삼차원 집적화를 위한 초박막 실리콘 웨이퍼 연삭 공정이 웨이퍼 표면에 미치는 영향

최미경,김은경,Choi, Mi-Kyeung,Kim, Eun-Kyung 한국마이크로전자및패키징학회 2008 마이크로전자 및 패키징학회지 Vol.15 No.2

전자산업의 소형화와 경량화 추세에 맞추어 최근 집적 칩(IC)이나 패키지를 적층시키는 삼차원 집적화(3D integration) 기술 개발은 차세대 핵심기술로 중요시되고 있다. 본 연구에서는 삼차원 집적화 공정 기술 중 하나인 초박막 실리콘 웨이퍼 연삭(grinding)공정이 웨이퍼 표면에 미치는 영향에 대해서 조사하였다. 실리콘 웨이퍼를 약 $30{\mu}m$과 $50{\mu}m$ 두께까지 연삭한 후, 미세연삭(fine grinding) 단계까지 처리된 시편을 건식 연마(dry polishing) 또는 습식 애칭(wet etching)으로 표면 처리된 시편들과 비교 분석하였다. 박막 웨이퍼 두께는 전계방시형 주사전자현미경과 적외선 분광기로 측정하였고, 표면 특성 분석을 위해선 표면주도(roughness), 표면손상(damage), 경도를 원자현미경, 투과정자현미경 그리고 나노인덴터(nano-indentor)를 이용하여 측정하였다. 표면 처리된 시편의 특성이 표면 처리되지 않은 시편보다 표면주도와 표면손상 등에서 현저히 우수함을 확인 할 수 있었으나, 경도의 경우 표면 처리의 유무에 관계없이 기존의 벌크(bulk)실리콘 웨이퍼와 오차범위 내에서 동일한 것으로 보였다. 3D integration technology has been a major focus of the next generation of IC industries. In this study Si wafer ultra-thinning has been investigated especially for the effect of ultra-thinning on the silicon surface. Wafers were grinded down to $30{\mu}m\;or\;50{\mu}m$ thickness and then grinded only samples were compared with surface treated samples in terms of surface roughness, surface damages, and hardness. Dry polishing or wet etching treatment has been applied as a surface treatment. Surface treated samples definitely showed much less surface damages and better roughness. However, ultra-thinned Si samples have the almost same hardness as a bulk Si wafer.

