금속다층박막을 이용한 터치스크린의 bus bar 구현

구수본(Soo-Bon Koo),이영훈(Young-Hun Lee) 한국정보기술학회 2010 Proceedings of KIIT Conference Vol.2010 No.-

On-cell type의 touch panel구조에서는 ITO film위 Ag paste를 이용한 screen print기술이 Bus bar전극형성의 일반적인 공정이다. 정전용량 touch panel의 수요증가 및 slim한 디자인 추세에 따라 Bezel폭 축소가 필수적이며, 이에 따라 Bus bar전극 또한 고집적화 기술의 개발이 필요하다. 이에 따라 본 논문에서는 금속박막 증착과 photo lithography공정을 이용한 bus bar전극형성 process를 설계하였다. 다양한 다층박막구조에 공정을 적용하여 ITO film과의 접착력 및 저 저항, 그리고 최소선폭에 대한 비교를 진행하였다. 최종 선택된 Mo/Al/Mo박막구조를 이용한 Bus bar전극의 저항 및 선폭측정결과 line저항(100), 최소선폭(10um)으로 fine pitch bus bar전극형성 공정에 적합한 것으로 확인되었다. In on-cell type touch panel structure, screen printing technology which uses Ag paste on ITO film is one of the general processes for Bus bar formation. Considering the growing of capacitance touch panel industry and slim design trend, decreasing the Bezel width is necessary. The high technology should be developed for Bus bar printing. Thus, Bus bar formation process was designed by metal deposition and photo lithography in this theory. By applying multiple layers structure process, the comparisons of adhesion strength between ITO films, resistances and pitch width were proceeded. Based on the comparisons, Mo/Al/Mo structure was known as the best for fine pitch bus bar formation process.

광원을 내장한 펜의 출력광과 광 도파로의 광 결합을 이용하는 터치 패널 장치의 내부 광 결합 구조 설계

박대서,김대종,오범환,박세근,이일항,이승걸,Park, Dae-Seo,Kim, Dae-Jong,O, Beom-Hoan,Park, Se-Geun,Lee, El-Hang,Lee, Seung-Gol 한국광학회 2009 한국광학회지 Vol.20 No.2

본 연구에서는 광원을 내장하고 있는 포인팅 펜(pointing pen)의 출력광과 광 도파로 배열 사이의 광 결합을 이용하여 펜의 접촉여부와 접촉 위치를 검출하는 광학식 터치 패널 장치를 제안한다. 펜의 출력광과 광 도파로 배열 간의 광 결합을 최대화하고, 동시에 특정 광 도파로로 결합된 광속이 적은 손실로 전파할 수 있도록 하기 위해 광 도파로의 교차점 마다 부가적인 피라미드 구조를 삽입하였다. 광 도파로 단면의 크기가 $50{\times}50{\mu}m^2$인 경우 광선 추적법을 통해 결정된 피라미드의 최적 구조는 밑변의 폭, 높이, 경사각이 각각 $50{\mu}m$, $22.5{\mu}m$, $42^{\circ}$이었다. 이때 광 결합 효율은 97.8%이었으며, 전파손실은 평균적으로 0.3 dB/mm이었다. 그리고 펜의 기울어짐에 대한 허용 각도는 ${\pm}12^{\circ}$임을 확인하였다. In this paper, an optical touch panel device is newly proposed, with operating principle based on the optical coupling between a pointing pen having a built-in light source and perpendicularly crossed optical waveguide arrays. In order to enable an external light to couple into a waveguide core, the auxiliary pyramidal structures are introduced into all intersecting points located periodically along optical waveguides. The shape is optimized for minimizing the unwanted propagation loss due to the same structure by a ray tracing method. For the optical waveguide with the size of $50{\times}50{\mu}m^2$, the bottom width, height, and slope angle of the optimized pyramidal structure are $50{\mu}m$, $22.5{\mu}m$, and $42^{\circ}$, respectively. The optical coupling efficiency of about 97.8% and the average propagation loss of 0.3 dB/mm were achieved for the optimized touch panel. Finally, it is found from the tolerance analysis that tilting of the pen up to ${\pm}12^{\circ}$ can be allowed.

