Thermal Stability, Adhesion and Electrical Studies on (Ti,Zr)Nx Thin Films as Low Resistive Diffusion Barriers between Cu and Si

Cheng-Lin Huang,Chih-Huang Lai,Po-Hao Tsai,Yu-Lin Kuo,Jing-Cheng Lin,Chiapyng Lee 대한금속·재료학회 2014 ELECTRONIC MATERIALS LETTERS Vol.10 No.3

In this study, we investigated the thermal stability, wettability, adhesion and reliability of (Ti,Zr)Nx films used as the diffusion barrier between Cu and Si. (Ti,Zr)Nx films were prepared by DC reactive magnetron sputtering from a Ti-5 at. % Zr alloy target in N2/Ar gas mixtures. A minimum film resistivity of 59.3 μΩ cm was obtained at an N2/Ar flow ratio of 2.75, which corresponds to the near stoichiometric composition (N/(Ti,Zr) ratio ~0.95). The sheet resistance of Cu/(Ti,Zr)N0.95/Si was not significantly increased until annealing above 750°C, indicating good thermal stability. On the other hand, the adhesion energy between Cu and the (Ti,Zr)Nx film was reduced as the N/Ti ratio was increased. To obtain reliable performance on stress-induced-voiding (SIV) and electromigration (EM) tests, we proposed to use (Ti,Zr)/(Ti,Zr)Nx/(Ti,Zr) tri-layers. We suggest that the interfacial adhesion between barrier and Cu plays an important role in reliability. The proposed tri-layer structure may be a promising candidate for a barrier, as it exhibits excellent reliability without increasing resistance.

Characteristics of Reactively Sputtered Niobium Nitride Thin Films as Diffusion Barriers for Cu Metallization

Cheng-Lin Huang,Chih-Huang Lai,Po-Hao Tsai,Hsing-An Huang,Jing-Cheng Lin,Chiapyng Lee 대한금속·재료학회 2013 ELECTRONIC MATERIALS LETTERS Vol.9 No.5

NbN films were prepared by radio frequency reactive magnetron sputtering and then employed as diffusion barriers between Cu and Si. The microstructure of the NbN films was an assembly of very small columnar crystallites with a cubic structure. To investigate the properties as diffusion barriers, we performed metallurgical reactions of Cu/NbN0.8/Si, Cu/Nb/Si and Cu/TaN0.7/Si for comparisons. The sheet resistance increased dramatically after annealing above 750°C for Cu/NbN0.80/Si, and above 500°C for both Cu/Nb/Si and Cu/TaN0.7/Si. The interfaces were deteriorated seriously and formation of Cu3Si was observed when the sheet resistance was significantly increased. The diffusion coefficient of Cu in NbN barrier films was estimated by using the change of resistance (ΔRs/Rs %). Compared with TaN0.7, NbN0.8 films possess larger grain size and lower Cu diffusion coefficient. Our results suggest that the NbN film can be used as a diffusion barrier for Cu metallization as compared to the well-known TaN film.

Developing Interaction Specifications for Online-to-offline (O2O) Proximity Commerce Systems

Cheng-Jhe Lin,Chiuhsiang Joe Lin,Tsai-Ting Lee,Jing-Ming Chiu 대한인간공학회 2014 대한인간공학회 학술대회논문집 Vol.2014 No.5

Information technology products such as smart phones, tablet PCs, eBooks and the intelligent-interactive digital signage have evolved and perfectly merged with the service systems to provide user-friendly user-interfaces and innovative service patterns. Online-to-offline (O2O) service model is one of the newest developments in the service systems where users in the physical world can interact with service providers in the cyberspace through various devices. Although traditional HCI studies have provided various research frameworks to describe interfaces and activities involved, there is a lack of interaction specifications which can clearly describe HCI in the realm of O2O service systems. This study developed a formal language that facilitates establishment of HCI specifications for O2O applications in proximity commerce based on interaction styles consisting of 4 inter-action types represented in an interaction diagram. The formal language thus provides a common ground for service provider and service implementer to communicate and develop a concrete prototype effectively.

Developing Interaction Specifications for Online-to-offline (O2O) Proximity Commerce Systems

( Cheng Jhe Lin ),( Chiuhsiang Joe Lin ),( Tsai Ting Lee ),( Jing Ming Chiu ) 한국감성과학회 2014 춘계학술대회 Vol.2014 No.-

Information technology products such as smart phones, tablet PCs, eBooks and the intelligent-interactive digital signage have evolved and perfectly merged with the service systems to provide user-friendly user-interfaces and innovative service patterns. Online-to-offline (O2O) service model is one of the newest developments in the service systems where users in the physical world can interact with service providers in the cyberspace through various devices. Although traditional HCI studies have provided various research frameworks to describe interfaces and activities involved, there is a lack of interaction specifications which can clearly describe HCI in the realm of O2O service systems. This study developed a formal language that facilitates establishment of HCI specifications for O2O applications in proximity commerce based on interaction styles consisting of 4 inter-action types represented in an interaction diagram. The formal language thus provides a common ground for service provider and service implementer to communicate and develop a concrete prototype effectively.

