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BCl<sub>3</sub>/He 유도결합 플라즈마를 이용한 TiN 박막의 식각 특성
주영희,우종창,김창일,Joo, Young-Hee,Woo, Jong-Chang,Kim, Chang-Il 한국전기전자재료학회 2012 전기전자재료학회논문지 Vol.25 No.9
We investigated the dry etching characteristics of TiN in $TiN/Al_2O_3$ gate stack using a inductively coupled plasma system. TiN thin film is etched by BCl3/He plasma. The etching parameters are the gas mixing ratio, the RF power, the DC-bias voltages and process pressures. The highest etch rate is in $BCl_3/He$ (25%:75%) plasma. The selectivity of TiN thin film to $Al_2O_3$ is pretty similar with $BCl_3/He$ plasma. The chemical reactions of the etched TiN thin films are investigated by X-ray photoelectron spectroscopy. The intensities of the Ti 2p and the N 1s peaks are modified by $BCl_3$ plasma. Intensity and binding energy of Ti and N could be changed due to a chemical reaction on the surface of TiN thin films. Also we investigated that the non-volatile byproducts such as $TiCl_x$ formed by chemical reaction with Cl radicals on the surface of TiN thin films.
경상남도 일부 농촌지역의 간흡충 감염에 대한 역학적 연구
주영희,오진경,공현주,손운목,김윤규,김정일,정갑열,신해림,Ju, Young-Hee,Oh, Jin-Kyoung,Kong, Hyun-Joo,Sohn, Woon-Mok,Kim, Yoon-Gyu,Kim, Jung-Il,Jung, Kap-Yeol,Shin, Hai-Rim 대한예방의학회 2005 Journal of Preventive Medicine and Public Health Vol.38 No.4
Objectives : To investigate the prevalence of Clonorchis Sinensis infestation and to determine the associated risk factors among a population in a part of the rural area of Gyeongsangnam-do, Korea, which is an area known to have a high mortality from liver cancer and a high infection of C. sinensis. Methods : The study populat ion consisted of those people who have lived in rural areas and who were over 40 years old. This study was performed in 5 areas during the period from 1999 to 200 3. Informed consents were obtained from the 2,381 study participants, and these people were interviewed about their life style habits with using the structured questionnaire that was administered by trained staff members. The subjects underwent blood sampling and their stool specimens were examined by using the Formalin-ether sedimentation technique. Results : Among the study subjects (N=2,381), the positivity for C. sinensis in the stool was 34.4% (95% CI=36.3-42.5); it was 39.4% (95% CI=36.3-42.5) in the males and 30.9% (95% CI=28.5-33.3) in the females . The positivity for C. sinensis was associated with current alcohol drinking (odds ratio=1.8, 95% CI: 1.5-2.1) and raw fish consumption (odds ratio 1.2, 95% CI: 0.9-1.6). Conclusion : The present study confirmed the high prevalence of C. sinensis in the study subjects. It is necessary to establish consistent medical management and education programs for the treatment and prevention of C. sinensis infestation in the rural inhabitants of Korea.
주영희,홍기형,Joo Young-Hee,Hong Ki-Hyung 대한음성학회 2005 말소리 Vol.55 No.-
In this paper, we propose an XML based meta-data specification for industrial speech databases. Building speech databases is very time-consuming and expensive. Recently, by the government supports, huge amount of speech corpus has been collected as speech databases. However, the formats and meta-data for speech databases are different depending on the constructing institutions. In order to advance the reusability and portability of speech databases, a standard representation scheme should be adopted by all speech database construction institutions. ETRI proposed a XML based annotation scheme [51 for speech databases, but the scheme has too simple and flat modeling structure, and may cause duplicated information. In order to overcome such disadvantages in this previous scheme, we first define the speech database more formally and then identify object appearing in speech databases. We then design the data model for speech databases in an object-oriented way. Based on the designed data model, we develop the meta-data specification for industrial speech databases.
유도 결합 플라즈마를 이용한 TaN 박막의 건식 식각 특성
진려,주영희,우종창,김한수,최경록,김창일,Li, Chen,Joo, Young-Hee,Woo, Jong-Chang,Kim, Han-Soo,Choi, Kyung-Rok,Kim, Chang-Il 한국전기전자재료학회 2013 전기전자재료학회논문지 Vol.26 No.1
In this paper, we investigated the etching characteristics of the TaN thin films and the surface reaction of TaN thin films after etching process. The etching characteristics of the TaN thin films were carried out using inductively coupled plasma (ICP). The etch rate and the selectivity of TaN to $SiO_2$ and TaN to PR were measured by varying the gas mixing ratio, RF power, DC-bias voltage, and process pressure in CF-based plasma. The surface reaction of TaN thin films were determined by x-ray photoelectron spectroscopy (XPS).
고밀도 플라즈마를 이용한 SnO<sub>2</sub> 박막의 건식 식각 특성
김환준,주영희,김승한,우종창,김창일,Kim, Hwan-Jun,Joo, Young-Hee,Kim, Seung-Han,Woo, Jong-Chang,Kim, Chang-Il 한국전기전자재료학회 2013 전기전자재료학회논문지 Vol.26 No.11
In this paper, we carried out the investigations of both etch characteristics and mechanisms for the $SnO_2$ thin films in $O_2/BCl_3/Ar$ plasma. The dry etching characteristics of the $SnO_2$ thin films was studied by varying the $O_2/BCl_3/Ar$ gas mixing ratio. We determined the optimized process conditions that were as follows: a RF power of 700 W, a DC-bias voltage of - 150 V, and a process pressure of 2 Pa. The maximum etch rate was 509.9 nm/min in $O_2/BCl_3/Ar$=(3:4:16 sccm) plasma. From XPS analysis, the etch mechanism of the $SnO_2$ thin films in the $O_2/BCl_3/Ar$ plasma can be identified as the ion-assisted chemical reaction while the role of ion bombardment includes the destruction of the metal-oxide bonds as well as the cleaning of the etched surface form the reaction products.
