 진료형태 및 핵의학적 진료장치에 대한 성능관리등에 대해 조사·연구하였다. A nationwide survey was conducted in the Korea in 2001 to determine the facilities available and the level of activity at centres where radionuclide and therapy was practised in 2000. A response rate of 75% indicated that 120 centres were providing radionuclide therapy and diagnosis. About the good treatment of radionuclide using in medical, researched so many country, but not yet in. Generally nuclear medical part use Tc-99m, Ga-67, I-131, Tl-201 in diagnosis and therapy, radiation detector and equipment for therapy use Gamma Camera, beta-counter, Dose Calibrator PET(Positron Emission Tomography). 81% rate of centre has Gamma Camera and 97% rate of use Tc-99m, I-131 radionuclide. In-vitro did more than in-vivo test absolutely. So in KFDA researched in unclear medical part in Man-Power, facilities, equipment use of nuclear medicine, part of diagnosis and diagnosis equipment.

      • KCI등재

        알코올 의존환자에서 갈근이 알코올 갈망과 대뇌 국소혈류량의 변화에 미치는 영향

        강철중,김명정,김성곤,김인주 大韓神經精神醫學會 1997 신경정신의학 Vol.36 No.5

        알코올 의존 환자에서 갈근이 알코올 갈망을 감소시킨다는 보고가 있고 알코올 갈망에 관여하는 대뇌부위가 전두엽-시상-선조체-측좌핵을 포함하는 회로라는 학설이 있다. 저자는, 갈근이 이러한 부위의 혈류량에 어떤 영향을 미치는지 알아보기 위해 연구를 실시하였다. 알코올 의존으로 입원하여 급성중독과 금단증상에서 회복된 환자를 대상으로 실험 제 1일에 알코올 갈망, 불안 및 기분을 측정한 후 단일광자광출전산화단층촬영술을 이용하여 양측 미상핵 두부, 양측 시상 및 양측 안와전두엽의 국소 혈류량을 측정하였다. 실험 제 3일에 소량의 알코올음료를 마시게 한 후에 제 1일의 실험을 반복하였다. 제4일부터 제13일까지 건조 갈근과립 12gram을 1일 2회 분복시키고 제11일과 제13일에 각기 제1일과 제3일의 실험을 동일한 방법으로 실시하였다. 그 결과는 아래와 같다. 1) 갈근 투여 전에는 음주 전에 비해서 음주 후에 알코올 갈망이 유의하게 증가하였으며 이때 우측 미상핵의 두부에서 혈류량이 유의하게 증가하였다. 2) 음주하지 않은 상태에서 갈근 투여 전과 후를 비교한 결과, 갈근 투여 후에는 알코올 갈망이 유의하게 감소하였으며 이때에 우측 미상핵의 두부와 좌측 안와전두엽에서 유의한 혈류량의 증가를 보였다. 3) 음주한 상태에서, 갈근 투여 전과 후를 비교하면, 갈근 투여 후에는 양측 미상핵 두부와 양측 시상에서 유의한 혈류량의 감소를 보였다. 4) 갈근 투여 후에는 음주 전에 비해서 음주 후에 알코올 갈망의 증가를 보이지 않았으며, 양측 미상핵 두부의 혈류량은 감소하였다. 저자는 이러한 결과에서, 갈근이 알코올 의존환자에서 기초 음주 욕구를 감소시키고 음주 후에 유발되는 알코올 갈망의 증가를 차단하며 이러한 음주욕구의 변화와 변연계선조체 특히 미상핵의 국소 혈류량의 변화 사이에 의미있는 연관성이 존재할 것으로 시사한다. In light of recent reports of the effectiveness of Radix puerariae in the alcoholics and recent formulation of a hypothesis that craving for alcohol in the alcohol-dependent individual is mediated by a limbic circuit involving the fronto-thalamic and fronto-striatoaccumbal region, the authors studied the effect of Radix puerariae on craving for alcohol and cerebral blood flow(rCBF) of these regions. The subjects were hospitalized patients with alcohol dependence recovered from acute intoxication and withdrawal symptoms. On the first day of experiment, rCBF in the areas of caudate nuclei, thalamus and orbitofrontal cortices was measured by Single-Photon Emission Computed Tomography. On the third day, the same procedure was repeated after intake of a small priming dose of alcohol. Radix puerariae in dose of 12gm/day for 10 days was given from fourth day of experiment to the thirteenth day and on the eleventh and thirteenth days, the measurements of rCBF were repeated in the same method as in the first and third day, respectively. Immediately before measurements of the rCBF in each experiment, craving for alcohol was measured by means of Visual Analogue Sale. The results were as follows : 1) Before the treatment of radix puerariae, the alcohol-dependent patients developed a significant alcohol-induced alcohol craving and a concomitant increase of rCBF in the right head of caudate nucleus. 2) Radix puerariae significantly lowered alcohol craving and significantly increased rCBF in the right head of caudate nucleus and the left orbitofrontal cortex in alcohol-free, basal condition. 3) After the treatment of radix puerariae, the rCBF after alcohol intake in bilateral caudate nuclei and bilateral hemithalami was significantly decreased. 4) Radix puerariae did not induce post-alcohol craving for alcohol and significantly decreased post-alcohol rCBF in bilateral caudate nuclei. From these results, it is suggested that Radix puerariae decreases basal alcohol craving in the alcohol-dependent patients, and further that there may exist a significant association between these changes of alcohol craving and concomitant changes of rCBF in the limbic striatim, especially caudate nucleus.