The Gender-Sensitive Social Risk Factors for Internet Addiction in College Undergraduate Students

Xia Lin,Jing-yan Gu,Wan-jun Guo,Ya-jing Meng,Hui-yao Wang,Xiao-jing Li,Wei Deng,Lian-sheng Zhao,Xiao-hong Ma,Ming-li Li,Ting Chen,S,K,Cheng,Tao Li 대한신경정신의학회 2021 PSYCHIATRY INVESTIGATION Vol.18 No.7

Objective The current study aims to explore precipitating and social risk factors for internet addiction (IA) in university undergraduate students, and to provide evidence for interventions and the early prevention of IA in different genders. Methods Four thousand eight hundred and fifty-eight college sophomores completed an online survey on their internet use-related behaviours and social risk factors. Results We found that more male (8.3%) than female students (5.4%) had moderate and severe IA. The main online activity in the moderate and severe IA groups was online gaming in males and online streaming in females. Roommates engaging in similar internetbased entertainment was a risk factor of IA only for males, while not being in a romantic relationship was a risk factor of IA for females only. Infatuation with the internet before college and adjustment problems for college life were shared risk factors for both genders in the mild and moderate IA groups. Conclusion IA was a common phenomenon in college students with shared and unique precipitating and social risk factors in males and females. The gender-sensitive risk factors for IA warranted earlier and individualized intervention and prevention strategies for IA in this population.

필자약력

김경이(Ker Yi Jing),예세웅(Shixiong Ni),박종성(Chong Sung Park),임벽소(Bih Jaw Lin),임추산(Chiou Shan Lin),송국성(Guo Cheng Suong),정단약(Y. Cheng Tuan),조현동(Hyun Dong Cho),한종만(Jong Man Han),홍민식(Min Shik Hong) 한양대학교 아태지역연구센터 1992 중소연구 Vol.16 No.2

Investigation of the electrical properties of metal–oxide–metal structures formed from RF magnetron sputtering deposited MgTiO3 films

Cheng-Liang Huang,Sih-Yin Wang,Yuan-Bin Chen,Bing-Jing Li,Ying-Hong Lin 한국물리학회 2012 Current Applied Physics Vol.12 No.3

Thin films of MgTiO3 high-k dielectric have been prepared by RF magnetron sputtering deposition at various substrate temperatures. X-ray diffraction, atomic force microscopy were used to characterize the deposited films. Experimental results show that substrate temperature has little effect on the stoichinometry. The electrical properties of MgTiO3 metaleinsulatoremetal (MIM) capacitors were investigated at various deposition temperatures, Pt/MgTiO3/Pt/SiO2/n-Si, were studied. It is shown that the MgTiO3 (210 nm) MIM capacitor fabricated at 200 ℃ shows an overall high performance, such as a high capacitance density of w1.2 nF/um2, a low leakage current of 1.51 × 10-9 A/cm2 at 5 V, low-voltage coefficients of capacitance, and good frequency dispersion properties. All of these indicate that the MgTiO3 MIM capacitors are very suitable for use in Si analog circuit application or dynamic random access memory (DRAM) cell. Thin films of MgTiO3 high-k dielectric have been prepared by RF magnetron sputtering deposition at various substrate temperatures. X-ray diffraction, atomic force microscopy were used to characterize the deposited films. Experimental results show that substrate temperature has little effect on the stoichinometry. The electrical properties of MgTiO3 metaleinsulatoremetal (MIM) capacitors were investigated at various deposition temperatures, Pt/MgTiO3/Pt/SiO2/n-Si, were studied. It is shown that the MgTiO3 (210 nm) MIM capacitor fabricated at 200 ℃ shows an overall high performance, such as a high capacitance density of w1.2 nF/um2, a low leakage current of 1.51 × 10-9 A/cm2 at 5 V, low-voltage coefficients of capacitance, and good frequency dispersion properties. All of these indicate that the MgTiO3 MIM capacitors are very suitable for use in Si analog circuit application or dynamic random access memory (DRAM) cell.

