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The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
Sung-Jin Kim,오혜근,안일신,Jai-Sun Kyoung,Jin-Back Park,Jung-Hyuk Cho,Seung-Wook Park,Sung-Hyuck Kim 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.49 No.2I
The line width has been gradually reduced to enhance the integration of semiconductor devices. As minimum line widths have shrunk, the exposure wavelength has also progressively shrunk. The exposure wavelengths have been reduced progressively from 436 nm to 365 nm to 248 nm and to 193 nm. This shrinkage of the exposure wavelength has caused some serious problems. One of the problems is the growth of defects in the reticle during the process. Such defects in the reticle are called haze. Haze is formed around the pellicle on the quartz side of the mask and on the chrome side of the mask. In this investigation, mask haze is intentionally formed on the backside of a mask by using 193 nm laser irradiation. The mask thickness is measured by using atomic force microscopy and spectroscopic ellipsometry. We investigated the simulated critical dimension value and the throughput by using Solid-E of Sigma-C for each mask. This paper will use simulations to describe the relationship between the transmittance and haze formation, the effect of haze on the process latitude, and throughput reduction due to haze formation. This study will lead to an understanding of the impact of possible limitations of haze transmission on the imaging performance of each mask.
Jung Hee Kwon,Wook Jin Kim,So Youn Lee,Hyun Wook Kang,Woo Taek Kim,Young Sang Lee,Chee Hark Harn 한국작물학회 2007 한국작물학회 학술발표대회 논문집 Vol.2007 No.11
Tocopherol belongs to the Vitamin E class of lipid soluble antioxidants that are essential for human nutrition. Tocopherols consist of a chromanol ring and a 15-carbon tail derived from homogentisate (HGA) and phytyl diphosphate, respectively. Condensation of HGA and phytyl diphosphate, the committed step in tocopherol biosynthesis, is catalyzed by HGA phytyltransferase (HPT). To increase tocopherol level in cucumber fruit, we performed Agrobacterium-mediated transformation with mdhpt gene, encoding HPT, isolated from apple (Malus domestica). We obtained two independent T0 cucumber plants from transforming 2,142 explants. Southern blot analysis of T0 showed that mdhpt was inserted in the genome. In order to test the tocopherol level, T1 cucumber fruits were screened by GC analysis. From 39 T1 fruits tested, some fruits showed 1.5-2 fold in α- and β-tocopherol content comparing to control. However, most of fruits contained lower levels of γ- and δ- tocopherol indicating a partition of metabolites in tocopherol biosynthesis pathway. We selected these T1 line and made a self-cross to obtain T2 seeds.
Clinicopathological Characteristics of Colon Cancer Diagnosed at Primary Health Care Institutions
( Sang Hyun Park ),( Chi Wook Song ),( Yun Bae Kim ),( Young Sun Kim ),( Hwang Rae Chun ),( Jung Hyun Lee ),( Won Jong Seol ),( Hyung Sun Yoon ),( Myung Kwon Lee ),( Jong Hyup Lee ),( Choon Sang Bhang 대한장연구학회 2014 Intestinal Research Vol.12 No.2
Background/Aims: The purpose of this study was to evaluate the clinicopathologic characteristics of colon cancers detectedat the SOK Sokpeynhan Internal Medical Network, a nationwide system of primary health care institutions. Methods: Weanalyzed 579 colon cancer patients diagnosed using colonoscopy at the SOK network from January 2011 through December2012. Cancers from the rectum to the splenic flexure were classified as left colon cancer. Patients over 65 were classified assenior. Results: The mean age (±SD) of subjects was 60.9±10.5 years and 61.1% were men. More than one quarter (28.2%) ofpatients were asymptomatic. The prevalence of left colon cancer was higher (77.9%) than that for right colon cancer. The mostfrequent macroscopic and histologic types were depressed (58.9%) and moderately differentiated adenocarcinoma (52.2%),respectively. Asymptomatic subjects displayed protruding or well differentiated adenocarcinoma, while symptomatic patientswere more likely to display depressed or moderately differentiated adenocarcinoma (P <0.05). The mean age of the right coloncancer group was higher than that for the left colon cancer group (P <0.05). Among symptomatic patients, the most frequentsymptoms were bloody stool for patients with left colon cancer and abdominal discomfort for patients with right colon cancer(P <0.05). The prevalence of depressed cancer was higher in older subjects as compared to younger subjects (P <0.05). Theprevalence of right colon cancer tended to increase with age, although this difference did not achieve statistical significance(P >0.05). Conclusions: Study results indicated an increase of colon cancer amongst younger demographics in recent years.The effectiveness of colonoscopy screening was also evident, as asymptomatic patients demonstrated frequent findings of welldifferentiated adenocarcinomas. Study results also suggested a need for closer examination of older patients, as right coloncancer tended to increase with age. (Intest Res 2014;12:131-138)
Exchange Nailing for Aseptic Nonunion of the Femoral Shaft after Intramedullary Nailing
( Sung-soo Ha ),( Chang-wug Oh ),( Jae-wook Jung ),( Joon-woo Kim ),( Kyeong-hyeon Park ),( Seong-min Kim ) 대한외상학회 2020 大韓外傷學會誌 Vol.33 No.2
Purpose: Although exchange nailing is a standard method of treating femoral shaft nonunion, various rates of healing, ranging from 72% to 100%, have been reported. The purpose of this study was to evaluate the efficacy of exchange nailing in femoral shaft nonunion. Methods: We retrospectively reviewed 30 cases of aseptic femoral shaft nonunion after intramedullary nailing. The mean postsurgical period of nonunion was 66.8 weeks. A nail at least 2 mm larger in diameter was selected to replace the previous nail after reaming. Distal fixation was performed using at least two interlocking screws. The success of the procedure was determined by the finding of union on simple radiographs. Possible reasons for failure were analyzed, including the location of nonunion, the type of nonunion, and the number of screws used for distal fixation. Results: Of the 30 cases, 27 achieved primary healing with the technique of exchange nailing. The average time to achieve union was 23.1 weeks (range, 13.7-36.9 weeks). The three failures involved nonunion at the isthmic level (three of 15 cases), not at the infraisthmic level (zero of 15 cases). Of eight cases of oligotrophic nonunion, two (25%) failed to heal, and of 22 cases of hypertrophic nonunion, one (4.5%) failed to heal. Of 11 cases involving two screws at the distal fixation, two (18.2%) failed to heal, and of 19 cases involving three or more screws, one (5.3%) failed to heal. None of these findings was statistically significant. Conclusions: Exchange nailing may enable successful healing in cases of aseptic nonunion of the femoral shaft. Although nonunion at the isthmic level, oligotrophic nonunion, and weaker distal fixation seemed to be associated with a higher chance of failure, further study is needed to confirm those findings.