http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
습식 식각에 의한 실리콘 웨이퍼의 표면 및 전기적 특성변화(2) - 표면거칠기와 전기적 특성의 상관관계 -
김준우,강동수,이현용,이상현,고성우,노재승,Kim, Jun-Woo,Kang, Dong-Su,Lee, Hyun-Yong,Lee, Sang-Hyeon,Ko, Seong-Woo,Roh, Jae-Seung 한국재료학회 2013 한국재료학회지 Vol.23 No.6
The relationship the between electrical properties and surface roughness (Ra) of a wet-etched silicon wafer were studied. Ra was measured by an alpha-step process and atomic force microscopy (AFM) while varying the measuring range $10{\times}10$, $40{\times}40$, and $1000{\times}1000{\mu}m$. The resistivity was measured by assessing the surface resistance using a four-point probe method. The relationship between the resistivity and Ra was explained in terms of the surface roughness. The minimum error value between the experimental and theoretical resistivities was 4.23% when the Ra was in a range of $10{\times}10{\mu}m$ according to AFM measurement. The maximum error value was 14.09% when the Ra was in a range of $40{\times}40{\mu}m$ according to AFM measurement. Thus, the resistivity could be estimated when the Ra was in a narrow range.
C<sub>3</sub>H<sub>8</sub>-SiCl<sub>4</sub>-H<sub>2</sub> 시스템에서 FactSage를 이용한 압력-조성-온도 3차원 상평형도의 응용
김준우,김형태,김경자,이종흔,최균,Kim, Jun-Woo,Kim, Hyung-Tae,Kim, Kyung-Ja,Lee, Jong-Heun,Choi, Kyoon 한국세라믹학회 2011 한국세라믹학회지 Vol.48 No.6
In order to deposit a homogeneous and uniform ${\beta}$-SiC films by chemical vapor deposition, we constructed the phase-diagram of ${\beta}$-SiC over graphite and silicon via computational thermodynamic calculation considering pressure(P), temperature(T) and gas composition(C) as variables in $C_3H_8-SiCl_4-H_2$ system. During the calculation, the ratio of Cl/Si and C/Si is maintained to be 4 and 1, respectively, and H/Si ratio is varied from 2.67 to 15,000. The P-T-C diagram showed very steep phase boundary between SiC+C and SiC region perpendicular to H/Si axis and also showed SiC+Si region with very large H/Si value of ~6700. The diagram can be applied not only to the prediction of the deposited phase composition but to compositional variation due to the temperature distribution in the reactor. The P-T-C diagram could provide the better understanding of chemical vapor deposition of silicon carbide.
C<sub>3</sub>H<sub>8</sub>-SiCl<sub>4</sub>-H<sub>2</sub> 시스템에서의 탄화 실리콘 증착에 대한 열역학적인 해석
김준우,정성민,김형태,김경자,이종흔,최균,Kim, Jun-Woo,Jeong, Seong-Min,Kim, Hyung-Tae,Kim, Kyung-Ja,Lee, Jong-Heun,Choi, Kyoon 한국세라믹학회 2011 한국세라믹학회지 Vol.48 No.3
In order to deposit a homogeneous and uniform ${\beta}$-SiC films by chemical vapor deposition, we demonstrated the phase stability of ${\beta}$-SiC over graphite and silicon via computational thermodynamic calculation considering pressure, temperature and gas composition as variables. The ${\beta}$-SiC predominant region over other solid phases like carbon and silicon was changed gradually and consistently with temperature and pressure. Practically these maps provide necessary conditions for homogeneous ${\beta}$-SiC deposition of single phase. With the thermodynamic analyses, the CVD apparatus for uniform coating was modeled and simulated with computational fluid dynamics to obtain temperature and flow distribution in the CVD chamber. It gave an inspiration for the uniform temperature distribution and low local flow velocity over the deposition chamber. These calculation and model simulation could provide milestones for improving the thickness uniformity and phase homogeneity.
