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BCl<sub>3</sub> 평판형 유도결합 플라즈마를 이용한 GaAs 건식식각
임완태,백인규,정필구,이제원,조관식,이주인,조국산,Lim, Wan-tea,Baek, In-kyoo,Jung, Pil-gu,Lee, Je-won,Cho, Guan-Sik,Lee, Joo-In,Cho, Kuk-San,Pearton, S.J. 한국재료학회 2003 한국재료학회지 Vol.13 No.4
We studied BCl$_3$ dry etching of GaAs in a planar inductively coupled plasma system. The investigated process parameters were planar ICP source power, chamber pressure, RIE chuck power and gas flow rate. The ICP source power was varied from 0 to 500 W. Chamber pressure, RIE chuck power and gas flow rate were controlled from 5 to 15 mTorr, 0 to 150 W and 10 to 40 sccm, respectively. We found that a process condition at 20 sccm $BCl_3$ 300 W ICP, 100 W RIE and 7.5 mTorr chamber pressure gave an excellent etch result. The etched GaAs feature depicted extremely smooth surface (RMS roughness < 1 nm), vertical sidewall, relatively fast etch rate (> $3000\AA$/min) and good selectivity to a photoresist (> 3 : 1). XPS study indicated a very clean surface of the material after dry etching of GaAs. We also noticed that our planar ICP source was successfully ignited both with and without RIE chuck power, which was generally not the case with a typical cylindrical ICP source, where assistance of RIE chuck power was required for turning on a plasma and maintaining it. It demonstrated that the planar ICP source could be a very versatile tool for advanced dry etching of damage-sensitive compound semiconductors.
초전도 플라이휠 에너지 저장장치의 강인제어를 이용한 전력계통의 저주파진동 억제
이정필,김한근,Lee, J.P.,Kim, H.G. 한국초전도학회 2012 Progress in superconductivity Vol.14 No.1
In this paper, the robust superconductor flywheel energy storage system(SFESS) controller using $H_{\infty}$ control theory was designed to damp low frequency oscillation of power system. The main advantage of the $H_{\infty}$ controller is that uncertainties of power system can be included at the stage of controller design. Both disturbance attenuation and robust stability for the power system were treated simultaneously by using mixed sensitivity $H_{\infty}$ problem. The robust stability and the performance for uncertainties of power system were represented by frequency weighted transfer function. To verify control performance of proposed SFESS controller using $H_{\infty}$ control, the closed loop eigenvalue and the damping ratio in dominant oscillation mode of power system were analyzed and nonlinear simulation for one-machine infinite bus system was performed under disturbance for various operating conditions. The results showed that the proposed $H_{\infty}$ SFESS controller was more robust than conventional power system stabilizer (PSS).
이정필,김한근,한상철,Lee, J.P.,Kim, H.G.,Han, S.C. The Korean Superconductivity Society 2012 Progress in superconductivity Vol.13 No.3
In this paper, we designed Active Magnetic Bearing (AMB) for large scale Superconductor Flywheel Energy Storage System (SFESS) and PD controller for AMB. And we experimentally evaluated SFESS including hybrid type AMB. The radial AMB was designed to provide force slew rate that was sufficient for the unbalance disturbances at the maximum operating speed. The thrust AMB is a hybrid type where a permanent magnet carries the weight of the flywheel and an electromagnetic actuator generates the dynamic control force. We evaluated the design performance of the manufactured AMB through comparison of FEM analysis and the results of experimental force measurement. In order to obtain gains of PD controller and design a notch filter, the system identification was performed through measuring frequency response including dynamics for the AMBs, a power amp and a sensor using a sine swept test method after levitating the flywheel. Through measuring the current input of the AMBs and the orbit of a flywheel according to rotational speed, we verified excellent control performance of the AMBs with small amount current for the large scale SFESS.