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MEMS 공정을 위한 여러 종류의 산화막의 잔류응력 제거 공정
李相佑,김성운,李尙禹,김종팔,박상준,이상철,조동일 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
Various oxide films are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). Large residual strain of these oxide films cause the wafer to bow, which can have detrimental effects on photolithography and other ensuing processes. This paper investigates the residual strain of tetraethoxysilane (TEOS), low temperature oxide (LTO), 7wt% and lOwt% phosphosilicate glass (PSG). Euler beams and a bent-beam strain sensor are used to measure residual strain. A polysilicon layer is used as a sacrificial layer, which is selectively etched away by XeF_(2). First, the residual strain of as-deposited films is measured, which is quite large. These films are annealed at 500℃, 600℃, 700℃ and 800℃ for 1 hour and residual strain is measured. Then, the residual strain after annealing at the conditions for depositing a 2μm thick polysilicon at 585℃ and 625℃ are also measured. Our results show that the 7wt% PSG is best suited as the sacrificial layer for 2μm thick polysilicon processes.
삽목 조건이 ‘설향’ 딸기의 묘소질 및 과실 수량에 미치는 영향
이상우,이용혁,홍점규,최성환,박수정,이상우 (사) 한국생물환경조절학회 2023 생물환경조절학회지 Vol.32 No.4
딸기 ‘설향’ 품종에 대해 삽목 육묘의 조건을 확립하고자 삽수 채취용 모주 선택, 삽수의 적정 엽수 및 삽목 시기를 구명하였다. 삽수 채취는 육묘장 모주와 과실 수확 후 재배 식물체에서 채취하였고, 삽수의 엽수는 0, 1, 2장 그리고 삽목 시기는 6 월 4일부터 7월 9일까지 1주일 간격으로 하였다. 육묘장 삽수와 재배 식물체 삽수의 최종 생존율은 각각 99.5%, 98.7%로높았으며, 유의적인 차이는 없었다. 근수는 육묘장 삽수에서3.1개 많았고, 관부와 잎의 생육은 차이가 없었다. 과실 수량은 육묘장 삽수와 재배 식물체 삽수에서 각각 419.2g, 428.4g 이었지만 유의적인 차이는 없었다. 삽수의 엽수별 생존율은엽수 1, 2장에서 각각 98.1%, 98.3%로 높았고, 0장은 25.3% 로 현저히 낮았다. 근수는 엽수 1, 2장에서 각각 26.0개, 26.3 개로 엽수 0장의 23.5개에 비해 많았다. 관부와 엽의 생육에서는 엽수에 따른 유의적인 차이가 없었다. 과실 수량은 엽수 1, 2장에서 각각 424.4g, 421.5g으로, 0장 396.7g 보다 많았다. 삽목 시기에 따른 삽목 후 생존율은 97.2% 이상으로 높았으며, 처리 간의 유의적인 차이는 없었다. 묘의 지하부와 지상부그리고 관부의 생육은 6월 4일과 11일 삽목에서 가장 좋았다. 과실 수량은 6월 4일, 6월 11일 삽목에서 각각 433.3g, 426.4g 으로 가장 많았으며, 삽목 시기가 가장 늦었던 7월 9일 삽목에서는 384.5g으로 적었다. 딸기 삽목용 삽수 재료는 육묘장 삽수와 과실 수확을 마친 재배 식물체 삽수 모두 가능하였고, 삽수의 적정 엽수는 최소 1장 이상 그리고 경남 지역의 삽목 시기는 6월 4일-11일이 적합하였다. This study was conducted to investigate optimal conditions for cutting propagation of the strawberry cultivar “Sulhyang” through the collection methods of cuttings (runners tips), leaf number of cuttings, and cutting time. Cuttings were collected from the mother plant in the nursery bed (MP) and plants after fruit harvest (HP); the leaf number of cuttings was 0, 1, and 2, and the cutting time was at one-week intervals from June 4 to July 9. The survival rates for MP and HP cuttings were notably high, reaching 99.5% and 98.7%, respectively, but no significant difference was found. The number of roots were higher in MP cuttings, and there was no significant difference in crown and leaf growth. The fruit yields were 419.2 and 428.4 g, for MP and HP cuttings, respectively. The survival rates according to leaf number of cuttings were 98.1% and 98.3% for 1 and 2 remaining leaves, respectively, and remarkably lower at 25.3% for no remaining leaves. The root numbers were 26.0 and 26.3 for 1 and 2 remaining leaves, respectively, compared with 23.5 for no remaining leaves, with no significant differences in crown and leaf growth. The fruit yields were 424.4 and 421.5 g for 1 and 2 remaining leaves, respectively, and 396.7 g for no remaining leaves. The survival rates according to cutting time was over 97.2% in all cutting time without any difference in each treatment. The root, shoot, and crown of the nursery plant before planting showed the best growth in the cuttings on June 4 and 11, resulting in the highest fruit yields of 433.3 and 426.4 g, respectively, with the lowest yields at 384.5 g for cutting time on July 9. Both MP and HP materials proved suitable for strawberry cuttings. The optimal leaf number for cuttings was at least 1, and the optimal cutting time in Gyeongnam area was evaluated as around June 4-11.
이상우,차상곤,심명석 경기대학교 부설 산업기술종합연구소 2002 산업기술종합연구소 논문집 Vol.23 No.-
It is quite difficult to find useful data which can be used for the acoustic design of a broadcasting facility, since the broadcasting for TV and radio are heavily dependent upon the use of electronic equipments both for recording and reproducing, in its nature. Hence, the importance of acoustics for such places has been easily overlooked. The present work tried to provide useful data for the acoustic design of a TV broadcasting studio by measuring and analyzing the acoustics of studios in a newly built TV broadcasting station. Reverberation times, background noise levels, and transmission losses of party walls in studios and control rooms were measured and evaluated.
이상우 명지대학교 예체능연구소 1996 藝體能論集 Vol.7 No.-
Lee Hyo-sok's When the Buckwheat Flower Blossoms is one of the representative short stories in Korean literature. It is generally argued that the literary merit of When the Buckwheat flower Blossoms lies in the eloquent lyrical phrases so artistically employed by the author. However, die reader is emotionally moved by this work not so much by its lyrical beauty but rather by it skillful portrayal of the collective emotions of the Korean people. First of all, the protagonist, Huh Sang-won is an atypical character. He has lived in relative seclusion all his life, yet he is uncommonly kind in heart. He religiously clings to the belief that given sufficient determination, anything can be achieved. Armed with this conviction alone, Huh spends 20 years of his life in search of a particular women, and in the end realizes his dream. However, this type of theme is not limited to this work alone but is readily found in many Korean classics that have touched the hearts of Korean readers through the ages. This theme is part of a universal quest motif, manifested the process of traversing the mountains and fields and crossing streams under the bright moon. This is precisely what makes When the Buckwheat Flower Blossoms an enjoyable reading experience.