$N_2$O 분위기에서 RTP로 제조한 실리콘 산화막의 산화 반응

박진성,이우성,심태언,Park, Jin-Seong,Lee, U-Seong,Sim, Tae-Eon 한국재료학회 1993 한국재료학회지 Vol.3 No.1

실리콘 산화막을 $N_2$O 분위기에서 RTP로 제조하여 그 성장 기구를 고찰 했다. 산화막과 기판 실리콘 계면 사이에 질소성분이 포함된 oxynitride층이 존재한다. $N_2$O 기체를 이용한 산화막 성장은 삼화제 확산에 의해 성장이 지배되는 포물선 성장론을 따르고 산화제 확산 억제작용은 실리콘 산화막과 실리콘 기판사이에 존재하는 oxynitride막에서 일어난다. 확산이 산화막 성장을 결정하는 구간에서 포물선 성장율 상수 B의 활성화 에너지는 약 1.5 eV이고 산화막 두께 증가에 따라 증가한다. Abstract Oxidation kinetics of silicon oxide films formed by rapid thermal oxidizing Si substrate in $N_2$O ambient studied. The data on $N_2$0 oxidation shows that the interfacial nitrogen-rich layers results in oxide growth in the parabolic regime by impeding oxidant diffusion to the Si$O_2$-Si interface even for ultrathin oxides. The activation energy of parablic rate constant, B, is about 1.5 eV, and the energy increses with oxide thickness.

$CaF_2$ 기전력법에 의한 용융아연 중 알루미늄 농도의 측정

박진성,김항수,정우광,김종상,Park Jin Sung,Kim Hang Soo,Jung Woo-Gwang,Katayama I.,Kim Jong Sang 한국전기화학회 2000 한국전기화학회지 Vol.3 No.4

용융아연 도금 강판 제조시 용융아연 도금 bath중의 알루미늄 농도를 조절하는 것은 매우 중요하다 본 연구의 목적은 용융아연 도금욕 중 알루미늄 농도를 신속하게 측정할 수 있는 센서 개발을 위한 기초 data를 제공하는 것이다. $CaF_2$고체전해질과 3가지 종류의 참조극을 사용하여 $460^{\circ}C\~500^{\circ}C$의 순수한 용융아연 bath에서 불소포텐샬을 측정하였다. 용융 아연 중 알루미늄의 농도를 측정하기 위하여 다음과 같은 불소 이온 농담전지 센서를 구성하였다. $$(-)W|Zn-Al,\;AlF_3|CaF_2|Bi,BiF_3|W(+)$$ 알루미늄의 농도가 $0.984wt\%$이하인 Zn-Al bath의 온도를 $460\pm10^{\circ}C$로 유지하고 상기의 알루미늄 농도 센서를 이용하여 기전력을 측정하였다. 측정된 기전력 값으로부터 최소 자승 회귀분석법을 이용하여, 다음과 같은 알루미늄 농도와 기전력과의 관계식을 얻었다. $$E/mV=56.795log[\%Al]+1881.7\;R=0.9704$$,$$0.026wt\%{\leq}[\%Al]{\leq}0.984wt\%$$ The control of dissolved aluminum concentration in the hot dip zinc galvanizing bath is greatly important in producing galvannealed steel sheets. The purpose of present study is to provide basic data for measurement of the aluminum concentration in site in hot dip zinc bath at the temperature of $460^{\circ}C\~500^{\circ}C$ using $CaF_2$ solid electrolyte sensor with three kinds of reference electrode. Good workability and stability of the sensor were confirmed with the $Bi+BiF_3$ reference electrode from the emf measurement. In order to measure the aluminum concentration in Zn-Al bath, the galvanic cell of fluorine ion was constructed with $CaF_2$ solid electrolyte as follows; $$(-)W|Zn-Al,\;AlF_3|CaF_2|Bi,BiF_3|W(+)$$. The emf measurement was made at the temperature of $460\pm10^{\circ}C$ in the Zn-Al bath. The following correlationship between aluminum concentration and emf was obtained by the least square regression analysis; $$E/mV=56.795log[\%Al]+1881.7\;R=0.9704$$,$$0.026wt\%{\leq}[\%Al]{\leq}0.984wt\%$$

근시성 맥락막 신생혈관 환자에서 스펙트럼 영역 빛간섭단층촬영으로 측정한 맥락막

박진성,조영욱,장지혜,Jin Sung Park,Young Wook Cho,Ji Hye Jang 대한안과학회 2014 대한안과학회지 Vol.55 No.9

