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Scaling MOSFETs을 위한 플라즈마 도핑 시스템을 이용한 fully 니켈 실리사이드의 일함수 조절
서보균(Bo-Kyun Seo),김병기(Byoung-Gi Kim),이헌복(Heon-Bok Lee),함성호(Sung-Ho Hahm) 대한전자공학회 2007 대한전자공학회 학술대회 Vol.2007 No.11
There are divided two kinds of potential solutions for limit of planar bulk MOSFET on the rise. First is a structural improvement of 3-Dimensional structure using double or triple gate, the other is a material improvement of physical phenomenons of earners using sal or SiGe substrate, novel gate material or dielectric material. In this paper, we focus on metal gate characteristics and fabricated MOS capacitor utilizing work function tuning of metal gate for pertinently controllable threshold voltage avoiding substrate doping, which was used NiSi.
좁은 트렌치를 이용한 Source/Drain 금속 접촉기술
장재형(Jae-Hyoung Jang),서보균,안시현(Shi-Hyun An),이헌복(Heon-Bok Lee),함성호(Sung-Ho Hahm) 대한전자공학회 2007 대한전자공학회 학술대회 Vol.2007 No.11
In this paper, a 3-dimensional MOSFET was fabricated was self-aligned contacts. we formed oxide spacer and nitride spacer. After etching out the sacrificial oxide spacer completely between fin side and nitride spacer, the ultra narrow trench was formed and filled up to form the contact by ALD Ni. This structure has the maximum contact area and show an alternative process techinique to overcome the lithography limit and to reduce contact area as the device scale down.
감마분광분석을 이용한 226Ra의 직접 측정방법에 대한 적용성 평가
지영용,정근호,임종명,김창종,장미,강문자,박상태,우주희,구본철,서보균 한국방사성폐기물학회 2014 방사성폐기물학회지 Vol.12 No.2
HPGe 감마선 검출기를 이용하여 226Ra의 방사능을 직접 측정방법의 경우, 226Ra의 186.21 keV 감마선이 235U에서 방출되는 185.7 keV 감마선에 의한 간섭을 받기 때문에 피크면적의 계산에서 반드시 보정이 필요하다. 비록 분해능이 아주 우수한 HPGe 검출기를 사용한다 하더라도 그리고 분광시스템의 채널수를 최대로 늘린다고 할지라도 약 0.5 keV 차이의 두 감마선 피크를 분리해 내기란 현실적으로 어려운 일이다. 본 연구에서는 감마분광분석을 이용한 226Ra의 직접 측정방법에 대한 적용 성을 평가하기 위하여, 여러 가지 간섭피크 보정들을 이용한 직접 측정방법을 조사하였다. 이를 원료물질 및 공정부산물 시 료들에 적용함으로써 직접 측정방법들에서 그 측정 불확도, 직선성 및 적용범위 등을 평가하였다. 최종적으로 방사평형 관 계를 이용하여 226Ra의 방사능을 측정하는 간접 측정방법으로부터 얻은 214Pb 및 214Bi의 결과를 직접 측정방법의 결과와 비 교함으로써 최적의 측정방법을 유도하였다. In the case of the direct measurement of 226Ra using a HPGe gamma-ray spectrometer, the interference between gammarays with 186.21 keV of 226Ra and 185.7 keV of 235U should be corrected to calculate the net peak area in the energy spectrum. In general, it is very difficult to conduct peaks stripping with difference of about 0.5 keV, although a HPGe with the superior resolution is applied and the maximum channels is applied to the spectrometer. In this study, several interference correction techniques in the direct measurement were surveyed to evaluate the feasibility for the measurement of 226Ra using the gamma-ray spectrometery. Applying the interference corrections to the analysis of raw materials and by-products, the method validation for the direct measurement of 226Ra was conducted by evaluating the measurement uncertainty, linearity, and range. As a result, the optimum method of the interference correction was selected by comparing with the indirect measurement of which progenies of 226Ra, such as 214Pb and 214Bi, were analyzed in the secular equilibrium state.
Gi Young Han,Do Hyun Kim,신창호,김송현,서보균,선광민 한국원자력학회 2016 Nuclear Engineering and Technology Vol.48 No.3
In analyzing residual radiation, researchers generally use a two-step Monte Carlo (MC) simulation. The first step (MC1) simulates neutron transport, and the second step (MC2) transports the decay photons emitted from the activated materials. In this process, the stochastic uncertainty estimated by the MC2 appears only as a final result, but it is underestimated because the stochastic error generated in MC1 cannot be directly included in MC2. Hence, estimating the true stochastic uncertainty requires quantifying the propagation degree of the stochastic error in MC1. The brute force technique is a straightforward method to estimate the true uncertainty. However, it is a costly method to obtain reliable results. Another method, called the adjoint-based method, can reduce the computational time needed to evaluate the true uncertainty; however, there are limitations. To address those limitations, we propose a new strategy to estimate uncertainty propagation without any additional calculations in two-step MC simulations. To verify the proposed method, we applied it to activation benchmark problems and compared the results with those of previous methods. The results show that the proposed method increases the applicability and user-friendliness preserving accuracy in quantifying uncertainty propagation. We expect that the proposed strategy will contribute to efficient and accurate two-step MC calculations.