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a-Si(n+)/p-Si(100) 구조에 있어서의 a-Si(n+)박막 Ohmic 특성 연구
민관홍,유정재,정상현,연제민,김광호 한국정보기술학회 2014 한국정보기술학회논문지 Vol. No.
In this study, a-Si(n+) thin film of a-Si(n+)/p-Si(100) heterojunction was analysed for ohmic contact properties. a-Si(n+) thin film was deposited on p-Si(100) substrate by RF magnetron sputtering with Si(n+, 0.001-0.005Ω· cm)target. To analysis the properties of a-Si(n+) thin film, a-Si(n+) was deposited on quartz substrate and conductivity property was measured by 4-point probe and structural property was analysed by XRD(X-Ray Diffraction). In order to improve contact resistance of metal-semiconductor interface, TiSix electrode of TLM(Transmission Line Model) pattern was formed. Electrode conductivity of Ag/TiSiX electrode annealed at various temperature of 800-950℃ and time of 2-10s were measured by 4-point probe. Ag/TiSiX/a-Si(n+)/p-Si(100) structure of TLM pattern was fabricated and a-Si(n+) ohmic properties of heterojunction a-Si(n+)/p-Si(100) was analysed by pA meter(HP 4140B). 본 연구는 태양전지에 적용시키기 위하여 p-Si(100) 기판위에 a-Si(n+)박막을 증착한 이종접합 a-Si(n+)/p-Si (100)구조에 있어서 a-Si(n+)박막 Ohmic 특성을 평가하였다. a-Si(n+)박막은 RF 마그네트론 스퍼터링법으로 Si (n+, 0.001-0.005Ω·cm, dopant; As)타겟을 스퍼터링하여 증착하였다. 증착된 a-Si(n+)박막의 특성평가를 위해 석영(Quartz)기판 위에 증착하여 4-point probe로 전기적 특성을 평가하였고, XRD(X-Ray Diffraction)로 구조적 특성을 평가 하였다. a-Si(n+)박막 Ohmic 특성을 평가하기 위한 TLM(Transmission Line Model) 패턴의 전극을 형성시켜 금속과 실리콘 계면의 접촉저항을 개선시키기 위한 타이실리사이드(TiSiX)를 형성하였다. TLM법 패턴 제작을 위해 a-Si(n+)/p-Si(100) 구조위에 Ag/TiSiX층을 제작하였으며, 전극 Ag/TiSiX의 열처리 온도(800-950℃) 및 시간(2-10sec)에 따른 특성변화를 관찰하여 4-point probe로 특성을 평가하였고, pA meter(HP 4140B)를 이용하여 이종접합 a-Si(n+)/p-Si(100)구조의 a-Si(n+)박막 Ohmic 특성을 측정하였다.
민관홍,유정재,정상현,찬다솜바스 시사바이,김광호 한국정보기술학회 2014 한국정보기술학회논문지 Vol. No.
