Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 CURRENT APPLIED PHYSICS Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

NSIP와 BOOP의 고해상전산화단층촬영 소견과 비교

백상현,박재성,차장규,홍현숙,김대호,박성진,조준희,이혜경,최진수 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Purpose: BOOP and NSIP also share similar clinical features such as subacute flu-like illness, the finding of bronchoalveolar lavage, the result of pulmonary function test and more favourable outcome than usual interstitial pneumonia(UIP). The author try to compare the HRCT findings of NSIP with BOOP by pattern and distribution of diseases. Materials and Methods: HRCT findings of histopathologically proven NSIP(Group Ⅰ; 6, Group Ⅱ; 7, Group Ⅲ; 2) in 15 patients(5 male, 10 female, age range, 39-69 years; mean age, 53 years), BOOP in 15 patients(6 male, 9 female, age range, 26-76 years; mean age, 52 years) were reviewed retrospectively. Results: The common pattern of the two diseases was admixed consolidation, ground glass attenuation & reticular densities with/without architectural distortion(NSIP; 53.3%, BOOP; 46.7%). The main component of the pattern wan predominantly consolidation(NSIP; 46.7%, BOOP; 73.3%) and ground glass attenuation(NSIP; 40.0%, BOOP;20.0%). Architectural distotion was more provinent finding with NSIP(mild ; 3, moderate ; 4, severe; 2) compared with BOOP(mild; 7, moderate; 2, severe; 0). The predominant overall distribution was lower lung, peribronchovascular & peripheral lung field in both of the two entities(NSIP;73.3%, BOOP; 73.3%). Peribronchovascular involvement was more common with NSIP(100%) than BOOP(80%), whereas peripheral involvement was more common with BOOP(93.3%) than NSIP(80%). Conclusion: The HRCT findings of NSIP and BOOP were similar in pattern and distribution. But NIP manifested more frequently ground-glass attenuation, whereas BOOP showed more frequently consolidation. Architectural distortion was more severe with NSIP than BOOP. NSIP invoved more frequently peribronchovascular space and BOOP were more common in peripheral lung field.

개에서 이중 결찰법을 통한 동맥관 개존증의 완치 예

윤헌영,정순욱,박희명,박철,정만복,김준영,한현정,황민,노병국,박상혁,장하영,박정윤 한국임상수의학회 2004 한국임상수의학회지 Vol.21 No.1

A ten months old, female Yorkshire terrier weighing 2.88 kg referred to veterinary teaching hospital of college of veterinary medicine, Konkuk University because of syncope, cough and dyspnea. First hematological and serum chemical test revealed thrombocytopenia, mild anemia, and increase of concentration of ALP (195 U/L). On 57 days later, second hematological and serum chemical test revealed polycythemia, increase of concentration of ALP (211 U/L), and Tchol (387 mg/dl). Right atrium enlargement, main pulmonary artery bulge and cardiomegaly (VHS = 11.5) were observed in radiographic findings. Ultrasonographic images showed both right and left ventricular dilation and turbulent flow between the descending aorta and the main pulmonary artery in color Doppler imaging. ECG showed left ventricular enlargement, SA block, and electrical alternant. Thoracotomy was performed through left fourth intercostal incision under isoflurane anesthesia. Patent ductus arteriosus was double ligated with 1-0 silk. Cough and dyspnea disappeared on 5 days after operation. Turbulent flow was not found in color doppler imaging of ultrasonography on 10 days after operation. Ten months later after the operation, syncope could not exist any more.

40세 이하 관상동맥 질환자에서 장기적 임상 관찰

이승욱,정명호,박종철,박형욱,조상희,김원,김계훈,이상현,강경태,조장현,김남호,김건형,안영근,조정관,박종춘,강정채 全南大醫大 2001 전남의대학술지 Vol.37 No.2

지능형 자동차 주변 감시 시스템 설계 방안

장시웅(Si-woong Jang),박영식(Young-sik Park),성현용(Hyun-yong Sung),곽길봉(Gil-bong Kwak),김선남(Seon-nam Kim),김경진(Kyeoung-jin Kim) 한국정보기술학회 2009 Proceedings of KIIT Conference Vol.2009 No.-

