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고밀도 플라즈마에 의한 $CeO_2$ 박막의 식각 메커니즘 연구
오창석,김창일,Oh, Chang-Seok,Kim, Chang-Il 대한전자공학회 2001 電子工學會論文誌-SD (Semiconductor and devices) Vol.38 No.12
$CeO_2$ 박막은 강유전체 메모리 디바이스 응용을 위한 금속-강유전체-절연체-실리콘 전계효과 트랜지스터 구조에서의 강유전체 박막과 실리콘 기판 사이의 완충층으로서 제안되어지고 있다. 본 논문에서는 $CeO_2$ 박막을 유도 결합 플라즈마를 이용하여 $Cl_2$/Ar 가스 혼합비에 따라 식각하였다. 식각 특성을 알아보기 위한 실험조건으로는 RF 전력 600 W, dc 바이어스 전압 -200 V, 반응로 압력 15 mTorr로 고정하였고 $Cl_2$($Cl_2$+Ar) 가스 혼합비를 변화시키면서 실험하였다. $Cl_2$/($Cl_2$+Ar) 가스 혼합비가 0.2일때 $CeO_2$ 박막의 식각속도는 230 ${\AA}$/min으로 가장 높았으며 또한 $YMnO_3$에 대한 $CeO_2$의 선택비는 1.83이였다. 식각된 $CeO_2$ 박막의 표면반응은 XPS와 SIMS를 통해서 분석하였다. XPS 분석 결과 $CeO_2$ 박막의 표면에 Ce와 Cl의 화학적 반응에 의해 CeCl 결합이 존재함을 확인하였고, 또한 SIMS 분석 결과로 CeCl 결합을 확인하였다. $CeO_2$ 박막의 식각은 Cl 라디칼의 화학적 반응의 도움을 받으며 Ce 원자는 Cl과 반응을 하여 CeCl과 같은 혼합물로 $CeO_2$ 박막 표면에 존재하며 이들 CeCl 혼합물은 Ar 이온들의 충격에 의해 물리적으로 식각 되어진다. Cerium oxide ($CeO_2$) thin film has been proposed as a buffer layer between the ferroelectric thin film and the Si substrate in Metal-Ferroelectric-Insulator-Silicon (MFIS) structures for ferroelectric random access memory (FRAM) applications. In this study, $CeO_2$ thin films were etched with $Cl_2$/Ar gas mixture in an inductively coupled plasma (ICP). Etch properties were measured for different gas mixing ratio of $Cl_2$($Cl_2$+Ar) while the other process conditions were fixed at RF power (600 W), dc bias voltage (-200 V), and chamber pressure (15 mTorr). The highest etch rate of $CeO_2$ thin film was 230 ${\AA}$/min and the selectivity of $CeO_2$ to $YMnO_3$ was 1.83 at $Cl_2$($Cl_2$+Ar gas mixing ratio of 0.2. The surface reaction of the etched $CeO_2$ thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is a Ce-Cl bonding by chemical reaction between Ce and Cl. The results of secondary ion mass spectrometer (SIMS) analysis were compared with the results of XPS analysis and the Ce-Cl bonding was monitored at 176.15 (a.m.u). These results confirm that Ce atoms of $CeO_2$ thin films react with chlorine and a compound such as CeCl remains on the surface of etched $CeO_2$ thin films. These products can be removed by Ar ion bombardment.
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메기 송과체의 신경세포에 관한 조직화학 및 전자현미경적 연구
오창석,김영우,김백윤,Oh, Chang-Seok,Kim, Young-Woo,Kim, Baik-Yoon 한국현미경학회 1995 Applied microscopy Vol.25 No.2
This study was carried out to clarify the neuronal organization in pineal body of catfish. The pineal body was observed by acetylcholinesterase histochemistry and electron microscopy. The neuronal types observed in the pineal body of catfish were bipolar and multipolar cells. Multipolar cells were found throughout the pineal end vesicle and whole stalk, but bipolar cells only in the end vesicle and distal stalk. The pineal tract was formed by the long axons of these neurons. The neuronal clusters(pineal ganglia) were also observed in the end vesicle. In summary, the type of neurons in catfish pineal was different from that of other species, and the neuronal distribution differed depending on the region of pineal body. These results reflect the interspecific and regional differences of the pineal organization of fishes.
