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      • SCOPUSKCI등재

        Cu oxide의 형성과 H(hfac) 반응을 이용한 Cu 박막의 건식식각

        양희정,홍성진,조범석,이원희,이재갑,Yang, Hui-Jeong,Hong, Seong-Jin,Jo, Beom-Seok,Lee, Won-Hui,Lee, Jae-Gap 한국재료학회 2001 한국재료학회지 Vol.11 No.6

        O$_2$plasma와 H(hfac)을 이용한 Cu 박막의 건식 식각을 조사하였다. 휘발성이 큰 Cu(hfac)$_2$와 $H_2O$를 탈착시키기 위하여 $O_2$ Plasma를 이용한 Cu 박막의 산화와 생성된 Cu 산화막을 H(hfac)과의 반응으로 제거하는 공정으로 식각을 수행하였다. Cu 박막의 식각율은 50-700 /min의 범위를 보였으며, 기판온도, H(hfac)/O$_2$ 유량비, plasma power에 따라 변하였다. Cu 박막의 식각율은 기판온도 215$^{\circ}C$보다 높은 온도구간에서 RF power가 증가함에 따라 증가하였고, 산화 공정과 H (hfac)과의 반응이 균형을 이루는 최적의 H (hfac)/O$_2$ 유량비는 1:1임을 확인하였다. Ti mask를 사용한 Cu Patterning은 유량비 1 : 1, 기판온도 25$0^{\circ}C$에서 실시하였고, 30$^{\circ}$외 taper slope를 갖는 등방성 etching profile을 얻을 수 있었다. Taper angle을 갖는 Cu 건식 patterning은 고해상도의 대면적 thin film transistor liquid-crystal(TFT-LCDs)를 위래 필요한 것으로써 기판온도, RF power, 유량비를 조절한 one-step 공정으로부터 성공적으로 얻을 수 있었다. Dry etching of copper film using $O_2$ plasma and H(hfac) has been investigated. A one-step process consisting of copper film oxidation with an $O_2$ plasma and the removal of surface copper oxide by the reaction with H(hfac) to form volatile Cu(hfac)$_2$ and $H_2O$ was carried but. The etching rate of Cu in the range from 50 to 700 /min was obtained depending on the substrate temperature, the H(hfac)/O$_2$ flow rate ratio, and the plasma power. The copper film etch rate increased with increasing RF power at the temperatures higher than 215$^{\circ}C$. The optimum H(hfac)/O$_2$ flow rate ratio was 1:1, suggesting that the oxidation process and the reaction with H(hfac) should be in balance. Cu patterning using a Ti mask was performed at a flow rate ratio of 1:1 on 25$0^{\circ}C$\ulcorner and an isotropic etching profile with a taper slope of 30$^{\circ}$was obtained. Cu dry patterning with a tapered angle which is necessary for the advanced high resolution large area thin film transistor liquid-crystal displays was thus successfully obtained from one step process by manipulating the substrate temperature, RF power, and flow rate ratio.

      • KCI등재

        수계 Cu 나노입자 잉크에서 Poly(styrene-co-maleic acid) 접착 증진제가 잉크 레올로지와 인쇄패턴의 접착력에 미치는 영향

        조예진,서영희,정선호,최영민,김의덕,오석헌,류병환,Jo, Yejin,Seo, Yeong-Hui,Jeong, Sunho,Choi, Youngmin,Kim, Eui Duk,Oh, Seok Heon,Ryu, Beyong-Hwan 한국재료학회 2015 한국재료학회지 Vol.25 No.12

