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이재종,이응숙,황경현,민승기 한국공작기계학회 2002 한국공작기계학회 춘계학술대회논문집 Vol.2002 No.-
In the recent, electro-rheological fluid has been used for micro polishing of the 3-dimensional micro-aspherical lens and some sectional parts with defects on the wide flat wafer. The ER fluid has the properties that its viscosity has drastic changed under some electric fields. Therefore, ER fluid can be applicable to the micro polishing for some parts using these properties. In this paper, the experimental device has been constructed using the precision milling machine in order to micro polishing for some sectional parts of a 4 inches wafer. It is consisted of a small steel electrode, a wafer fixture, DC10mA and 5KV power supply unit, and a controller unit. Using the ER experimental device, possibility of amending for wide flat wafer and micro polishing of some micro part has been analyzed.
CNC 공작기계의 열변형 오차 보정 (Ⅰ) : 보정장치 기초실험 The Basic Experiment of Compensation Device
이재종,최대봉,곽성조,박현구 한국공작기계학회 2001 한국공작기계학회 춘계학술대회논문집 Vol.2001 No.-
One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric and thermal errors of the machine tools. In this study, the compensation device is manufactured in order to compensate thermal error of machine tools under the real-time. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to compensate thermal characteristics under several operating conditions, experiments performed with five gap sensors and manufactured compensation device on the horizontal machining center.
CNC 공작기계의 열변형 오차보정 (Ⅱ) : 알고리즘 및 시스템 인터페이스 중심 System Interface
이재종,최대봉,박현구,류길상 한국공작기계학회 2002 한국공작기계학회 추계학술대회논문집 Vol.2002 No.-
One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric errors, thermally-induced errors, and the deterioration of the machine tools. Geometric and thermal errors of machine tools should be measured and compensated to manufacture high quality products. In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. In this study, the compensation device and temperature-based algorithm have been implemented on the machining center in order to compensate thermal error of machine tools under the real-time. The thermal errors are predicted using the neural network and multi-regression modeling methods. In order to compensate thermal characteristics under several operating conditions, experiments performed with five gap sensors and manufactured compensation device on the horizontal machining center.
이재종,최대봉,박현구,곽성조,박홍석 한국공작기계학회 2000 한국공작기계학회 추계학술대회논문집 Vol.2000 No.-
In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.
이재종,최기봉,김기홍,임형준,Lee, JaeJong,Choi, KeeBong,Kim, GeeHong,Lim, HyungJun 한국진공학회 2015 진공 이야기 Vol.2 No.1
With the recognition of nanotechnology as one of the future strategic technologies, the R&D efforts have been performed under exclusive supports of governments and private sectors. At present, nanotechnology is at the focus of research and public attention in almost every advanced country including USA, Japan, and many others in EU. Keeping tracks of such technical trends, center for nanoscale mechatronics and manufacturing (CNMM) was established in 2002 as a part of national nanotechnology promotion policy led by ministry of science and technology (MOST) in Korea. It will hold widespread potential applications in electronics, optical electronics, biotechnology, micro systems, etc, with the promises of commercial visibility and competitiveness. In this paper, wafer scale multilayer nanoimprint lithography technology which is well-known the next generation lithography, roll-typed nanoimprint lithography (R-NIL), roll-typed liquid transfer imprint lithography (R-LTIL), the key technology for nanomanufacturing and nanoscale measurement technology will be introduced. Additionally, its applications and some achievements such as solar cell, biosensor, hard disk drive, and MOSFET, etc by means of the developed multilayer nanoimprint lithography system are introduced.