20세 이상 일부 성인남녀의 망간 섭취상태 평가

최미경,김은영,Choi, Mi-Kyeong,Kim, Eun-Young 한국식품영양과학회 2007 한국식품영양과학회지 Vol.36 No.4

본 연구에서는 우리나라 정상 성인의 일상적인 망간 섭취량과 주요 급원식품을 제시하여 망간의 영양섭취기준 마련을 위한 기초 자료로 활용하고자 20세 이상 성인남녀 354명을 대상으로 신체 계측과 24시간 회상법에 의한 식사섭취 조사를 실시한 후 망간의 섭취상태를 분석하였다. 조사대상자의 평균 연령은 남자 54.6세, 여자 53.8세이었으며, 신장, 체중 및 체질량지수는 남자 165.7cm, 67.2kg, $24.5kg/m^2$, 여자 153.7cm, 59.1kg, $24.9kg/m^2$로 남자대상자의 신장과 체중이 여자대상자보다 유의하게 높았으나(p<0.001, p<0.001) 체질량지수는 유의한 차이가 없었다. 1일 평균 에너지 섭취 량은 남자 1740.9kcal, 여자 1432.6kcal이었으며, 망간섭취량은 남녀 각각 3.7mg과 3.2mg으로 남자대상자가 유의하게 높았다(p<0.001, p<0.01). 그러나 섭취 에너지 1000kcal당 망간 섭취량으로 산출한 망간 밀도는 남녀 각각 2.2mg/1000kcal와 2.3mg/1000kcal로 유의한 차이가 없었다. 남자대상자의 총 식품섭취량은 1219.1g으로 여자대상자의 1071.3g보다 유의하게 높았다(p<0.05). 전체대상자의 식품군별 망간의 섭취량과 섭취 에너지 1000kcal당 섭취량은 곡류(1.9mg, 1.3mg/1000kcal), 채소류(0.5mg, 0.3mg/1000kcal), 두류(0.4mg, 0.2mg/1000 kcal), 조미료류(0.2mg, 0.1mg/1000kcal) 순위로 높은 섭취를 보였다. 1일 망간 섭취량에 기여한 20순위 식품은 쌀, 대두, 수수, 김치 두부, 밀가루, 고춧가루, 팥, 차조, 된장, 감자, 라면, 풋고추, 국수, 메밀 냉면, 콩나물, 김, 수박, 들깨, 간장이었으며, 20가지 식품을 통해 전체 망간 섭취량의 74%를 섭취하였다. 이상의 연구결과를 종합할 때, 전체대상자의 1일 망간 섭취량은 3.4mg(2.2mg/ 1000kcal)로 충분섭취량 수준이었으며 쌀, 대두, 수수, 김치, 두부와 같은 곡류, 두류, 채소류가 망간의 주요 급원인 것으로 나타났다. This study was peformed to estimate manganese intake and the major food source of manganese in Korean adults. The 354 subjects aged over 20 years were measured anthropometrics and dietary intake using 24-hour recall method. Daily intake and the major food sources of manganese were calculated using manganese database of food composition tables in Korea, USA and Japan. The average age, height, weight and BMI were 54.6years, 165.7cm, 67.2kg and $24.5kg/m^2$ for men and 53.8 years, 153.7cm, 59.1kg and $24.9kg/m^2$ for women, respectively. The daily energy and manganese intake of men were significantly higher than those of women (1740.9 kcal vs. 1432.6 kcal; p<0.001, 3.7mg vs. 3.2mg; p<0.01). However, daily manganese intake per 1000kcal between men and women was not significantly different (2.2mg/1000kcal vs. 2.3mg/1000kcal). Daily manganese intakes from each food group were 1.9mg from cereals, 0.5mg from vegetables, 0.4mg from pulses and 0.2mg from seasonings. The 20 major food sources of dietary manganese were rice, soybean, sorghum, Kimchi, tobu, wheat flour, red pepper powder, small red bean, glutinous millet, soybean paste, potato, Ramyeon, green pepper, noodle, buckwheat Naengmyeon, soybean sprout, laver, watermelon, perilla seeds powder and soy sauce. Manganese intake from these 20 foods was 74.0% of the total dietary manganese intake. In conclusion, daily manganese intake of the subject was 3.4mg (2.2mg/1000 kcal) and met adequate intake of manganese. The mai or food sources of manganese were cereals, pulses, and vegetables such as rice, soybean, sorghum, Kimchi and tobu.

골관절염 환자의 타이치 자조관리 프로그램 효과

최미경,원동희,김연주,최미옥,임난영,송정희,Choi, Mi-Kyung,Won, Dong-Hee,Kim, Yeoun-Ju,Choi, Mi-Ok,Lim, Nan-Young,Song, Jung-Hee 대한근관절건강학회 2007 근관절건강학회지 Vol.14 No.1

Purpose: The purpose of this study was to examine the effects of Tai-Chi self-help program for osteoarthritis patients. Method: This study was performed from 1th August. to 30th Dec. 2006. 27 osteoarthritis patients were participated in the Tai-Chi self-help program. Outcome measures were pain, flexibility and balance, self-efficacy. Data were analysed by SPSS WIN 12.0. Result: There were statistically significant in balance and knee flexibility. but no significant differences were found in pain and self-efficacy. Conclusion: In conclusion, Tai-Chi self-help program was proved to be an effective nursing intervention to increase the balance and flexibility. Also 12 forms of Tai-Chi self-help program has been found safely applicable to the patients with osteoarthritis for 8 weeks. A rigorous research design should be further considered to identify the long-term benefit for this population.