Purpose: Using the spectral domain optical coherence tomography (SD-OCT), we studied the difference in the choroidal morphology between the choroidal neovascularization (CNV) area and the area surrounding CNV. Methods: This retrospective study consisted of 19 patients with myopic CNV lesion in eye; fellow eyes were used as controls. All eyes were analyzed by measuring the choroidal thickness and large choroidal vessel size using SD-OCT. Eyes with CNV were divided into groups; the neovascular lesion was defined as group 1, the surrounding area as group 2. Subfovea of the fellow eye was defined as group 3. Results: The choroidal thickness was 80.00 ± 68.31 in group 1, 63.44 ± 67.75 in group 2 and 71.11 ± 65.69 μm in group 3. There was a significant difference between group 1 and group 2 (<em>p</em> = 0.038). There were no significant differences between group 1 and 3 or between group 2 and 3 (<em>p</em> = 0.365, p = 0.314). The large choroidal vessel size was 57.47 ± 39.78 in group 1, 40.45 ± 34.69 in group 2 and 45.63 ± 37.00 μm in group 3. There was a significant difference between group 1 and group 2 (<em>p</em> = 0.025). There were no significant differences between group 1 and 3 or between group 2 and 3 (<em>p </em>= 0.123, <em>p</em> = 0.325). Conclusions: Choroidal thickness and large choroidal vessel size at the center of the CNV were greater than in the area surrounding CNV. The results suggest that although the CNVs were due to a thinned choroid caused by severe choroidal ischemia, the development of CNV requires maintenance of choriocapillaris and large choroid vessels. J Korean Ophthalmol Soc 2014;55(9):1313-1319

LED 조명 모듈 표면의 방사율 측정에 관한 연구

박진성,허창수,Park, Jin-Sung,Huh, Chang-Su 한국전기전자재료학회 2013 전기전자재료학회논문지 Vol.26 No.6

LED lighting is sensitive because it made by semiconductor. So it has been researched about radiation of heat technologies for a long time. In addition, measurement and assessment a radiation of heat also conducted. It is necessary to get a date of accuracy temperature on the board after LED driven for measuring Junction temperature of the LED Lighting. For this research, we use 5 chip which is 4 W power on top of LED lighting board made by aluminum. Thermal camera effects to emissivity depending on material and property of the surface in LED board because it determines thermal energy which emitted from material surface. it is not only thermal camera has not a standard about emissivity. It has an error of temperature when emissivity was measured by thermal camera. we confirmed that emissivity and reflected temperature depending on color and quality of the surface throughout experiment.

Pyrazine 이 첨가된 TMAH / IPA 이방성 식각특성

박진성,정귀상 ( Jin Sung Park,Gwty Sang Chung ) 한국전기전자재료학회 1997 한국전기전자재료학회 춘계학술대회논문집 Vol.1997 No.0

스마트폰 시청 시 몸통 교정기 착용에 따른 목, 허리 굽힘-이완 비율, 관절가동범위, 압통, 착용감 변화

박진성,박두진,Park, Jin-Seong,Park, Du-Jin 대한고유수용성신경근촉진법학회 2021 PNF and Movement Vol.19 No.3

Purpose: This study was conducted to investigate changes in the cervical and lumbar flexion-relaxation ratio, range of motion, pressure pain threshold, and perceived comfort following the wearing of a trunk brace during smartphone watching. Methods: To calculate the number of subjects for this study, an analysis with G^*Power was performed at a statistical power of 0.8, an effect size of 0.5, and a significance level of 0.05, based on the results of a preliminary experiment on five subjects. In total, 27 adult men and women were recruited who had been informed of the study's purpose and process and had agreed to participate. All subjects watched content on a smartphone for 20 minutes in the same posture and conditions while wearing and not wearing a trunk brace, and then their cervical and lumbar flexion-relaxation ratio, range of motion, pressure pain threshold, and perceived comfort were measured. Results: Compared to the non-wearing of a trunk brace, the wearing of a trunk brace resulted in a statistically significant smaller decline in cervical extension and right-side cervical rotation (p<0.05). When the subjects wore a trunk brace, their right- and left-side cervical and right-side lumbar pressure pain statistically significantly improved when compared to not wearing a trunk brace (p<0.05). They also perceived a significantly lowered level of comfort 20 minutes after wearing a trunk brace compared to immediately after wearing it (p<0.05). Conclusion: The trunk brace was effective in reducing declines in right-side cervical rotation and the occurrence of left- and right-side cervical and right-side lumbar pressure pain. The findings indicate the need to improve the perceived comfort of trunk braces.

