Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 CURRENT APPLIED PHYSICS Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

NSIP와 BOOP의 고해상전산화단층촬영 소견과 비교

백상현,박재성,차장규,홍현숙,김대호,박성진,조준희,이혜경,최진수 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Purpose: BOOP and NSIP also share similar clinical features such as subacute flu-like illness, the finding of bronchoalveolar lavage, the result of pulmonary function test and more favourable outcome than usual interstitial pneumonia(UIP). The author try to compare the HRCT findings of NSIP with BOOP by pattern and distribution of diseases. Materials and Methods: HRCT findings of histopathologically proven NSIP(Group Ⅰ; 6, Group Ⅱ; 7, Group Ⅲ; 2) in 15 patients(5 male, 10 female, age range, 39-69 years; mean age, 53 years), BOOP in 15 patients(6 male, 9 female, age range, 26-76 years; mean age, 52 years) were reviewed retrospectively. Results: The common pattern of the two diseases was admixed consolidation, ground glass attenuation & reticular densities with/without architectural distortion(NSIP; 53.3%, BOOP; 46.7%). The main component of the pattern wan predominantly consolidation(NSIP; 46.7%, BOOP; 73.3%) and ground glass attenuation(NSIP; 40.0%, BOOP;20.0%). Architectural distotion was more provinent finding with NSIP(mild ; 3, moderate ; 4, severe; 2) compared with BOOP(mild; 7, moderate; 2, severe; 0). The predominant overall distribution was lower lung, peribronchovascular & peripheral lung field in both of the two entities(NSIP;73.3%, BOOP; 73.3%). Peribronchovascular involvement was more common with NSIP(100%) than BOOP(80%), whereas peripheral involvement was more common with BOOP(93.3%) than NSIP(80%). Conclusion: The HRCT findings of NSIP and BOOP were similar in pattern and distribution. But NIP manifested more frequently ground-glass attenuation, whereas BOOP showed more frequently consolidation. Architectural distortion was more severe with NSIP than BOOP. NSIP invoved more frequently peribronchovascular space and BOOP were more common in peripheral lung field.

40세 이하 관상동맥 질환자에서 장기적 임상 관찰

이승욱,정명호,박종철,박형욱,조상희,김원,김계훈,이상현,강경태,조장현,김남호,김건형,안영근,조정관,박종춘,강정채 全南大醫大 2001 전남의대학술지 Vol.37 No.2

지능형 자동차 주변 감시 시스템 설계 방안

장시웅(Si-woong Jang),박영식(Young-sik Park),성현용(Hyun-yong Sung),곽길봉(Gil-bong Kwak),김선남(Seon-nam Kim),김경진(Kyeoung-jin Kim) 한국정보기술학회 2009 Proceedings of KIIT Conference Vol.2009 No.-

본 연구는 차량 주변을 지능적으로 감시하는 자동차 주변 감시시스템에 관한 것으로, 자동차의 주행 및 주차 시 속도의 변화나 운전자의 요청에 의해 자동차 주변 지역에 관한 시야를 상황에 따라 달리하여 모니터링 함으로써 운전자가 안전한 주행 및 주차를 수행할 수 있게 하기 위한 것이다. 그러한 목적을 달성하기 위하여 본 연구에서는 차량의 주변부를 감시하기 위하여 차량의 외곽에 설치된 카메라의 각도가 지면으로부터 차량의 상부를 향하는 방향으로 변경될 수 있도록 제어하는 제어부, 카메라의 영상을 입력받아 차량주변의 영상을 생성하는 영상처리모듈, 영상처리모듈에서 생성된 영상을 출력하는 디스플레이를 포함하는 것을 특징으로 하는 지능형 자동차 주변 감시시스템을 제안한다. This study is on a vehicle surroundings monitoring system, which enables a driver to travel and park safely by monitoring vehicle surroundings, depending on the speed of vehicle and driver's control when traveling and parking. To achieve the aforementioned purpose, we propose an intelligent vehicle surroundings monitoring system, which consists of a control part, an image processing module and display module. Hence, the control module controls angle of camera to turn upward from the bottom to monitor vehicle surroundings. The image processing module merges the received images from cameras with the original vehicle image to display the vehicle’s surroundings in real time as if looking down from the sky.

