http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
MEMS 공정을 위한 여러 종류의 산화막의 잔류응력 제거 공정
이상우(Sang Woo Yi),김성운(Sung Un Kim),이상운(Sang Woo Lee),김종팔(Jong Pal Kim),박상준(Sang Jun Park),이상철(Sang Chul Lee),조동일(Dong Il cho) 한국센서학회 1999 센서학회지 Vol.8 No.3
Various oxide films are commonly used as a sacrificial layer or etch mask in the fabrication of microelectromechanical systems (MEMS). Large residual strain of these oxide films causes the wafer to bow, which can have detrimental effects on photolithography and other ensuing processes. This paper investigates the residual strain of tetraethoxysilane (TEOS), low temperature oxide (LTO), 7 wt% and 10 wt% phosphosilicate glass (PSG). Euler beams and a bent-beam strain sensor are used to measure the residual strain. A polysilicon layer is used as the sacrificial layer, which is selectively etched away by XeF₂. First, the residual strain of as-deposited films is measured, which is quite large. The residual strain of the films is also measured after annealing them not only at 500 ℃, 600 ℃, 700 ℃ and 800 ℃ in N₂ environment for 1 hour but also at the conditions for depositing a 2 ㎛ thick polysilicon at 585 ℃ and 625 ℃. Our results show that the 7 wt% PSG is best suited as the sacrificial layer for 2 ㎛ thick polysilicon processes.
이상운,김찬우,김민근,김성곤,권광준,박영욱,Lee, Sang-Woon,Kim, Chan-Woo,Kim, Min-Keun,Kim, Seong-Gon,Kwon, Kwang-Jun,Park, Young-Wook 대한악안면성형재건외과학회 2011 Maxillofacial Plastic Reconstructive Surgery Vol.33 No.6
Pathologic fractures of the mandible can occur for many reasons including osteoradionecrosis, osteomyelitis, malignancy and cyst. Pathologic fractures are difficult to treat because management is needed not only for the fractures of the mandible but also the underlying disease the is weakening the bone. Additionally, the diseased mandible in the pathologic fracture frequently has abnormal bone healing capacity. We experienced three cases of pathologic fractures of the mandible resulting from cyst, malignancy and osteomyelitis. The treatment of these cases was complicated and time-consuming. Therefore, we present our three cases and discuss the management of pathologic fractures of the mandible.
서중환경에서 표면피복 양생재 변화에 따른 콘크리트의 균열특성
이제현 ( Lee Je-hyun ),김태우 ( Kim Tae-woo ),백철 ( Baek Cheol ),이상운 ( Lee Sang-un ),한민철 ( Han Min-cheol ),한천구 ( Han Cheon-goo ) 한국건축시공학회 2017 한국건축시공학회 학술발표대회 논문집 Vol.17 No.2
Many problems in various aspects such as generation of plastic/dry contraction cracks and cold joints can be caused unless proper quality control measures are established in hot weather circumstances. Therefore, this study aimed to compare the crack patterns of concrete by applying a change in 3 surface curing methods such as a mono aluminum-deposited bubble sheet developed to reduce the temperature and cracks through reflection of heat in summer and a PE film and a surface exposure used generally to an actually constructed apartment slab. The study result confirmed that the best concrete crack reduction effect can be obtained with a mono aluminum-deposited bubble sheet.
최상길(Sang-gil Choi),황성우(Seong-woo Hwang),전호진(Ho-jin Jeon),김우혁(Woo-hyeok Kim),정도현(Do-hyeon Jeong),이다연(Da-yeon Lee),이상운(Sang-un Lee) 한국방송·미디어공학회 2021 한국방송공학회 학술발표대회 논문집 Vol.2021 No.11
방송장비가 네트워크 기술을 만나 진화하고 있다. 네트워크 케이블로 초고해상도 영상과 다채널 음향 데이터를 송·수신하고, 다수의 방송장비 제어를 가능케 하는 NDI(Network Device Interface)의 등장으로 방송장비와 네트워크 기술이 융합되고 있다. 최근 국내외 여러 기업이 네트워크 기반의 방송 솔루션을 출시하고 있어, 관련 산업계는 향후 방송장비 시장이 네트워크 기반으로 개편될 것으로 전망하고 있다. NDI는 뉴텍(NewTek)에서 개발한 IP 전송 프로토콜의 일종으로 무(無)손실, 압축, 제로(Zero) 딜레이, 멀티캐스트 등의 특징을 갖고 있다. 기존 비디오 전송 프로토콜이었던 SDI(Serial Device Interface)와는 다르게 네트워크에서 방송장비를 운용할 수 있도록 만들어진 프로토콜이다. 본 논문에서는 NDI를 기반으로 앞으로 다가올 포스트 코로나 시대에 대응할 효율적인 방송 환경을 제안하고자 한다.
반우호 ( Woo Ho Ban ),강현희 ( Hyeon Hui Kang ),백명기 ( Myong Ki Baeg ),김재경 ( Jae Gyung Kim ),김현진 ( Hyun Jin Kim ),백인운 ( In Woon Baek ),김은오 ( Eun Oh Kim ),고선혜 ( Sun Hye Ko ),이상학 ( Sang Haak Lee ),문화식 ( Hwa Si 대한결핵 및 호흡기학회 2011 Tuberculosis and Respiratory Diseases Vol.70 No.4
Herein we report the case of a 71-year-old woman who complained of fatigue and enlarged right axillary lymph nodes for 18 months. At her first visit, her chest X-ray showed diffuse nodular opacities in both lung fields. Initial excisional biopsy of the axillary lymph nodes showed granulomatous lesions and acid fast bacilli were seen on Ziehl-Neelsen staining. However, even after 15 months of anti-tuberculosis (TB) medication, her right axillary lymph nodes were enlarged. We re-performed an excisional biopsy of the nodes, which showed Hodgkin`s lymphoma (HL). A retrograde review of the biopsy before anti-tuberculous medication, revealed HL coexisting with TB. HL and TB cause difficulties in differential diagnosis due to similarities in clinical course, imaging procedures and histopathological analysis of the involved tissue. Therefore, it is important to consider the possibility of concurrent HL and TB when patients who undergo treatment for TB or chemotherapy for lymphoma complain of persistent systemic symptoms or enlarged lymph nodes.