충북지역 일부 고등학생의 식사속도와 청소년 영양지수 점수와의 관련성

최미경,김인영,김옥선,배윤정,Choi, Mi-Kyeong,Kim, In Young,Kim, Ok Sun,Bae, Yun-Jung 한국식품영양학회 2021 韓國食品營養學會誌 Vol.34 No.2

This study aimed to investigate the relationship between eating speed and nutritional status among Korean high-school students using Nutrition Quotient for Korean Adolescents (NQ-A). In this study, a questionnaire survey was conducted in 453 high-school students (227 boys and 226 girls) from September 2019 to October 2019 in Chungbuk area. Based on the self-reported speed of eating data, subjects were classified into a fast group (n=180), a medium group (n=184), and a slow group (n=89). NQ-A scores for each group were measured in each speed group. In the environment section, girls showed a significant difference in usage time of electronic devices, such as TVs and smartphones: the fast group spent significantly more time than the medium group (p=0.035). In the practice section, among boys, the slow group had significantly higher scores for washing hands before eating than the medium and the fast groups (p=0.022). This study suggested that eating speed of high school students is associated with health-related environment factor and practice factor of NQ-A, such as time spent on smart devices or washing hands before eating. The study results can provide baseline data for nutrition education on health management of high school students.

한국 성인의 김치이용음식 섭취 현황: 2015년 국민건강영양조사 자료 이용

최미경,Choi, Mi-Kyung 한국식품조리과학회 2018 한국식품조리과학회지 Vol.34 No.3

Purpose: This study analyzed the types and consumption status of foods containing kimchi by Korean adults using the 2015 Korea National Health and Nutrition Examination Survey (KNHANES) to provide basic data for the development of recipes using kimchi. Methods: The food intake survey (24-hour recall survey) data from the 2015 KNHANES were used and 83 kinds of foods cooked with kimchi consumed by adults aged 19-64 years were selected. A total of 1,014 foods cooked with kimchi were used for the analysis and complex sample ${\chi}^2$-tests of independence were conducted using SPSS 23.0 for windows. Results: The foods containing kimchi revealed a high frequency of stews & hot pots (55.6%), stir fried dishes (15.9%), rice & porridge dishes (9.7%), and soups (8.5%). The ${\chi}^2$-test of independence using a complex sample module showed that the consumption ratios of each food differed significantly according to gender (p<0.05), age (p<0.001), meal place (p<0.001), and meal time (p<0.001). As a result of the analysis of additional ingredients, the frequency of using pork (19.6%), tuna (7.7%), bean sprouts (3.1%), and other seafood, such as saury and mackerel (2.1%), were high. Conclusion: Recipes need to be developed for foods containing kimchi appropriate for the subjects and situations considering the general characteristics, meal places, and meal times. The development of recipe using pork could be more diversified because pork is the preferred ingredient in various foods containing kimchi, and recipe development using various ingredients found in this study should be attempted.

탄천 하도사주의 지형 형성과정과 식생분포 연구

최미경,이삼희,최정권,Choi, Mi-Kyoung,Lee, Sam-Hee,Choi, Jung-Kwon 한국조경학회 2010 韓國造景學會誌 Vol.37 No.6