개에서 이중 결찰법을 통한 동맥관 개존증의 완치 예

윤헌영,정순욱,박희명,박철,정만복,김준영,한현정,황민,노병국,박상혁,장하영,박정윤 한국임상수의학회 2004 한국임상수의학회지 Vol.21 No.1

A ten months old, female Yorkshire terrier weighing 2.88 kg referred to veterinary teaching hospital of college of veterinary medicine, Konkuk University because of syncope, cough and dyspnea. First hematological and serum chemical test revealed thrombocytopenia, mild anemia, and increase of concentration of ALP (195 U/L). On 57 days later, second hematological and serum chemical test revealed polycythemia, increase of concentration of ALP (211 U/L), and Tchol (387 mg/dl). Right atrium enlargement, main pulmonary artery bulge and cardiomegaly (VHS = 11.5) were observed in radiographic findings. Ultrasonographic images showed both right and left ventricular dilation and turbulent flow between the descending aorta and the main pulmonary artery in color Doppler imaging. ECG showed left ventricular enlargement, SA block, and electrical alternant. Thoracotomy was performed through left fourth intercostal incision under isoflurane anesthesia. Patent ductus arteriosus was double ligated with 1-0 silk. Cough and dyspnea disappeared on 5 days after operation. Turbulent flow was not found in color doppler imaging of ultrasonography on 10 days after operation. Ten months later after the operation, syncope could not exist any more.

한의진단명과 진단요건의 표준화 연구 II (표준화 실례) : 2차년도 연구결과 중간 보고

양기상,최선미,최승훈,안규석,박경모,박종현,김성우,신승호,정우열,전병훈,고현,김정범,신상우,김성훈,김동희,권영규,엄현섭,장혜옥 한국한의학연구원 1996 한국한의학연구원논문집 Vol.2 No.1

The diagnostic requirements were suggested and explained regarding the systems of differentiation of symptoms and signs in the second year study of standardization and unification of the terms and conditions used for diagnosis in oriental medicine. The systems were as follows; - differential diagnosis according to condition of body fluid, differentiation of syndromes according to the state of qi and blood, differential diagnosis according to relative excessiveness or deficiency of yin and yang(氣血陰陽津液辨證) - differentiation of diseases according to pathological changes of the viscera and their interrelation - analyzing and differentiating of febrile diseases in accordance with the theory of the six channels(傷寒辨證) The individual diagnosis pattern was arranged by the diagnostic requirements in the following order : another name(異名), notion of diagnosis pattern, index of differentiation of symptoms and signs(辨證指標), the main point of diagnosis, analysis of diagnosis pattern(證候分析), discrimination of diagnosis pattern(證候鑑別), a way of curing a diseases(治法), prescription(處方), herb in common use(常用藥物), diseases appearing the diagnosis pattern(常見疾病), documents(文獻調査). This study was carried out on the basis of the Chinese documents and references.