Highly Flexible Touch Screen Panel Fabricated with Silver Nanowire Crossing Electrodes and Transparent Bridges

전영은,박기복,진한별,정성철,고흥석,이인남,이춘협,Young Kuil Joo 한국광학회 2015 Current Optics and Photonics Vol.19 No.5

A capacitive-type touch screen panel (TSP) composed of silver nanowire (AgNW) crossing electrodesand transparent bridge structures was fabricated on a polycarbonate film. The transparent bridge structurewas formed with a stack of Al-doped ZnO (AZO) electrodes and SU-8 insulator. The stable and robustcontinuity of the bridge electrode over the bridge insulator was achieved by making the side-wall slopeof the bridge insulator low and depositing the conformal AZO film with atomic layer deposition. Withan extended exposure time of photolithography, the lower part of the SU-8 layer around the regionuncovered by the photomask can be exposed enough to the UV light scattered from the substrate. Thisleads to the low side-wall slope of the bridge insulator. The fabricated TSP sample showed a largecapacitance change of 22.71% between with and without touching. Our work supplies the technologicalclue for ensuring long-term reliability to the highly flexible and transparent TSP made by using conventionalfabrication processes

비정질 실리콘 광센서를 이용한 터치 감응 디스플레이 설계 및 제작

이수연(Soo-Yeon Lee),박현상(Hyun-Sang Park),한민구(Min-Koo Han) 대한전기학회 2009 전기학회논문지 Vol.58 No.11

A new touch-sensitive hydrogenated amorphous silicon(a-Si:H) display with embedded optical sensor arrays is presented. The touch-sensitive panel operation was successfully demonstrated on a prototype of 16-in. active-matrix liquid crystal display (AMLCD). The proposed system provides the finger touched point without the real-time image processing of information of the captured images. Due to the simple architecture of the system, we expect the introduction of large-area touch-sensitive display panels.

정전용량식 터치스크린 패널을 위한 SiO2 버퍼층 두께에 따른 ITO 박막의 전기적 및 광학적 특성

정윤근(Yeun-Gun Chung),정양희(Yang-Hee Joung),강성준(Seong-Jun Kang) 한국전자통신학회 2022 한국전자통신학회 논문지 Vol.17 No.6

본 연구에서는 Nb2O5/SiO2 이중 버퍼층위에 ITO박막을 증착하여, SiO2버퍼층 두께 변화 (40∼50 nm)에 따른 전기적 및 광학적 특성을 조사하였다. Nb2O5/SiO2 이중 버퍼층을 도입한 ITO박막의 표면 거칠기는 0.815에서 1.181 nm 범위의 작은 값을 가지는 매끄러운 형상을 보였고, 면저항은 99.3∼134.0 Ω/sq. 범위로 정전용량식 터치스크린 패널에 적용하는데 문제가 없는 것으로 나타났다. 특히 Nb2O5 (10 nm) / SiO2 (40 nm) 이중 버퍼층을 삽입한 ITO박막의 단파장(400∼500 nm) 영역에서의 평균 투과도와 색도(b*)는 83.58 % 와 0.05로 이중 버퍼층이 삽입되지 않은 ITO박막의 74.46 % 와 4.28에 비해 상당히 향상된 결과를 나타내었다. 이를 통해 Nb2O5/SiO2 이중 버퍼층을 도입한 ITO박막에서 인덱스 매칭 효과로 인해 단파장 영역의 투과도 및 색도와 같은 광학적 특성이 현저히 향상되었음을 확인할 수 있었다. In this study, we prepared ITO thin films on the Nb2O5/SiO2 double buffer layer and investigated electrical and optical properties according to the change of SiO2 buffer layer thickness (40~50nm). The ITO thin film fabricated on the Nb2O5/SiO2 double buffer layer exhibited a broad surface roughness with a small value ranging of 0.815 to 1.181nm, and the sheet resistance was 99.3 to 134.0Ω/sq. It seems that there is no problem in applying the ITO thin film to a capacitive touch screen panel. In particular, the average transmittance in the short-wavelength (400~500nm) region and the chromaticity (b*) of the ITO thin film deposited on the Nb2O5(10nm)/SiO2(40nm) double buffer layer showed significantly improved results as 83.58% and 0.05, respectively, compared to 74.46% and 4.28 of ITO thin film without double buffer layer. As a result, it was confirmed that optical properties such as transmittance in the short-wavelength region and chromaticity were remarkably improved due to the index matching effect in the ITO thin film with the Nb2O5/SiO2 double buffer layer.