본 연구는 차량 주변을 지능적으로 감시하는 자동차 주변 감시시스템에 관한 것으로, 자동차의 주행 및 주차 시 속도의 변화나 운전자의 요청에 의해 자동차 주변 지역에 관한 시야를 상황에 따라 달리하여 모니터링 함으로써 운전자가 안전한 주행 및 주차를 수행할 수 있게 하기 위한 것이다. 그러한 목적을 달성하기 위하여 본 연구에서는 차량의 주변부를 감시하기 위하여 차량의 외곽에 설치된 카메라의 각도가 지면으로부터 차량의 상부를 향하는 방향으로 변경될 수 있도록 제어하는 제어부, 카메라의 영상을 입력받아 차량주변의 영상을 생성하는 영상처리모듈, 영상처리모듈에서 생성된 영상을 출력하는 디스플레이를 포함하는 것을 특징으로 하는 지능형 자동차 주변 감시시스템을 제안한다. This study is on a vehicle surroundings monitoring system, which enables a driver to travel and park safely by monitoring vehicle surroundings, depending on the speed of vehicle and driver's control when traveling and parking. To achieve the aforementioned purpose, we propose an intelligent vehicle surroundings monitoring system, which consists of a control part, an image processing module and display module. Hence, the control module controls angle of camera to turn upward from the bottom to monitor vehicle surroundings. The image processing module merges the received images from cameras with the original vehicle image to display the vehicle’s surroundings in real time as if looking down from the sky.

한의진단명과 진단요건의 표준화 연구 II (표준화 실례) : 2차년도 연구결과 중간 보고

양기상,최선미,최승훈,안규석,박경모,박종현,김성우,신승호,정우열,전병훈,고현,김정범,신상우,김성훈,김동희,권영규,엄현섭,장혜옥 한국한의학연구원 1996 한국한의학연구원논문집 Vol.2 No.1

The diagnostic requirements were suggested and explained regarding the systems of differentiation of symptoms and signs in the second year study of standardization and unification of the terms and conditions used for diagnosis in oriental medicine. The systems were as follows; - differential diagnosis according to condition of body fluid, differentiation of syndromes according to the state of qi and blood, differential diagnosis according to relative excessiveness or deficiency of yin and yang(氣血陰陽津液辨證) - differentiation of diseases according to pathological changes of the viscera and their interrelation - analyzing and differentiating of febrile diseases in accordance with the theory of the six channels(傷寒辨證) The individual diagnosis pattern was arranged by the diagnostic requirements in the following order : another name(異名), notion of diagnosis pattern, index of differentiation of symptoms and signs(辨證指標), the main point of diagnosis, analysis of diagnosis pattern(證候分析), discrimination of diagnosis pattern(證候鑑別), a way of curing a diseases(治法), prescription(處方), herb in common use(常用藥物), diseases appearing the diagnosis pattern(常見疾病), documents(文獻調査). This study was carried out on the basis of the Chinese documents and references.

