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Silicone rubber 멤브레인을 이용한 압저항형 저차압센서의 개발
서창택,공성수,심준환,고광락,서현미,김영진,설철규,신장규,이종현 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
A 4-beam piezoresistive differential pressure sensor using a silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n^(+)/n silicon substrates by an unique silicon micromachining technique using porous silicon etching. The width, length, and thickness of the beam is 120 μn, 600 μm, and 6 μm, respectively, and the thickness of the silicone rubber membrane was 36 gm. By the use of four-beam structure, the mechanical strength of the differential pressure sensor can be highly improved due to smaller shear stress. And the lower sensitivity of the sensor can be simply solved by combining two output signals of half-bridge. The effectiveness of the sensor is confirmed through an experiment and FEM simulation in which the differential pressure sensor is characterized.
Fabrications of a continuous-flow DNA amplifier using dry film resist
공대영,강태욱,서창택,조찬섭,이종현 한국바이오칩학회 2010 BioChip Journal Vol.4 No.3
out any etching. Also, DFR is confirmed low consumption power because DFR has very lower thermal conductivity (2.33 W/mK) in comparison with silicon (168 W/mK) therefore displays high performance in heating an internal sample. As DFR is hydrophilic, it can bond with glasses without any treatment. Therefore, anodic bonding process using silicon bulk micro-machining or an RIE process used in the PDMS fabrication technique using O2 plasma is not necessary. According to these advantages, it is expected that production cost can be decreased because fabrication costs of the PCR chamber is decreased. In this paper, a soda-lime glass substrate coated with a DFR of the fluid to cycle through different temperature zones was used to form a micro-channel structure and integrated Pt heater continuous-flow PCR.
Novel Electrode Structure of a Photovoltaic Cell
공대영,조영우,서창택,이종현,조찬섭,김봉환 한국물리학회 2011 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.58 No.51
A new method for the electrode structure of high-efficiency photovoltaic cell by an air bridge electrode has been developed. Three types of the photovoltaic cells; a non texturing photovoltaic cell, a TMAH(Tetra methyl ammonium hydroxide)-texturing photovoltaic cell with an electrode using a screen print, a TMAH-texturing photovoltaic cell with an air bridge electrode have been processed in order to optimize the electrode structure. An efficiency of 3.62% was achieved for an air bridge electrode photovoltaic cell, which is better than the efficiency 2.24% for conventional photovoltaic cells fabricated by using a TMAH-texturing process and screen-printed electrodes. Air bridge electrodes augmented incident light by diffraction of sunlight.