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TiS$i_2$ 박막의 열안정성에 미치는 막 스트레스의 영향
김영욱,김영욱,고종우,이내인,김일권,박순오,안성태,이문용,이종길,Kim,,Yeong-Uk,Kim,,Yeong-Uk,Go,,Jong-U,Lee,,Nae-In,Kim,,Il-Gwon,Park,,Sun-O,An,,Seong-Tae,Lee,,Mun-Yong,Lee,,Jong-Gil 한국재료학회 1993 한국재료학회지 Vol.3 No.1
단결정 실리콘위에 스퍼터법으로 증착된 티타니움막을 급속가열로에서 고상반응에 의해 형성시킨 면저항 1.2 ohm/sq. 내외의 TiS$i_2$ 박막에 있어서 열안정성을 상부절연막의 유무 및 종류에 따라 조사하였다. 상부절연막은 상압 CVD로 증착한 USG(Undoped Silicate Glass, Si$i_2$) 막과 플라즈마 CVD법으로 증착한 PE-SiN(S$i_3$$N_4$)막을 사용했다. 열안정성 평가는 90$0^{\circ}C$에서 시간을 달리하여 TiS$i_2$막, PE-SiN막, USG막의 스트레스는 각각 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$의 인장응력을 나타내었다. 응집현상은 TiS$i_2$의 응집현상은 Nabarro-Herring 마이크로 크리프에 의한 원자의 확산관점에서 검토되었다. Abstract The effect of the film stress on the thermal stability of TiSi, films under the dielectric overcoat was investigated. TiS$i_2$ films with the sheet resistance of 1.2 ohm/sq. were produced by a solid-state reaction between sputtered Ti film and single-crystalline Si in an RTA (rapid thermal anneal) machine. Dielectric overcoats such as the USG (Undoped Silicate Glass, Si$O_2$) film and the PE-SiN(S$i_3$$N_4$) film were deposited by AP-CVD and PE-CVD, respectively, on the TiS$i_2$ film. The thermal stability of the TiSi, film was evaluated by changes in the sheet resistance, film stress and microstructure after furnace anneals at 90$0^{\circ}C$. Agglomeration of the TiSi2 film high temperatures results in the increase of sheet resistance and the decrease of tensile stress of TiSi, film. The stress level of the TiSi" PE-SiN and ~SG films at 90$0^{\circ}C$C was 1.3${\times}{10^{9}}$, 1.25 ${\times}{10^{10}}$, 2.26 ${\times}{10^{10}}$ dyne/c$m^2$ in tensile, respectively. Dielectric films deposited by CVD on TiSi, was effective on preventing agglomeration of TiSi,. The PE-SiN film mproved the thermal stability of TiSi, more effectively than the AP-CVD USG film. It is considered that agglomeration of the TiS$i_2$ film under the stress of dielectric overcoat at high temperature can be caused by a diffusional flow of atom called Nabarro-Herring microcreep.reep.
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김영욱(金永旭) 구결학회 2006 口訣硏究 Vol.0 No.16
이 글은 角筆의 기원에 대한 탐구이다. 각필은 毛筆과 대비되는 硬筆의 일종으로 모필이 발명되기 이전부터 인류가 문자를 새기고 기록하는 데에 사용했던 필기도구를 凡稱한다. 각필은 佛敎文化와 밀접한 관련이 있다. 불경에 각필을 새기는 방법이 어떤 경로를 통해서 한국과 일본까지 전파되었는지에 관한 硏究는 古代 아시아 문화 교류사의 한 일면을 밝힐 수 있는 단서를 포착할 수 있다는 점에서 文字文化史的인 意味가 있다. 동아시아의 문자 문화는 모필 문화와 각필 문화로 대별될 수 있는데 中國의 文字文化에 짝을 이루는 것이 毛筆이고 印度의 口述文化에 짝을 이루는 것이 角筆이다. 한반도는 북방의 문화와 남방의 문화가 접목하는 곳이었다. 印度의 각필문화가 어떠한 경로를 거쳐서 한반도까지 오게 된 것인지에 대해서는 분명하게 알 수가 없지만 필자가 추정한 내용을 요약하면 다음과 같다. 인도에는 이미 기원전 3세기인 아쇼카 시대부터 경전의 문자를 각필로 새기거나 기록하는 문화가 융성하였는데 기원후 육세기 혹은 칠세기에 걸쳐 인도의 날란다 대학에 유학한 中國의 승려에 의해 중국으로 전파되었을 것으로 보이며 기원후 칠세기 경에 중국의 長安에 유학한 韓國의 승려에 의해 한국으로 전파된 것으로 보인다.
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金永旭 순천청암대학 1979 論文集-順川看護專門大學 Vol.5 No.-
From the end of 19th century to the former half of the 20th centry, Dewey's educational ideas were shocking in the educational circles all over the world. In our country since the 1945 liberation, his ideas made a great contribution to the democratic educational ideology and to the educational system of our country. He developed the educational basis with the experimental method on the ground of pragmatism. He also had the Dewey School' which means experimental school and he atempted the experimental process of his educational philosophy. Among his books, these are the best ones; 1) School and society 2) Democracy and Education 3) Experience and Education Mentioning all about our lives, he said that the important objects of school education were to foster the ability of social adoption and democratic grounding. He attatched great imporance to the experimental learning and he said, "School is the place where the ability of future social skills are stored up." He was greatly concerned for the process of character buildhng as well as the importance of juvenile education. He applied the process of character building to education with the scientific method. His theory can be devided into three parts; 1) The philosophical foundation of Dewery's educational ideas. 2) The practical factors which formed the educational ideas to Dewey. 3) The fundamental characteristic of Dewey's educational thought. The aim of this paper is for the correct understanding of Dewey's educational ideas and for the guidence of students as well as for the study of the writer.
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看護學科 進學動機에 따른 意識 調査 : 順天看專을 對象으로 On Soonchun Nursing Junior College
金永旭 순천청암대학 1975 論文集-順川看護專門大學 Vol.1 No.-
Since Soonchun Nursing high school was raised to the status of Nursing Junior College in 1973, not a few students have applies for this school without understanding of particularuty and speciality of this school, consequently many problems and difficulties have been brough about to the education and administration of this school, An important element of the above is that students have applied this nursing school without duly consideration of their intellectural power and aptitude as nurse, and that their parents blindly insisted upon their becoming nurses, In order to guide the students well and to accomplish the purpose of education, the following subjects were investigated; ① Motives of applying for nursing school ② Occupations of parents of students in this school ③ Academic backgrounds of students' parents ④ Investigation to want an Occupation of students in this school.
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NDSL