비대면 휘트니스 MR 플랫폼 개발을 활용한 운동 수행 효과에 관한 연구
김준우,Kim, Jun-woo 국제문화기술진흥원 2021 The Journal of the Convergence on Culture Technolo Vol.7 No.3
본 연구는 기존 휘트니스 사업의 문제점을 극복하고, 코로나 시국에 대한 늘어난 수요를 충족시킬 수 있는 휘트니스 시스템을 구축하고자 수행되었다. 비대면 휘트니스 에듀테인먼트 서비스를 위한 플랫폼 기술로써 다양한 신체 부위 운동 및 네트워크형 정보 동기화가 가능한 차세대 휘트니스 운동 기구이다. 휘트니스 장비의 운동 정보를 동기화하여, MR 기반 아바타를 통한 학습형 콘텐츠로 구성하였다. 이용하는 사용자의 누적 운동 효과에 따른, LSTM 기반 알고리즘을 적용한 A.I 분석으로 운동량 분석을 통한 맞춤형 평가 시스템의 적용성을 검토하여 정량화된 결과를 도출하였다. 학계 전문가를 통한, 체계적 운동 기법 적용을 위한 모션 캡처 및 3D 가시화 휘트니스 프로그램으로 이용자의 휘트니스 지식 및 운동능력 향상에 기여할 것이라 판단된다. This study was carried out to overcome the problems of the existing fitness business and to build a fitness system that can meet the increased demand in the Corona situation. As a platform technology for non-face-to-face fitness edutainment service, it is a next-generation fitness exercise device that can use various body parts and synchronize network-type information. By synchronizing the exercise information of the fitness equipment, it was composed of learning contents through MR-based avatars. A quantified result was derived from examining the applicability of the customized evaluation system through momentum analysis with A.I analysis applying the LSTM-based algorithm according to the cumulative exercise effect of the user. It is a motion capture and 3D visualization fitness program for the application of systematic exercise techniques through academic experts, and it is judged that it will contribute to the improvement of the user's fitness knowledge and exercise ability.
인지된 위험과 신뢰가 Cloud Computing 사용의도에 미치는 영향
김준우(Jun Woo Kim),김용구(Yong-Gu Kim) 한국산업경영시스템학회 2012 한국산업경영시스템학회지 Vol.35 No.3
This research tested how the perceived risk and the trust affect the usage intention of the cloud computing. To this end, this research setups a research model and tests it with the statistic tools. In order to build the model, TAM (Technology Acceptance Model) and UTAUT (Unified Theory of Acceptance and Use of Technology) were employed and, the factors such as the perceived risk, the trust and the intention of the cloud computing use were derived. This research finds that the perceived risk does not affect the intention of usage. Also the perceived risk has the negative effect for the trust. Thus this research has the following suggestions.
변조전달함수 측정에 있어 기하학적 조정 불량이 해상도에 미치는 영향
김준우(Jun-Woo Kim) 한국방사선학회 2021 한국방사선학회 논문지 Vol.15 No.5
엑스선 영상 시스템으로부터 획득한 영상의 공간주파수에 대한 해상도를 분석하기 위해 변조전달함수(modulation-transfer function, MTF)를 계산한다. 일반적으로 검출기의 응답함수는 슬릿-카메라를 사용하여 선분포함수(line-spread function, LSF)를 획득하고, 푸리에 변환을 거쳐 변조전달함수를 도출한다. 엑스선이 항상 슬릿-카메라 중심에 입사해야 된다는 조건 때문에 실험자에 의해 발생하는 검출기와 슬릿-카메라의 기울임은 검출기 성능에 영향을 미치게 된다. 이와 더불어 기울임에 확대율이 더해진다면 엑스선 영상 시스템의 성능평가에 문제가 발생할 것이다. 본 연구에서는 실험적 오차에 기인하여 이를 변조전달함수, 즉 푸리에 도메인에서 실험과 분석모델을 해석하였고, 공간주파수에 미치는 영향을 분석하였다. 나아가 다양한 엑스선 영상 시스템에 있어 성능평가가 실시되어야 할 것이고, 실험적 오차는 불가결하게 발생하며 이를 허용할 수 있는 범위에 대한 검토가 이루어져야 한다. The modulation transfer function (MTF) is calculated to analyze the resolution of the spatial frequency of the image acquired from the x-ray imaging system. In general, the response function of the detector acquires a line spread function (LSF) using a slit-camera, and derives a modulation transfer function through a Fourier transform. Because of the fact that the x-ray must always be incident on the center of the slit-camera, the tilt of the detector and slit-camera caused by the experimenter will affect the detector performance. In addition, if the tilt increases, the performance evaluation of the x-ray image system will be problematic. In this study, we analyzed the experimental and analytical models in the modulation transfer function, ie, the Fourier domain, based on the experimental error and analyzed the effect on the spatial frequency. Furthermore, performance evaluation is being carried out for various x-ray imaging systems, and experimental errors are indispensable, and the extent to which they can be tolerated should be reviewed.