실리콘 웨이퍼 공정용 알루미나 정전척의 제작과 특성에 관한 연구

천희곤,조동율,이영섭,박용균,최성호,정광진,Serguei Spoutai 울산대학교 기계부품 및 소재 특성평가연구센터 1999 연구보고서 Vol.1999 No.-

정전척의 유전체 물질로 열전도도와 유전특성 그리고 기계적 특성이 우수한 알루미나에 TiO₂첨가하여 유전체의 비저항을 변화시켜서 정전척(electrostatic chuck)에서 발생하는 정전력인 쿨롱힘(coulomb force)과 존슨-라벡힘(Johnsen-Fahbeck firce_의 영향을 규명하려 하였다. 그리고 비저항, 인가전압, 온도, 습도가 정전력에 어떠한 영향을 주는지 고찰하였으며, 인가전압에 따른 응답 특성에 관하여 고찰하였다. Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of TiO₂ addition (0 wt%, 1.3 wt%, 2 wt%, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discussed

UV/Cl₂(g)에 의한 Si-wafer 표면금속 오염물의 건식세정에 관한 연구

손동수,정광진,최성호,천희곤,조동율 울산대학교 1998 공학연구논문집 Vol.29 No.2

본 연구에서는 실리콘 웨이퍼 표면에 존재하는 미량의 Zn, Fe, Ti 금속 오염물들이 UV-excited chlorine radical을 이용한 건식세정 방법으로 제거되는 반응과정을 연구 하였다. 실리콘 웨이퍼 상에 진공증착법으로 원형패턴이 있는 Zn, Fe, Ti 박막을 증착시켜 상온 및 200℃에서 UV/CI₂세정하였을 때, 염소 래디컬(CI*)이 Fe, Zn, Ti와 반응하여 제거되는 것을 반응 전후 광학현미경과 SEM을 통해 표면 형상 변화를 관찰하였고, in-line으로 연결된 XPS를 통해서 반응 후 웨이퍼 표면에 남아있는 화합물의 화학적 결합상태를 관찰하였으며, UV/CI₂세정 후 실리콘 기판이 손상받는 정도를 알기 위해 AFM으로 표면 거칠기를 측정하였다. 광학현미경과 SEM의 분석에 의하면 Zn와 Fe는 쉽게 제거되는 반면 염화물을 형성하기 보다는 휘발성이 적은 산화물을 형성하는 경향이 강한 Ti은 약간만 제거되는 것을 확인하였다. XPS 분석을 통해서 이들 금속 오염물들이 chlorine radical과 반응하여 웨이퍼 표면에 금속 염화물을 형성하고 있는 것을 확인하였고, UV/CI₂세정처리를 하였을 때 실리콘 웨이퍼의 표면 거칠기가 약간 증가하는 것을 알 수 있었다. 지금까지의 결과를 통해 볼 때, 습식세정과 UV/CI₂건식세정을 병행하면 플라즈마 및 레이저를 사용하는 다른 건식세정 방법에 비하여 보다 저온에서 실리콘 기판의 큰 손상 없이 비교적 용이하게 금속 오염물을 제거할 수 있음을 알수 있었다. The reaction mechanisms of dry cleaning of Zn, Fe and Ti trace contaminants on the Si wafer using UV/CI₂ have been studied by SEM, AFM and XPS analyses. The patterned Zn, Fe and Ti films were deposited on the Si wafer surface by thermal evaporation and changes in the surface morphology after dry cleaning using CI₂and UV/CI₂at 200℃ were studied by optical microscopy and SEM. In addition changes in surface roughness of Si wafer by the cleaning was observed by AFM. The chemical bonding states of the Zn, Fe and Ti deposited silicon surface were observed with in-line XPS analysis. Zn and Fe were easily cleaned in the form of volatile zinc-chloride and iron-chloride as verified by the surface morphology changes. Ti which forms involatile oxides was not easily removed at room temperature but was slightly removed by UV/CI₂at elevated temperature of 200℃. It was also found that the surface roughness of the Si wafer increased after CI₂and UV/CI₂cleaning. Therefore, the metallic contaminants on the Si wafer can be easily removed at lower temperature by continuous processes of wet cleaning followed by UV/CI₂dry cleaning.

