반도체·디스플레이 장비용 바닥 환경진동허용규제치의 실험적 평가방법 고찰

안채헌,최정희,박준순,박민수,An, Chae Hun,Choi, Jeong Hee,Park, Joon Soon,Park, Min Su 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.1

The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.

도로 하부 통과 배관의 주행 하중 속도에 따른 진동 특성

원종화(Jong Hwa Won),선진선(Jin Sun Sun),유한규(Han-Kyu Yoo),김문겸(Moon Kyum Kim) 한국가스학회 2008 한국가스학회지 Vol.12 No.1

지진 및 외부 진동에 의하여 구조물에 발생하게 되는 진동량은 진동 속도와 피해규모가 비례하는 관계에 있음을 고려하여 일반적으로 진동속도로 나타내어진다. 본 연구에서는 진동 속도 기반의 구조물 진동 기준을 검토하고, 이를 고려하여 도로 하부 매설 가스 강관의 안정성 평가를 수행하였다. 가스공사 주사용 배관인 762 mm API 5L Gr. X65 강관을 해석 대상 배관으로 선정하였으며 도로설계기준에 의하여 지반 매설 조건 및 DB-24 하중을 다양한 속도에 대한 시간 함수로 고려하여 재하하였다. 진동속도는 차량 진행 속도 80 km/h까지 증가하다가 이후 감소하는 경향을 보였으며, 차량 진행 속도 80 km/h에서 0.034cm/s의 진동 속도를 보임으로서 진동 기준 대비 매우 작은 값임을 확인하였다. 또한 감쇄법칙을 적용하여 진행파의 속도를 분석한 결과, 차량 진행 속도 80 km/h에서 가장 작은 속도를 나타내었다. Vibration velocity induced by earthquakes or external vibration sources is one of the integrity assessment indexes, and is also a representative value used to describe the amount of vibration because it is based on a proportional relationship with the damage scale. In this study, the vibration velocity criterion for structures is first examined. Then, based on the velocity criterion, an integrity assessment is performed. Burial condition is set up based on the “Highway and Local Road Design Criteria” with API 5L Gr. X65 pipeline (D = 762 mm). The FE model considers DB-24 vehicle load as a time function with a varying velocity in the range of 20~160 km/h. Maximum vibration velocity occurs at v = 80 km/h and decreases after v = 80 km/h. The maximum vibration velocity of buried pipeline by DB-24 loads is about 0.034 츠/s. The velocity that occurs is in the range of allowable values for each vibration velocity criterion. The wave propagation velocity was identified based on attenuation law and the minimum value appears at vehicle velocity 80 km/h that has maximum vibration velocity.

철도 진동의 영향을 받는 주거 건물의 진동 평가 기준의 비교분석

이민정(Lee Min-Jung),한상환(Han Sang-Whan) 대한건축학회 2009 대한건축학회 학술발표대회 논문집 - 계획계/구조계 Vol.29 No.1(구조계)

Multi-dimensional land use planning is introduced for the high density development of the urban area. That has advantages such as protecting interruption of the site due to railway and giving the land near the urban center. When buildings construct close to the railway, vibration problem is necessarily checked. The railway-induced vibration may effect on the nearby structure's damage and serviceability such as the impairment of the stability, cracks, and annoyance of residents. Several countries have vibration criteria that provide guideline values according to vibration sources and receivers. In Korea also has vibration criterion, but it does not consider the properties of structures and has limitations of application. Thus this study comparatively analyzed vibration criteria which are mostly cited in our country. Form the result this study suggest the guideline to apply the criteria.

함정 디젤엔진 진동규격 연구

이경현(Kyoung-Hyun Lee),한형석(Hyung-Suk Han),박미유(Mi-You Park),조흥기(Heung-Gi Cho) 한국소음진동공학회 2011 한국소음진동공학회 학술대회논문집 Vol.2011 No.10

Vibration of diesel engines in naval vessels causes structure vibration which is significant under water radiating noise source under CIS (Cavitation Inception Speed). So managing the vibration level of diesel engine is important for survivability and also durability of naval vessels. Therefore, in this research, a vibration criterion which is applied for Korean naval vessels are reviewed. It is compared with the DNV, ABS and merchant ship’s diesel engine criteria. And also vibration data of three Korean naval vessels are analyzed. As a result, reasonable criteria of diesel engine vibration and shipbuilding standards are suggested.

