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새로운 증착원으로 형성된 MOCVD TiN에 관한 연구
최정환,이재갑,김지용,이은구,홍해남,신현국,Choe, Jeong-Hwan,Lee, Jae-Gap,Kim, Ji-Yong,Lee, Eun-Gu,Hong, Hae-Nam,Sin, Hyeon-Guk 한국재료학회 1999 한국재료학회지 Vol.9 No.3
새로운 TiN 선구체인 TEMAT(tertrakis etylmethylamino titanium)과 암모니아를 이용하여 TiN 박막을 형성하였다. 단일 증착원으로 증착시킨 경우에는 $70~1050\AA$/min의 증착률을 얻을 수 있었으며 증착온도에 지배를 받았다. $275^{\circ}C$의 증착온도에서 $0.35\mu\textrm{m}$의 접촉창에서 약 90%의 도포성을 얻을 수 있었다. TEMAT에 암모니아를 첨가하였을 때 단일증착원에서 $3500~6000\mu\omega-cm$정도의 갑을 나타내던 비저상이 ~$800\mu\omega-cm$ 정도로 낮아졌으며 대기중 막의 안정성도 향상되었다. AES의 분석결과에서도 암모니아의 첨가로 현저한 산호와 탄소 함량의 감소를 나타내었다. 그러나 암모니아의 유량을 증가시킬수록 $0.5\mu\textrm{m}$ 접촉창에서 나타난 tiN 박막의 도포성은 감소하였고 이는 TEMAT와 암모니아의 기상 반응에의한 높은 첩착계수를 가진 중간 생성물의 형성에 의한 것으로 생각된다. 반응 부산물에 대한 분석은 QMS에 의해 이루어 졌으며 transamination 반응에 의한 TiN 증착 기구를 제시하였다. 추가적으로 XPS 분석으로 TEMAT와 암모니아의 반응에 의해 만들어지는 탄소는 금소기 탄소였으며 $\beta$-수소 반응이 transamination 반응과 경쟁적으로 일어남을 나타내었다. MOCVD TiN films were prepared from a new TiN precursor, tetrakis(etylmethylamino)titanium (TEMAT) and ammonia. Deposition of TiN films from a single precursor, TEMA T yielded the growth rates of $70 to 1050\AA$/min, depending on the deposition temperature. Furthermore, the excellent bottom coverage of -90% over $0.35\mu\textrm{m}$ contacts was obtained at $275^{\circ}C$. The addition of ammonia to TEMA T lowered the resistivity of as- deposited TiN film to ~ $800\mu\omega-cm$ from $3500~6000\mu\omega-cm$ and improved the stability of TiN film in air. Examination of the films by Auger electron spectroscopy(AES) showed that the oxygen and carbon contents decreased with the addition of ammonia. However, increasing ammonia flow rate decreased the bottom coverage of TiN films over $0.5\mu\textrm{m}$ contacts, probably due to the high sticking coefficient of intermediate species produced from the gas phase reaction of TEMA T and ammonia. Based on the byproduct gases detected by the quadrupole mass spectrometer (QMS), the transammination reaction was proposed to be responsible for TiN deposition. In addition, XPS analysis revealed that the carbon in the films made from TEMA T and ammonia was metallic carbon, suggesting that $\beta$-hydrogen activation process occurs competitively with the transammination reaction.
이관호,허재완,최명민,윤승용,양성주,홍해남,조성우 생화학분자생물학회 2005 Experimental and molecular medicine Vol.37 No.4
When treated with protopine and alkalized extracts of the tuber of Corydalis ternata for one year, significant decrease in glutamate level and increase in glutamate dehydrogenase (GDH) activity was observed in rat brains. The expression of GDH between the two groups remained unchanged as determined by Western and Northern blot analysis, suggesting a post-translational regulation of GDH activity in alkalized extracts treated rat brains. The stimulatory effects of alkalized extracts and pro - topine on the GDH activity was further examined in vitro with two types of human GDH isozymes, hGDH1 (house-keeping GDH) and hGDH2 (nerve-specific GDH). Alkalized extracts and protopine activated the human GDH isozymes up to 4.8-fold. hGDH2 (nervespecific GDH) was more sensitively affected by 1 mM ADP than hGDH1 (house-keeping GDH) on the activation by alkalized extracts. Studies with cassette mutagenesis at ADP-binding site showed that hGDH2 was more sensitively regulated by ADP than hGDH1 on the activation by Corydalis ternata. Our results suggest that prolonged exposure to Corydalis ternata may be one of the ways to regulate glutamate concentration in brain through the activation of GDH.