항암요법을 받은 폐암환자의 삶의 질

장군자,박점희,류은경,김현미 慶北大學校 醫科大學 1996 慶北醫大誌 Vol.37 No.3

목적 : 항암요법을 받은 폐암환자의 삶의 질 정도를 파악하여 효과적인 암환자 간호를 하기 위한 기초자료를 제공하기 위해 본 연구를 시도하였다. 대상 및 방법 : 1995년 10월 1일부터 1996년 3월 31일까지 대구시내 소재 1개 대학교 병원에 입원하여 폐암을 진단받은 후 항암요법을 받은 환자 97명을 대상으로 하여 구조화된 질문지를 이용하여 자료를 수집하였으며, 자료의 분석은 SAS program을 이용하여 실수, 백분율, 최소값, 최대값, 평균, 표준편차, t-test 및 ANOVA, 단계적 중회귀분석을 하였고, 도구의 신뢰도는 Cronbach's α값을 구하였다. 결과 : 항암요법을 받은 폐암환자의 삶의 질 평균은 4.67이었고, 영역별로는 신체적 영역 3.90, 정신적 영역 4.23, 사회경제적 영역 5.65였다. 인구학적 특성에 따른 삶의 질은 연령과 교육수준에서, 질환특성에 따른 삶의 질은 신체적 활동정도에서 유의한 차이가 있었고, 항암제 종류와 항암치료횟수에 따른 삶의 질은 유의한 차이가 없었다. 결론 : 항암요법을 받은 폐암환자의 삶의 질 정도는 4.67로 다른 암진단을 받은 환자들에 비해 낮은 편으로 폐암에 대한 간호학적인 지식의 축적과 효과적인 간호중재에 대한 계속적인 연구, 항암요법이 폐암환자의 삶의 질에 미치는 영향에 대해서 더 많은 연구가 필요하다고 생각된다. This study was designed to investigate the quality of life in lung cancer patients with chemotherapy. Ninety seven patients with chemotherapy were sampled from one university hospital located in Taegu. The data were analyzed by percentage, mean, t-test. ANOVA. and stepwise multiple regression analysis, using the SAS program. The results were as follows; The mean score of quality of life was 4.67/10. The mean score of psychological dimension was 4.23/10. The mean score of socio-economic dimension was 5.65/10. The general characteristics related to quality of life were age. education level. A cancer characteristics related to quality of life was performance state. There was no statistically significant difference between chemoagents, chemotherapy frequency and quality of life.

경구 진정요법하에 시행한 설소대 절제술

장용걸,박호원,이주현,서현우 大韓小兒齒科學會 2009 大韓小兒齒科學會誌 Vol.36 No.4

Tongue-tie is a congenital anomaly characterized by an abnormally short lingual frenum, which may restrict tongue tip mobility, In the neonate and infant, tongue-tie was said to cause difficult breast-feeding, In the older infant, toddler and young child, poor speech has been frequently listed because movement of tongue tip is limit ed. Also as a abnormal tongue position, various orthodontic problems, later mechanical and social manifestations could be developed. Treatment options such as observation, speech therapy, frenotomy and frenectomy have been suggested. The optimal timing for the surgery has not been determined, but early intervention may be appropriate for the children with significant tongue-tie who has the significant potential to speech difficulties and later social and mechanical problems. Sedation is an effective method for incapable of cooperative and the handicapped children, necessary to early intervention. We report three cases, using oral sedation for the frenectomy in young children with severe tongue-tie. After treatments, we could find out sufficient tongue movement and improved speech ability. 설유착증(tongue-tie)은 비정상적으로 짧은 설소대로 인하여 혀의 움직임이 제한되는 것을 의미한다. 영유아에서 심한 설유착증은 수유곤란을 야기하기도 하고, 증상이 지속적으로 존재할 때는 혀의 운동범위가 제한되어 발음문제를 야기할 수 있다. 또한 비정상적인 혀의 위치로 인해 여러 가지 교정적인 문제를 초래 할 뿐만 아니라, 기능적, 사회적 장애요소로 작용할 수도 있다. 설유착증의 치료방법으로는 관찰, 언어치료, 단순절개술 그리고 절제술 등이 있는데, 수술시기에 대한 논란은 있지만 정도가 심하여 장기간 언어장애가 지속되거나 교정적인 문제를 야기 할 것으로 판단되는 경우 조기수술이 권장되고 있다. 진정요법은 조기치료가 필요한 나이가 어리고 비협조적인 환아들이나, 신체적, 정신적 이유로 통상적 인 치과진료에 어려움이 있는 환아들에게 효과적으로 사용될 수 있는 방법이다. 본 증례는 설유착증으로 수술이 필요하나 협조전단계인 환아를 대상으로 경구투여를 이용한 진정요법으로 소대절제술을 시행하여 양호한 결과를 얻었기에 이를 보고하는 바이다.

