MEMS 공정을 위한 여러 종류의 산화막의 잔류응력 제거 공정

李相佑,김성운,李尙禹,김종팔,박상준,이상철,조동일 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1

Various oxide films are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). Large residual strain of these oxide films cause the wafer to bow, which can have detrimental effects on photolithography and other ensuing processes. This paper investigates the residual strain of tetraethoxysilane (TEOS), low temperature oxide (LTO), 7wt% and lOwt% phosphosilicate glass (PSG). Euler beams and a bent-beam strain sensor are used to measure residual strain. A polysilicon layer is used as a sacrificial layer, which is selectively etched away by XeF_(2). First, the residual strain of as-deposited films is measured, which is quite large. These films are annealed at 500℃, 600℃, 700℃ and 800℃ for 1 hour and residual strain is measured. Then, the residual strain after annealing at the conditions for depositing a 2μm thick polysilicon at 585℃ and 625℃ are also measured. Our results show that the 7wt% PSG is best suited as the sacrificial layer for 2μm thick polysilicon processes.

삽목 조건이 ‘설향’ 딸기의 묘소질 및 과실 수량에 미치는 영향

이상우,이용혁,홍점규,최성환,박수정,이상우 (사) 한국생물환경조절학회 2023 생물환경조절학회지 Vol.32 No.4

딸기 ‘설향’ 품종에 대해 삽목 육묘의 조건을 확립하고자 삽수 채취용 모주 선택, 삽수의 적정 엽수 및 삽목 시기를 구명하였다. 삽수 채취는 육묘장 모주와 과실 수확 후 재배 식물체에서 채취하였고, 삽수의 엽수는 0, 1, 2장 그리고 삽목 시기는 6 월 4일부터 7월 9일까지 1주일 간격으로 하였다. 육묘장 삽수와 재배 식물체 삽수의 최종 생존율은 각각 99.5%, 98.7%로높았으며, 유의적인 차이는 없었다. 근수는 육묘장 삽수에서3.1개 많았고, 관부와 잎의 생육은 차이가 없었다. 과실 수량은 육묘장 삽수와 재배 식물체 삽수에서 각각 419.2g, 428.4g 이었지만 유의적인 차이는 없었다. 삽수의 엽수별 생존율은엽수 1, 2장에서 각각 98.1%, 98.3%로 높았고, 0장은 25.3% 로 현저히 낮았다. 근수는 엽수 1, 2장에서 각각 26.0개, 26.3 개로 엽수 0장의 23.5개에 비해 많았다. 관부와 엽의 생육에서는 엽수에 따른 유의적인 차이가 없었다. 과실 수량은 엽수 1, 2장에서 각각 424.4g, 421.5g으로, 0장 396.7g 보다 많았다. 삽목 시기에 따른 삽목 후 생존율은 97.2% 이상으로 높았으며, 처리 간의 유의적인 차이는 없었다. 묘의 지하부와 지상부그리고 관부의 생육은 6월 4일과 11일 삽목에서 가장 좋았다. 과실 수량은 6월 4일, 6월 11일 삽목에서 각각 433.3g, 426.4g 으로 가장 많았으며, 삽목 시기가 가장 늦었던 7월 9일 삽목에서는 384.5g으로 적었다. 딸기 삽목용 삽수 재료는 육묘장 삽수와 과실 수확을 마친 재배 식물체 삽수 모두 가능하였고, 삽수의 적정 엽수는 최소 1장 이상 그리고 경남 지역의 삽목 시기는 6월 4일-11일이 적합하였다. This study was conducted to investigate optimal conditions for cutting propagation of the strawberry cultivar “Sulhyang” through the collection methods of cuttings (runners tips), leaf number of cuttings, and cutting time. Cuttings were collected from the mother plant in the nursery bed (MP) and plants after fruit harvest (HP); the leaf number of cuttings was 0, 1, and 2, and the cutting time was at one-week intervals from June 4 to July 9. The survival rates for MP and HP cuttings were notably high, reaching 99.5% and 98.7%, respectively, but no significant difference was found. The number of roots were higher in MP cuttings, and there was no significant difference in crown and leaf growth. The fruit yields were 419.2 and 428.4 g, for MP and HP cuttings, respectively. The survival rates according to leaf number of cuttings were 98.1% and 98.3% for 1 and 2 remaining leaves, respectively, and remarkably lower at 25.3% for no remaining leaves. The root numbers were 26.0 and 26.3 for 1 and 2 remaining leaves, respectively, compared with 23.5 for no remaining leaves, with no significant differences in crown and leaf growth. The fruit yields were 424.4 and 421.5 g for 1 and 2 remaining leaves, respectively, and 396.7 g for no remaining leaves. The survival rates according to cutting time was over 97.2% in all cutting time without any difference in each treatment. The root, shoot, and crown of the nursery plant before planting showed the best growth in the cuttings on June 4 and 11, resulting in the highest fruit yields of 433.3 and 426.4 g, respectively, with the lowest yields at 384.5 g for cutting time on July 9. Both MP and HP materials proved suitable for strawberry cuttings. The optimal leaf number for cuttings was at least 1, and the optimal cutting time in Gyeongnam area was evaluated as around June 4-11.