진동대 실험을 통한 수평진동 체감도 평가

조강표,정승환,정명채,조수연 한국풍공학회 2007 한국풍공학회지 Vol.11 No.1

본 논문에서는 진동대 실험을 통한 수평진동에 대한 체감도를 평가하고자 한다. 먼저 국외선행연구를 조사하여, 실험의 적절한 방향을 모색하였다. 실험은 1차원 수평 진동대를 사용하고, 무빙룸은 우리가 생활하고 있는 공간과 유사하게 설계 및 제작하였다. 실험평가방법은 피험자를 40명 모집하여, 8명씩 5개조로 나누어 주파수 0.2Hz~1.2Hz 범위에서 가속도를 증가시켜 체감도에 대해 평가하였다. 수평진동 실험으로 얻어진 체감도 누적분포를 0~20%, 21~40%, 41~60%, 61~80%, 81~100%로 나누어 추세선을 그려서 성능평가곡선을 작성하였다. 또 국외 사용성 평가기준에 반영된 설문지를 바탕으로 실험에 적합한 설문지를 제작하여, 진동에 대한 피험자들의 느낌을 조사하였다. 실험결과를 주파수에 따른 지각임계가속도로 평가하였다. 그리고, 인간의 수평진동지각에 대해 감각적요소 즉 시각적, 청각적요소가 얼만큼 영향을 주는지 정량적으로 평가하였다. In this paper, threshold of motion perception for horizontal vibration was estimated by one-dimensional shaking table. After investigating preceding studies in foreign countries, a suitable course of experiments was organized. We used one-dimensional shaking table for horizontal vibration tests, and a vibration house made similar to a living space was made. Experimental results were recorded by increasing acceleration in the range of 0.2Hz through 1.2Hz of frequency after organized into five experimental groups, each of which was composed of eight persons. We obtained performance curves by dividing the distribution of perception from horizontal vibration tests into the range of 0~20%, 21~40%, 41~60%, 61~80%, 81~100% and then fitting curves. Also we made questionnaire based on human comfort criteria of foreign countries, and examined the feeling of subjects. From the results of horizontal vibration tests, it was found that acceleration of perception was low when frequency was high, and that visual and auditory senses affects the human perception for horizontal vibration.

TFT-LCD 생산공장 내 유틸리티 가동으로 인한 정밀장비 과도진동 현상 및 평가

백재호(Baek, Jae-Ho),이홍기(Lee, Hong-Ki),손성완(Son, Sung-Wan),전종균(Chun, Chong-Keun) 한국소음진동공학회 2007 한국소음진동공학회 논문집 Vol.17 No.8

Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.

반복되는 동하중에 의한 구조물 상부바닥 균열 감소를 위한 진동저감 연구

전종균(Chun, C.K.),박삼진(Park, S.J.),박상곤(Park, Sang-Gon),김도영(Kim, Do-Young) 한국산학기술학회 2011 한국산학기술학회논문지 Vol.12 No.4

본 연구에서는 반복되는 동하중에 의한 구조물 상부바닥에 나타나는 균열에 대한 연구를 수행하였다. 물류 센터 상층 바닥슬라브에 균열발생 원인으로 의심되는 지게차의 진동이 향후 운영상에 문제가 되고 있다. 따라서 본 연구에서는 주요지점에서 지게차의 운행/적하차시 발생하는 진동을 측정 및 분석 하였다. 측정된 진동을 바탕으로 진 동허용규제치와 비교분석한 결과, 허용규제치를 초과하는 과도진동으로 판명되어 구조적 균열의 원인을 규명하였다. 또한 측정 결과 값을 바탕으로 범용 유한요소모델링 및 해석을 통해 진동저감을 위한 영향성을 평가하였다. 이에 따 른 대책방안을 제시하였으며, 대책 안 시공 후 진동저감효과를 검증할 수 있었다. In this study, we investigate the cracks that formed on the upper floor of the structures due to continuous dynamic loading. We explain the cause of floor slab cracks on the upper floor of the distribution center and discuss preventive measures that can enhance the center’s functions and security. In order to explain how a forklift's excessive vibration can cause the cracks, we have measured and analyzed the vibration during a forklift's operation and discovered that the cracks form because the vibration exceeds the vibration criteria. Using a finite element modeling on such results, we have come up with optimal methods to reduce the vibration and confirmed their validity by measuring the vibration after implementing our methods.