Mitochondrial citrate accumulation drives alveolar epithelial cell necroptosis in lipopolysaccharide-induced acute lung injury

Yang Hui-Hui,Jiang Hui-Ling,Tao Jia-Hao,Zhang Chen-Yu,Xiong Jian-Bing,Yang Jin-Tong,Liu Yu-Biao,Zhong Wen-Jing,Guan Xin-Xin,Duan Jia-Xi,Zhang Yan-Feng,Liu Shao-Kun,Jiang Jian-Xin,Zhou Yong,Guan Cha-Xi 생화학분자생물학회 2022 Experimental and molecular medicine Vol.54 No.-

Necroptosis is the major cause of death in alveolar epithelial cells (AECs) during acute lung injury (ALI). Here, we report a previously unrecognized mechanism for necroptosis. We found an accumulation of mitochondrial citrate (citratemt) in lipopolysaccharide (LPS)-treated AECs because of the downregulation of Idh3α and citrate carrier (CIC, also known as Slc25a1). shRNA- or inhibitor–mediated inhibition of Idh3α and Slc25a1 induced citratemt accumulation and necroptosis in vitro. Mice with AEC-specific Idh3α and Slc25a1 deficiency exhibited exacerbated lung injury and AEC necroptosis. Interestingly, the overexpression of Idh3α and Slc25a1 decreased citratemt levels and rescued AECs from necroptosis. Mechanistically, citratemt accumulation induced mitochondrial fission and excessive mitophagy in AECs. Furthermore, citratemt directly interacted with FUN14 domain-containing protein 1 (FUNDC1) and promoted the interaction of FUNDC1 with dynamin-related protein 1 (DRP1), leading to excessive mitophagy-mediated necroptosis and thereby initiating and promoting ALI. Importantly, necroptosis induced by citratemt accumulation was inhibited in FUNDC1-knockout AECs. We show that citratemt accumulation is a novel target for protection against ALI involving necroptosis.

Effect of wind time on the dispersal capacity of Trichogramma dendrolimi Matsumura (Hymenoptera Trichogrammatidae)

Jin-cheng Zhou,Qian-jin Dong,Tong-shu Zhang,Li-jia Duan,Su-fang Ning,Quanquan Liu,Yuan-yuan Li,Chun-xue Li,Hui Dong 한국응용곤충학회 2019 Journal of Asia-Pacific Entomology Vol.22 No.3

The efficacy of Trichogramma against pests basically depends on the dispersal capacity of the wasps. A releaserecapture method was used in this study to evaluate the effect of relative wind speed (RWS) during the nighttime and the daytime on the dispersal capacity of postrelease population of Trichogramma dendrolimi Matsumura. Two repeated measurements were carried out, using sentinel cards with the host eggs and yellow sticky card traps on the third and the sixth day after wasp release. The results showed that: (1) both the number of recaptured wasps and parasitized eggs increased with the RWS in the daytime during the first three days. The number of parasitized eggs also increased with the RWS in the daytime over the latter three days. The distances that encompassed 98% recaptured T. dendrolimi adults (X 98 ) at the first three days was quadratically increased by the RWS of the daytime. (2) The number of wasps recaptured decreased with the distance from the releasing point during the first three days, but it was not influenced by the distance from the releasing point during the latter three days. (3) The average dispersal radius of the wasps during the first three days was shorter than during the latter three days. The present results will be helpful to improve release techniques based on the wind effects at different times.