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오창석,정구진,박보경,배성권,Oh, Chang Seok,Jung, Cu Jin,Park, Bo Kyung,Bae, Sung Kwon 보건의료산업학회 2007 보건의료산업학회지 Vol.1 No.1
The current hospital industry is showing relatively low profitability in comparison with other industries due to the low medical fees and high costs. Therefore, our government presented the direction of improvement through model execution and support of the specialized hospitals. However, it is estimated that the specialized hospitals also will show differentiated management performances in accordance with their specialized fields due to the characteristics of medical treatment. Therefore, this study had attempted an analysis on the financial index in accordance with the weight of medical treatment items for the rehabilitative medicine department among the whole hospital groups through getting out of analyzing financial indices of individual hospitals centered at their costs. For this p개pose, this study had carried out its research by partially reciting the study on the plan for utilizing participations of private health resources to expand rehabilitative medicine services into the private people of the Korea Health Industry Development Institute(KHIDI). As its results, it was shown that the stability, profitability, activity and productivity of hospitals with high weight of medical treatment for the rehabilitative medicine department were lower than those for the general hospitals. To support smooth operations of these hospitals 'with high weight of medical treatment for the rehabilitative medicine department or of specialized rehabilitation hospitals, it is judged that the plan such as the support for hospital management fund and the additional recognition on the rehabilitative fees, etc. together with the actualization of medical fees must be provided for the institutions which are providing rehabilitative medical services more than the fixed percentage and being equipped with the sufficient medical equipment and personnel to do them.
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오창석,Oh, Chang-Seok 한국국토정보공사 공간정보연구원 2014 지적과 국토정보 Vol.44 No.1
본 논문은 2011년부터 시행되고 있는 지적측량수수료의 개별공시지가 적용 제도의 문제점과 개선방안을 제시하기 위하여 각종 관련 전문서적, 학술논문, 국토교통부의 관련 자료를 참고하고 대한지적공사 광주전남본부의 지적측량접수 담당직원들을 대상으로 설문을 실시하여 그 내용과 결과들을 두 가지로 분석하여 문제점과 개선방안을 제시하였다. 먼저 개별공시지가 적용 방법의 개선방안으로 가격대별 지가계수의 세분화와 개별공시지가가 없는 토지에 대해서는 표준지와 토지가격비준표 활용 방안을 제시하였다. 다음으로 지적측량접수 담당자의 개별공시지가 교육 및 교재와 홍보자료 미비 등의 문제점에 대한 개선방안으로는 대한지적공사 지적연수원에 개별공시지가 과정과 사이버 교육 등을 신설하여 담당직원과 일반직원들에게 교육하여 전문성을 강화하고 담당자의 입장에서 이해하기 쉬운 개별공시지가 관련 교재와 국민들에게 지적측량수수료에 개별공시지가 적용의 필요성과 방법에 대한 홍보자료를 작성하여 배포하고 이를 통해 정부3.0을 실현할 것을 제시하였다. This study presents the two major problems and those improvements of Cadastral Surveying Fee System. The system has been attempted to apply for Individual Public Land Price since 2011. To tackle those problems, this study examines a variety of literatures such as specialty publications, academic thesis, and reports from government. This study applies questionnaire survey method. And the data were collected by the personnel in charge of receiving cadastral surveying application in Gwangju and Jellanamdo branch, LX Korea Cadastral Survey Corp. In order to apply Individual Public Land Price to Cadastral Surveying Fee System, this study suggests subdivision of land at price and application of sample lot and land price standard index table. A number of curriculums provided by training institute in LX Korea Cadastral Survey Corp., education materials and cyber education method are necessary to promote awareness of personnel in charge. Publicity activities are also required to fulfill governmental basis.
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정수처리 공정 적용을 위한 MCDI (Membrane Capacitive Deionization) Module의 수용액 내 TDS 제거 특성에 관한 연구
오창석,안주석,오현제,Oh, Changseog,An, Jusuk,Oh, Hyun-Je 대한상하수도학회 2021 상하수도학회지 Vol.35 No.4
Recently, various researches have been studied, such as water treatment, water reuse, and seawater desalination using CDI (Capacitive deionization) technology. Also, applications like MCDI (Membrane capacitive deionization), FCDI (Flow-capacitive deionization), and hybrid CDI have been actively studied. This study tried to investigate various factors by an experiment on the TDS (Total dissolved solids) removal characteristics using MCDI module in aqueous solution. As a result of the TDS concentration of feed water from 500 to 2,000 mg/L, the MCDI cell broke through faster when the higher TDS concentration. In the case of TDS concentration according to the various flow rate, 100 mL/min was stable. In addition, there was no significant difference in the desorption efficiency according to the TDS concentration and method of backwash water used for desorption. As a result of using concentrated water for desorption, stable adsorption efficiency was shown. In the case of the MCDI module, the ions of the bulk solution which is escaped from the MCDI cell to the spacer during the desorption process are more important than the concentration of ions during desorption. Therefore, the MCDI process can get a larger amount of treated water than the CDI process. Also, prepare a plan that can be operated insensitive to the TDS concentration of backwash water for desorption.
