Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 CURRENT APPLIED PHYSICS Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

NSIP와 BOOP의 고해상전산화단층촬영 소견과 비교

백상현,박재성,차장규,홍현숙,김대호,박성진,조준희,이혜경,최진수 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Purpose: BOOP and NSIP also share similar clinical features such as subacute flu-like illness, the finding of bronchoalveolar lavage, the result of pulmonary function test and more favourable outcome than usual interstitial pneumonia(UIP). The author try to compare the HRCT findings of NSIP with BOOP by pattern and distribution of diseases. Materials and Methods: HRCT findings of histopathologically proven NSIP(Group Ⅰ; 6, Group Ⅱ; 7, Group Ⅲ; 2) in 15 patients(5 male, 10 female, age range, 39-69 years; mean age, 53 years), BOOP in 15 patients(6 male, 9 female, age range, 26-76 years; mean age, 52 years) were reviewed retrospectively. Results: The common pattern of the two diseases was admixed consolidation, ground glass attenuation & reticular densities with/without architectural distortion(NSIP; 53.3%, BOOP; 46.7%). The main component of the pattern wan predominantly consolidation(NSIP; 46.7%, BOOP; 73.3%) and ground glass attenuation(NSIP; 40.0%, BOOP;20.0%). Architectural distotion was more provinent finding with NSIP(mild ; 3, moderate ; 4, severe; 2) compared with BOOP(mild; 7, moderate; 2, severe; 0). The predominant overall distribution was lower lung, peribronchovascular & peripheral lung field in both of the two entities(NSIP;73.3%, BOOP; 73.3%). Peribronchovascular involvement was more common with NSIP(100%) than BOOP(80%), whereas peripheral involvement was more common with BOOP(93.3%) than NSIP(80%). Conclusion: The HRCT findings of NSIP and BOOP were similar in pattern and distribution. But NIP manifested more frequently ground-glass attenuation, whereas BOOP showed more frequently consolidation. Architectural distortion was more severe with NSIP than BOOP. NSIP invoved more frequently peribronchovascular space and BOOP were more common in peripheral lung field.

개에서 이중 결찰법을 통한 동맥관 개존증의 완치 예

윤헌영,정순욱,박희명,박철,정만복,김준영,한현정,황민,노병국,박상혁,장하영,박정윤 한국임상수의학회 2004 한국임상수의학회지 Vol.21 No.1

A ten months old, female Yorkshire terrier weighing 2.88 kg referred to veterinary teaching hospital of college of veterinary medicine, Konkuk University because of syncope, cough and dyspnea. First hematological and serum chemical test revealed thrombocytopenia, mild anemia, and increase of concentration of ALP (195 U/L). On 57 days later, second hematological and serum chemical test revealed polycythemia, increase of concentration of ALP (211 U/L), and Tchol (387 mg/dl). Right atrium enlargement, main pulmonary artery bulge and cardiomegaly (VHS = 11.5) were observed in radiographic findings. Ultrasonographic images showed both right and left ventricular dilation and turbulent flow between the descending aorta and the main pulmonary artery in color Doppler imaging. ECG showed left ventricular enlargement, SA block, and electrical alternant. Thoracotomy was performed through left fourth intercostal incision under isoflurane anesthesia. Patent ductus arteriosus was double ligated with 1-0 silk. Cough and dyspnea disappeared on 5 days after operation. Turbulent flow was not found in color doppler imaging of ultrasonography on 10 days after operation. Ten months later after the operation, syncope could not exist any more.

40세 이하 관상동맥 질환자에서 장기적 임상 관찰

이승욱,정명호,박종철,박형욱,조상희,김원,김계훈,이상현,강경태,조장현,김남호,김건형,안영근,조정관,박종춘,강정채 全南大醫大 2001 전남의대학술지 Vol.37 No.2

지능형 자동차 주변 감시 시스템 설계 방안

장시웅(Si-woong Jang),박영식(Young-sik Park),성현용(Hyun-yong Sung),곽길봉(Gil-bong Kwak),김선남(Seon-nam Kim),김경진(Kyeoung-jin Kim) 한국정보기술학회 2009 Proceedings of KIIT Conference Vol.2009 No.-