Bioinspired Transparent Laminated Composite Film for Flexible Green Optoelectronics

Lee, Daewon,Lim, Young-Woo,Im, Hyeon-Gyun,Jeong, Seonju,Ji, Sangyoon,Kim, Yong Ho,Choi, Gwang-Mun,Park, Jang-Ung,Lee, Jung-Yong,Jin, Jungho,Bae, Byeong-Soo American Chemical Society 2017 ACS APPLIED MATERIALS & INTERFACES Vol.9 No.28

<P>Herein, we report a new version of a bioinspired chitin nanofiber (ChNF) transparent laminated composite film (HCLaminate) made of siloxane hybrid materials (hybrimers) reinforced with ChNFs, which mimics the nanofiber-matrix structure of hierarchical biocomposites. Our HCLaminate is produced via vacuum bag compressing and subsequent UV-curing of the matrix resin-impregnated ChNF transparent paper (ChNF paper). It is worthwhile to note that this new type of ChNF-based transparent substrate film retains the strengths of the original ChNF paper and compensates for ChNF papers drawbacks as a flexible transparent substrate. As a result, compared with high-performance synthetic plastic films, such as poly(ethylene terephthalate), poly(ether sulfone), poly(ethylene naphthalate), and polyimide, our HCLaminate is characterized to exhibit extremely smooth surface topography, outstanding optical clarity, high elastic modulus, high dimensional stability, etc. To prove our HCLaminate as a substrate film, we use it to fabricate flexible perovskite solar cells and a touch-screen panel. As far as we know, this work is the first to demonstrate flexible optoelectronics, such as flexible perovskite solar cells and a touch-screen panel, actually fabricated on a composite film made of ChNF. Given its desirable macroscopic properties, we envision our HCLaminate being utilized as a transparent substrate film for flexible green optoelectronics.</P>

Fabrication of metallic nanomesh structures using phase shift lithography and its application to touch screen panels

Chung, Sung-il,Kim, Pan Kyeom,Kwon, Young-woo,Ha, Tae-gyu,Hur, Ji-won,Lee, Kyu-man Elsevier 2016 Journal of materials processing technology Vol.238 No.-

<P>This study reports on the fabrication process of a nanomesh-shaped nickel mold by using phase shift lithography. We also present its application to a transparent electrode film for a touch screen panel. A suitable gap between the checkerboard- shaped patterns on a photomask was chosen to obtain the nickel mold with a mesh-shaped pattern connected to each other. A nanomesh-type trench pattern was transferred from the nickel mold onto a polyethylene terephthalate film through the imprinting lithography process with ultraviolet light. The nanomesh-embedded electrode pattern was fabricated by filling the nanotrench with Ag paste. The light transmittance and sheet and line resistance of the nanomesh-type transparent conducting electrode film were evaluated. The TCE film was then applied to a 7 in. touch sensor module. (C) 2016 Elsevier B.V. All rights reserved.</P>