      • KCI등재후보

        2003년 국내 중증급성호흡기증후군 진료 현황 및 문제점 분석

        이진수,김은실,정문현,백제중,정선화,안주희,최영화,이선희,고철우,김성범,김민자,박승철,기현균,송재훈,최상호,김양수,이상오,조용균,박영훈,정숙인,김연숙,이흥범,손창희,장성희,정희진,김우주 대한감염학회 2004 감염과 화학요법 Vol.36 No.3

        목적 : 2002년 말 중국에서 SARS가 발생한 이후 국내에서도 2003년 10월까지 총 3명의 추정환자, 17명의 의심환자가 보고되었다. 향후 추가적인 SARS의 유행이 우려되는 상황에서, 그간의 SARS 환자 진료에 있어서의 실질적인 준비사항, 진료 현황 등에 대한 조사를 통해 문제점을 파악하여, 향후 더 나은 대비가 될 수 있도록 개선점을 제시하고자 하였다. 재료 및 방법 : SARS로 의심되는 환자를 진료 경험이 있는 병원의료진을 대상으로 2003년 10월에 설문조사를 실시하였다. 설문에는 SARS 환자 진료 시의 실질적인 조치, 진료 현황, 병실, 응급실 및 외래에서의 격리 시설과 준비사항, 보건당국의 관리와 지원에 관한 사항을 포함하였다. 결과 : 대상이 되는 22개 병원 중 17개(17/22, 77.2%) 병원이 설문에 응하였다. SARS 환자를 위한 격리실은 응급실, 외래, 일반병실 및 중환자실에서 각각 9개(9/17, 52.9%), 5개(5/17, 29.4%), 15개(15/16, 93.7%), 4개(4/16, 25%) 병원에서 음압처리가 되어있지 않은 일인실 혹은 다인실이 사용되었고, 1개(1/16, 6.3%) 병원에서만 일반병실에서 음압격리실이 운영되었다. 입원환자의 진찰 시 개인보호구의 착용은 거의 모든 의료기관에서 이루어졌다. 보건당국에서 SARS지정병원의 시설 등을 사전에 확인한 곳은 1곳(1/12, 8.3%)이였고, 14개 병원(14/15, 93.3%)에서는 보건당국에 의뢰한 검사결과를 통하 받지 못하였다. 결론 : 의료기관에서 SARS 환자용 격리실뿐만 아니라 기존의 격리실 설비 등이 미흡하였으며, 특히 중환자실 및 외래의 준비가 더욱 부족하였다. 보건당국의 의료기관에 대한 종합적인 지원이 부족하였고, 병원과의 원활한 연계가 잘 이루어지지 않았다. SARS 만이 아닌 격리를 필요로 하는 질환의 적절한 진료를 위해 향후 병원 시설의 정비와 정부차원에서의 보다 구체적이고 실질적인 대책마련이 필요하다. Background : There was an worldwide outbreak of the Severe Acute Respiratory Syndrome (SARS) originated from China in late 2002. During that period three cases of suspected SARS and 17 cases of probable SARS were reported in Korea. With the concerns about the reemergence of SARS-coV transmission, it is important to be prepared for any possibility. So, this study is aimed to analysis the past measures in managing SARS and propose the amendatory plans to improve the preparedness. Materials & Methods : Questionnaires were collected among clinicians with any experience in managing the probable or suspected SARS cases in Oct. 2003. 17 out of 22 hospitals responded to the questionnaire. The contents in the questionnaire were practical activities, personal equipments, response plans, isolation facilities in emergency centers, outpatient clinics, general wards and intensive care units, and relationship with the public health department. Results : The dedicated isolation rooms in emergency centers, outpatient clinics, general wards, and intensive care units were prepared in 9 (9/17, 52.9%), 5 (5/17, 29.4%), 15 (15/16, 93.7%), and 4 (4/16, 25.0%) hospitals, respectively. Except for one hospital that newly made negative pressure room for SARS, single or multi-bed rooms without airborne infection control were used in all the other hospitals. The personal precaution principles were kept quite well in general wards. Before the designation of SARS hospital by the public health department prior evalution to see if the hospital was suitable for managing SARS was conducted in only 1 (1/12, 8.3%) hospital. The results of laboratory diagnosis were reported back in 1 (1/15, 6.6%) hospital. Conclusions : The isolation facilities which can control airborne infection were almost deficient not only for SARS but also for other respiratory transmissible diseases. For the infection control of transmissible diseases including SARS, more investment is needed on medical facilities and comprehensive support from the public health department required.

