전기전도성을 가지는 매크로다공성 알루미노실리케이트-탄소 복합체 제조

최광민,조우석,김종영,정종열,백승우,이규형,Choi, Kwang Min,Cho, Woo-Seok,Kim, Jong-Young,Jung, Jong-Yeol,Baik, Seung-Woo,Lee, Kyu Hyoung 한국전기전자재료학회 2017 전기전자재료학회논문지 Vol.30 No.2

Recently, macroporous ceramic materials with high electrical conductivity and mechanical strength are urgently needed for semiconductor and display manufacturing devices. In this work, we obtained electro-conducting macroporous aluminosilicate ceramics having surface resistivity of 108~1,010 ohm by dispersing electro-conducting carbon in ceramic matrix. By addition of 0.5~3.0 wt% frit glass, chemical bonding between grains was strengthened, and flexural strength was enhanced up to 160 MPa as a result. We evaluated the characteristics of present ceramics as vacuum chuck module for liquid crystal display display manufacturing devices.

국내 펜트하우스(하늘채)의 공간 특성에 관한 연구

최광민(Choi, Kwang-Min),허범팔(Hur, Bum-Pall) 한국실내디자인학회 2011 한국실내디자인학회논문집 Vol.20 No.3

Many of penthouse apartments began to be built and distributed in Korea from the 2000s. However, we have a transformed definition from the international concept of penthouse. It seems that the penthouse apartments in Korea have a confined definition as a luxury and privileged house-we often find IT out from advertisements of newly built apartments. In this thesis, therefore, it needs to make a clear and substantial definition of penthouse. And on the base of this definition, this study is intended to analyze planes of penthouse apartments which are distributed recently. It is in order to find out positive aspects of penthouse apartments and to make practical application of this analysis. The process of this study for plane-planning is as follows. Firstly, it is investigated and analyzed that external factors that have an effect on plane-planning such as locations and types of penthouse apartments. Secondly, an interior of penthouse apartments are divided into a private, public and outward area. And properties of each area through this research show the way of division and arrangement of plane. Thirdly, methods of connection between spaces is analyzed on the base of results of research for the way of partition. Finally, specific characters of penthouse apartments planning is derived from synthesis of research. In conclusion, analysis of plane-planning of penthouse apartments is summarized as follows. The majority of penthouse apartments is arranged to small portions of households and on higher stories in apartment which is situated around Han River or public parks. These external factors influence the plane-planning in both the interior and exterior way. For the exterior planning in space, it becomes important to design bays as many as possible in contact with outside in order to satisfy demands for fine prospects. It is also important to plan extra places naturally such as a terrace in order to provide virtual grounding. In the interior planning, a large size of interior induces to develop space for linking between each area, such as corridors or extra rooms. This makes it possible that the private area is linked to each other, at the same time it has its own distinctiveness according to its usage.

돌돔(Oplegnathus fasciatus)에 대한 인위적인 해상풍력발전소 건설소음의 면역학적 영향

최광민 ( Kwang-min Choi ),주민수 ( Min-soo Joo ),강경식 ( Gyoungsik Kang ),우원식 ( Won-sik Woo ),김경호 ( Kyung Ho Kim ),손민영 ( Min-young Son ),손하정 ( Son Ha Jeong ),박찬일 ( Chan-il Park ) 한국어병학회 2021 한국어병학회지 Vol.34 No.2

Offshore wind power generation is an energy generation field that is rapidly developing owing to the increasing demand for clean energy. However, the physiological response of fish to the underwater noise generated during construction or operation of wind turbines is unclear. We confirmed the effects of sound pressures of 125, 135, 145, and 155 dB/μPa, including 140 dB/μPa (the standard sound pressure for noise damage recognition in South Korea), through serum analysis in rock bream (Oplegnathus fasciatus). High mortality induced by reduced immunity through artificial infection after stimulation was confirmed. These results suggest that rock bream is negatively affected by the noise generated during the construction of offshore wind power plants.

산림 걷기 운동이 스트레스와 피로도에 미치는 영향

최광민(Kwang Min Choi),신원섭(Won Sop Shin),연평식(Poung Sik Yeoun),조영민(Young Min Cho) 한국산림휴양복지학회 2011 한국산림휴양학회 학술발표회 자료집 Vol.2011 No.2

반도체 웨이퍼 제조공정 클린룸 구조, 공기조화 및 오염제어시스템

최광민 ( Kwang Min Choi ),이지은 ( Ji Eun Lee ),조귀영 ( Kwi Young Cho ),김관식 ( Kwan Sick Kim ),조수헌 ( Soo Hun Cho ) 한국산업보건학회 2015 한국산업보건학회지 Vol.25 No.2

Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers`` disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(≤ 1,000 #/ft³), temperature(23±0.5℃), humidity(45±5%), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(≤ 1 cm/s²), and differential pressure(atmospheric pressure + 1.0-2.5 mmH2O) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

반도체 메탈공정 및 1차 스크러버에서 생성되는 파우더 부산물의 물리화학적 특성분석

최광민 ( Kwang Min Choi ),정명구 ( Myung Koo Jung ),안희철 ( Hee Chul An ) 한국산업보건학회 2015 한국산업보건학회지 Vol.25 No.3

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide (WO3), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at 23.8 33.9 41.74 48.86 and 54.78 which correspond to the (200), (220), (222), (400), and (420) planes of cubic WO3. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers`` health.

