반도체 공정 설비 정비 작업 안전보건 가이드: 증착, 식각, 이온주입

조경이 ( Kyung Ehi Zoh ),한택현 ( Taek-hyeon Han ),문재진 ( Jae-jin Moon ),정인균 ( Ingyun Jung ),황영우 ( Yeong Woo Hwang ),권세영 ( Seyoung Kwon ),고경윤 ( Kyung-yoon Ko ),이민건 ( Mingun Lee ),장재필 ( Jaepil Chang ),박동욱 ( D 한국산업보건학회 2024 한국산업보건학회지 Vol.34 No.2

Objectives: The aim of this study is to develop a comprehensive Occupational Safety and Health (OSH) guide for maintenance tasks in semiconductor processing, specifically focusing on etching, deposition, and ion implantation processes. Methods: The development of the OSH guide involved a literature review, consultations with industry experts, and field investigations. It concentrates on Maintenance Work (MW) operations in these specialized areas. Results: The result is a detailed OSH guide tailored to MW in etching, deposition, and ion implantation facilities within semiconductor processing. This guide is structured to assist maintenance workers through pre-, during and post-MW phases, ensuring easy comprehension and adherence to safety protocols. It highlights the necessity of safety and health measures throughout the MW process to protect personnel. The guide is enriched with real-life scenarios and visual aids, including cartoons and photographs, to aid in the understanding and implementation of safety and health principles. Conclusions: This OSH guide is designed to enhance the protection of workers engaged in maintenance activities in the electronics sector, particularly in semiconductor manufacturing. It aims to improve compliance with safety and health standards in these high-risk environments.

염화벤잘코늄(Benzalkonium chloride) 살균제의 용도 및 건강 위험에 대한 고찰 : 가습기 살균제를 중심으로

김지원(Jiwon Kim),조경이(Kyung Ehi Zoh),김하나(Hana Kim),박동욱(Dong-Uk Park) 한국환경보건학회 2021 한국환경보건학회지 Vol.47 No.6

Background: Benzalkonium chloride (BKC) has been extensively used as a preservative in industrial products and in hygiene, medical, and cosmetic applications. Humidifier disinfectant (HD) products containing BKC have been used in South Korea. Objectives: This study was aimed to review types of products containing BKC, to summarize the regulations in the US, EU, Japan, and South Korea, and to review the health effects associated with the use of HD. Methods: We reviewed and summarized documents which were searched through PubMed and Google Scholar with the key words: BKC and asthma/contact dermatitis, humidifier disinfectant-associated lung injury (HDLI), and more. Results: Regulations in most countries including South Korea do not allow its use as disinfectants in spraytype of products for medicine, cosmetics, and household products. Two types of HD containing BKC (800~1,270 ppm) were marketed in South Korea from 1996~2003. Health effects reported from people who used products containing BKC were allergic contact dermatitis, erythema, and respiratory disease, including asthma. Two people who responded as HD users containing BKC only were confirmed to have developed asthma. HD-associated lung injury (HDLI) was reported by consumers who used both HD containing polyhexamethylene guanidine (PHMG) and HD containing BKC. Conclusions: In conclusion, the use of BKC as a biocide has to be controlled considering the route and pattern of exposure. Products containing BKC as preservatives were reviewed with exposure routes and sites in the human body such as skin, eyes, and the respiratory tract. HD containing BKC was clinically evaluated to be associated with asthma.

가습기 살균제 참사와 관련된 당시 생활화학물질 관리 법령에 대한 비판적 고찰

조대환(Dae Hwan Cho),조경이(Kyung Ehi Zoh),박태현(Taehyun Park),최예용(Yeyong Choi),박동욱(Dong-Uk Park) 한국환경보건학회 2022 한국환경보건학회지 Vol.48 No.3