예·체능 전공 대학생들의 여가실태와 개선방향에 관한 연구

박장근,정수현,임란희 명지대학교 예체능연구소 2003 藝體能論集 Vol.14 No.-

The objective of this research which investigates the leisure activity form and a satisfactory degree of physical training and art university students and there is a place where it presents the improvement plan for this field In order to attain the objective of the research We executed self-admistration method question of the collection from 2001 May 21st until 2001 August 31st to 370 people physical traning subject 100 person, fine arts subject 100 person music 100 person baduk subject 70 person university students who are located in the H, K university in seoul and M, Y university in Kyonggi-Do It reveals from the research the following conclusion. 1. the leisure activity participation which it follows in personal quality and form quality analysis(1) views from result of the participation form the appreciation 27.3%, sports 26.8%, playing and amusement 26.8% it appeared the fact that it is the difference which considers form the sex the subject, the religion and the family economic leave. (2) According to the results of participation for one month, from the fourth to the sixth of attendance was 27.1 percent and from the third to the fourth of attendance was 24.1 percent. However, there were some differences in two items as major add religion. (3) From the result of the participation form due to the dwelling duration, from two hours to three hours was 35.7% percent. But there were some differences in gender as well. (4) From the result of the participation form due to the duration, over three years was 49.2 percent and there was no difference in this part. (5) From the result of the participation form due to the companion, a friend was 65.9%, other sex friend was 15.4% However, There were some differences in two items as major and grade. (6) From the result of the participation for due to the pocket money in one month, from 200,000 to 300,000 was 35.1 percent , from 100,000 to 200,000 was 23.0 percent, there were also some differences in two items as grade and the family economic level. (7) The result of the participation form which it follows in activity consuming expense is appeared that 10-30 thousand won below 48.1% and 10 thousand won 24.1%. It appeared the fact that there is the difference un the grad the family economic level. (8) The result of the participation form which it follows in hindrance activity, there are 39.7% economic power 30.8% It appeared the fact that there is the difference insufficient time in the subject the family economic level. 2. The evaluation scale regarding a leisure activity satisfactory analysis satisfactory degree is like that very at 5 scales of the Likert, (5 pieces), it is like that, (4 pieces), it is an usual, (3 pieces), it is not like that, (2 pieces), it is not like that very, (1 piece) with it evaluated, When it sees a leisure activity satisfactory moral investigation result, it appers Order broad way that stress solution average 3,87 (sd=.96) with to appear most highly ,friendship planning average 3.55 (sd=1.07) using of knowledge 3,29 (sd=.99) study ability improvement 3,09 (sd=1.10) physical strength increase 3.05(sd=1.23).

원광 뇌졸중 등록 자료를 통한 허혈성 뇌졸중의 임상 양상과 위험인자

박현영,장혁,박성욱,김요식,조광호 圓光大學校 醫科學硏究所 1999 圓光醫科學 Vol.15 No.2

Background: To investigate clinical features and risk factors of stroke patients who lived in Korean rural area, we analysis Wonkwang Stroke Registry and compared with other studies. Methods: We filled out Stroke Registry in the consecutive patients with acute ischemic stroke from march 1997 to February 1999. We analyzed demographic data, risk factors and subtypes of stroke. All patients were divied into 3 groups according to their age. Stroke subtype was classified into large artery atherosclerosis(LAA),small vessel occlusion(SVO), cardioembolism(CE), stroke of other determined etiology(SOE), and stroke of undetermined etiology(SUE) by TOAST(Trial of Org 10172 in Actue Stroke Treatment). Results: Five hundred nine patients were included in Wonkwang Stroke Registry from march 1997 to February 1999. Mean age was 65.47±0.48 years old. The ratio of males to females was 1 : 0.78. SVO was the most frequent subtype(49%) of ischemic stroke, and then followed by LAA(27.5%), CE(7%), SOE(8.1%), and SUE(8.4%). The internal carotid artery(ICA) territory was involved in 59.3% patients. Vertebrobasilar artery territory involvement was noted in 37.5%, and 3.2% of patients showed multiple artery territory involvement. All patients had risk factor of ischemic stroke except for 14 patients. Mean number of risk factors was 1.7/patient. Hypertension(62.1%) was the most frequent risk factor, and follwed by smoking(26.3%), diabetes mellitus(25.9%), and hyperlipidemia(25.55%). Conclusions: These results showed that the proportion of ischemic stroke subtype was not concordant with other studies. It may be caused by different mode of living and ethnic difference. This study may afford further information on the characteristics of Korean rural area stroke.