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Co/Ti이중박막을 이용한 $CoSi_2$에피박막형성에 관한 연구
김종렬,배규식,박윤백,조윤성,Kim, Jong-Ryeol,Bae, Gyu-Sik,Park, Yun-Baek,Jo, Yun-Seong 한국재료학회 1994 한국재료학회지 Vol.4 No.1
전자빔 증착법을 사용하여 10nm두께의 Ti과 18nm두께의 Co를 Si(100)기판에 증착한 후, $N_{2}$분위기에서 $900^{\circ}C$, 20초 급속 열처리하여, Co/Ti 이중금속박막의 역전을 유도함으로서 $CoSi_{2}$박막을 형성하였다. 4점 탐침기로 측정한 면저항은 3.9Ω/ㅁ 었으며, 열처리 시간을 증가해도 이값은 유지하여 열적 안정성을 나타내었다. XRD 결과는 형성된 실리사이드는 기판과 에피관계를 갖는 $CoSi_{2}$상 임을 보였으며, SEM 사진은 평탄한 표면을 나타내었다. 단면 TEM 사진은 기판위에 형성된 박막층은 70nm 두께의 $CoSi_{2}$ 에피박막과 그위에 두개의 C0-Ri-Si합금층등 세개의 층으로 되어 있음을 보였다. AES 분석은, 기판상의 자연산화막을 형성할 수 있었음을 보여주었다. AES분석은, 기판상의 잔연산화막이 열처리초기, Ti에 의해 제거된후 Co가 원자적으로 깨끗한 Si기판에 확산하여 $CoSi_{2}$에피박막을 형성할 수 있었음을 보여주었다. $700^{\circ}C$, 20초 + $900^{\circ}C$, 20초 이중 열처리를 한 경우, $CoSi_{2}$결정성장으로 면저항값은 약간 낮아졌으나, 박막의 표면과 계면이 거칠었다. 이 $CoSi_{2}$에피박막의 실제 소자에의 적용방안과 막의 역전을 통한 에피박막형성의 기제를 열역학 및 kinetics 관점에서 고찰하였다. Ti film of lOnm thickness and Co film of 18nm thickness were sequentially e-heam evaporated onto Si (100) substrates. Metal deposited samples were rapidly thermal-annt.aled(KTA) in thr N1 en vironment a t $900^{\circ}C$ for 20 sec. to induce the reversal of metal bilayer, so that $CoSi_{2}$ thin films could be formed. The sheet resistance measured by the 4-point probe was 3.9 $\Omega /\square$This valur was maintained with increase in annealing time upto 150 seconds, showing high thermal stab~lity. Thc XRII spectra idrn tified the silicide film formed on the Si substrate as a $CoSi_{2}$ epitaxial layer. The SKM microgr;iphs showed smooth surface, and the cross-sectional TKM pictures revealed that the layer formed on the Si substrate were composed of two Co-Ti-Si alloy layers and 70nm thick $CoSi_{2}$ epl-layer. The AES analysis indicated that the native oxide on Si subs~rate was removed by TI ar the beginning of the RTA, and Ihcn that Co diffused to clean surface of Si substrate so that epitaxial $CoSi_{2}$ film could bt, formed. In thc rasp of KTA at $700^{\circ}C$. 20sec. followed by $900^{\circ}C$, 20sec., the thin film showed lower sheet resistance, but rough surface and interface owing to $CoSi_{2}$ crystal growth. The application scheme of this $CoSi_{2}$ epilayer to VLSI devices and the thermodynarnic/kinetic mechan~sms of the $CoSi_{2}$ epi-layer formation through the reversal of Co/Ti bdayer were discussed.
김휘동,구혜원,곽문석,김종렬,손병철,문덕환,이종태,조규일,엄상화,정귀옥,전진호,이채언,Kim, Hwi-Dong,Koo, Hye-Won,Kwak, Moon-Suk,Kim, Jong-Ryul,Son, Byung-Chul,Moon, Deog-Hwan,Lee, Jong-Tae,Cho, Kyu-Il,Ohm, Sang-Hwa,Jung, Kui-Oak,Chun, Jin 대한예방의학회 1996 Journal of Preventive Medicine and Public Health Vol.29 No.4
This study surveyed and measured the level and structure of cancer deaths and their trends over time for offering the fundamental data of e cancer prevention and control in Pusan city in the future. Authors conducted the study of descriptive epidemiology using materials derived from the computerized data of total 3,722 certified cancer deaths in Pusan city from January 1 to December 31, 1993 registered on the National Statistical Once, the Republic of Korea. The obtained results were as follows: 1. According to the total registered cases of deaths(16,331 cases) in Pusan city during 1993, cancer(3,722 cases) and cerebrovascular disease(2,118 cases) were the first and second cause of deaths as 23.1% and 16.9%, respectively. These pattern showed the change between cancer (14.7%) and cerebrovascular disease(18.5%) in order of frequency in comparison to 1982. Also, the total number of cancer deaths was increased in comparison to 1982. The rate of death certification by physicians was 87.1% of all registered deaths, which was increased to 6.8% in comparison to 1982(80.3%). 2. Crude death rate and cancer specific death rate was 4.06 per 1,000 populations and 93.8 per 100,000 populations(male:117.8, female:70.0), respectively. The former was similar to that of 1982, but the latter was increased to 1.6 times as that of 1982. 3. Age-adjusted cancer specific death rate by standardization with whole country population was 111.9(male:141.5, female:106.7) per 100,000 populations, higher than not age-adjusted cancer specific death rate(93.8), and the sex difference was statistically significant with male predominance (p<0.05). 4. Cancer specific death rate by age was generally increased with age and most of cancer deaths(male:91.8%, female:88.5%) occurred since 40 years old. 5. The major cancer(cancer specific death rate per 100,000 populations) in male was liver(30.6) followed by stomach(25.6), lung(21.9), and GB and EHBD(5.7), in female stomach(15.7), liver(9.9), lung(7.3), and uterus(6.9). The relative frequency of the leading three cancer among total cancer deaths marked 66.3% in male and 47.l% in female, and decreased in comparison to 1982(male:72.2%, female:54.5%). 6. The total ratio of male to female cancer specific death rate showed 1.68 to 1 with male predominance. And the ratio was above 2.0 in larynx, oral cavity & pharynx, esophagus, liver, lung, bladder cancer and the ratio was $1.0\sim1.9$ in stomach, pancreas, gall bladder and EHBD, brain, rectum and anus cancer, leukemia, but the ratio was reversed in thyroid and colon cancer. In conclusion, cancer was the first cause of deaths. The proportion of lung cancer was increased, that of stomach & uterine cancer was decreased relatively, and liver cancer was constantly higher proportion. In the future, it is necessary to conduct the further investigations on the cancer risk factors considering areal specificity.
김호상(Ho Sang Kim),김창길(Chang Gil Kim),김이청(Yi Cheong Kim),김종렬(Jong Ryeol Kim) 한국마린엔지니어링학회 2010 한국마린엔지니어링학회 학술대회 논문집 Vol.2010 No.4
Artificial reefs are widely used as important means of fishing ground creation for not only commercial fishing but also recreational fishing. The evaluation of artificial reef in this study was made based upon three steps, estimation of effective bulk void volume, catch analysis per unit reef volume and biomass estimation of attachment organisms on the reef. This method can be applied to both the evaluation for post-deployment management of the exist artificial reefs and for the preservation of fisheries resource at the artificial reef fishing grounds.