      • 한국인에서 혈소판 당단백 Ⅱb/Ⅲa 유전자 다형성과 관동맥 성형술 후 재 협착과의 관계

        이민수,이정우,김보영,임대승,강정아,김정희,김윤철,성보영,최성준,성인환,전은석 충남대학교 의과대학 지역사회의학연구소 2000 충남의대잡지 Vol.27 No.2

        Platelet aggregation is the final pathway of acute coronary syndrome such as acute myocardial infarction and unstable angina. Platelet glycoprotein IIb/IIIa is a membrane receptor for fibrinogen and yon Willebrand factor and it plays an important role in platelet aggregation and in the pathogenesis of acute coronary syndrome. It is known that polymorphism of the gene that encoding platelet glycoprotein IIb/IIIa(PI^A1/A2) is strongly related to acute coronary syndrome in Caucasian, but not in Koreans. We investigated relationship between platelet glycoprotein llb/Illa gene polymorphism and restenosis of coronary artery after angioplasty in Koreans. Total 371 patients(M=251. F=120) were enrolled. Angioplasty group comprised 143 patients who underwent coronary angioplasty, and in the angioplasty group, restenosis group comprised with the 65 patients who had restenotic lesion over 50% of luminal diameter in follow-up coronary angiography. Normal group comprised 153 patients who had no significant angiographic lesion and variant angina group comprised 75 patients who were positive in ergonovine test. Genomic DNA was extracted from peripheral arterial blood. To determine the frequency of P1^A1/A2 genotype, polymerase chain reaction(PCR) was done and the product was restricted with Mspl. 3%. agarrose gel electrophoresis showed restriction fragment length polymorphism. Clinical profile and risk factor were also reviewed. Among all 371 patients of study group, genotype of only one patients in restenosis group if is proven to be PI^A1/A2 heterozygote. All patients of normal study group, no restenosis group, and the other patients in restenosis group have an PI^A1 homozygote genotype. In our study, platelet glycoprotein IIb/Illa polymorphism has no relationship with restenosis of the coronary artery after angioplasty in Koreans. But the genotypic frequency of platelet glycoprotein IIb/IIIa gene polymorphism in Koreans is concordant with that of previous studies.