본 연구는 차량 주변을 지능적으로 감시하는 자동차 주변 감시시스템에 관한 것으로, 자동차의 주행 및 주차 시 속도의 변화나 운전자의 요청에 의해 자동차 주변 지역에 관한 시야를 상황에 따라 달리하여 모니터링 함으로써 운전자가 안전한 주행 및 주차를 수행할 수 있게 하기 위한 것이다. 그러한 목적을 달성하기 위하여 본 연구에서는 차량의 주변부를 감시하기 위하여 차량의 외곽에 설치된 카메라의 각도가 지면으로부터 차량의 상부를 향하는 방향으로 변경될 수 있도록 제어하는 제어부, 카메라의 영상을 입력받아 차량주변의 영상을 생성하는 영상처리모듈, 영상처리모듈에서 생성된 영상을 출력하는 디스플레이를 포함하는 것을 특징으로 하는 지능형 자동차 주변 감시시스템을 제안한다. This study is on a vehicle surroundings monitoring system, which enables a driver to travel and park safely by monitoring vehicle surroundings, depending on the speed of vehicle and driver's control when traveling and parking. To achieve the aforementioned purpose, we propose an intelligent vehicle surroundings monitoring system, which consists of a control part, an image processing module and display module. Hence, the control module controls angle of camera to turn upward from the bottom to monitor vehicle surroundings. The image processing module merges the received images from cameras with the original vehicle image to display the vehicle’s surroundings in real time as if looking down from the sky.

한의진단명과 진단요건의 표준화 연구 II (표준화 실례) : 2차년도 연구결과 중간 보고

양기상,최선미,최승훈,안규석,박경모,박종현,김성우,신승호,정우열,전병훈,고현,김정범,신상우,김성훈,김동희,권영규,엄현섭,장혜옥 한국한의학연구원 1996 한국한의학연구원논문집 Vol.2 No.1

The diagnostic requirements were suggested and explained regarding the systems of differentiation of symptoms and signs in the second year study of standardization and unification of the terms and conditions used for diagnosis in oriental medicine. The systems were as follows; - differential diagnosis according to condition of body fluid, differentiation of syndromes according to the state of qi and blood, differential diagnosis according to relative excessiveness or deficiency of yin and yang(氣血陰陽津液辨證) - differentiation of diseases according to pathological changes of the viscera and their interrelation - analyzing and differentiating of febrile diseases in accordance with the theory of the six channels(傷寒辨證) The individual diagnosis pattern was arranged by the diagnostic requirements in the following order : another name(異名), notion of diagnosis pattern, index of differentiation of symptoms and signs(辨證指標), the main point of diagnosis, analysis of diagnosis pattern(證候分析), discrimination of diagnosis pattern(證候鑑別), a way of curing a diseases(治法), prescription(處方), herb in common use(常用藥物), diseases appearing the diagnosis pattern(常見疾病), documents(文獻調査). This study was carried out on the basis of the Chinese documents and references.

유방암의 위와 대장전이

유현아,김은영,서민지,정은,조민정,오현진,장지혜,박지찬,이정의,박석영 이화여자대학교 의과학연구소 2014 EMJ (Ewha medical journal) Vol.37 No.2

Gastric metastasis from breast cancer is rare and only six cases have been reported in Korea. Colon metastasis is more rare than gastric metastasis. We report a 63-year-old woman with gastric and colon metastases of invasive lobular carcinoma of breast. She was diagnosed as right breast cancer, received right modified radical mastectomy 10 years ago and has been treated with chemotherapy and hormone therapy. Investigating for melena and a small caliber of stool, we found gastric and colon metastases. The diagnosis of metastatic breast cancer was made through gross pathologic and immunohistochemistry staining. We report a case with gastric and colon metastases from breast cancer and a review of the associated six case reports in Korea.

