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SPM을 이용한 반도체 포토레지스트 제거 공정 대체를 위한 DIW-$O_3$ 방식 세정기술 개발
손영수,함상용,Son, Yeong-Su,Ham, Sang-Yong 한국기계연구원 2003 硏究論文集 Vol.33 No.-
Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.
손영수,함상용,김병인,이성휘,Son, Young-Su,Ham, Sang-Yong,Kim, Byoung-Inn,Lee, Sung-Hwee 한국전기전자재료학회 2007 전기전자재료학회논문지 Vol.20 No.11
The realization of the photoresist(PR) removal method with vaporized water and ozone gas mixture has been studied for the LCD TFT array manufacturing. The developed PR stripper uses the water boundary layer control method based on the high concentration ozone production technology. We develop the prototype of PR stripper and experiment to find the optimal process parameter condition like as the ozone gas flow/concentration, process reaction time and thin boundary layer formation. As a results, we realize the LCD PR strip rate over the 0.4 ${\mu}m/min$ and this PR removal rate is more than 5 times higher than the conventional immersion type ozonized water process.
반도체 감광막 제거공정 적용을 위한 고농도 오존발생장치 개발
孫永洙(Young-Su Son),咸尙龍(Sang-Yong Ham) 대한전기학회 2006 전기학회논문지C Vol.55 No.12
we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of 19.7[wt%/O₂] at the flow rate of 0.3[ℓ/min] of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[㎚/min] at the ozone concentration of 16[wt%/O₂] and flow rate of 8[ℓ/min.]. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.
박철훈(Cheol Hoon Park),함상용(Sang Yong Ham),홍두의(Doo Euy Hong),김준규(Jun Kyu Kim) 한국소음진동공학회 2015 한국소음진동공학회 논문집 Vol.25 No.12
Most of spindles for machine tool are supported by ball bearings, and there are problems in the limits of high speed and high power as well as the cumbersome maintenance due to the short life time. In order to overcome these problems of the conventional spindles, the high speed spindle with magnetic bearings is developed in this study. Magnetic bearings for 60 000 r/min class high-speed spindle are designed, and high speed spindle with magnetic bearings are fabricated. Based on the running test up to 60 000 r/min, it is verified that the spindle is stably supported by the magnetic bearings, and the magnitude of the unbalance response at 60 000 r/min is less than 3 μm.
손영수(Son Young-Su),함상용(Ham Sang-Yong),최혁진(Choi Hyuek-Jin),오상우(Oh Sang-Woo) 한국해양환경·에너지학회 2006 한국해양환경공학회 학술대회논문집 Vol.2006 No.-
침몰선박 잔존유 무인회수시스템을 선상에서 운용 및 제어하기위한 원격제어시스템을 개발하였다. 개발한 원격제어시스템은 잔존유 회수시스템을 구성하는 각종 액츄에이터 구동 및 제어기능, 수중에서의 무인회수시스템 작업상황 모니터링 기능 그리고 수중 회수작업의 촬영 및 영상 전송/저장 기능을 수행하도록 설계하였다. 제작한 원격제어시스템으로 실 해역에서의 무인 회수작업 실시결과 설계한 제반 기능을 완벽히 수행함으로써 개발한 원격제어시스템의 효용성을 확인하였다. we have been developed on the onboard remote control system for the operation and control of the remotely operated oil recovery system from sunken ship . The remote control system was designed to perform the operation and control of the several hydraulic and electric actuators, monitor the underwater oil recovery work and equipment status, and transfer the video image of the oil recovery work to the onboard Pc. As a result of the sea performance test with the developed remote control system, we confirmed that all of the functions of the oil recovery system was carried out successfully by control of the onboard remote control system.