水平 bow-fin이 船體抵抗 및 運動性能에 미치는 影響 : 수평 bow-fin이 선체저항 및 운동성능에 미치는 영향

이상우 釜山大學校 工科大學 1985 工科大學 硏究 報告 Vol.29 No.-

21세기의 동아시아와 한국 그리고 제주도 : "북한관광실태연구" "동북아 해양질서와 국제법" "지방분권화 와 국제화 흐름 속에서 제주도 개발을 다시 생각한다"

김부찬,이상우,허향진 제주대학교 동아시아연구소 1990 東아시아硏究論叢 Vol.1 No.-

경관자원을 중심으로 한 농촌마을들 간의 네트워크 잠재력 분석 - 충청남도 당진군, 서산시, 태안군을 중심으로 -

이상우,전진형,김상범,김유진 한국농촌계획학회 2017 농촌계획 Vol.23 No.3

The purpose of this study is to reveal network potential among agricultural villages focused on landscape and amenity resources. For this study, we conducted Social Network Analysis (SNA) utilizing existing landscape resource database. As a result of the study, major landscape types shared among villages were found for each city. For example, agricultural and residential landscapes were identified as major types for Danjin city. Add to major landscape resources, in Dangjin city, Habduk village were recognized as a core. Seokmun, Daehoji, Woogang, and Sunseong villages were widely found as the sub core group. For Seosan city, Jigok, Palbong, and Kobuk villages were widely recognized as core group. Most of villages which indicated the highest degree centrality were superior in terms of the number of total landscape resources as well as landscape type diversity. These results can be useful for initial planning process when considering major theme for landscape-based network organization. Also, this information will be helpful for planning stage through the specification of the potential role of each village in overall network.

대장유리피판(Colon Free Flap)을 이용한 식도재건의 구제술

이상우,민경원 대한성형외과학회 2006 Archives of Plastic Surgery Vol.33 No.2

Besides gastric pull-up or colonic interposition, microvascular technique in esophageal reconstruction has been approved reliable methods. When free intestinal transfer is considered, jejunal free flap is commonly used. We treated the patient who had undergone reconstruction with a right colon interposition and suffered from inability of swallowing because of stricture and necrosis of the interposed flap. Although we have planned jejunal free transfer, we couldn't use jejunum due to adhesion by previous gastrojejunostomy and colon interposition. Salvage procedure with microvascualr free left colon flap was executed successfully. After 9 month follow-up, the patient was able to consume a normal diet.

지역자활센터의 사회적 가치 창출에 관한 연구

이상우 동의대학교 지방자치연구소 2020 공공정책연구 Vol.37 No.1

The purpose of this study is to analyze the social value of the community self-sufficiency agency (CSSA). A total of 148 cases (59.4%) from 249 cases of nationwide the CSSA were interviewed with the structured questionnaires. A key finding was that there was a difference between what the CSSA perceived as a social problem and what the CSSA actually practiced. Second, as a result of survey, more than 70% of respondents agreed that role of the CSSA should be focused on the vulnerable group and expanded more comprehensive social problems for local community including the vulnerable group. Third, the level of social value of the CSSA was on average 2.78 points out of 4 as moderate or slightly lower. Fourth, the level of organizational performance of the CSSA was on average 3.68 points out of the 5 points, exceeding the average level. Lastly, organizational performance (average 3.83 points) of the group with higher social value level was significantly higher than the group (average 3.53 points) that did not (p<.001). Based on these results, the study discussed social welfare implications for the CSSA.