구강에서 채취한 혐기성 세균에 대한 서양산 고추냉이(Horseradish, Armoracia rusticana) 뿌리 추출물의 항균효과

장용걸,박호원,신일식,이주현,서현우 大韓小兒齒科學會 2010 大韓小兒齒科學會誌 Vol.37 No.2

서양산 고추냉이 (Horseradish, Armoracia rusticana)의 주성분인 allylisothiocyanate(AIT)는 각종 세균에 대한 살균 효과로 주목받고 있다. 이전 연구들을 통해 구강내 다양한 세균 및 진균류에 대한 항균성이 입증되었으나 근단내 병소를 유발하는 혐기성 세균에 대한 연구는 미진한 실정이다. 본 연구에서는 사람의 근단 병소에서 직접 분리한 E. faecalis와 F. nucleatum에 대한 서양산 고추냉이 뿌리 추출물의 항균활성을 표준균주와 비교해보고 이를 대표적인 항균제인 클로르헥시딘과 비교하여 다음과 같은 결론을 얻었다. 1. 서양산 고추냉이 뿌리 추출물은 E. faecalis 임상 분리균주에 대하여 표준균주와 같거나 약간 높은 농도에서 항균효과를 나타냈고, 625.0~1,250.0 μg/ml의 농도에서 클로르헥시딘 (7.8~15.6 μg/ml)과 대등한 항균효과를 가지는 것으로 나타났다. 2. 서양산 고추냉이 뿌리 추출물은 F. nucleatum 임상 분리균주에 대하여 표준균주와 같거나 약간 높은 농도에서 항균효과를 나타냈고, 78.1~312.5 μg/ml의 농도에서 클로르헥사딘 (7.8~15.6 μg/ml)과 대등한 항균효과를 가지는 것으로 나타났다. 이번 연구로 표준균주 뿐만 아니라 구강에서 직접 분리한 혐기성 세균에 대한 서양산 고추냉이 뿌리 추출물의 항균성을 확인할 수 있었고, 추후 근관 세척제나 소독제로 서양산 고추냉이 뿌리 추출물을 이용할 수 있는 가능성을 보여주었다. Objective : The aim of this study was to determine the antimicrobical effect of horseradish root extracts against Enterococcus faecalis and Fusobacterium nucleatum isolated from oral cavity compared with reference strain, and compared with that of chlorhexidine. Method : Horseradish root extracts and chlorhexidine were sequentially diluted and tested against anaerobes(E. faecalis, F. nucleatum) isolated from children's oral cavity. The microbes were anaerobically incubated and the minimum inhibitory concentration(MIC) and minimum bactericidal concentration(MBC) were detected. Results: 1. Horseradish root extracts showed antimicrobial effect against E. faecalis isolated strain at same or slightly higher concentration compared with MIC of reference strain. 2. 625.0~1.250.0 ㎍/ml horseradish root extracts showed similar antimicrobial effect with chlorhexidine(7.8~15.6 ㎍/ml). 3. Horseradish root extracts showed antimicrobial effect against F. nucleatum isolated strain at same or slightly higher concentration compared with MIC of reference strain. 4. 78.1~312.5 ㎍/ml horseradish root extracts showed similar antimicrobial effect with chlorhexidine(7.8~15.6 ㎍/ml). Conclusions : The results of this study confirm that horseradish root extracts has antimicrobial effect against anaerobes isolated from oral cavity as well as reference strain. And we found the potential of horseradish root extracts as a canal irrigant or disinfectant.

