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The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12㎛ to 0.17㎛ by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15μm. English abstract here.
The burr of micro drilling and micro cutting on thin metal film is a major obstacle to mass production for micro PCB boards in micro technologies of personal computing and telecom explosion. As the burr affects on the assembling process, it is necessary to study continuously on control or elimination of the burr. In order to get higher valued products, it is also needed to competitive techniques with the high resolution. In this paper, we studied experimentally the burr generation that when it is processed on the copper foil by laser in micro-hole machining Unlike mechanical machining, the burr produced on substrate is a resultants of melt and re-solidification of a melten metal which was heated and treated and treated by laser. And higher laser energy increases the size of burr. Therefor in micro-drilling with laser, it is difficult to reduce the effects of burr for very thin metal sheets. We investigated the state of the burr and analyzed the laser ablation Cu micro machining with respect to laser intensity and processing time.
Nowadays, great attention has been shown to the question of ultrasonic linear motor for accomplishing the high positioning accuracy and high driving force in the semiconductor and optical industry. Ultrasonic linear motors have many advantages such as simple structure, quick response, ability to maintain position without energy consumption, and electromagnetic effect. And BLT has attracted attention to accomplish large vibration amplitude and large mechanical force. Authors designed and developed the new type of ultra sonic linear motor with multi support mechanism, achieved 75N of output force and 0.45㎧ of velocity.
In this study, the effect of mode Ⅱ by variation of multilevel loading direction was experimentally investigated in the fatigue crack propagation behavior. To generate mixed-mode Ⅰ+Ⅱ loading state, the compact tension shear(CTS) specimen and loading device were used in this tests. The experimental method divided into three steps and three cases that were step Ⅰ(0°), step Ⅱ(30°, 60°, 90°),step Ⅲ(0°) and case Ⅰ(0° ⇒ 30° ⇒ 0°), case Ⅱ(0° ⇒ 60° ⇒ 0°), case Ⅲ(0° ⇒ 90° ⇒ 0°). The result of test, the step Ⅱ affected to the step Ⅲ in the all case. Specially, The fatigue crack propagation rate was faster and the fatigue life was smaller than of mixed mode Ⅰ+Ⅱ(30°,60°) due to the effect of mode Ⅱ in the step Ⅲ of the case Ⅲ.