Aggregation behavior analysis of hydrate particles in the bend pipe based on the population balance model

Cheng Yu,Lin Wang,Chuanjun Han,Jiaqiang Jing,Yuxing Li,Wuchang Wang,Mingjun Du,Xincan Song,Longyao Zhang 대한기계학회 2022 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.36 No.7

The hydrate particle aggregation is crucial for the flow safety of oil and gas pipelines. In this paper, coupled with the Eulerian-Eulerian model, k-ε turbulence model and the population balance model considering the hydrate aggregation and breakage, the hydrate aggregation process is studied in the bend, and the change of the average particle size under different hydrate volume fractions is discussed. The results show that the hydrate aggregation process includes two stages in the bend, namely the rapid growth and the dynamic equilibrium. In the rapid growth stage, both the hydrate concentration and particle size in the elbow increase rapidly, and the high concentration and large particle size regions on the inside of the elbow also increase significantly. Furthermore, two types of aggregates are formed on the inside of the elbow. One is a small amount of large-particle aggregates, while the other is the relatively high concentration of medium-size aggregates. Besides, the uniform suspension with a smaller concentration and particle size is distributed on the outside of the elbow, but there are also large-size particles that aggregate and adhere near the wall of pipe. As the hydrate volume fraction increases, the hydrate average particle size increases. High concentration hydrate reaches dynamic equilibrium faster during the flow process.

Regeneration of hexamminecobalt(II) under the catalysis of activated carbon modified with ZnCl2 solution

Jing-yi Cheng,Lin Yang,Wei-kang Yuan,Xiang-li Long 한국공업화학회 2012 Journal of Industrial and Engineering Chemistry Vol.18 No.5

The simultaneous scrubbing of NO and SO2 can be accomplished by hexamminecobalt(II) solution. Activated carbon acts as a catalyst to regenerate hexamminecobalt(II), Co(NH3)62+, to sustain the NO removal efficiency. In this paper, ZnCl2 solution has been used to ameliorate the catalytic performance of coconut activated carbon in the regeneration of Co(NH3)62+. The effects of the modification condition on the catalytic performance of activated carbon have been investigated in a batch stirred cell. The change of the surface chemical characteristics of the activated carbon caused by ZnCl2 treatment was measured by determining the concentrations of acidic and basic groups as well as their points of zero charge (pHpzc)with Boehm titration and mass titration. The alteration of the surface physical characteristics of the carbons was determined with an ASAP2000 Surface Analyzer using N2 as the adsorbate. The experiments demonstrate that the catalytic performance of the coconut activated carbon may be improved when the carbon is treated by ZnCl2 solution with concentration above 0.30 mol l1. The best ZnCl2 concentration may be 0.50 mol l1. The optimal impregnation duration is 9 h. High activation temperature is propitious for the amelioration of the catalytic capability of carbon. 4 h may be the best time for the activation of activated carbon. In our experiment, the NO removal efficiency is maintained at a level of 73% when the regeneration of Co(NH3)62+ is under the catalysis of modified carbon while that is 57% with the regeneration of Co(NH3)62+ catalyzed by original carbon. It can be concluded that such modification can improve the catalytic performance of coconut activated carbon in the simultaneous removal of SO2 and NO with Co(NH3)62+ ammonia solution.

An improved algorithm for pile damage localization based on complex continuous wavelet transform

Jing-Liang Liu,Cheng-Xu Lin,Xi-Jun Ye,Wen-Ting Zheng,Yong-Peng Luo 국제구조공학회 2021 Smart Structures and Systems, An International Jou Vol.27 No.3

Since the complex continuous wavelet transform (CCWT) based pile damage detection method is empirical and subjective, an improved algorithm for pile damage localization based on CCWT is proposed by introducing K-means clustering and fast Fourier transform (FFT). In this method, the K-means clustering algorithm is used to accurately calculate the time coordinates of two energy concentrating points caused by the incident and reflected waves, respectively. Meanwhile, FFT is employed to estimate the concerned frequency band of the response signal. Therefore, a specific region in the time frequency plane is defined objectively and it can be used to search the phase angle turning points and localize pile damage. The proposed method is verified by numerical examples of piles with single and multiple damage positions. A parameter analysis is also conducted to investigate how damage depth and damage degree in piles affect the accuracy and effectiveness of the proposed method. The results demonstrate that the proposed method is able to localize a pile with a damage at least 2.5 m away from the pile head when the damage degree is as less as 5%. After that, dynamic tests of an actual square reinforced concrete pile and an actual circular reinforced concrete pile are investigated to verify the application of the proposed method on practical engineering. Although the proposed method is capable of localizing actual piles more accurately than the CCWT method, the problem of interference points needs to be addressed by mutual verification with other pile damage localization methods.