        For a decade, solution-processed functional materials and various printing technologies have attracted increasingly the significant interest in realizing low-cost flexible electronics. In this study, Cu nanoparticles are synthesized via the chemical reduction of Cu ions under inert atmosphere. To prevent interparticle agglomeration and surface oxidation, oleic acid is incorporated as a surface capping molecule and hydrazine is used as a reducing agent. To endow water-compatibility, the surface of synthesized Cu nanoparticles is modified by a mixture of carboxyl-terminated anionic polyelectrolyte and polyoxylethylene oleylamine ether. For reducing the surface tension and the evaporation rate of aqueous Cu nanoparticle inks, the solvent composition of Cu nanoparticle ink is designed as DI water:2-methoxy ethanol:glycerol:ethylene glycol = 50:20:5:25 wt%. The effects of poly(styrene-co-maleic acid) as an adhesion promoter(AP) on rheology of aqueous Cu nanoparticle inks and adhesion of Cu pattern printed on polyimid films are investigated. The 40 wt% aqueous Cu nanoparticle inks with 0.5 wt% of Poly(styrene-co-maleic acid) show the "Newtonian flow" and has a low viscosity under $10mPa{\cdots}S$, which is applicable to inkjet printing. The Cu patterns with a linewidth of $50{\sim}60{\mu}m$ are successfully fabricated. With the addition of Poly(styrene-co-maleic acid), the adhesion of printed Cu patterns on polyimid films is superior to those of patterns prepared from Poly(styrene-co-maleic acid)-free inks. The resistivities of Cu films are measured to be $10{\sim}15{\mu}{\Omega}{\cdot}cm$ at annealing temperature of $300^{\circ}C$.

      • KCI등재

        전기방사로 합성된 산화아연 나노섬유의 Glucose 감응특성

        최종명,변준혁,김상섭,Choi, Jong-Myoung,Byun, Joon-Hyuk,Kim, Sang Sub 한국재료학회 2015 한국재료학회지 Vol.25 No.12

        The development of glucose biosensors has been attracting much attention because of their importance in monitoring glucose in the human body; such sensors are used to diagnose diabetes and related human diseases. Thanks to the high selectivity, sensitivity to glucose detection, and relatively low-cost fabrication of enzyme-immobilized electrochemical glucose sensors, these devices are recognized as one of the most intensively investigated glucose sensor types. In this work, ZnO nanofibers were synthesized using an electrospinning method with polyvinyl alcohol zinc acetate as precursor material. Using the synthesized ZnO nanofibers, we fabricated glucose biosensors in which glucose oxidase was immobilized on the ZnO nanofibers. The sensors were used to detect a wide range of glucose from 10 to 700 M with a sensitivity of $10.01nA/cm^2-{\mu}M$, indicating that the ZnO nanofiber-based glucose sensor can be used for the detection of glucose in the human body. The control of nanograins in terms of the size and crystalline quality of the individual nanofibers is required for improving the glucose-sensing abilities of the nanofibers.

      • KCI등재

        BMP-2 Immoblized in BCP-Chitosan-Hyaluronic Acid Hybrid Scaffold for Bone Tissue Engineering

        Subrata Deb Nath,ABUEVA CELINE,Swapan Kumar Sarkar,이병택 한국재료학회 2014 한국재료학회지 Vol.24 No.12

        In this study, we fabricated a novel micro porous hybrid scaffold of biphasic calcium phosphate (BCP) and apolylectrolyte complex (PEC) of chitosan (CS) and hyaluronic acid (HA). The fabrication process included loading of CSHAPEC in a bare BCP scaffold followed by lypophilization. SEM observation and porosimetry revealed that the scaffold wasfull of micro and macro pores with total porosity of more than 60 % and pore size in the range of 20~200 μm. The compositescaffold was mechanically stronger than the bare BCP scaffold and was significantly stronger than the CS-HA PEC polymerscaffold. Bone morphogenetic growth factor (BMP-2) was immobilized in CS-HA PEC in order to integrate the osteoinductivepotentiality required for osteogenesis. The BCP frame, prepared by sponge replica, worked as a physical barrier that prolongedthe BMP-2 release significantly. The preliminary biocompatibility data show improved biological performance of the BMP-2immobilized hybrid scaffold in the presence of rabbit bone marrow stem cells (rBMSC).