정신분열병과 Neuregulin 1 유전자의 연합연구

박동연,이유상,조은영,조승희,장용이,전현옥,장수연,윤세창,김종원,홍경수 大韓神經精神醫學會 2005 신경정신의학 Vol.44 No.3

Objectives : The authors recently found a suggestive evidence of linkage of chromosome 8p21-12 to schizophrenia in Korean multiplex families. Neuregutin 1 (NRGI) was identified in this locus as a positional and functional candidate gene for Schizo-phrenia, through several independent studies with European and Chinese populations. The purpose of this study is to determine whether NRGl is associated with schizophrenia in Korean population. Methods : Three SNPs (SNP8NRG221533, SNP8NRG241930, SNP8NRG243177) and two microsatellites markers (478B14-848,420M9-1395) located at the 5' end of NRGI were genotyped for 242 unrelated schizophrenia patients and the same num-ber of normal controls. Genetic association was tested by χ²-test (df=1). Not only for the whole patients group but also for asubgroup of patients with auditory hallucination. This subtype showed stronger linkage with chromosome 8p12 in the prior study of the authors with multiplex families. Results : G allele of SNP8NRG241930 was significantly in excess in the subgroup of patients with auditory hallucination compared to the control group (p=0.03, 0R=1.76). We also found that 3 SNPs haplotype TTC (p=0.04, 0R=0.58) and five markers haplotype TTC53 (p=0.01,0R=0.49) were associated with schziophrenia with a protective effect. Three SNPs haplotype CGT which is a part of the at-risk haplotype of the Icelandic schizophrenia families was found in excess in the patients group but no significant association was observed. Conclusion : NRGI might either play a mle in the predisposition to schizophrenia or be in linkage disequilibrium with a causal locus of this illness.

경구 진정요법하에 시행한 설소대 절제술

장용걸,박호원,이주현,서현우 大韓小兒齒科學會 2009 大韓小兒齒科學會誌 Vol.36 No.4

Tongue-tie is a congenital anomaly characterized by an abnormally short lingual frenum, which may restrict tongue tip mobility, In the neonate and infant, tongue-tie was said to cause difficult breast-feeding, In the older infant, toddler and young child, poor speech has been frequently listed because movement of tongue tip is limit ed. Also as a abnormal tongue position, various orthodontic problems, later mechanical and social manifestations could be developed. Treatment options such as observation, speech therapy, frenotomy and frenectomy have been suggested. The optimal timing for the surgery has not been determined, but early intervention may be appropriate for the children with significant tongue-tie who has the significant potential to speech difficulties and later social and mechanical problems. Sedation is an effective method for incapable of cooperative and the handicapped children, necessary to early intervention. We report three cases, using oral sedation for the frenectomy in young children with severe tongue-tie. After treatments, we could find out sufficient tongue movement and improved speech ability. 설유착증(tongue-tie)은 비정상적으로 짧은 설소대로 인하여 혀의 움직임이 제한되는 것을 의미한다. 영유아에서 심한 설유착증은 수유곤란을 야기하기도 하고, 증상이 지속적으로 존재할 때는 혀의 운동범위가 제한되어 발음문제를 야기할 수 있다. 또한 비정상적인 혀의 위치로 인해 여러 가지 교정적인 문제를 초래 할 뿐만 아니라, 기능적, 사회적 장애요소로 작용할 수도 있다. 설유착증의 치료방법으로는 관찰, 언어치료, 단순절개술 그리고 절제술 등이 있는데, 수술시기에 대한 논란은 있지만 정도가 심하여 장기간 언어장애가 지속되거나 교정적인 문제를 야기 할 것으로 판단되는 경우 조기수술이 권장되고 있다. 진정요법은 조기치료가 필요한 나이가 어리고 비협조적인 환아들이나, 신체적, 정신적 이유로 통상적 인 치과진료에 어려움이 있는 환아들에게 효과적으로 사용될 수 있는 방법이다. 본 증례는 설유착증으로 수술이 필요하나 협조전단계인 환아를 대상으로 경구투여를 이용한 진정요법으로 소대절제술을 시행하여 양호한 결과를 얻었기에 이를 보고하는 바이다.