본 연구는 하천 경관요소 중에서 비교적 단시간에 걸쳐 변화하는 사주 지형과 식생 분포의 역동적 형성과정을 밝히기 위해 수행되었으며, 연구 대상 하천은 2002년 이후 생태계보전지역으로 관리되고 있는 탄천 하류부 구간이다. 이를 위해서 사주지형의 변화는 항공사진과 경관사진을 통해 그 형성과정을 파악하고 현재 사주 지형 위에 형성된 식생의 분포를 현장조사를 통해 분석하였다. 분석한 연구 결과는 다음과 같다. 첫째, 1980년대 후반에 직강화 되었던 하도 내에서 1990년대에 들어 사주의 발달이 현저하여 다양한 형태의 사주가 형성되었고 이는 지속적으로 변화하였다. 초기에 사주가 형성되고 시간이 경과함에 따라, 하도 내 흐름 특성에 따라 사주의 면적과 높이가 변하였다. 둘째, 식생의 분포에 있어서는 물과 접촉 빈도가 높은 하안부는 교란의 정도가 심하기 때문에 무식생 상태이거나, 간헐적인 식생이 분포하여 피도가 낮게 나타났으며, 고수부지 쪽으로 형성된 사주에는 목본류나 정수식물군락이 활착되면서 식생 피도가 높게 나타나 안정식생역을 형성하였다. 셋째, 사주와 식생형성과정의 관계는 사주의 형태와 식생의 안정성 여부에 따라 저수로변 사주, 불안정 식생 저수로변사주, 안정식생 하중주 그리고 불안정식생 하중주 4가지 유형으로 나타났다. 본 연구를 통해 밝힌 하도 내 사주와 하천식생의 형성과정에 있어서의 상호관계는 모래하상의 하천부지에서 식물종이나 식재위치 선정에 유용할 것이나, 하천생태계 복원을 위한 실행사업의 식재 지침으로 활용되기 위해서는 다양한 특성을 지닌 하천에 대한 보다 폭 넓은 사례연구가 뒷받침되어야 할 것이다. This study identified the dynamic process of sandbar and vegetation distribution of the sandbar on the Tan-cheon River. The study area is located in the lower reaches of the Tan-cheon River that has been managed as an Ecosystem Reserve Area since 2002. For the study, the geomorphological process was analyzed through mapping analysis using a satellite image followed by analysis of the vegetation distribution through an on-site survey. The major findings were as follows : First, In the fluvial geomorphic process, various kinds of sandbars were developed in 1990s, the morphologic characteristics changing continuously. Second, In the distribution of vegetation on the sandbar, the sandbar shore was covered with bare sand substrate or intermittent annual vegetation because of the periodic fluctuation of the water-level due to intensive disturbances. Third, In the relationship between the sandbar formation and vegetation, four types of sandbars were classified: channel-shore stable bar, channel-shore unstable bar, mid-channel stable bar and mid-channel unstable bar, according to the fluvial disturbance & vegetation process. The study verifies that the vegetation distribution is reciprocally related to the geomorphological process. Accordingly, it is meaningful in the selection of plant species and the planting area of the sand bar. However, it is limited to the planting guidelines on river restoration projects. More diverse on-site experimental studies should be conducted.

한국인 상용 식품 중 망간 함량 분석

최미경,김은영,Choi, Mi-Kyeong,Kim, Eun-Young 한국영양학회 2007 Journal of Nutrition and Health Vol.40 No.8

Using ICP-AES, we analyzed manganese content in 366 foods consumed frequently by Koreans. For the analysis, it was included a total of 366 foods such as 51 kinds of grains, 7 kinds of potatoes and starches, 7 kinds of sugars and sweeteners, 12 kinds of legumes, 11 kinds of nuts and seeds, 68 kinds of vegetables, 7 kinds of mushrooms, 33 kinds of fruits, 13 kinds of meats, 4 kinds of eggs, 48 kinds of fishes and shellfishes, 7 kinds of seaweeds, 16 kinds of milks, 8 kinds of oils and fats, 27 kinds of beverages, 34 kinds of seasonings, 13 kinds of processed foods and others. Among the grains, starches and sugars, manganese content of rice was 0.745 mg/100g. As for legumes, the content of manganese in soybean milk was 0.033 mg/100g and in black beans was 4.075 mg/100g. In nuts and seeds, the content of manganese in gingko nuts was 0.268 mg/100g while that in pine nuts was 8.872 mg/100g. Among the vegetables, manganese contents were 0.061 mg/100g in cherry tomato and 14.017 mg/100g in ginger. In mushrooms, the highest manganese content was displayed in ear mushroom at 10.382 mg/100g. Dried jujube and shrimp were found to be the fruits and fishes with high manganese contents at 2.985 mg/100g and 3.512 mg/100g, respectively. Among dairy foods, oils and beverages, manganese content was the highest in instant coffee powder at 2.577 mg/100g. Seasonings and processed foods posted 0.010 mg/100g in Sagolgomtang, instant soup and 23.846 mg/100g in pepper. In a furture, more various food for manganese content needs to be analyzed and a reliable food database should be compiled from the findings of researches in order to estimate manganese consumption accurately.