      • KCI등재

        Mod. 440A 마르텐사이트계 스텐인리스강의 공식에 미치는 탄화물의 영향

        권순두,허성화,강창룡,Kwon, Soon-Doo,Heo, Sung-Hwa,Kang, Chang-Yong 한국재료학회 2015 한국재료학회지 Vol.25 No.12

        In this study, we investigated the effect of the residual carbides and tempered carbides precipitated by tempering treatment after quenching on the pitting corrosion of mod. 440A martensitic stainless steel. In quenched specimens and tempered specimens after quenching of mod. 440A martensitic stainless steel, the volume fraction of the residual carbides and total carbides decreased with the increase of the austenitizing temperature. Pitting resistance increased with the increase of austenitizing temperature. With the increase of the volume fraction of the residual and total carbides, the pitting resistance of mod. 440A martensitic stainless steel was decreased. The pitting resistance of mod. 0.5C-17Cr-0.5Ni 440A martensitic stainless steel had stronger affected by residual carbides than precipitated carbides produced by tempering.

      • KCI등재

        은이 코팅된 이산화티탄 나노입자 및 도전성 페이스트 제조 특성

        심상보,이미재,배동식,Sim, Sang-Bo,Lee, Mi Chae,Bae, Dong-Sik 한국재료학회 2015 한국재료학회지 Vol.25 No.12

        In this study, the properties of Ag-coated $TiO_2$ nanoparticles were observed, while varying the molar ratio of water and $Ag^+$ for the surfactant and $TiO_2$. According to the XRD results, each nanoparticle showed a distinctive diffraction pattern. The intensity of the respective peaks and the sizes of the nanoparticles increased in the order of AT1($R_1=5$)(33.3 nm), AT2($R_1=10$)(38.1 nm), AT3($R_1=20$)(45.7 nm), AT4($R_1=40$)(48.6 nm) as well as AT5($R_2=0.2$, $R_3=0.5$)(41.4 nm), AT6($R_2=0.3$, $R_3=1$)(45.1 nm), AT7($R_2=0.5$, $R_3=1.5$)(49.3 nm), AT8($R_2=0.7$, $R_3=2$)(57.2 nm), which values were consistent with the results of the UV-Vis. spectrum. The surface resistance of the conductive pastes fabricated using the prepared Ag-coated $TiO_2$ nanoparticles exhibited a range 7.0~9.0($274{\sim}328{\mu}{\Omega}/cm^2$) times that of pure silver paste(ATP)($52{\mu}{\Omega}/cm^2$).

      • KCI등재

        Gd<sub>3</sub>Ga<sub>5</sub>O<sub>12</sub> 기판위에 성장된 Y<sub>3</sub>Fe<sub>5</sub>O<sub>12</sub> 박막의 열처리 조건에 따른 강자성 공명 특성 연구

        이예림,박승영,정종율,Lee, Yelim,Phuoc, Cao Van,Park, Seung-Young,Jeong, Jong-Ryul 한국재료학회 2015 한국재료학회지 Vol.25 No.12

        In this study, we investigated the effect of annealing conditions on the ferromagnetic resonance(FMR) of yttrium iron garnet ($Y_3Fe_5O_{12}$, YIG) thin film prepared on gadolinium gallium garnet ($Gd_3Ga_5O_{12}$, GGG) substrate. The YIG thin films were grown by rf magnetron sputtering at room temperature and were annealed at various temperatures from 700 to $1000^{\circ}C$. FMR characteristics of the YIG thin films were investigated with a coplanar waveguide FMR measurement system in a frequency range from 5 to 20 GHz. X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS) were used to characterize the phase formation, crystal structure and composition of the YIG thin films. Field dependent magnetization curves at room temperature were obtained by using a vibrating sample magnetometer(VSM). The FMR measurements revealed that the resonance magnetic field was highly dependent on the annealing condition: the lowest FMR linewidth can be observed for the $800^{\circ}C$ annealed sample, which agrees with the VSM results. We also found that the Fe and O composition changes during the annealing process play important roles in the observed magnetic properties.