      • SCISCIESCOPUS

        Risk mitigation strategy by Passive IN-core Cooling system for advanced nuclear reactors

        Seo, Seok Bin,Kim, In Guk,Kim, Kyung Mo,Jeong, Yeong Shin,Bang, In Cheol Elsevier 2018 Annals of nuclear energy Vol.111 No.-

        <P><B>Abstract</B></P> <P>After the Fukushima accident, the installation of passive safety systems for nuclear power plants becomes necessary as protection against external power failures. Recently, an innovative safety system was introduced by employing a hybrid heat-pipe concept asa Passive IN-core Cooling system (PINCs). The hybrid heat-pipe concept employs the combination of a control rod and a heat pipe to passively shutdown a reactor in an accident condition and simultaneously remove decay heat from the core. As a result, a PINCs can handle the entire accident sequence in a single system, leading to significant enhancement in nuclear reactor safety. In this study, the safety enhancement of various nuclear reactors has been quantitatively evaluated by using the probabilistic safety assessment method (PSA). PSA models of the APR1400, PGSFR, and SMART nuclear reactors developed in Korea, are developed, and a PINCs model has been applied to each reactor. The PSA model of the PINCs has been developed based on the systematic design and configuration of each reactor. In addition, postulated accident sequences where the PINCs operates have been developed in the PSA model. Finally, the consequence of each accident sequence has been quantitatively evaluated in the form of core damage frequency (CDF) and minimal cut set (MCS) for each nuclear reactor. Based on the PSA results, it is confirmed that the application of the PINCs effectively reduces the overall CDF of all nuclear reactors. In addition, the failure paths causing the core damage are restricted for APR1400 and PGSFR. In conclusion, the employment of the PINCs significantly improved the overall safety degrees of various nuclear reactors.</P> <P><B>Highlights</B></P> <P> <UL> <LI> PINCs combines a control rod and a heat pipe to enhance safety of advanced reactors. </LI> <LI> PSA models of advanced reactors are developed including PINCs. </LI> <LI> The consequences of the accident aided by PINCs are quantitatively evaluated. </LI> <LI> PINCs significantly reduces the overall CDFs of all nuclear reactors. </LI> </UL> </P>

      • KCI등재SCIESCOPUS

        Engineering of AlON interlayer in Al<sub>2</sub>O<sub>3</sub>/AlON/In<sub>0.53</sub>Ga<sub>0.47</sub>As gate stacks by thermal atomic layer deposition

        Lee, Woo Chul,Cho, Cheol Jin,Park, Suk-In,Jun, Dong-Hwan,Song, Jin Dong,Hwang, Cheol Seong,Kim, Seong Keun ELSEVIER 2018 Current Applied Physics Vol.18 No.8

        <P>The presence of an AlN interfacial layer in high-k/In0.53Ga0.47As gate stacks improves the interfacial properties and enhances the electrical performance of devices. However, pure AlN is rarely grown by atomic layer deposition (ALD) because of the low reactivity of NH3 toward the common Al-precursor and the predisposition to oxidation of the grown AlN layer. Although a plasma-enhanced ALD technique significantly suppresses the oxygen content in the grown AlN layer, the deterioration of the interface properties by plasma-damage is a critical issue. In this work, an AlON interlayer was engineered by optimizing the NH3 feeding time in thermal ALD to improve the interface quality in Al2O3/AlON/In0.53Ga0.47As capacitors. It was determined that a mere increase in the NH3 feeding time during the ALD of the AlON film resulted in a higher nitrogen incorporation into the AlON interlayer, leading to a reduction in the interface trap density. Furthermore, the out-diffusion of elements from the In0.53Ga0.47As layer was effectively suppressed by increasing the NH3 feeding time. This work demonstrates that simple process optimization can improve the interface quality in high-k/In0.53Ga0.47As gate stacks without the use of any plasma-activated nitrogen source.</P>

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