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오혜근,이윤경,임성철 대한병리학회 2002 Journal of Pathology and Translational Medicine Vol.36 No.1
We present a case of ovarian leiomyoma without related clinical symptoms in a 68-year-old woman. Leiomyoma arising primarily in the ovary is rare. However, it is believed that there are actually more cases than those reported because this condition is usually mistaken for a fibrothecoma or parasitic leiomyoma. Most cases previously reported were incidentally presented and coexisted with other ovarian lesions. The present case was characterized by a 9cm, round lobulated mass that totally replaced the left ovary without uterine leiomyoma or coexisting ovarian lesions.
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Process Study of a 200 nm Laser Pattern Generator
오혜근 한국물리학회 2002 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.41 No.6
An overview of resist and process development for use as the next laser pattern generation tool, which will use an approximately 200 nm laser, is presented. Some mask specific issues must be overcome if a 200 nm laser pattern generator is to be used rather than relatively well-known 193 nm wafer process. Post coating and post exposure delay are the main issues that should be taken care of before using a 200 nm laser pattern generator. The limits and possible uses of a 200 nm laser pattern generator are discussed. Among the possible 200 nm light sources, a 198 nm continuous wave laser was recently chosen as the light source. This wavelength is a little bit larger than 193 nm, so some resolution might be lost in terms of aerial image, but the transmittance at 198 nm is larger than that at 193 nm. This allows for a larger side wall angle and a larger process latitude in the resist process. Overall, the target resolution of a 70 nm node can be easily obtained with a 200 nm laser pattern generator.
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오혜근,서재홍 대한병리학회 2003 Journal of Pathology and Translational Medicine Vol.37 No.5
We present two cases of congenital epulis in female newborns. Congenital epulis is a very rare lesion of uncertain histogenesis. The present lesions were located on the gingiva of the anterior alveolar ridge of the maxilla and the mandible, respectively. Both tumors consisted mainly of large eosinophilic granular cells arranged in solid nests. The neoplastic granular cells showed positive reactions for neuron specific enolase and vimentin in their cytoplasms, while they were entirely negative for other antibodies used in this study.
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오혜근,구자봉,김동출,심재영,박정훈,박영균,임성철 조선대학교 2003 The Medical Journal of Chosun University Vol.28 No.1
We present a case of angiomyofibroblastoma of the vulva in a 32-year-old woman. The asymptomatic lesion measured 4×3cm and appeared as a gray-white myxoid mass on cut sections Histologically, it appeared as a relatively well-circumscribed spindle cell proliferation with alternating hypercellular and hypocellular areas and proliferation of thin-walled blood vessels. Immunohistochemically, the stromal cells expressed vimentin, CD34 and progesterone receptor, but not desmin, α-smooth muscle actin, S-100 protein and estrogen receptor. These features were similar to those of angiomyofibroblastoma as previously reported in the vulva except negativity for desmin A case of pathologically proven very rare tumor of angiomyofibroblastoma of the vulva is presented with a literature review
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64MB DRAM 선폭 구현을 위한 Half-Tone Type 위상 변이 매스크
오혜근 한양대학교 공학기술연구소 1993 공학기술논문집 Vol.2 No.1
Various methods of lithography are developed for pattern delineation of ultra large scale integrated circuits. Among them, i-line + half-tone type phase shifting mask is the leading candidate for 67MB dynamic random access memory. Optical resolution limit and process lattitude are examined by aerial image and developed resist profile study. The contrast of aerial image shows that the optimum transmittance of half-tone chrome is about 6%. The resist profile study gives about 1.2㎛ depth of focus for 0.35㎛ patterns. The simulation shows half-tone mask is suitable method for 0.35㎛ patterns with enough depth of focus.
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193 nm 용 화학 증폭형 감광제 시뮬레이션을 위한 노광 후 지연 효과에 대한 연구
이영미,오혜근 한양대학교 이학기술연구소 2001 이학기술연구지 Vol.3 No.-
The deprotection of 193 run chemically amplified resist is amplified by photo-generated acid during post exposure bake. The acid concentration is changed through reactions such as diffusion, evaporation and acid neutralization with atmospheric base contaminations during post exposure delay. Since the acid concentration greatly affects the final critical dimension, it is very important to control post exposure delay time. In this paper the characteristics of the post exposure delay effect on photoresist profiles was studied. We measured the transmittance and thickness change of the 193 run chemically amplified resist with respect to post exposure delay time. From this result the imaginary refractive index change with post exposure delay time was also obtained. This post exposure delay effect was included in our simulator, LUV (Lithography for Ultra-Violet), and the resulting resist profiles were obtained. 193 nm 용 화학 증폭형 감광제(Chemically Amplified Resist)는 노광(Exposure)을 하면 PAG(Photo Acid Generator)에 의해 산이 생성되고 노광 후 열처리 (Post Exposure Bake) 동안 비보호 (deprotection)반응이 일어나게 된다. 그런데 빛에 의해 만들어진 산은 노광을 하고 노광 후 열처리를 하기까지의 지연 시간 동안 확산, 증발, 그리고 대기중 염기와의 중화반응 등에 의해 농도가 변할 수 있다. 노광과 노광 후 열처리뿐만 아니라 노광 후 지연 (Post Exposure Delay)에 의해 변한 산의 농도가 현상 후 최종 선폭에 막대한 영향을 끼치게 된다. 따라서 본 논문에서는 노광 후 지연 시간에 따른 193 nm 용 양성 화학 증폭형 감광제의 투과율과 두께 변화를 측정하여 노광 후 지연 시간에 따른 하수 굴절률을 얻었고, 그 결과를 노광 후 열처리시 비보호 고분자 영역의 농도와 관련시켜 선폭에 미치는 영향을 연구하였으며 자체 제작한 시뮬레이터 LUV(Lithography for Ultra-Violet)에 적용하였다.
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임성철,오혜근,민영돈 대한병리학회 2002 Journal of Pathology and Translational Medicine Vol.36 No.5
Gastrointestinal lipomas are rare and are most common in the right colon. They are in opposite distribution of predilection site in comparison to adenocarcinomas and adenomatous polyps. The peak incidence for lipoma of the large bowel is in the sixth decade when there is a high incidence of colorectal carcinoma. Because of their location and the age of the patients at presentation, large bowel lipomas are usually treated on the basis of a presumptive malignant diagnosis. A 79-year-old male is presented with a 1-year history of rectal bleeding. Colonoscopy demonstrated a pedunculated mass nearly obstructing the rectum. Anterior resection was performed. The mass consisted of submucosal lobulated mature fatty tissue with ulcerated mucosa. The authors describe a case of a submucosal lipoma of the rectum with review of literatures.
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Modeling of the Cross-linking and the Diffusion Processes in a Negative Chemically Amplified Resist
김상곤,오혜근,정영대,안일신 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.2
A chemically amplified negative-type resist has proposed advantages of a negative tone imaging. However, a negative-image system has been analyzed virtually by using a positive-image simulation because the dark field of a positive-tone mask corresponds to the bright field of a negative-tone mask. In this paper, a new modeling method for the cross-linking and the diffusion processes is introduced for the lithography process of a negative resist. For random approaches, the gel formation model and the Monte Carlo method are described for negative resist. The simulated results for negative resists are in good agreement with the experimental results.
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