      • KCI등재

        염료감응형 태양전지의 비백금 상대전극을 위한 Co가 내재된 Graphitic 다공성 탄소나노섬유

        안혜란,강혜린,선효정,한지호,안효진,An, Hye Lan,Kang, Hye-Rhin,Sun, Hyo Jeong,Han, Ji Ho,Ahn, Hyo-Jin 한국재료학회 2015 한국재료학회지 Vol.25 No.12

        Co-embedded graphitic porous carbon nanofibers(Co-GPCNFs) are synthesized by using an electrospinning method. Their morphological, structural, electrochemical, and photovoltaic properties are investigated. To obtain the optimum condition of Co-GPCNFs for dye-sensitized solar cells(DSSCs), the amount of cobalt precursor in an electrospinning solutuion are controlled to be 0 wt%(conventional CNFs), 1 wt%(sample A), and 3 wt%(sample B). Among them, sample B exhibited a high degree of graphitization and porous structure compared to conventional CNFs and sample A, which result in the performance improvement of DSSCs. Therefore, sample B showed a high current density(JSC, $12.88mA/cm^2$) and excellent power conversion efficiency(PCE, 5.33 %) than those of conventional CNFs($12.00mA/cm^2$, 3.78 %). This result can be explained by combined effects of the increased contact area between the electrode and elecytolyte caused by improved porosity and the increased conductivity caused by the formation of a high degree of graphitization. Thus, the Co-GPCNFs may be used as a promising alternative of Pt-free counter electrode in DSSCs.

      • KCI등재

        DMAB첨가량에 따른 연성회로기판을 위한 무전해 Ni 도금박막에 관한 연구

        김형철,나사균,이연승 한국재료학회 2014 한국재료학회지 Vol.24 No.11

        We investigated the effects of DMAB (Borane dimethylamine complex, C2H10BN) in electroless Ni-B film withaddition of DMAB as reducing agent for electroless Ni plating. The electroless Ni-B films were formed by electroless platingof near neutral pH (pH 6.5 and pH 7) at 50 oC. The electroless plated Ni-B films were coated on screen printed Ag pattern/PET (polyethylene terephthalate). According to the increase of DMAB (from 0 to 1 mole), the deposition rate and the grainsize of electroless Ni-B film increased and the boron (B) content also increased. In crystallinity of electroless Ni-B films, anamorphization reaction was enhanced in the formation of Ni-B film with an increasing content of DMAB; the Ni-B film with< 1 B at.% had a weak fcc structure with a nano crystalline size, and the Ni-B films with > 5 B at.% had an amorphousstructure. In addition, the Ni-B film was selectively grown on the printed Ag paste layer without damage to the PET surface. From this result, we concluded that formation of electroless Ni-B film is possible by a neutral process (~green process) at alow temperature of 50 oC.

      • KCI등재

        Microstructural Evolution of Grade 91 Steel upon Heating at 760~1000 oC

        Yinsheng He,장정철,이재현,신기삼 한국재료학회 2015 한국재료학회지 Vol.25 No.11

        The microstructural evolution of Grade 91 tempered martensite ferritic steels heat treated at 760~1000 oC for two hours was investigated using scanning electron microscopy(SEM), energy disperse spectroscopy(EDS), electron backscattered diffraction (EBSD), and transmission electron microscopy(TEM); a microhardness tester was also employed, with a focus on the grain and precipitate evolution process as well as on the main hardening element. It was found that an evolution of tempered martensite to ferrite(760~850 oC), and to fresh martensite(900~1000 oC), occurred with the increase of temperature. Simultaneously, the parabolic evolution characteristics of the low angle grain boundary(LAGB) increased with the increase of the heating temperature(highest fraction of LAGB at 925 oC), indicating grain recovery upon intercritical heating. The main precipitate, M23C6, was found to be coarsened slightly at 760~850 oC; it then dissolved at 850~1000 oC. Besides this, M3C cementite was formed at 900~1000 oC. Finally, the experimental results show that the hardness of the steel depended largely on the matrix structure, rather than on the precipitates, with the fresh martensite showing the highest hardness value.

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