정경원(Gyung Won Jung),남정현(Jung Hyun Nam),이호정(Ho Jung Lee),홍해남(Hae Nam Hong),조영걸(Young Geol Jo) 대한바이러스학회 2000 Journal of Bacteriology and Virology Vol.30 No.1
The aim of this study was to investigate viral etiology in dilated cardiomyopathy (DCM) by polymerase chain reaction (PCR) or nested reverse transcription PCR (RT-PCR), and characterize the enteroviral RNA presented in the clinical specimens. Twenty-eight paraffin-embedded heart tissue samples were assayed to detect cytomegalovirus, herpes simplex virus type 1, type 2, parvovirus, adenovirus, and enterovirus (EV) with each specific primer. Of these 28 patients (mean age: 27, M: 24, F: 4), 26 were histologically diagnosed as DCM and 2 as myocardial infarction (MI). Nested RT-PCR detected enteroviral RNA in 7 (26.9%) of 26 patients with DCM, and none of patients with MI. And none of DNA viruses tested were detected from the samples. Amplified products were also genotyped by single-strand conformation polymorphism (SSCP). Three subtypes can be differentiated from 7 clinical specimens. Furthermore, direct sequence analysis was performed to determine whether genetic variation of EV is present in the explanted heart tissues from patients with DCM. Although most of the sequences among the wild isolates have the greatest similarity to those of coxsackievirus B3, there are specific regions of variable sequences (no 490 - no 510). The data suggest that enterovirus may be a major viral pathogen for the DCM in Korea and nucleotide sequence data indicate that coxsackievirus B3 may be a leading etiologic agent of DCM.
TDEAT TiN 증착률에 영향을 미치는 인자들에 대한 연구
최정환(J. H. Choi),이재갑(J. G. Lee),박상준(S. J. Park),김재호(J. H. Kim),홍해남(H. N. Hong),윤의중(E. J. Yun),김좌연(J. Y. Kim) 한국진공학회(ASCT) 1998 Applied Science and Convergence Technology Vol.7 No.3
낮은 평형압력을 가진 TDEAT 증착원을 이용하여 TiN 증착을 실시한 실험에서 TiN 증착률에 영향을 주는 인자들에 대하여 연구를 실시하였다. TiN 성장률은 bubbler 온도, 증착온도, 운반기체관의 conductance, 운반기체 종류에 따라 큰 영향을 받고 있었다. 또한 bubbler로 유입되는 운반기체관의 가열에 의하여도 증착률 증가가 적은 범위에서 이루어지고 있음이 관찰되었다. 이와함께 chamber 내로 유입되는 운반관을 90℃로부터 120℃로 가열한 실험에의하면 운반관 가열이 TiN 성장 증가를 일으키고 있으며, 온도에 대한 TiN 성장은 약 0.2 eV의 활성화에너지를 가진 Arrhenius 형태로 증가되고 있었다. We have studied the factors influencing the growth rate of TiN deposited from TDEAT using a bubbler. The growth rate of TiN was primarily dependent on the bubbler temperature, deposition temperature, gas delivery line conductance and carrier gases. In addition, the heating of the gas line through which carrier gas was delivered to the bubbler increased the growth rate slightly. Also heating of the delivery gas line between the bubbler and the chamber caused the increase of the growth rate of TiN, showing the Arrehenius behaviour with the activation energy of 0.2 eV.