2형 당뇨병에서 Repaglinide의 유용성에 대한 연구

박철영,김영설,이현철,장학철 대한당뇨병학회 2001 임상당뇨병 Vol.2 No.4

연구배경 : 제2형 당뇨병 환자의 치료에 새로운 약제인 repaglinide와 기존에 상용하던 gliclazide를 비교하여 repaglinide의 유효성 및 안정성을 비교 평가 하고자 하였다. 방법 : 154명의 환자를 1:1 비율로 repaglinide와 gliclazide군으로 무작위 배정하였다. 약제 투여 전에 탈락된 2명을 제외한 152명의 환자 중 127명의 환자가 투약을 마쳤다. 투약 방법은 2주간의 약제 중지 기간 후에 4주동안 약제 용량 결정 기간을 통해 결정된 용량을 8주간 지속적으로 투여 하였다. 약제 용량은 repaglinide는 0.5mg, 1mg 또는 2mg 1정을 매 주식사 전에 경구 투여하였으며, gliclazide는 80mg 1정 또는 1/2정으로 시작해 제품 설명서에 따라 투여하였다. 치료 전 후의 당화혈색소, 공복혈당, 식후혈당 및 지질대사 지표 등의 검사로 유효성을, 여러 가지 생화학적,혈액학적 검사 및 저혈당빈도 등으로 안정성을 각각 평가하였다. 결과 : 12주 투여 후 repaglinide군과 gliclazide군 모두에서 당화혈색소 및 공복혈당의 유의한 감소를 보였다. 그러나 당화혈색소 및 공복혈당의 감소 정도는 두 군간의 유의한 차이는 없었다. 60분 및 90분의 식후혈당의 변화값의 평균은 repaglinide군에서는 기저치와 비교하여 유의하게 감소하였지만, gliclazide군에서는 유의한 감소를 보이지 않았다. 그러나 두 군의 60분, 90분 및 120분에서의 식후혈당 감소 정도는 두 치료군간에 유의한 차이는 없었다. 총콜레스테롤의 값의 유의한 감소가 gliclazide군에서 있었지만 변화 정도는 두 치료군간의 차이가 없었다. 체중변화는 두 군간 통계학적으로 유의한 차이가 없었다. 두 군모두 우려할 만한 약제 이상반응은 없었다. 저혈당 증상은 gliclazide군이 repaglinide군보다 많았지만 두 군간에 유의한 차이는 없었다. 결론 : 제2형 당뇨병 환자에서 repaglinide는 혈당조절에 대하여 gliclazide와 동등한 유효성을 가지고 있으며 안전한 것으로 사료된다. Background : This study was designed to compare the efficacy and safety of repag linide with gliclazide in a 12-week open-labelled, randomized, parallel group, multi-center study of outpatients with type 2 diabetes. Methods : A total of 182 patients were screened . 154 patients were randomized in a 1:1 ratio of repaglinide (78 patients) and gliclazide (76 patients). Two randomized patients withdrew from the trial prior to receive any trial medication. At the end of trial, 127 patients completed. The study protocol included a screening visit to assess patient eligibility; a washout period of 2 weeks, a titration period of 4 weeks, and a subsequent 8 week maintenance period. Repaglinide was a dministered preprandially with the three main meals, and gliclazide was taken according to the product labeling . Results : After 12 weeks treatment, both repaglinide and gliclazide resulted in significant reductions in HbA_(1c) (p<0.001; both treatment groups) and fasting blood glucose (FBG) values (p<0 .001; both treatment groups). Significant reductions in postprandial blood glucose (PPBG) values were found in the repaglinide group at 60 minutes (p<0.05) and at 90 minutes (p<0.05). However, no significant treatment differences in HbA 1c, FBG, or PPBG were observed. Both number of patients and frequency of reported hypoglycemic events appeared to be lower in the repaglinide group than in the gliclazide group (not significant). Conclusion: Overall, the results showed that repaglinide is well-to lerated and equally effective in controlling HbA_(1c), FBG and PPBG as gliclazide.

바둑학 전공자들의 여가활동 특성에 관한 연구

박장근,정수현,임란희 명지대학교 예체능연구소 2002 藝體能論集 Vol.13 No.-

This study aims at examining the characteristic of leisure types of ‘the majors in Baduk Studies who attend Myong-ji University. The questionnaire was given to 100 students for the purpose of investigating their leisure type, that is, leisurely activities, satisfaction from it, absorbtion in it and the degree of satisfaction with life. The result conducted by some statistical analyses is as follows : 1. The Analysis of Participation type of leisure activities 1) In the aspect of participation type of leisure modes, play &ecreation takes 34.0% and in sex appears significant difference. 2) In the participation frequency, over 6 times occupies 41.0% and in sex comes meaningful discrepancy. 3) In the participation span, over 3 years has 56% of the whole, where remarkable differences are shown in grade, religion and the level of household economy. 4) In the participation of accompanists, 66% turns up ‘friends’, which has no significant difference in any factors. 5) In the participation of an obstruction factor, the shortage of time accounts for 48.0%, that shows an meaningful difference in grade. 2. The Analysis of the Degree of Satisfaction in Leisure Participation of the Majors in Baduk Studies 1) The highest in leisure satisfaction was shown in men, freshmen, non-religion, middleclass, and a meaningful difference appeared in religion. 2) The highest satisfaction in leisure absorbtion was seen in women the 4th grade, non-religion, the high class, and a significant difference came out in the level of household economy. 3) The highest in the satisfaction of life turned up in men, freshmen, non-religion, the high class, and a meaningful difference was shown in the level of household economy.