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PLA법으로 제작한 C<SUB>60</SUB> 과 Si 합성 박막의 특성 분석
김민성(M. S. Kim) 한국동력기계공학회 2005 한국동력기계공학회 학술대회 논문집 Vol.- No.-
We have investigated the fabrication of Si nanoparticles and C60 thin films by pulsed laser ablation. By Atomic Force Microscopy(AFM), the laser-deposited C60 thin film was verified to have surface far smoother than the surfaces of films produced by the conventional evaporation method. The Si deposited at a He atmosphere of 0.2 Torr was with about 60Å height of the Si nanoparticles, suggesting that it was uniformly deposited. We observed visible green emissions spectra in the Si/C60 multilayer films after laser annealing. It is considered that this green emissions is occurred from SiC particles, which is produced reaction of Si nanoparticles with C60 by laser annealing.