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열처리 조건에 따른 백금박막 측온저항체 온도센서의 특성에 관한 연구
정귀상,노상수 ( Gwiy Sang Chung,Sang Soo Noh ) 한국센서학회 1997 센서학회지 Vol.6 No.2
Platinum thin films were deposited on SiO₂/Si and Al₂O₃ substrates by DC magnetron sputtering for RTD (resistance thermometer devices) temperature sensors. The resistivity and sheet resistivity of these films were decreased with increasing the annealing temperature and time. We made Pt resistance pattern on Al₂O₃ substrate by lift-off method and fabricated Pt-RTD temperature sensors by using W-wire, silver epoxy and SOG(spin-on-glass). In the temperature range of 25∼400℃, we investigated TCR(temperature coefficient of resistance) and resistance ratio of Pt-RTD temperature sensors. TCR values were increased with increasing the annealing temperature, time and the thickness of Pt thin films. Resistance values were varied linearly within the range of measurement temperature. At annealing temperature of 1000℃, time of 240min and thin film thickness of l㎛, we obtained TCR value of 3825ppm/℃ close to the Pt bulk value.
서정환 ( Jeong Hwan Seo ),노상수 ( Sang Soo Noh ),이응안 ( Eung Ahn Lee ),정귀상 ( Gwiy Sang Chung ),김광호 ( Kwang Ho Kim ) 한국센서학회 2005 센서학회지 Vol.14 No.1
N/A This paper present characteristics of chromium oxide thin-film as piezoresistive sensors, which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-Oxide atmosphere for high temperature applications. The chemical composition, physical and electrical properties and thermal stability ranges of the CrO, sensing elements have studied. CrO_(x) thin films with a linear gauge factor(GF≒15), high electrical resistivity (p = 340μΩcm) and TCR<-55 ppml °C have been obtained. These CrO_(x) thin films may allow high temperature pressure sensor miniaturization to be achieved.