In this study, fabrication and properties of MIS solar cell by using screen printing method which has advantage of mass production, low price, and simple processing compared with vacuum deposition method were analyzed. To fabricate MIS capacitor, Aluminum oxide(Al2O3) thin film(1nm) which has a good electrical and optical properties at visible ray region was deposited on p-Si(0.5-2Ω·cm) by RPALD(Remote Plasma Atomic Layer Deposition) and Ag, Al metal pastes used as front and back contact were printed using screen printing method then annealing by RTA(Rapid Thermal Annealing). Electrical properties of MIS capacitors were measured such as leakage current and C-V by pA meter(HP 4140B) and LCR meter(HP 4284A), respectively. Base on the result of MIS capacitor, MIS Solar cell using screen printing method was fabricated and electrical properties(I-V) was analyzed by solar simulator at STC(Standard Test Condition) 100mW/cm2, 25℃. In addition, spectral response properties of MIS solar cell was measured from 350nm to 1100nm wavelength by quantum efficiency measurement system. 본 연구는 전극을 형성하는데 있어서 진공증착법보다 공정이 간편하고 저가의 대량생산에 용이한 장점을 가진 스크린 인쇄법을 이용하여 MIS 태양전지를 제작하여 특성을 평가하였다. p-Si(0.5-2 Ω·cm) 기판 위에 기계적 특성이 뛰어나고 가시광선 영역에서 광학적 특성이 우수한 산화알루미늄(Al2O3, 1nm)박막을 RPALD (Remote Plasma Atomic Layer Deposition)을 이용하여 증착하고 전면 전극으로 Ag, 후면 전극 Al 페이스트를 스크린 인쇄법으로 인쇄한 뒤, RTA(Rapid Thermal Annealing, 급속열처리)장치로 열처리 하여 MIS 커패시터를 제작하였다. MIS 커패시터의 전기적 특성은 pA meter(HP 4140B)와 LCR meter(HP 4284A)를 이용하여 C-V특성과 누설전류 특성을 평가하였다. 커패시터의 전기적 특성 평가 후 스크린 인쇄법을 이용하여 MIS 태양전지를 제작하여 솔라시뮬레이터(Solar Simulator)로 STC(Standard Test Condition) 100mW/cm2, 25℃ 상태에서 태양전지의 전기적 특성을 평가하고, 양자효율 측정 시스템(Quantum Efficiency measurement system)을 이용하여 파장범위(350~1100nm)에 따른 스펙트럼 응답 특성을 평가하였다.
20세기 전반기 에큐메니칼 운동에서의 서구교회와 비서구교회
민관홍 한국교회사학회 2013 韓國敎會史學會誌 Vol.34 No.-
Auf der Weltmissionskonferenz (The World Missionary Conference) in Edinburgh 1910 forderten die 17 nicht-westlichen Vertreter ein herzliches Zusammenwirken zwischen westlichen Kirchen und nicht-westlichen Kirchen. Auf der Vollversammlung des IMR in Jerusalem 1928 forderten die Delegierten aus nicht-westlichen Kirchen die Anerkennung ihrer kirchlichen Selbständigkeit. Nicht-westliche Kirchen wünschten eine nationale vereinigte Kirche im Zusammenhang mit ihrem erwachsenden Nationalgefühl. Auf der Vollversammlung des IMR in Tambaram 1938 waren die Delegierten aus nicht-westlichen Kirchen in der Mehrheit. Aber dazu wurde im Bericht, der John Merle Davies vorgelegt hatte, ernüchternde festgestellt, dass nichtwestlichen Kirchen in einer schlechten finanziellen Lage waren, und dass ihre Strukturen immer noch schwach waren. Auf der Vollversammlung des IMR in Whitby 1947 wurde die Partnerschaft zwischen westlichen Kirchen und nicht-westlichen Kirchen viel stärker verwirklichen. Die Weltkonferenz für Praktisches Christentum (The Universal Christian Conference on Life and Work) veränderte nicht ihren westlich geprägten Charakter auf der Vollversammlung in Stockholm 1925 sowie auf der Vollversammlung in Oxford 1937. Auch die Weltkonferenz für Glauben und Kirchenverfassung (The World Conference on Faith and Order) veränderte nicht ihren westlich geprägten Charakter auf der Vollversammlung in Lausanne 1927 sowie auf der Vollversammlung in Edinburgh 1937. Deshalb hatten die Weltkonferenz für Praktisches Christentums und die Weltkonferenz für Glauben und Kirchenverfassung keine guten Beziehungen zu nichtwestlichen Kirchen. Darüber hinaus dominierten westliche Kirchen den Gründungsprozess des Ökumenischen Rates der Kirchen (ÖRK). Auf der Vollversammlung in Amsterdam 1948 gab der ÖRK der Lage der nicht-westlichen Kirchen keine Beachtung. Bei den ökumenischen Bewegungen in der ersten Hälfte des 20. Jahrhunderts. will westliche Kirchen keine echte ökumenische Annäherung an nicht-westlichen Kirchen.