Vibration-based damage alarming criteria for wind turbine towers

Nguyen, Cong-Uy,Huynh, Thanh-Canh,Dang, Ngoc-Loi,Kim, Jeong-Tae Techno-Press 2017 Structural monitoring and maintenance Vol.4 No.3

In this study, the feasibility of vibration-based damage alarming algorithms are numerically evaluated for wind turbine tower structures which are subjected to harmonic force excitation. Firstly, the algorithm of vibration-based damage alarming for the wind turbine tower (WTT) is visited. The natural frequency change, modal assurance criterion (MAC) and frequency-response-ratio assurance criterion (FRRAC) are utilized to recognize changes in dynamic characteristics due to a structural damage. Secondly, a finite element model based on a real wind turbine tower is established in a structural analysis program, Midas FEA. The harmonic force is applied at the rotor level as presence of excitation. Several structural damage scenarios are numerically simulated in segmental joints of the wind turbine model. Finally, the natural frequency change, MAC and FRRAC algorithm are employed to identify the structural damage occurred in the finite element model. The results show that these criteria could be used as promising damage existence indicators for the damage alarming in wind turbine supporting structures.

영상 위상기반 진동 측정 및 자기회귀 모델을 통한 결함 탐지

이승석,공예슬,MIAO YINAN,전준영,박규해 한국비파괴검사학회 2022 한국비파괴검사학회지 Vol.42 No.4

Vision-based vibration measurement has emerged as a powerful tool in the field of structural health monitoring. The camera, as one of the non-contact sensors, can capture the structural dynamics with high resolution and without any mass loading effect. The defect detection through modal parameters, such as operational deflection shape and mode shape, can be further improved using a camera. In this study, a phase-based displacement measurement with an optimal complex steerable filter is used to accurately measure the structural vibrations. Based on the measured vibration data, a damage detection technique using autoregressive (AR) model is proposed that aims to detect different types of damage. First, a one-dimensional (1D) AR model is applied to the obtained signals to examine the feasibility of applying time series analysis techniques for data-based structural health monitoring. Then, a two-dimensional (2D) AR model that fully utilizes the high-resolution measurement provided by a camera is proposed for more effective damage detection. The experiment was conducted on a five-story structure with three different types of damage, and damaged detection and classification were efficiently performed using 1D and 2D autoregressive models. 최근 카메라를 이용한 원거리 진동 측정 기법 및 구조 건전성 모니터링 적용 연구가 활발히 진행되고 있다. 카메라 시스템 기반 구조 건전성 모니터링 연구의 경우, 높은 공간해상도와 질량부하 효과 없는 비 접촉식 센싱을 특징으로 operational deflection shape, 모드 형상 등 모달 파라미터를 통한 결함 탐지에 집중되어 있다. 본 연구에서는 진동 측정에 최적화된 단일 steerable 필터를 사용한 영상 위상기반 변위 측정 기법을 활용하여 높은 정확성 및 강건성으로 진동을 측정하였으며, 이를 바탕으로 보다 다양한 결함의 신뢰성 높은 결함 진단을 위한 데이터 기반 구조 건전성 모니터링 적용 연구 수행을 목표로 한다. 먼저, 시계열 분석 기법 중 하나인 자기회귀(Autoregressive) 모델을 통하여 데이터 기반 구조 건전성 모니터링 연구 적용성을 검토하고 더 나아가, 카메라의 장점을 극대화한 2차원 자기회귀모델을 새로운 특성인자로 제안하여 효율적인 결함 진단을 수행하였다. 본 연구에서는 5층 구조물에서 세 가지 결함을 모사하고 자기회귀(AR) 모델과 2차원 자기회귀(2D AR) 모델을 통하여 구조물의 결함 탐지 및 분류를 수행하였다.

Structure integrity of rack module for compressed natural gas (CNG) pressure vessel - under automotive collision and vibration

Hyo-Seo Kwak,Chul Kim 대한기계학회 2016 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.30 No.11

A rack module is used to load a tube trailer with Compressed natural gas (CNG) pressure vessels and transport them. While driving, vibration is inevitable due to rough road surface and engine torque. Furthermore an automotive collision could lead to the destruction of the rack module and pressure vessels, and cause gas leakage or the explosion of the pressure vessels. In this study, the structural integrity of a rack module, whose total weight is about 28.6 tons including 20 high pressure vessels, is evaluated by both crash test and impact analysis. The fatigue failure of the rack module is predicted under impact loading caused by collision and under repeated loading due to vibration.