Background: No study has examined the regulatory factors associated with fatal health problems due to the use of humidified disinfectants (HD) in South Korea. Objectives: This study aimed to identify and discuss the deficiencies and limitations found in the Toxic Chemical Control Acts (TCCA) that failed to prevent the health risk of chemicals in HD products. Methods: The South Korean TCCA was reviewed focusing on acts in operation from 1994 through the end of 2011, the period when HD was allowed in manufacturing and marketing. Results: The TCCA was the act intended to regulate the toxicity of chemicals in HD products. We found the TCCA to lack three key legal clauses which would have been essential to controlling the health risk of HD. First, there was the exemption of toxic and hazard testing for existing chemicals, including chloromethylisothiazolinone (CMIT), methylisothiazolinone (MIT), and benzalkonium chloride (BKC). Secondly, there were no articles requiring industry to provide animal inhalation test result for polymers such as polyhexamethylene guanidine (PHMG) and Oligo(2-)ethoxyethoxyethyl guanidine chloride (PGH). Finally, there was a lack of articles on examining the risk of products as well as on addressing changes in the usage of products. These articles were found to be generally provided in the US Toxic Substance Chemical Act (TSCA) and the EU Registration, Evaluation and Authorization of Chemicals (REACH). Conclusions: In conclusion, the Ministry of Environment of South Korea had not updated key articles for regulating hazardous chemicals, causing large-scale health problems due to HD which had been fundamentally addressed in chemical-related acts in other countries.

CMIT/MIT 함유 가습기 살균제 제품의 제조 및 판매기업 형사판결 1심 재판 판결문에 대한 과학적 고찰 (II) : 동물실험, 폐 손상 판정기준, 개인 인과

박동욱(Dong-Uk Park),조경이(Kyung Ehi Zoh),김지원(Jiwon Kim),최상준(Sangjun Choi),이소연(So-yeon Lee),전형배(Hyoungbae Jun),박태현(Taehyun Park) 한국환경보건학회 2021 한국환경보건학회지 Vol.47 No.3

Objectives: In January 2021, the former heads of the manufacturer SK Chemical and the vendor Aekyung were acquitted for manufacturing and selling humidifier disinfectant (HD) containing 5-chloro-2-methylisothiazol- 3(2H)-one/2-methylisothiazol-3(2H)-one (CMIT/MIT). In this article, we analyzed the rationale used in this judgement in the light of scientific consideration. Methods: The sentencing document for the judgements was obtained from the Korea Supreme Court Service. In particular, the judgements made by the court related to the toxicological and individual association with HD perspectives were discussed based on scientific evidence. Results: The ruling stated that the necessary conditions for causality between CMIT/MIT and such diseases were not met based on the fact that asthma and lung damage were not found in the inhalation exposure animal experiments. The judgment overlooked the inevitable limitations of using animal experiments for verifying health effects in humans, which are often inconsistent with the observations in animals. Among 11 government-affirmed lung injury cases with CMIT/MIT usage, three patients’ humidifier disinfectant-associated lung injury (HDLI) pathology proved that CMIT/MIT could cause lung injury similar to that caused by PHMG and PGH. In addition, five children showed decreased lung function related to damage caused by humidifier disinfectant exposure. Conclusions: We conclude that there is sufficient evidence supporting the assertion that HDs containing CMIT/ MIT cause lung injuries, including asthma, contrary to the court’s decision.

CMIT/MIT 함유 가습기 살균제 제품의 제조 및 판매기업 형사판결 1심 재판 판결문에 대한 과학적 고찰 (I) : 제품 위험성과 노출평가 측면에서

박동욱(Dong-Uk Park),조경이(Kyung Ehi Zoh),김지원(Jiwon Kim),최상준(Sangjun Choi),권정환(Jung-Hwan Kwon),전형배(Houngbae Jun),김성균(Sungkyoon Kim) 한국환경보건학회 2021 한국환경보건학회지 Vol.47 No.2