Identification and expression analysis of grape LRK10L-2 genes during grape fruit development

Ma Jin-Ping,Yin Xue-Ren,Wei Tong-Lu,Liu Hai-Nan,Pei Mao-Song,Yang Sheng-Di,Jin Hui-Ying,He Guang-Qi,Guo Da-Long 한국식물생명공학회 2022 Plant biotechnology reports Vol.16 No.1

LRK10L-2 is known to be related to the plant disease response, little information is available about the relationship of LRK10L-2 and fruit ripening. The protein physicochemical properties, conserved domains, gene structures, subcellular locali- zation, expression patterns during grape fruit development and promoter activity of the members of grape LRK10L-2 gene family were explored in this study. A total of 109 LRK10L-2 family gene members were identified, and mainly distributed on chromosome 16. Almost all of them were located in the plasma membrane. Most of the LRK10L-2 genes contain four or five motifs, ranging from 0 to 5 introns and have the cis-acting elements related to hormones in their promoter regions. There were 20 pairs of tandem duplicates and 293 pairs of segmental duplication in LRK10L-2 family genes. It was proved that the expression of LRK10L-2 gene varied at the different fruit development stages of 'Kyoho' and its early-ripening bud mutant, ‘Fengzao’. The subcellular localization of VIT_16s0098g00160 and VIT_16s0098g00400 were in the plasma membrane, and had a significant enrichment of the GUS signal in N.benthamiana leaves for the promoter. The results lay a solid basis for the further functional researches of the LRK10L-2 genes for grape fruit ripening.

센서 재료 , 제조공정 및 기타 : 실리콘 웨이퍼 공정용 알루미나 정전척의 제작과 특성에 관한 연구

정광진(Kwang Jin Jeong),박용균(Yong Gyun Park),이영섭(Young Seop Lee),조동율(Tong Yul Cho),천희곤(Hui Gon Chun) 한국센서학회 1999 센서학회지 Vol.8 No.6

Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of TiO₂ addition(0, 1.3, 2.0, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discussed.

초등학교급식에서 수행되는 급식비 관련 재무관리 업무분석

최은희,이진미,곽동경 대한영양사협회 1996 대한영양사협회 학술지 Vol.2 No.2

The purpose of this study was to examine financial management practices in elementary school foodservices. Respondents were asked to provide information on demographics, operational characteristics, financial management activities(responsibility, importance and time demand). Data were collected from 106 elementary school foodservice using the mail questionnaire. The results were as follows: 1. Time demand of 14 financial management activities was examined. The results of time-demand showed that most financial activities were performed about once per month. Reporting, inventory checking and production cost accounting were performed several times per week. 2. Major financial management activities performed by school dietitians were inventory checking, record keeping, production cost accounting, and foodservice operation planning. 3. Results of the importance rating of 14 financial management activities showed that the production cost accounting, budgeting, controlling meal costs, reporting the national treasury accounts, and inventory checking were rated as very important(4.00~4.49). Factor analysis was conducted on the importance ratings. Five activities were differentiated such as budgeting, record keeping, cost controlling, cost accounting, and reporting. The cost controlling task was identified at the most important one among them. 4. Important ratings for reporting were found to be significantly different by age, and years of experience. The younger and the less experienced were responded with higher scores on reporting. Analysis of variance for the importance scales by meal costs per one person, food cost percentage, labor cost percentage was conducted, but significant differences were not founded.

학교급식 비 관리의 효율적 개선을 위한 연구 : 공동조리 및 단독조리 급식학교의 비교 A comparison of commissary with conventional school foodservice systems

최은희,이진미,곽동경 대한영양사협회 1995 대한영양사협회 학술지 Vol.1 No.1

Commissary school foodservice system has been expanded rapidly in elementary foodservices in Korea. Therefore, it is essential that cost effectiveness should be assessed by comparing between alternative systems. The objectives of this study were to assess the effects on meal costs of foodservice systems and other school characteristics in terms of meal costs/day per 1 person; to examine financial management practices and dietitians' perception concerning importance of school foodservices financial management. A total of 16 commissary schools in nationwide and 102 conventional schools at Chungnam province and Seoul were participated in this survey by mails. The results are as follows: 1. Average meal costs per one person was 1,232.6 won evaluated on the standards of monthly budget basis on June, 1994. Average food costs per one person was 836.1 won(67.83%), average labor cost was 320.1 won(25.97%) and operation costs was 76.3 won(6.2%). 2. Average meal costs per one person did not show any significant difference between commissary and conventional foodservice schools. Meal costs of the island type and the rural type were significantly higher than those of the urban type. Meal costs of schools in Chungnam and other province were higher than schools in Seoul. The schools with less than 200 feeding numbers were higher than the schools more than 201 in meal costs per one person. 3. Food costs per one person were higher in the urban type, especially in Seoul, as the scale of feeding number increased. Labor costs and operational costs were increased in island type as well as in the schools of small feeding numbers. 4. Foodservice teachers, not dietitians were in charge of foodservice duties at the 75% of satellites. Dietitians participated in the satellite foodservice duties were only averaged at 2.19 visits per month of 20 feeding days. 5. Items which influenced by food costs per person at the step of foodservice production were purchasing method, the perception of inventory, the distributor for foodservice, and usage of standardized recipes.