전통으로서의 비극과 경험으로서의 비극 : 최인훈 희곡의 비극성(悲劇性)에 관한 고찰

이상우 안암어문학회 1993 어문논집 Vol.32 No.1

물리화학적 처리를 이용한 군부대 사격장 내 중금속 오염 토양의 정화

이상우,이우춘,이상환,김순오,Lee, Sang-Woo,Lee, Woo-Chun,Lee, Sang-Hwan,Kim, Soon-Oh 한국지하수토양환경학회 2021 지하수토양환경 Vol.26 No.5

This study evaluated the feasibility of combined use of physical separation and soil washing to remediate heavy metals (Pb and Cu) contaminated soil in a military shooting range. The soils were classified into two types based on the level of heavy metal concentrations: a higher contaminated soil (HCS) with Pb and Cu concentrations of 6,243 mg/kg and 407 mg/kg, respectively, and a lower contaminated soil (LCS) with their concentrations of 1,658 mg/kg and 232 mg/kg. Pb level in both soils exceeded the regulatory limit (700 mg/kg), and its concentration generally increased with decreasing soil particle size. However, in some cases, Pb concentrations increased with increasing soil particle size, presumably due to the presence of residues of bullets in the soil matrix. As a pretreatment step, a shaking table was used for physical separation of soil to remove bullet residues while fractionating the contaminated soils into different sizes. The most effective separation and fractionation were achieved at vibration velocity of 296 rpm/min, the table slope of 7.0°, and the separating water flow rate of 23 L/min. The efficiency of ensuing soil washing process for LCS was maximized by using 0.5% HCl with the soil:washing solution mixing ratio of 1:3 for 1 hr treatment. On the contrary, HCS was most effectively remediated by using 1.0% HCl with the same soil:solution mixing ratio for 3 hr. This work demonstrated that the combined use of physical separation and soil washing could be a viable option to remediate soils highly contaminated with heavy metals.

시․군․구 지역 사회복지협의회 네트워크 특성이 조직성과에 미치는 영향

이상우,전우일 한국지역사회복지학회 2019 한국지역사회복지학 Vol.0 No.70

This study aimed to analyze the effect of the network level on service outcomes among the Local Council on Social Welfare (LCSW). This study aimed to analyze the effect of the network level on organizational performance among the Local Council on Social Welfare (LCSW). A total 120 cases (79.5%) from 151 cases of nationwide LCSW were analyzed. A key finding was that the network level of the LCSW indicated relatively lower which was on average 2.57 points. Second, there were statistically difference in the level of organizational performance of the LCSW by the joint project experience, project duration and the network level. Finally, network factors had a significant impact on organizational performance of the LCSW by hierarchical multiple regression analysis. Based on these results, the study suggested implications for improving network and organizational performance of the LCSW. 본 연구의 목적은 시․군․구 지역 사회복지협의회의 네트워크 특성이 조직성과에 미치는 영향을 분석하는 것이다. 이를 위해 전국 151개 시․군․구 사회복지협의회의를 전수 조사하여 최종적으로 120개(79.5%) 응답기관을 분석하였다. 주요 연구결과는 다음과 같다. 첫째, 시․군․구 사회복지협의회의 네트워크 수준은 평균 2.57점의 비교적 낮은 수준으로 나타났다. 둘째, 시․군․구 사회복지협의회의 서비스 성과 수준은 타 기관과의 공동 사업 경험, 평균 사업수행 기간, 네트워크 수준에 따라 통계적으로 유의미한 차이가 나타났다. 셋째, 시․군․구 사회복지협의회 네트워크 특성이 조직성과에 미치는 영향을 확인하기 위해 위계적 회귀분석을 수행한 결과, 네트워크 특성이 시․군․구 사회복지협의회의 조직성과에 통계적으로 유의미한 영향을 미치는 것으로 나타났다. 연구결과를 바탕으로 본 연구에서는 시․군․구 사회복지협의회 네트워크 및 조직의 서비스 성과 향상을 위한 함의를 제공하였다.