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構造主義와 現代學問의 構造 : 敎育的 意義의 探索을 위한
강신웅 세계평화교수협의회 1977 아카데미論叢 Vol.5 No.1
Cu는 Si 초고집적 회로의 상부배선용 물질로 주목받고 있다. Cu 확산 방지능을 지닌 TiN박막을 반응성 스퍼터링법으로 (100)Si 기판 위에 성장하였다. Cu 박막은 Cu-CVD법으로 TiN/Si 기판 위에 증착 하였다. 준비된 시료에 급속 열처리를 수행한후, Cu 확산 방지막의 열적 안정성을 조사하였다. 500℃에서 열처리 하였을 때 Cu 박막의 표편 거칠기가 개선되었다. 비저항도 1.65Ω㎝로 양호한 결과를 보이며 TiN가 Cu확산의 방지막으로 효과적인 기능을 수행하고 있다. Cu가 TiN 박막층을 통하여 기판표면의 Si와 반응하여 Cu-Siliside를 생성하는 것을 알았다. Cu 확산에 따른 TiN 박막층의 구조변화가 Cu/TiN/Si 박막의 전기적 특성을 저하시키는 원인으로 사료된다. Cu is an attractive material for interconnects in Si ULSl devices applications. TiN was deposited on (100) Si wafer using a reactive sputtering technique. Cu films were grown on TiN/Si substrates by Cu-CVD(chemical vapor deposition). In this study, Rapid Thermal Annealing(RTA) was carried out on Cu/TiN/Si films. The thermal stability indispensable for a barrier against Cu was then investigated using sheet resistance measurement, Surface roughness of the film was reformed from RTA carried out at 500℃. Surface resistivity was found to be 1.65Ω㎝. From these observations, it was confirmed that the TiN layer acted effectively as a brooking barrier for the diffusion of Cu atoms, It has been concluded that Cu atoms move through TiN layer and react with Si atoms from the substrate forming Cu-Siliside at the TiN/Si interface. The structure change of TiN layer accompanying with Cu diffusion has degraded the electric properties of the film.
尹世哲,姜信雄 弘益大學校 1975 弘大論叢 Vol.7 No.-
A great many formal statements of educational aims affirm the centrality of the goal of developing morally responsible citizen through public schooling; yet few schools actually deal with maral education in a serious and systematic fashion. The teacher is often proclaimed to be the central force in the formation of moral character in the young; yet few teachers have been provided with training designed to enhance their effectiveness as moral educators. Therefore, the most striking characteristics of the contemporary state of moral education is the inconsistency between what is said and what is done. Moral philosophy and moralizing are quite differnt. As a result, while moral education has been rich in moral fervor, it has been lacking in conceptual depth. Moral education (or value education) is not simply skill training in how to act in certain ways, but rather must include provision for preparation to understand and apply principles to relevent situations in human existance. In relation to these facts, the following assumptions were proposed. The first assumption of contemporary moral philosophy is the position that the terms "moral" and "morality" do not simply reter to a complex of components which encompass at least both of these elements. The second assumption is that the concept "morality" does not simply or solely refer to mores of behaviors deemed acceptable in a certain society, but also refers to the act of personal confrontation with and choice between alternative principles and behaviors on the basis of criteria that transcend "the value system" of any particular society. The third assumption of moral philosophy deals with the importance of moral principles to the moral sphere and hence to value education. Value and moral principles are taken only to be statements of potential alternatives until that moment when human behavior turns into a binding principle by accepting it and acting upon it. In short, moral education could find its significance only on the condition that students may "create" their own values and moral principles.