Identification and sex expression profiles of olfactory-related genes in Mythimna loreyi based on antennal transcriptome analysis

Zhang Yun-Ying,Guo Jin-Meng,Wei Zhi-Qiang,Zhang Xiao-Tong,Liu Si-Ruo,Guo Hui-Fang,Dong Shuanglin 한국응용곤충학회 2022 Journal of Asia-Pacific Entomology Vol.25 No.2

To better understand the olfactory mechanism of Mythimna loreyi, a worldwide migratory pest, we for the first time conducted a large scale identification of olfactory-related genes and investigation of their sex expression profiles by transcriptomic analysis. A total of 42,832 unigenes were obtained by transcriptome sequencing, as sembly and annotation, with an average length of 1,229 bp and N50 of 2,086 bp. In particular, 138 olfactoryrelated genes were identified by homologous blasting, including 33 odorant binding proteins (OBPs), 16 che mosensory proteins (CSPs), 63 odorant receptors (ORs), 24 ionotropic receptors (IRs) and two sensory neuron membrane proteins (SNMPs). Further, by using differential gene expression (DGE) and fragments per kilobase per million fragments (FPKM) values to compare the transcript levels between female and male antennae, we found that 22 olfactory-related genes (9 OBPs, one CSP and 12 ORs) were sex biased, with 10 genes being male biased and 12 genes female biased. In addition, sex and tissue expression profiles determined by qPCR of 15 selected genes confirmed the reliability of sex expression profiles obtained by the transcriptomic analysis, and demonstrated that most olfactory-related genes were specifically or primarily expressed in antennae, suggesting their roles in olfaction, while a few genes were highly expressed in other tissues, implying their non-olfaction functions. This study provides an important basis for further functional study of olfactory genes in M. loreyi.

Identification and sex expression profiles of olfactory-related genes in Mythimna loreyi based on antennal transcriptome analysis

Zhang Yun-Ying,Guo Jin-Meng,Wei Zhi-Qiang,Zhang Xiao-Tong,Liu Si-Ruo,Guo Hui-Fang,Dong Shuanglin 한국응용곤충학회 2022 Journal of Asia-Pacific Entomology Vol.25 No.3

To better understand the olfactory mechanism of Mythimna loreyi, a worldwide migratory pest, we for the first time conducted a large scale identification of olfactory-related genes and investigation of their sex expression profiles by transcriptomic analysis. A total of 42,832 unigenes were obtained by transcriptome sequencing, as sembly and annotation, with an average length of 1,229 bp and N50 of 2,086 bp. In particular, 138 olfactoryrelated genes were identified by homologous blasting, including 33 odorant binding proteins (OBPs), 16 che mosensory proteins (CSPs), 63 odorant receptors (ORs), 24 ionotropic receptors (IRs) and two sensory neuron membrane proteins (SNMPs). Further, by using differential gene expression (DGE) and fragments per kilobase per million fragments (FPKM) values to compare the transcript levels between female and male antennae, we found that 22 olfactory-related genes (9 OBPs, one CSP and 12 ORs) were sex biased, with 10 genes being male biased and 12 genes female biased. In addition, sex and tissue expression profiles determined by qPCR of 15 selected genes confirmed the reliability of sex expression profiles obtained by the transcriptomic analysis, and demonstrated that most olfactory-related genes were specifically or primarily expressed in antennae, suggesting their roles in olfaction, while a few genes were highly expressed in other tissues, implying their non-olfaction functions. This study provides an important basis for further functional study of olfactory genes in M. loreyi.