Objectives: There was a judgment of acquittal for the manufacturer SK Chemical and the vendor Aekyung regarding humidifier disinfectant (HD) containing 5-chloro-2-methylisothiazol-3(2H)-one/2-methylisothiazol- 3(2H)-one (CMIT/MIT). The rationale used in this judgement is discussed here in the light of scientific consideration. Methods: The sentencing document for the judgements was obtained from the Korea Supreme Court Service. In particular, the judgements made by the court related to the risk of HD and external and internal exposure to CMIT/MIT are discussed based on scientific evidence. Results: Rendering a determination in a criminal trial of insufficient evidence of causation, the court dismissed the prosecution’s motion that humidifier disinfectant-associated lung injuries (HDLI) and asthma were associated with the utilization of these products. However, CMIT/MIT, a strong sensitizing and corrosive substance, has been reported to be associated with brain toxicity, allergic contact dermatitis, and asthma. Furthermore, the judgment did not consider total consumption amounts or the cumulative dose of CMIT/MIT in the humidifier. Lastly, there are several cases supporting the fact that exposure to water-soluble substances including CMIT/MIT can cause lower respiratory tract diseases. In addition to cases of asthma among the workers exposed to CMIT/ MIT, we identified lung injury victims who were exposed to HDs exclusively containing CMIT/MIT. Conclusions: We conclude that there is sufficient evidence supporting the assertion that HDs containing CMIT/ MIT cause lung injuries, including asthma, contrary to the court’s judgement.

전자산업 공정에서 사용한 부품, 기계류 세정(cleaning) 작업 안전보건 가이드

이승희 ( Seunghee Lee ),김소연 ( Soyeon Kim ),조경이 ( Kyung Ehi Zoh ),황영우 ( Yeong Woo Hwang ),이경희 ( Kyong-hui Lee ),정광재 ( Kwang Jae Chung ),박동욱 ( Dong-uk Park ) 한국산업보건학회 2023 한국산업보건학회지 Vol.33 No.4

Objectives: This study aims to develop an Occupational Safety and Health (OSH) guide for the safe cleaning of contaminated machinery, equipment, and parts used in the electronics manufacturing process. Methods: A literature review, field investigations, and discussions were conducted. An initial draft of an OSH guide was developed and reviewed by experts with significant experience in maintenance work in the electronics manufacturing process in order to refine the guide. Results: Workers involved in cleaning processes with chemicals, solvents, and abrasive blasting can face exposure to a wide range of chemicals, abrasives, and noise. Identifying potential risks associated with each cleaning technique was an essential first step toward enhancing safety measures. The OSH guide comprises approximately eleven to twelve sections spanning 20-25 pages. It includes engineering and administrative protocols systematically organized to address the necessary actions before, during, and after cleaning tasks, depending on the technique. It is recommended that airline respirator masks be used in conjunction with an air purification system to ensure adherence to air quality standard D for atmosphere level. The use of an oil-free air compressor is advised, preferably a stationary model that does not rely on fuel sources like diesel. Conclusions: This OSH guide is designed to protect workers involved in maintenance activity in the electronics industry and aligns with global standards, such as those from the International Organization for Standardization (ISO) and Semiconductor Equipment and Material International, ensuring a higher level of safety and compliance.

정오 "가습기 살균제 제품의 건강위험 고찰 - 제품 수와 살균제 성분을 중심으로 -"

박동욱,이승희,임흥규,김소연,김지원,박지훈,조경이,Park, Dong-Uk,Lee, Seunghee,Lim, Heung Kyu,Kim, So-Youn,Kim, Jiwon,Park, Jihoon,Zoh, Kyung Ehi 한국환경보건학회 2020 한국환경보건학회지 Vol.46 No.6

가습기 살균제 제품의 건강위험 고찰 : 제품 수와 살균제 성분을 중심으로

박동욱(Dong-Uk Park),이승희(Seunghee Lee),임흥규(Heung Kyu Lim),김소연(So-Youn Kim),김지원(Jiwon Kim),박지훈(Jihoon Park),조경이(Kyung Ehi Zoh) 한국환경보건학회 2020 한국환경보건학회지 Vol.46 No.5

Objectives: No study has been conducted to review characteristics of humidifier disinfectants (HD) products, such as real numbers, levels and types of HD substances contained, or the volume marketed. We aimed to review the characteristics of HD through a literature review. Methods: We collected literature reporting the names, numbers, and ingredients of HD and discussed them with a focus on the number of HD products and the chemicals used as a disinfectant. Results: A total of eight publications has reported the names of HD brands or types of disinfectants from 2011 to 2020. To date, a total of 40 HD products have been used, excluding four products. Eight HD products used polyhexamethylene guanidine phosphate (PHMG) and 14 used a mixture of chloromethylisothiazolinone (CMIT) and methylisothiazolinone (MIT) as disinfectants. Benzalkonium chloride (BKC) and sodium dichloroisocyanurate (NaDCC) were also used as a disinfectant in several HD products. A total of 19 HD products were associated with the development of HD associated lung injury (HDLI). The Oxy Saksak HD product containing PHMG showed the highest number of HD associated health effects. The type of disinfectant from a total of 14 HD products has not been identified. Conclusions: A total of 40 HD products have been marketed in South Korea since 1994. Further studies should be conducted to identify the association of product characteristics, including type of HD ingredients, with health effects.