풍력발전 건설 시 발생하는 수중소음이 조피볼락(Sebastes schlegelii)의 생리 및 면역요인에 미치는 영향

최광민(Kwang-Min CHOI),주민수(Min-Soo JOO),박찬일(Chan-Il PARK) 한국수산해양교육학회 2021 水産海洋敎育硏究 Vol.33 No.6

Wind power generation is a promising power generation facility field that is developing due to interest in environmental protection and technological development. However, disturbance to humans and animals has been reported due to noise generated during construction and operation. Therefore, we attempted to evaluate the immune and physiological effects of stress caused by a sound pressure range of 125–155 dB/μPa in Korean rockfish (Sebastes schlegelii), a major aquaculture fish species in South Korea, by reproducing the noise generated during the construction of a wind power plant. Significant effects were confirmed for molecular biological and serological indicators, and serious mortality occurred due to artificial infection. These results indicate a more fatal effect on animals in aquaculture farms, which cannot move or avoid undesirable habitats, unlike animals in natural conditions. Thus, it is important to develop measures for environmental noise management.

반도체 가공 작업환경에서 부산물로 발생되는 주요 금속산화물의 입자 크기, 형상, 결정구조에 따른 독성 고찰

최광민 ( Kwang-min Choi ) 한국산업보건학회 (구 한국산업위생학회) 2016 한국산업보건학회지 Vol.26 No.2

Objectives: The purpose of this study is to review size, shape, and crystal structure-dependent toxicity of major metal oxide particles such as silicon dioxide, tungsten trioxide, aluminum oxide, and titanium dioxide as byproducts generated in semiconductor fabrication facility. Methods: To review the toxicity of major metal oxide particles, we used various reported research and review papers. The papers were searched by using websites such as Google Scholar and Pub Med. Keyword search terms included ``SiO2(or WO3 or Al2O3 orTiO2) toxicity``, ``health effects SiO2(or WO3 or Al2O3 or TiO2). Additional papers were identified in references cited in thesearched papers. Results: In various cell lines and organs of human and animals, cytotoxicity, genotoxicity, hepatoxicity, fetotoxicity, neurotoxicity, and his to pathological changes were induced by silicon dioxide, tungsten trioxide, aluminium oxide, and titanium dioxide particles. Differences in toxicity were dependent on the cell lines, organs, doses, as well as the chemical composition, size, surface area, shape, and crystal structure of the particles. However, the doses used in the reported papers were higher than the possible exposure level in general work environment. Oxidative stress induced by the metal oxide particles plays a significant rolein the expression of toxicity. Conclusions: The results cannot guarantee human toxicity of the metal oxide particles, because there is still a lack of available information about health effects on humans. In addition, toxicological studies under the exposure conditions in the actual work environment are needed

산림 걷기 운동이 스트레스와 피로도에 미치는 영향

최광민(Kwang Min Choi),신원섭(Won Sop Shin),연평식(Poung Sik Yeoun),조영민(Young Min Cho) 한국산림휴양학회 2011 한국산림휴양학회지 Vol.15 No.1

본 연구는 산림치유를 활용한 산림 걷기 운동이 스트레스와 피로에 감소에 어떠한 영향을 미치는지 알아보기 위하여 수행되었다. 자료 수집은 20대의 건강한 남성 10명을 선정하여 실험집단 5명과 통제집단 5명을 나누어 수집되었다. 2010년 7월말부터 8월말까지 총 12회(주 3회)의 산림 걷기 운동이 실시되어 pretest-posttest control group design에 의해 자료가 수집되었다. 자료의 분석결과 산림 걷기 운동에 참여한 실험집단은 큰 폭으로 스트레스와 피로도가 감소하였다. 반면 실험에 참여하지 않은 통제집단은 이러한 차이가 발견되지 않았다. this study performed to investigate of forest walking exercise of forest on human' stress and fatigue. total 12 experiments were performed to 10 healthy man, from july to august of 2010. the results of data analyses indicated that there were improvements in their stress and fatigue levels after their participation in the experiments.

반도체 작업환경 내 부산물로 생성되는 실리카 입자의 크기, 형상 및 결정 구조

최광민 ( Kwang Min Choi ),여진희 ( Jin Hee Yeo ),정명구 ( Myung Koo Jung ),김관식 ( Kwan Sick Kim ),조수헌 ( Soo Hun Cho ) 한국산업보건학회 2015 한국산업보건학회지 Vol.25 No.1

Objectives: This study aimed to elucidate the physicochemical properties of silica powder and airborne particles as by-products generated from fabrication processes to reduce unknown risk factors in the semiconductor manufacturing work environment. Materials and Methods: Sampling was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. Thirty-two powder and airborne by-product samples, diffusion(10), chemical vapor deposition(10), chemical mechanical polishing(5), clean(5), etch process(2), were collected from inner chamber parts from process and 1st scrubber equipment during maintenance and process operation. The chemical composition, size, shape, and crystal structure of silica by-product particles were determined by using scanning electron microscopy and transmission electron microscopy techniques equipped with energy dispersive spectroscopy, and x-ray diffractometry. Results: All powder and airborne particle samples were composed of oxygen(O) and silicon(Si), which means silica particle. The by-product particles were nearly spherical SiO2 and the particle size ranged 25 nm to 50 μm, and most of the particles were usually agglomerated within a particle size range from approximately 25 nm to 500 nm. In addition, the crystal structure of the silica powder particles was found to be an amorphous silica. Conclusions: The silica by-product particles generated from the semiconductor manufacturing processes are amorphous SiO2, which is considered a less toxic form. These results should provide useful information for alternative strategies to improve the work environment and workers‘ health.