환절기 자돈사고 예방을 위한 사양관리 포인트

박진성,Park, Jin-Seong 대한양돈협회 2006 養豚 Vol.28 No.10

TMAH / IPA / Pyrazine 수용액에서 전기화학적 식각정지법을 이용한 Si 기판의 미세가공

박진성,정귀상 ( Chin Sung Park,Gwiy Sang Chung ) 한국전기전자재료학회 1997 한국전기전자재료학회 추계학술대회논문집 Vol.1997 No.1

RTP로 $N_2$O 분위기에서 제조한 Oxynitride Gate 절연체의 물질적 전기적 특성

박진성,이우성,심태언,이종길,Park, Jin-Seong,Lee, Woo-Sung,Shim, Tea-Earn,Lee, Jong-Gil 한국재료학회 1992 한국재료학회지 Vol.2 No.4

Si(100) 웨이퍼를 사용하여 RTP 장비에서 $O_2$와 $N_2$O 분위기에서 8nm의 oxynitride를 제조 하였다. 기존의 로(furnace) 열산화막과 비교해서 oxynitride는 I-V, TDDB 특성이 우수하였고, flat-band voltage shift도 적었으며 $BF_2이온$ 주입에 의한 붕소 투과 억제 특성도 우수하다. 유전상수는 oxynitride가 열산화막에 비해서 크다. Oxynitride는 순수한 Si$O_2$유사하게 V 〉${\varphi}_0$ 구간에서 Fowler-Nordheim 터널링 특성을 나타낸다. SIMS, AES, 그리고 XPS 분석 결과 질소 pile-up이 Si$O_2$/Si 계면에서 나타나고, 이것은 oxynitride 산화막 특성 향상과 깊은 관련이 있다. Ultrathin(8nm) oxynitride (SiOxNy) film have been formed on Si(100) by rapid thermal processing(RTP) in $O_2$and $N_2$O as reactants. Compared with conventional furnace $O_2$ oxide, the oxynitride dielectrics shows better characteristics of I-V and TDDB, and less flat-band voltage shift. The oxynitride has a behavior of Fowler-Nordheim tunneling in the region of V 〉${\varphi}_0$ simialr to pure Si$O_2$oxide. The relative dielectric constant of oxynitride is higher than that of conventional pure oxide. Excellent diffusion harrier property to dopant(B$F_2$) is also observed. Nitrogen depth profiles by SIMS, AES, and XPS show nitrogen pile - up at Si$O_2$/Si interface, which can explain the improved properties of oxynitride dielectrics.

역학적 축 선정에 따른 전후면 경골천장각의 단순방사선학적 분석

박진성,정순택,황선철,김동희,곽지용,윤홍권,남대철,Park, Jin-Sung,Jeong, Soon-Taek,Hwang, Sun-Chul,Kim, Dong-Hee,Gwark, Ji-Yong,Yoon, Hong-Kwon,Nam, Dae-Cheol 대한족부족관절학회 2013 대한족부족관절학회지 Vol.17 No.3

Purpose: We investigated a statistical difference of tibial-articular surface (TAS) angles between radiographs of standing ankle anteroposterior (AP) and whole lower extremity view, and evaluated whether the tibial axis obtained from the standing ankle AP view reflects the original mechanical axis of lower extremity. Materials and Methods: Both the standing ankle AP and whole lower extremity view were taken from 60 legs of 30 healthy volunteers without a history of ankle surgery or deformity of lower limb. To determine the tibial axis, Takakura's and Hintermann's method were employed in the standing ankle AP view. To compare these results with the original TAS angle, ANOVA and multiple comparison test were used. Results: The mean TAS angle was 88.3 degrees(from hip joint to ankle), 89.5 degrees (from knee joint to ankle), 88.5 degrees (Takakura's method), and 90.2 degrees(Hintermann's method). Although there was a statistical significance (p=0.000) between these results, Takakura's method had no significant difference, compared to the results of whole extremity view by the multiple comparison test. Conclusion: The tibial axis obtained by Takakura's method reflects the original mechanical axis of lower extremity. When a surgical procedure is planned, however, it is necessary to consider that the ankle radiographs do not provide any information on the proximal deformity without the whole lower extremity view.