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박성만,신교직,최경호,배근열,이효선,허윤정,장기철,백정주,김영훈,송광식,김영랑 한국고분자학회 2021 한국고분자학회 학술대회 연구논문 초록집 Vol.46 No.1
PHPS (Perhydropolysilazane) is an inorganic compound with Si-N bonds that can be treated in solution and has properties similar to glass after curing. In general, for curing of PHPS, there are several methods including ammonia vapor exposure, thermal, and UV irradiation. Among a variety of curing methods, UV irradiation curing methods can be considered as promising methods because a Si-O-Si bond is formed immediately, while Si-O-Si bonds was formed followed by Si-OH intermediates for ammonia curing. In this study, PHPS was cured using pulse UV, and then photo-base generator was additionally incorporated using pulse UV irradiation. Due to the addition of photo-base generator, an amine catalyst was formed to increasing the curing efficiency. WVTR and OTR were measured to evaluate the barrier properties of the film according to the curing method. The conversion mechanism according to the curing method was evaluated through elemental analysis according to the depth of the film.