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박종하(Jong-Ha Park),황주호(Jooho Hwang),박천홍(Chun-Hong Park),홍준희(Jun-Hee Hong) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12㎛ to 0.17㎛ by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15μm. English abstract here.
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