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R.F. Magnetron Sputtering법으로 제조한 LaCoO₃박막의 가스감지 특성
신정호,김정규,박기철,전춘배,장재영 慶尙大學校 工科大學 自動化및컴퓨터應用技術硏究所 1998 自動化 및 컴퓨터應用技術 Vol.5 No.1
LaCoO₃(LCO) thin film sensors were fabricated on an alumina substrate by r.f. magnetron sputtering. By varying the annealing temperature of the LCO film from 600℃ to 1000℃, we investigated X-ray diffraction pattern, electrical properties, and gas sensing properties of the films. The crystallinity was improved and the activation energy was increased with increasing the annealing temperature. The sensitivities of the LCO films for NH₃ and CO gases were also increased with the annealing temperature. Sensing properties of LCO thin films were improved when the measuring temperature was 350℃ or more
신정호,장재영,김정규,박기철 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
LaCrO_(3) thick film sensors were fabricated on an alumina substrate by screen printing method. The sensitivities for gases were investigated by varying the heat treatment temperatures of the films. The sensitivities of LaCrO_(3) thick film for Gallo and NH_(3) gases were better than for CO and NO gases. The best condition of heat treatment was 450℃ and the optimal operating temperature of LaCrO_(3) thick film for the highest sensitivity was 400℃. Sensitivities of LaCrO_(3) thick films about at 3000ppm for C_(4)H_(10) and NH_(3) gases were 85% and 95%, respectively.
장재영,박기철,신정호,김정규 慶尙大學校生産技術硏究所 1998 生産技術硏究所論文集 Vol.14 No.-
LaCrOa₃ thick-film sensors were fabricated on an alumina substrate by the screen printing method. The sensitivities for gases were investigated by varying the heat treatment temperatures of the films. The sensitivities of LaCrO₃ thick-film for ?? and NH₃ gases were better than those for CO and NO gases. The best condition of heat treatment was 450℃ and the optimal operating temperature of LaCrO₃ thick-film for the highest sensitivity was 400℃. Sensitivities of LaCrO₃ thick-film about at 3000ppm for ?? and NH₃gases were 85% and 95%, respectively.
김영범,박종아,김진해,김권태,김정규,마대영,박기철 경상대학교 생산기술연구소 2001 工學硏究院論文集 Vol.1 No.-
The microsensors to detect NH3 gas were fabricated by continous deposition of In film by evaporation and ZnO film by rf magnetron sputtering onto the Si3N4 diaphragm that was prepared by MEMS technology. The sensors were heat-treated to dope In into the ZnO thin film. The electrical characteristics of sensitive films were studied as a function of heat-temperature by 4-point probing method and electrometer. The dependence of the sensitivity, selectivity and time response of sensor on heat-treatment temperature was investigated. The microsensor heat-treated at 400℃ that 3000 A ZnO:In film was chosen as gas sensitive film, showed the highest sensitivity 23% at 350ppm NH3 under 366mW heater power. The time response was 90sec. The sensitivity for CO and NOx was not observed.
R.F. magnetron sputtering법으로 제조한 LaCoO₃박막의 가스감지 특성
장재영,신정호,김정규,박기철,전춘배 경북대학교 센서기술연구소 1998 센서技術學術大會論文集 Vol.9 No.1
LaCoO_(3)(LCO) thin film sensors were fabricated on an alumina substrate by the r.f. magnetron sputtering. By varying the annealing temperature of the LCO films from 600℃ to 1000℃, we investigated X-ray diffraction pattern, electrical properties, and gas sensing properties of the films. The crystallinity was improved and the activation energy was increased with increasing the annealing temperature. The sensitivity of the LCO films for NH_(3) and CO gases was also increased with the annealing temperature. Sensing properties of LCO thin films were improved when the measuring temperature was 350℃ or more.
임종도,김진해,박종아,김권태,김정규,마대영,박기철 경상대학교 생산기술연구소 2001 工學硏究院論文集 Vol.1 No.-
The Pd(palladium) doped SnO2(Tin Oxide) thin films sensitive to NH3 gas were prepared on alumina substrate by rf magnetron sputtering method. The gas sensing characteristics of Pd doped SnO2 thin films were studied as a function of film thickness and heat-treatment temperature. The dependence of the sensitivity, the selectivity and the time response of the thin films on heat-treatment temperature, film thickness and gas species were investigated. The thin films of Pd doped SnO2 which were the Pd content of 5 wt%, the film thickness of 5000 ? and the heat-treatment temperature of 600 ℃ showed the highest sensitivity of 68 % for 100 ppm NH3 gas concentration under an operating temperature of 400 ℃. The sensitivity towards NOx gas was not observed in the same condition.
남성진,이동욱,박찬규,정시욱,김추성,조성래,구본천,양사규,이일웅,박정자 慶北大學校 醫科大學 1997 慶北醫大誌 Vol.38 No.2
Castleman' s disease is a rare, reactive lymphoid proliferation of unknown cause and pathogenesis. Depending on histololgic findings, it has been divided into two distinct histologic subtypes that include hyaline-vascular type(90%) and plasmacell type(10%). This disease occurs most commonly in mediastinal lymph nodes and cervical lymph nodes, inguinal lymph nodes respectively. But occurs rarely in retroperitoneum. We report a case of hyaline-vascular type asymptomatic Castleman' s disease of the retroperitoneum in a 47-year-old man.
Al_2O_3를 첨가한 LaFeO_3 박막의 암모니아 가스감지 특성
이복상,조철형,최부천,박기철,마대영,김정규 경상대학교 생산기술연구소 2002 工學硏究院論文集 Vol.2 No.-
LaFeO_3 thin films with 2%, 5% and 10% A1_2O_3 additives were fabricated by r.f. magnetron sputtering method on Al_2O_3 substrates. Structural, electrical and ammonia gas sensing characteristics of the thin films with different heat treatments were examined. From the XRD results, the compound of LaFeO_3 and Al_2O_3 was not found. Thin film with 5% Al_2O_3 additives, heat-treated at 800℃, showed the sensitivities of about 85% for 100ppm ammonia gas at the working temperature of 300℃. The response time to the ammonia gas was several seconds and the thin film showed good selectivity to NH_3 gas.