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정해도,문도민,강성건,류근걸 釜山大學校生産技術硏究所 1997 生産技術硏究所論文集 Vol.52 No.-
SOI(Silicon On Insulator)기술은 MOS(Metal-Oxide Semiconductor), CMOS(Complementary MOS)등의 전자집적회로 제조시 소자의 고속화, 고집적화, 저전력화, 발열 특성의 향상 등의 효과를 기대할 수 있다. 간략하게 Bonded SOI웨이퍼의 제조를 설명하면 SiO₂를 성장시킨 웨이퍼와 경면 가공한 다른 웨이퍼를 접합하여 열처리 등 후공정을 행한 후 한쪽 웨이퍼를 원하는 두께만큼 박막으로 가공한다. 본 연구에서는 기본적인 Bonded SOI 웨이퍼의 제조 공정 기술을 획득하고, 이를 통해 두께 3㎛ 이하, 표면거칠기 5Å이하의 상부 실리콘 박막을 가공하였다. SOI(Silicon On Insulator) technology is many advantages in the fabrication of MOS(Metal-Oxide Semiconductor) and CMOS(Complementary MOS) structures. These include high speed, lower dynamic power consumption, greater packing density, increased radiation tolearence et al. In the smiplest form of bonded SOI wafer manufacturing, creating, a bonded SOI structure involves oxidizing at least one of the mirror polished silicon surfaces, cleaning the oxidized surface and the surface of the layer to which it will be bonded, bringing the two cleanded surfaces together in close physical proximity, allowing the subsequent room temperature bonding to proceed to completion, and then following this room temperature joining with some form of heat treatment step, and device wafer is thinned to the target thickness. In this paper, The process of Bonded SOI wafer manufacturing is described briefly, and we made an attempt to manufacture the Bonded SOI safer that Si layer thickness is below 3㎛ and average roughness is below 5Å.
급성 심근경색 후의 좌심실류를 동반한 심실중격결손증 2례
김기환,류홍옥,문영수,고원섭,이광재,이건주,최석구,유원상 인제대학교 1989 仁濟醫學 Vol.10 No.1
Rupture of the interventicular septum, one of the must serious complication of acute myocardial infarction, requires prompt diagnosis and evaluation for surgical intervention. In two cases, we performed right heart catheterization, and two dimensional and Doppler echocadiogram for diagnosis.
정태교 ( Tae Kyo Chung ),현성열 ( Sung Youl Hyun ),김진주 ( Jin Joo Kim ),류일 ( Eell Ryoo ),이근 ( Kun Lee ),조진성 ( Jin Seung Cho ),황성연 ( Sung Yun Hwang ),이석기 ( Suk Ki Lee ) 대한외상학회 2005 大韓外傷學會誌 Vol.18 No.2
Background: Blunt thoracic trauma in children has a high morbidity and mortality. In this study, we assessed the significance of the injury pattern, mechanism and initial status in emergency department on severity and prognosis in pediatric blunt thoracic trauma patients. Method: We retrospectively reviewed medical records and chest X-ray and CT images of 111 pediatric blunt thoracic trauma patients from October 2000 to June 2005. Data recorded age, gender, season, injury mechanism, injury pattern, associated injury, length of hospital stay and cause of death. Result: Of all 111 patients, 68 patients were injured by motor vehicle accidents, 30 were falls, 5 were motorcycle accidents, 3 were sports accidents and 5 were miscellaneous. In thoracic trauma, single injury of lung contusion were 35 patients and 32 patients had multiple thoracic injuries. Hospital stay in school age group were longer than preschool age group. The causes of death were brain injury in 9, respiratory distress in 4, and hypovolemic shock in 2 patients. Emergently transfused and mechanically ventilated patients had higher mortality rates than other patients. Patients required emergency operation and patients with multiple thoracic injuries had higher mortality rates. Conclusion: In this study, patients with combined injury, emergency transfusion, mechanical ventilation, emergency operation, multiple injuries in chest X-ray had higher mortality rates. Therefore in these pediatric blunt thoracic trauma patients, accurate initial diagnosis and proper management is required.
Characteistics of Charge Traps and Poling Behavior of Poly (Vinylidene Fluoride)
서정원,류균상,이호성,Seo Jeong Won,Ryoo Kun Sang,Lee Hoo Sung Korean Chemical Society 1985 Bulletin of the Korean Chemical Society Vol.6 No.4
Transient charging and discharging currents as well as space charge limited currents have been measured in biaxially stretched poly(vinylidene fluoride) film under various poling fields and temperatures. At low temperatures and short poling times, the I-V characteristics showed shallow trap behavior. When the current values extrapolated to the infinite time, the I-V characteristics indicate that the distribution of the trap energy levels is uniform or very broad. The abnormal suppression of current at higher poling voltages and the high discharge rate observed also in the same voltage range are attributed to the morphological changes due to dipole reorientation.