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최부연,박경호,이재열,이종현,유형준 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
A thermally actuated micro-relay using a mercury-contact has been designed and fabricated. The mercury actuation was achieved by externally pressurized nitrogen, and the mercury-contact was moved by actuation pressure of 110torr in the 100μm-wide microchannel. The injection pressure of mercury was 300torr in the 60μm-wide microchannel of the micro relay structure.
박경호,이춘수,정영이,이용일,최부연,이종현,유형준 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
Annealing effects on residual stress of polysilicon microstructures were investigated using cantilever test patterns. 0.5-2μm thick polysilicon films on 2-4μm thick oxide layers were annealed at 900, 1000, and 1100℃ in nitrogen atmosphere for 1 hour. The vertical deflections of cantilever beams were measured by a 3-dimensional optical microscope with 0.01μm resolution and SEM(scnning electron microscope). The estimated maximum residual stresses of as-prepared and 900℃-annealed beams were 7.88x10^(9) and 5.6x10^(8) N/m^(2), respectively. Annealing at 1100℃ for 1 hour was found to be effective to release the residual stress of the polysilicon microstructures.
HF 증기상 식각을 이용한 다결정 규소 미세 구조체의 제작
박경호,이춘수,정영이,이용일,최부연,이종현,유형준 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
We present a novel method to fabricate surface micromachined structures without their sticking on the substrate. An anhydrous HF/CH_(3)OH vapor-phase etching(VPE) of sacrificial SiO_(2) layers was employed to release 0.5-2 μm thick polysilicon cantilevers. The fabricated structures were observed using scanning electron microscope and 3-dimensional optical microscope. The results show that we can successfully make cantilever beams up to 1200 μm long without sticking. This VPE technique will be useful in surface micromachining technologies.