방향족 화합물의 할로 메칠화 반응

박정서,김신종,백운필,이현주,송윤석,장정민 明知大學校 自然科學硏究所 1997 자연과학논문집 Vol.15 No.-

Biphenyl의 para position에 methylene group을 도입 시키는 방법으로 paraformaldehyde와 dimethylamine을 반응시켜 Mannich Base인 (1,1'-biphenyl-4,4'-dimethyl)-dimethli amine을 합성해 보았으나, 전혀 반응이 진행되지 않았다. 즉 , Biphenyl에 강한 activating group이 없으므로 Mannich Base을 사용한 방법은 효과적이 못된다. 따라서, 다른 방법으로 biphenyl에 bromomethylation을 진행 시켜서, 두 개의 methylene group을 도입시켰다. Bromomethylation은 다음과 같이 사용하는 시약 및 실험 방법 등을 고려하여 3가지 방법으로 시도 하였다. 1)1,3,5-trioxane + HBr in AcOH + paraformaldehyde 사용법, 2)Hbr in AcOH + paraformaldehyde 사용법, 3) NaBr + H₂SO₄+paraformaldehyde 사용법, 이상의 3가지 방법 중에서 NaBr+ H₂SO₄+ paraformaldehyde 사용법이 가장 좋은 결과를 얻었다. 이러한 system에서 반응을 진행시킨 결과 69% 의 높은 수율 (87%의 purity)로 4,4'-dibromomethylbiphenyl 합성에 성공할 수 있었다. The synthetic method for the induction of methylene group on the para position of arenes is of importance. Since the weak activation effect of phenyl group on the electrophilic substitution reaction, the induction of methylene group by way of Mannich base using paraformaldehyde and dimethylamine was unsuccessful. It was found that halomethylation of byphenyl is only the way for the preparation of di-p-methylenebiphenyl. Especially, bromomethylation was turn out to be more reliable synthetic method than chloromethylation. Herein, we developed 3 protocols for the synthesis of 4,4'-dibromomethylbiphenyl. In addition, the best result was obtained using NaBr + H₂SO₄paraformaldehyde protocol in 69% yield.

한국의 정신분열병 외래 환자의 직ㆍ간접비용

박종익,송선희,서동우,장현종,이종국,장안기,김윤,이철,홍진표 大韓神經精神醫學會 2000 신경정신의학 Vol.39 No.3

연구목적 : 정신분열병 외래 환자의 직접 비용과 간접 비용을 추산해 보고, 의료 자원의 적절한 운용과 효과적인 배분을 위한 보건 정책의 기초자료로 사용하고자 한다. 방 법 : 정신분열병 진단을 받은 289명의 환자를 대상으로 6개월간 외래를 방문하면서 사용한 의료비와 시간을 조사하여 직접 비용을 추산하였고, 이 기간 동안 소실된 생산성을 간접 비용으로 환산하였다. 만성질환인 관상동맥 질환을 앓고 있는 환자 82명을 대조군으로 하여 비용을 비교하였다. 결 과 : 정신분열병 환자의 실업률은 72.1%였으며, 직장을 가지고 있는 경우에도 단순노무직의 비율이 64.5%로 매우 높았다. 정신분열병의 직접 비용은 평균 81.5만원으로 관상동맥 질환의 평균 71.5 만원보다 상대적으로 많이 추산되었으나 유의하지는 않았다. 간접 비용은 평균 645.6만원, 258.9 만원으로 정신분열병군이 2.5배 정도 높았다. 결 론 : 정신분열병은 다른 만성질환에 비하여 상대적으로 매우 고비용이 요구되는 질환이며, 보다 체계적인 비용의 추산을 통하여 양질의 정신 보건 서비스를 제공할 수 있는 토대가 마련되어야 할 것이다. Objectives : We have aimed to estimate the direct and indirect costs of treating out-patients with schizophrenia in Korea, to use this fundamental data for the effective management and proper distribution of the medical resource. Method : To estimate the direct cost, we surveyed the medical cost and time of two hundred and eighty-nine out-patients with schizophrenia for six months. And the lost productivity as many months was converted into the indirect cost. Those of eighty-two coronary heart disease patients were also estimated as a comparison group. Results : An unemployement rate of schizophrenic patients was 72.1 percent. Moreover the ratio of the laborer in the sample was, even if employed, 64.5 percent. The mean direct cost of schizophrenic patients was, about 815,000 won, higher than that of coronary heart disease, 715,000 won however it was not statistically significant. The former was also estimated 2.5 times more than the latter for the indirect cost, or 6,456,000 won versus 2,589,000 won. Conclusion : Schizophrenia is a relatively costly illness compared to other chronic illness, so the systematic estimation of the cost is necessary to provide mental health service of high quality.