A Flexible and Robust Transparent Conducting Electrode Platform Using an Electroplated Silver Grid/Surface-Embedded Silver Nanowire Hybrid Structure

Jang, Junho,Im, Hyeon-Gyun,Jin, Jungho,Lee, Jaemin,Lee, Jung-Yong,Bae, Byeong-Soo American Chemical Society 2016 ACS APPLIED MATERIALS & INTERFACES Vol.8 No.40

<P>In this paper, we report flexible transparent conducting electrode (TCE) film using a silver grid (Ag grid)/silver nanowire (AgNW) hybrid structure (AG/NW-GFRHybrimer). The AG/NW-GFRHybrimer consists of an AgNW-embedded glass-fabric reinforced plastic film (AgNW-GFRHybrimer) and an electroplated Ag grid. The AgNW-GFRHybrimer is used as a flexible transparent substrate and a seed layer for electroplating. The Ag grid is fabricated via an all-solution-process; the grid pattern is formed using conventional photolithography; and Ag is deposited through electroplating. The AG/NW-GFRHybrimer exhibits excellent opto-electrical properties (transparency = 87%, sheet resistance = 13 Omega/square), superior thermal stability (250 degrees C for 720 min and 85 degrees C/85% RH for 100 h); and outstanding mechanical flexibility (bending radius = 1 mm for 2000 cycles). Finally, a touch-screen panel (four-wire resistive type) was fabricated using the AG/NW-GFRHybrimer to demonstrate its potential for use in actual optoelectronic applications.</P>

금속 나노 파티클의 레이저 플라즈모닉 어닐링을 통한 메탈메쉬 전극 형성과 이를 활용한 유연 터치 센서

정성민 ( Seongmin Jeong ),황윤식 ( Yun Sik Hwang ),우유미 ( Yu Mi Woo ),조용준 ( Yong Jun Cho ),김찬혁 ( Chan Hyeok Kim ),안민기 ( Min Gi An ),서호석 ( Ho Seok Seo ),양찬현 ( Chan Hyeon Yang ),박귀일 ( Kwi-il Park ),박정환 ( Jung 한국전기전자재료학회 2024 전기전자재료학회논문지 Vol.37 No.2

Laser-induced plasmonic sintering of metal nanoparticles (NPs) holds significant promise as a technology for producing flexible conducting electrodes. This method offers immediate, straightforward, and scalable manufacturing approaches, eliminating the need for expensive facilities and intricate processes. Nevertheless, the metal NPs come at a high cost due to the intricate synthesis procedures required to ensure long-term reliability in terms of chemical stability and the prevention of NP aggregation. Herein, we induced the self-generation of metal nanoparticles from Ag organometallic ink, and fabricated highly conductive electrodes on flexible substrates through laser-assisted plasmonic annealing. To demonstrate the practicality of the fabricated flexible electrode, it was configured in a mesh pattern, realizing multi-touchable flexible touch screen panel.

Touch Position Recovery Algorithm for Differential Sensing Touch Screen

Kim, Ji-Ho,Won, Dong-Min,Kim, HyungWon The Korea Institute of Information and Commucation 2016 Journal of information and communication convergen Vol.14 No.2

Differential sensing methods are more effective in alleviating panel noise than single-line sensing, and thus have been increasingly used in the touch screen industry. However, they have a drawback: they tend to cancel out multiple touches and need touch position recovery algorithms. This paper introduces a novel algorithm of touch position recovery for differential sensing, which is a low-complexity but high-accuracy approach for determining multiple touch positions. We have implemented the proposed method in a touch screen controller system on a chip. In the simulation experiments using realistic touch screen models and a differential sensing circuit, the algorithm exhibited a high detection performance of a signal-to-noise ratio gain of up to 52.21 dB. Therefore, we can conclude that the proposed method is substantially more accurate than the previous method. Further, the proposed method incurs little or no overhead in terms of the detection speed and the chip size.