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Etch Rate Dependence of Differently Doped Poly-Si Films on the Plasma Parameters
박성호,김윤태,김진섭,김보우,마동성,Park, Sung-Ho,Kim, Youn-Tae,Kim, Jin-Sup,Kim, Bo-Woo,Ma, Dong-Sung 대한전자공학회 1988 전자공학회논문지 Vol. No.
플리즈마 변수로서 가스조성과 압력 및 RF 전력이 인 및 붕소가 각각 다른 양으로 주입된 다결정 실리콘의 식각율 변화에 미치는 영향을 고찰하였다. $POCl_3$에 의해 인이 주입된 경우, 염소조성보다 불소조성이 많은 영역, 즉 $Cl_2$와 $SF_4$의 비가 17대 33일 때, 가장 큰 비등방성과 가장 작은 선폭손실을 달성하였다. 플라즈마 조건에 관계없이 주입된 불순물 농도의 증가에 다라, 인이 주입된 경우는 식각율이 증가하였고, 붕소가 주입된 경우는 식각율이 반대로 감소하였다. 또한, 급속 열처리에 의한 활성화 시간의 함수로서 인이 주입된 다결정실리콘의 식각율변화를 측정한 결과, 도우핑 농도뿐 아니라 활성화된 운반자, 즉 전자의 농도가 그 식각율 증가에 중요한 역할을 한다는 것을 확인하였다. The dependence of the etch rates of differently doped poly-Si films on the gas composition, the chamber pressure and the RF power was investigated in detail. The highest anisotropy and the lowest CD loss were achieved at the $SF_6$-rich compositions, i.e., $Cl_2:SF_6$=17:33 (SCCM), in the $POCl_3$-doped poly-Si. The etch rates increased for n-type dopant (phosphorus), while decreased for p-type (boron) with increasing the doping levels irrespective of plasma parameters. And from the results of the activation of doped poly-Si films the active carrier concentrations as well as the doping concentrations were found to be responsible for the increase of the etch rate of the phosphorus-doped poly-Si.
박성호,윤여일,김성현 ( Seong Ho Park,Yea Il Yoon,Sung Hyun Kim ) 한국공업화학회 1997 공업화학 Vol.8 No.5
암모니아와 금속염과의 기-고 반응을 이용한 화학열펌프에서 열전달 특성과 물질전달 특성을 개선하기 위하여 금속염을 팽창흑연에 반지름 방향으로 겉보기 밀도가 증가하도록 함침시켜 새로운 비균일 열전도성 반응블럭을 제조하였다. 이것은 겉보기 밀도가 반지름 방향으로 165, 222, 279, 337, 394(kg/m³)로 증가하도록 만든 것으로 균일 열전도성 반응블럭과 반응특성을 비교하였다. 실험결과 열전달특성은 비균일 열전도성 반응블럭이 훨씬 좋았고, 반응을 반복함에 따라 물질전달과 반응특성이 개선되었으며 반응의 재현성도 양호함을 알 수 있었다. The nonuniform thermal conductive reaction blocks were manufactured by impregnation of metal salts on the expanded graphite to improve the heat and mass transfer ability of reaction block for the chemical heat pump using the reaction of ammonia and metal salts(halide). The nonuniform blocks were designated to increase apparent density, like 165, 222, 279, 337, 394 kg/m³ radially. The experimental results showed that the heat transfer characteristics of nonuniform blocks were better than uniform blocks. As the reaction of ammonia repeated, the volumetric expansion in the reaction block makes the mass transfer improve, and the reproducibility better.
박성호,정일영,이권용,Park, Sung-Ho,Jung, Il-Young,Lee, Kwon-Yong 대한치과보존학회 2003 Restorative Dentistry & Endodontics Vol.28 No.1
Chewing simulator, which can partly mimic the motion of chewing motion of human, has been successfully developed. The purpose of its development was to make a new machine which can anticipate the clinical results of restoration in the human teeth more accurately in vitro condition It is composed of 4 major parts, chewing part, motor part, water bath, controlling part. The controlling part control the chewing force, frequency, the temperature and running time of water. Additionally, the actual chewing force and remaining time is shown in the monitor of controlling part. At present, the chewing cycle is composed depending on the pre-published data of foreign people. Long term clinical data should be additionally collected for the simulator to mimic the clinical results more accurately.
박성호,박한준,윤승환,조준,문창택,장상근,Park, Sung-Ho,Park, Han-Jun,Youn, Seung-Hwan,Cho, Joon,Moon, Chang-Taek,Chang, Sang-Jeun 대한신경외과학회 2001 Journal of Korean neurosurgical society Vol.30 No.1
Object : The rapid and early oxygen delivery to brain tissue was a common therapeutic method in the treatment of severe head injury patients. The purpose of this study was to investigate the effect of increased fraction of inspired oxygen in early stage of severe head injury. Methods : The parameters of research were CSF(cerebral spinal fluid) oxygen pressure($PcsfO_2$), lactate, pH, temperature, and CSF carbon dioxide pressure($PcsfCO_2$). We selected 28 patients with head trauma whose the Glasgow Coma Scale(GCS) score was less than 8 point at admission. All patients were mechanically ventilated and monitored with the commercial ICP monitoring device. Each of parameters was compared as increased fraction of inspired oxygen. In experimental cohort of 14 patients, the mean $PcsfO_2$ level was increased to $314.93{\pm}259.15mmHg$ by raising the $FiO_2$ from 40% to 100% for nine hours(p<0.05). And the mean CSF lactate level was decreased to $2.96{\pm}1.98mmol/L$ on 100% $FiO_2$ as compared with $5.98{\pm}3.25mmol/L$ on 40% $FiO_2$ in control group(p<0.05). The only above two parameters were showed statistically meaningful outcome. Conclusions : Although this study was performed in small cohort and short period, these results supports that increased inspired oxygen therapy in severe head injuried patients was recommended as a modality of treatment in future through the continuous survey.
대소변불리(大小便不利)를 동반한 척추 압박골절 환자 치험 1례
박성호,박준식,송윤경,엄유식,Park, Sung-Ho,Park, Jun-Sik,Song, Yun-Kyung,Eom, Yu-Sik 척추신경추나의학회 2005 대한추나의학회지 Vol.6 No.1
In recent years, according to the increase of the osteoporosis and traffic accidents, the vertebral compression fracture patients are increased, This Study is clinical observation to the patients who be taken compression fracture of the $L1^{\sim}L2$ vertebra bodies with the symptoms of urinary disorder and ileus. She was treated by bed rest, acupuncture and moxibustion, herb medicine, physical therapy. In the observation of this case, I think that conservative treatment which involved acupuncture, moxibustion therapy and herb medicinal treatment is more effective than common nonoperative therapy.