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오창석(Oh, Chang-Seog) 숭실대학교 법학연구소 2013 法學論叢 Vol.29 No.-
중재에 있어서는 분쟁사안에 대하여 최종적인 결정을 하게 되는 중재인을 당사자들이 스스로 선정할 수 있다. 이것은 결국 중재인들에 대한 당사자들의 영향력 행사가능성을 의미하기도 한다. 따라서 당사자들은 중재인의 공정성과 독립성보다는 오히려 자신에게 조금이라도 유리한 판정을 기대할 수 있는 중재인을 선정하고자 하는 경향이 있다. 특히 국제상사 중재에 있어서는 당사자들간에 다른 합의가 없는 경우에는 서로 다른 국적을 가진 3인의 중재인으로 중재판정부를 구성하는 것이 일반적인데, 이러한 경우에는 각 중재인들의 사고방식의 차이, 언어와 문화의 차이, 다른 법체계 속에서의 법학교육의 차이 등의 이유로 서로 의견을 달리 하는 것은 드문 일이 아니다. 소수의견은 원래 영미법계 국가에서의 소송에서 인정되어 온 것이다. 대륙법계 국가에서는 소수의견의 공표가 합의비밀의 원칙을 저해한다는 이유로 전면 금지되거나 또는 우리나라에서와 같이 대법원이나 헌법재판소의 재판의 경우에만 허용되고 있는 실정이다. 종래 소수의견의 장점과 단점에 대해서는 특히 독일에서 많은 논의가 있었고, 결국 소수의견의 장점이 그 단점에 비하여 우세하다는 평가를 받고 있다. 이러한 소송에 있어서의 소수의견의 장단점이 중재절차에도 그대로 적용될 수는 없지만, 오늘날 국제상사중재 실무에 있어서는 소수의견을 허용하는 추세이다. 그리고 소수의견의 공표는 법관뿐만 아니라 중재인의 권한이라고 파악되기도 한다. 우리나라 중재법은 소수의견에 대한 규정이 없어서 논란이 있을 수 있으나, 중재당사자들과 다른 중재인들의 합의가 있는 경우에는 소수의견의 개진을 허용해야 할 것으로 보인다. 다만, 소수의견은 중재제도의 목적과 중재인의 독립성과 공정성을 저해하지 않는 범위내에서 허용되어야 할 것이며, 이를 통하여 중재판정의 취소를 구하는 기초를 제공하기 위한 목적으로 이용되어서는 안된다. An opinion in the administration of justice is understood as the judge’s, or court’s position on a certain legal issue or with regard to a pending case, which also provides an explanation of the reasoning behind the position. Ideally, decisions are made unanimously. The opinion of the majority of the court is drawn up as the court judgment. The minority opinion, or the dissenting opinion, is the opinion expressed by one judge or jointly by several judges who disagree with the decision reached by the majority in the case. Such a separately expressed opinion can differ from the majority opinion for its reasoning or conclusion. Dissenting opinion and its disclosure is known mainly in the countries of the Anglo-American legal family. In the continental European legal systems, the dissenting opinion is allowed and disclosed only in some countries and even there it is made available in the published form mostly only in higher or constitutional courts. Judges of Korean Supreme Court and Korean Constitutional Court may also attach dissenting opinions to the judgments of the Court. International arbitrators sometimes include dissenting opinions in their awards. This is done because they are convinced that the majority decision is not sustainable for legal or factual reasons or because they feel obliged to the party that appointed them that they have represented, albeit without success, the position of “their” party in the deliberations of the tribunal. Often the viewpoints are expressed as arguments not only against but in favour of the dissenting opinion. Arguments both for and against the dissenting opinion can be divided into those having to do with the internal work of the arbitral tribunal and those which are external to the tribunal. The advantages of dissenting opinions appear to outweigh, both in number and in substance, their disadvantages. Under the practice, dissenting opinions should be permitted and should be published, but they should not be used to undermine the aims and principles of arbitration, especially its neutrality and confidentiality, or to lay an improper basis for judicial attack on the award. Only responsible use of dissenting opinions can be to the benefit of arbitration.
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