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강중옥(Joong-Ok Kang),백석(Suk Baek),한창수(Chang-Soo Han),홍성욱(Seong-Wook Hong) Korean Society for Precision Engineering 2004 한국정밀공학회지 Vol.21 No.3
This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in [1]. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically pre loaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.
입력성형기법을 이용한 변위증폭형 마이크로스테이지 잔류진동제어
배규현,송은혜,강중옥,홍성욱 한국공작기계학회 2009 한국공작기계학회 춘계학술대회논문집 Vol.2009 No.-
This paper presents a result of application of input shaping to a micro-stage with a displacement amplification mechanism. The stage considered in this study is subjected to severe residual vibration in its lever mechanism to amplify displacement. The system dynamics exhibit some nonlinear nature due to the hysteresis of the PZT actuator. Input shaping method is successfully applied to the system so as to eliminate residual vibration from the system. The experimental study also shows that staircase input is useful to avoid the performance degrade by the nonlinear characteristics.