일부 신나의 구성성분과 공기중 증발에 관한 연구

백남원,조경이 한국산업위생학회 1997 한국산업보건학회지 Vol.7 No.2

For twelve solvent thinners, evaporation rates of components were investigated and models to estimate the actual concentration have been evaluated. Also, the current ACGIH TLVs (Threshold Limit Values) for the concentration of organic mixtures have been adjusted. The results of this study are summarized as follows : 1. Airborne concentrations of solvent thinner components were related to their respective vapor pressure (r=0.96). On the other hand, there was no significant relation between the concentrations in the air of the thinner compounds and the original amount in liquid form. 2. Airborne concentrations of each chemical were estimated by temperature at 8.5 1, 16.7 1 and 31.5±2℃ with an air velocity of 1.5 m/s. The concentrations were increased by increasing temperature (p$lt;0.05). The percentage of concentrations were proportionate to their respective percentage of vapor pressure. Among the chemicals studied, n-butyl acetate, n-butyl alcohol, m-xylene, p-xylene and o-xylene showed a clear relationship to temperature. 3. Airborne concentration of each chemical was estimated by air velocity at 0.05, 1.50 and 2.50 m/s, with a constant temperature at 17±2℃. The concentrations were increased by increasing air velocity (p$lt;0.05). The percentage of concentrations were proportionate to their respective percentage of vapor pressure. Among the chemicals studied, n-butyl alcohol, m-xylene and p-xylene showed a clear relationship to velocity. 4. In estimating the concentrations of solvent thinners by temperature and air velocity. ACGIH TLVs for mixtures tended to be larger than the values obtained by ACGIH exposure index. It shows that ACGIH TLVs for mixtures are not adequate for evaluating the airborne concentration of thinners and other organic mixtures. 5. The evaporation rate of the thinners were compared to the theoretical equations of Hummel, Braun and Mackay. The Hummel and Braun methods were close to exposure index but Makay's showed an underestimated value. In order to see the accuracy of each three models, the SSE (Error Sum of Squares) calculated for Hummel's was 1.73, being the closest to the actual values. 6. Present ACGIH TLVs for mixtures are not appropriate evaluate industrial environments. In this study, a correction of TLVs using vapor pressure of respective components was suggested. In order to evaluate the corrected TLVs a paired t-test was performed. There was no significant difference between the exposure index and the concentration corer suggested TLVs (p$gt;0.05). Thus, this corrected TLVs seem appropriate in order to evaluate actual industrial workplaces organic chemical concentration in the air.

우리나라에서 사용되는 일부 신나의 구성성분에 관한 연구

백남원,윤충식,조경이,정회명 한국산업위생학회 1998 한국산업보건학회지 Vol.8 No.1

In this study, 108 thinners were analyzed to identify their composition. The purposes of this study were to provide the data for MSDS and worker exposure levels. Thinners were collected from manufacturing industries, distributors and users. Wide ranges of thinner components were found ; Toluene, xylene, and ethyl benzene were most often found. Next, MIBK, cellosolve acetate, butyl cellosolve, and butyl acetate were found in 20-40 thinners. Others, such as acetone, n-hexane, cyclohexane, heptane, methylcyclohexane, octane and nonane were also found. There were about 5-6 components in each thinner. In the view point of Industrial Hygiene, Benzene was the most important component of thinners, which procures leukemia. Benzene was found from 8 kinds of thinners out of the total 108 surveyed. Thus, Content of benzene in thinners must be evaluated when industrial hygiene surveys are performed. Aromatic hydrocarbons were identified from 71 kinds of thinners out of total 108 and their contents were 10-87%. Alkanes were not contained in automobile painting, spraying, degreasing, urethane and epoxy thinners but lacquer, enamel and coating thinners.