부산광역시 일지역 65-84세 노인 인구에서의 수면습관 및 수면장애에 대한 조사
양창국,유승윤,주영희,한홍무,Yang, Chang-Kook,Yoo, Seung-Yoon,Joo, Young-Hee,Hahn, Hong-Moo 대한수면의학회 1997 수면·정신생리 Vol.4 No.1
연구배경 : 나이가 들면서 수면습관에 많은 변화가 있고, 이와 함께 수면장애가 증가하나, 이에 대한 관심이 적기 때문에 노인 인구에서의 수면습관 변화에 따르는 문제점 및 수면장애에 대한관심이 적다. 따라서 본연구를 통하여 노년기에서의 수면습관 및 수면장애를 동시에 조사함으로서 노인인구에서의 수면습관 및 수면장애에 대한 관심을 고취시키려고 한다. 방법 : 부산시 일지역 거주 65세 이상 84세 이하 노인인구 933명 중 무작위로 표집한 206명 (22.08%)을 대상으로 개별 가정방문을 통하여 반구조화된 면담을 실시하였다. 결과 : 1. 평균취침시간은 $10.28{\pm}1.30$시 였고, 입면에 소요되는 시간은 $44.51{\pm}45.12$ 분이었다. 수면중간에 깨는 횟수는 하룻밤 $2.05{\pm}1.59$회 였고 중간에 깨어 있는 시간의 합산은 $42.08{\pm}49.80$ 분이었다. 아침에 깨어나는 시간은 $5.24{\pm}1.33$시였고 잠자리에서 일어나는 시간은 $6.25{\pm}1.38$시였다. 총수면 시간은 $5.63{\pm}1.80$시간이었다. 일주일에 $2.86{\pm}2.85$일간 입면 및/또는 수면유지의 곤란을 호소하였고 일주일에 $2.49{\pm}3.23$회의 낮잠을 자고 있었다. 2. 전체 조사대상 206 명중 116명 (57.7%)은 불면증 군으로, 85명(42.3%)은 비불면증 군으로 분류되었다. 불면증 중에서 108명(52.4%)은 입면에 어려움을, 103명(50.5%)은 새벽 일찍 깨는 것을, 93명 (45.1%)은 수면 유지의 어려움을 호소하였다. 3. 불면증이외의 수면장애에 대한조사에서 전체 조사대상 206명 중 악몽 68명(33.0%), 잠꼬대 43명(20.9%), 수면 무호흡증 30명(14.6%), 야경증 16명(7.8%) 등을 포함하는 다양한 수면장애의 가능성이 의심되었다. 4. 수면위생이 불량한 경우가 많았고, 전체 조사 대상 206 명중 현재 11명 (5.3%)이 불면증 때문에 수면제를 복용하고 있었고, 12명(5.8%)이 잠을 이루기 위하여 술을 마시고 있었다. 수면을 방해하는 요인으로는 잠자리에서의 걱정 81명(39.3%)과 신체적인 통증 38명(18.4%)이 가장 많았다. 5. 전체 조사대상 206 명중 110 명(55.2%)이 신체적인 불편을, 93명(45.4%)이 불안이나 우울 등의 심인적인 고통을 호소하고 있었고, 이는 불면증군에서 더 유의하게 많이 호소하였다. Objectives : The purpose of this study is to analyse sleep habits and sleep disorders in the elderly population ased 65-84 years. Methods : Epidemiological survey was performed at home by means of semi structured interviews in the city of Pusan, Korea. Subjects were randomly selected. The questionnaire consisted of 128 items including demographic findings, sleep habits, sleep disorders, somatic illnesses, and psychological distresses. Results : (1) The mean retiring time was 10.28 h (SD 1.30 h) and the mean wake-up time was 5.24 h (SD 1.33 h). The mean duration of sleep was 5.63 h (SD 1.80 h). The mean sleep onset time was 44.51 min. The mean frequency of daytime napping was 2.49 (SD 3.23). The subjects reported they woke up an average of 2.05 (SD 1.59) times per night. All of the above results were not related to age or gender. However, the mean frequency of difficulty in initiating/maintaining sleep was 2.2 times for men and 3.2 times for women (p<0.05). (2) The prevalence of insomnia was 57.7% and was not related to age or gender. Difficulty in initiating sleep was the most commonly reported insomnia complaint(52.4%). Early morning awakening was reported by 50.0% of patients and difficulty in maintaining sleep was reported by 45.1% of them. Worrying in bed and physical pain were strong contributing factor to insomnia. Conclusions : The results of our study showed several characteristics of sleep habits in the elderly. Sleep disorder in old age is not inevitable or trivial. Since sleep disturbance in older adults is common and distressing, it has implications for general health and well-being. Active concern and therapeutic intervention for the sleep habits and sleep disorders in the elderly are needed.