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산소의 첨가가 박막 백금측온저항체의 온도저항계수에 미치는 영향
설철규,김영진,장경훈,이건환,이정희 경북대학교 센서기술연구소 1997 센서技術學術大會論文集 Vol.8 No.1
A thin film Pt-RTD(resistance temperature device) was fabricated by using DC magnetron sputtering and laser patterning. A study was fulfilled to adjust the TCR(temperature coefficient of resistance) to 3850 ppm/℃ which is IEC751 standard and the influence of oxygen addition(0 ~ 20 %) on TCR was measured. The resistance of Pt-RTD was set to 1000 Q at 0 ℃ using laser patterning and trimming. The analyses of XRD and AES were used to characterise the platinum thin film. The TCR of Pt-RTD was measured by a high precision oil bath. When the addition of oxygen flow rate was 1 %, TCR was 3850 ppm/℃.
백금박막 RTD를 이용한 유속센서의 제조와 그 동작특성
서현미,장경훈,김영진,설철규 경북대학교 센서기술연구소 1997 센서技術學術大會論文集 Vol.8 No.1
A flow sensor for detecting the flow rate of a air, composing a substrate, a heating element, and one or two fluid temperature sensing elements disposed symmetrically around the heating element. Wherein resistence changes by a fluid temperature change and heating element is maintained at fixed level by the control of voltage that is applied to the heating element. The function of the heating element(microheater) is based on the self-heating effect of the resistor when current is applied to it. A airflow sensor is capable of accuritely measuring a air flow irrespective of changes in ambient temperature. Pt thin films were deposited by a DC magnetron sputtering with Ar/O_(2) gas mixtures. Due to the oxygen incorporation into the Pt films, deposition rate and resistivity of as-deposited Pt thin films increased with oxygen fraction in the sputtering gas.
Silicone rubber 멤브레인을 이용한 압저항형 저차압센서의 개발
서창택,공성수,심준환,고광락,서현미,김영진,설철규,신장규,이종현 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
A 4-beam piezoresistive differential pressure sensor using a silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n^(+)/n silicon substrates by an unique silicon micromachining technique using porous silicon etching. The width, length, and thickness of the beam is 120 μn, 600 μm, and 6 μm, respectively, and the thickness of the silicone rubber membrane was 36 gm. By the use of four-beam structure, the mechanical strength of the differential pressure sensor can be highly improved due to smaller shear stress. And the lower sensitivity of the sensor can be simply solved by combining two output signals of half-bridge. The effectiveness of the sensor is confirmed through an experiment and FEM simulation in which the differential pressure sensor is characterized.