웨이퍼 레벨 3D 패키징을 위한 초박막 Si 웨이퍼 공정기술

최미경,김은경,Choi, Mi-Kyeung,Kim, Eun-Kyung 대한용접접합학회 2008 대한용접·접합학회지 Vol.26 No.1

본 보고에서는 3D 패키징에서 중요한 공정의 하나인 초박막 Si 웨이퍼 Thinning 공정에 대해 간략히 소개하였고, 표면처리에 대해 살펴보았다. 기계적, 특히 전기적 Damage를 줄이기 위한 최적화된 Thinning 공정과 신뢰성 분석 및 평가, 그리고 초박막 웨이퍼 핸들링 방법 등이 시스템적으로 개발되는 것이 중요하다. 칩 소형화 추세와 더불어 3D 패키징 기술이 중요시되는 산업 요구에 맞추어 향후 웨이퍼 Thinning 기술을 포함한 3D 기술의 핵심 공정기술들은 그 중요성이 증대할 것이고, 이에 대한 활발한 연구가 진행되리라 기대한다.

연령별 일부 한국인의 Glycemic Load와 혈중 지질과의 관련성

최미경,배윤정,한은경,승정자,Choi Mi-Kyeong,Bae Yun-Jung,Han Eun-Kyung,Sung Chung-Ja 동아시아식생활학회 2006 동아시아식생활학회지 Vol.16 No.1

The purpose of this study was to investigate the correlation between glycemic load and blood lipid profiles in some Korean according to age: The subjects were divided into four groups based on the following age ranges; $10\sim19$ age group(n=260), $20\sim49$ age group(n=129), $50\sim64$ age group(n=135), over 65 age group(n=87). They were measured for the anthropometric measurements, dietary intakes, glycemic load and blood analysis. The average ages of the $10\sim19$ age group, $20\sim49$ age group, $50\sim64$ age group and over 65 age group were 10.9 yrs, 40.8 yrs, 57.1 yrs and 70.8 yrs, respectively. The food intakes were increased according to age in the younger two groups but decreased in the elder two groups. The energy and carbohydrate intakes were the highest in the $10\sim19$ age group. The averages of serum HDL-cholesterol levels of the $20\sim49,\;50\sim64$ and over 65 age group were significantly lower than that of the $10\sim19$ age group. The food intake of the $10\sim19$ age group was positively correlated to the glycemic load(p<0.001). The food and energy intakes of the $20\sim49,\;50\sim64$ and over 65 age group were positively correlated to the glycemic load. And the serum triglyceride and AI levels of the over 65 age group were positively correlated to the glycemic load(p<0.001, p<0.05). These results suggest the need for further research into the relation between glycemic load and blood lipids in order to ensure proper carbohydrate intakes.

베이커리 카페 고객의 이용 실태 및 성별, 연령에 따른 차이 조사 : 서울 지역을 중심으로

최미경,정재찬,Choi Mi-Kyung,Jung Jae-Chan 동아시아식생활학회 2006 동아시아식생활학회지 Vol.16 No.2

The purposes of this study were to examine bakery cafe use and to identify differences according to gender and age. The questionnaires developed for this study were distributed to 320 males and females aged 20 and over in Seoul. A total of 285 questionnaires were used for analysis(89.1%) and the statistical analyses were completed using SPSS Win (12.0) for descriptive analysis and $x^2-test$. Over 80% of customers used bakery cafes once a month or less, and female customers visited more often than males. The main reasons for using bakery cafe were to chat and then, to buy and eat bakery products. There was a significant difference by age. Average time consumed at a bakery cafe was usually under 1 hour and 30 minutes. Female and younger customers stayed longer than male and older customers, respectively. The majority of customers(85.6%) were accompanied by 2 or less guests and there was no significant difference between the groups. The expenses per person per visit were usually $3,000won{\sim}10,000won$, and the percentage of customers who spent at least 15,000 won was highest in those aged 41 and more. The groups with different gender and age also differed in their choices of products. Customers who are female or under 41 years old used coffees or beverages more often than other group customers. There was no significant difference in understanding on bakery cafe between groups, and 64.9% of respondent answered that they understood bakery cafe as a complex of bakery and cafe. Overall, for early settlement and development of the bakery cafe industry, it seems very important to establish marketing strategy that meets target customers' needs on the basis of understanding their patterns of bakery cafe use.