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RF PACVD에 의한 초경합금상에 다이아몬드 박막의 합성
김대일,이상희,박구범,박상현,이용근,김보열,김영봉,이덕출,Kim, Dae-Il,Lee, Sang-Hee,Park, Gu-Bum,Park, Sang-Hyun,Lee, Yong-Geun,Kim, Bo-Youl,Kim, Young-Bong,Lee, Duck-Chool 대한전기학회 2000 전기학회논문지C Vol.55 No.12
Diamond thin films were synthesized on WC-Co substrate at various experimental parameters using 13.56MHz RF PACVD)radio frequency plasma-assisted chemical vapor deposition). In order to increased the nucleation density, the WC-Co substrate was polished with 3${\mu}m$ diamond paste. And the WC-Co substrate was preatreated in $HNO_3\;:\;H_2O$ = 1:1 and $O_2$ plasma. In $H_2-CH_4$ gas mixture, the crystallinity of thin film increased with decreasing $CH_4$ concentration at 800W discharge power and 20torr reaction pressure. In $H_2-CH_4-O_2$ gas mixture, the crystallinity of thin film increased with increasing $O_2$ concentration at 800W discharge power, 200torr reaction pressure and 4% $CH_4$ concentration.