3成分界 壓電薄膜을 이용한 超高主波用 素子의 開發 및 그 特性 分析

尹和重,徐日煥,丘庚完,林武悅,李珍昊 경북대학교 센서기술연구소 1995 연차보고서 Vol.1995 No.-

유기금속을 사용한 졸-겔 스핀 코팅법으로 PZT-PNN 박막을 제조하였으며, diethanolamine을 안정화물질로 사용하였다. PT:PZ:PNN의 코팅 용액의 mol%는 각각 #1 (50:40:10), #2(50:30:20), #3(45:35:20), #4(40:40:20), #5(40:50:10), #6(35:45:20) 그리고 #7(30:50:20)으로 제조하였다 스핀 코팅된 박막의 잔류 유기물을 제거하기 위해 350℃에서 예비소결을 하였고, 박막의 결정화를 위해 450℃ ∼ 700℃에서 소결하였다. 백금 기판과 Pt/TiN/Ti/TiN/Si 기판 위에 박막을 성장하였으며, 500℃의 소결에서도 perovskite 상이 출현하였다. 결정성이 가장 양호한 소결온도는 700℃이었다. Sawyer-Tawer 회로를 이용하여 박막의 P-E 이력곡선을 관찰하였다. 박막의 항전계와 잔류분극은 각각 28.8 ㎸/㎝과 18.3 μC/㎠이었다. 유전상수 K는 128 ∼ 1120의 값을 나타내었고, 상경계(40:40:20 mol%)에서 최대값을 보여주었다. 박막의 진성파괴전압은 27.0 ∼ 60.0 MV/m이었으며, 소결온도가 올라갈수록 파괴전압은 낮아지는 경향을 나타내었다. 결정성과 전기적 특성을 고려하면 550℃의 소결온도에서 박막의 특성이 가장 양호하다고 생각된다. #4 40:40:20 mol%의 박막을 이용하여 초고주파 필터를 제작하였다. ring-dot 분할전극형 필터의 경우 공진주파수는 435.26 ㎒이고 투과손실은 -0.20 ㏈이며, 반공진주파수는 1905.11 ㎒ 투과손실은 -34.30 ㏈이었다. 두께진동을 이용한 필터의 경우 공진주파수는 1035.17 ㎒ 투과손실은 -0.86 ㏈, 반공진주파수는 2310.07 ㎒ 투과손실은 -29.11 ㏈이며, 탄성표면파 필터의 경우 공진주파수는 228.28 ㎒ 투과손실은 -0.62 ㏈, 반공진주파수는 1352.86 ㎒ 투과손실은 -35.68 ㏈이었다. PbTiO_3-PbZrO_3-Pb(Ni_(1/3)Nb_(2/3)O_3)(PZT-PNN) thin films were been prepared from corresponding metal organics partially stabilized with diethanolamine by the sol-gel spin coating method. The each mol rates of PT:PZ:PNN solutions were #1(50:40:10), #2(50:30:20), #3(45:35:20), #4(40:40:20), #5(40:50:10), #6(35:45:20) and #7(30:50:20) respectively. The spin-coated PZT-PNN films were heat-treated at 350℃ for decomposition of residual organics, and were heat-treated at temperature between 450 ℃ and 750 ℃ for crystallization. The substrates, such as Pt and Pt/TiN/Ti/TiN/Si were used for the spin coating of PZT-PNN films. The perovskite phase was observed in the PZT-PNN films which were heat-treated at 500 ℃. The crystallization of the PZT-PNN films was optimized at 700 ℃ of sintering temperature. The P-E hysteresis curve was drawn by Sawyer- Tower circuit with PZT-PNN film. The coercive field and the remanent polarization of PZT-PNN film was 28.8 ㎸/㎝ and 18.3 μC/cm2 respectively. Its dielectric constants were shown between 128 and 1120, and become maximum value in MPB. The break down voltages of PZT-PNN films were shown between 27.0 and 60.0 MV/m. Crystalline and electrical characteristics of thin film indicate that characteristics of film is optimised at 550 ℃ sintering temperature. S.H.F. filter was made of #4 40:40:20 mol% thin film. For the case of ring-dot electrode type filter, resonance frequency and transmission loss were 435.26 ㎒ and -0.20 ㏈, and antiresonance frequency and transmission loss were 1905.11 ㎒ and -34.30 ㏈. For the case of thickness vibration filter, resonance frequency and transmission loss were 1035.17 ㎒ and -0.86 ㏈, and antiresonance frequency and transmission loss were 2310.07 ㎒ and -29.11 ㏈. For the case of SAW filter, resonance frequency and transmission loss were 228.28 ㎒ and -0.62 ㏈, and antiresonance frequency and transmission loss were 1352.86 ㎒ and -35.68 ㏈.

진동 센서용 3성분계 압전 박막의 제조 및 그 특성 분석(Ⅱ)

윤화중,서일환,구경완,임무열,이진호 경북대학교 센서기술연구소 1994 연차보고서 Vol.1994 No.-

3성분계 PZT 압전박막의 출발물질로는 Pb acetate, Zr propoxide, Ti propoxide, Ni acetate, Nb ethoxide를 사용하였고, 용매로는 iso metoxy ethanol을 사용하였다. 가수분해를 방지하기 위해 coating 용액에 diethanolamine을 첨가하여 chelate화합물을 형성하였고, coating 전에 H_2O를 첨가하여 M-O-M 구조의 polymer gel이 형성되도록 하여 내구성이 강한 박막을 제작하였다. Coating 용액의 열중량 분석 결과, 건조 온도는 90℃∼120℃, 예비소결 온도는 300℃∼400℃가 적합한 것으로 판단되었다. 박막의 SEM 단면 촬영 결과, 하부기판과 하부전극 사이의 TiN-Ti-TiN buffer층이 박막과 하부 기판과의 반응을 막아주어 막이 잘 형성되었으며, 각 계면에서도 별다른 이상이 발견되지 않았다. X-RD로 박막의 결정성을 조사한 결과 Pt 기판과 Pt/TiN-Ti-TiN/Si 기판 공히 550℃의 소결에서 결정성이 가장 양호하며 600℃ 이상에서는 과소결 되는 것으로 판단된다. D-E Hysterisis 곡선을 관찰한 결과 이 박막은 강유전체임을 확인했으며, 항전계는 28.8 ㎸/㎝, 잔유분극은 18.3 μC/㎠ 이었다. 박막의 I-V 특성 결과는 다음과 같다. ◁표 삽입▷(원본을 참조하세요) 3성분계 PZT 박막의 C-V 특성곡선을 측정한 결과 각 조성비에 대한 비유전율은①(50:40:10)은 406, ②(50:30:20)은 1084, ③(45:35:20)은 723, ④(40:40:20)은 316이었다. In order to make the three compound piezoelectric thin film, the Pb acetate, Zr propoxide, Ti propoxide, Ni acetate, Nb ethoxide are used as starting materials, and iso metoxyethanol was used as a solvent. After DEA (diethanolamine) is added in to the solution, the coating solution and chelate compound are made in order to the phenomenon of hydrosys was prevented. Before coating, H2O was added in to the solution, the polymer gel which is M-O-M structure was formed, and then the strong durable film was made. As a result of the analysis by TGA, dry temperature was between 90℃ and 120℃, presintering temperature was indicated between 300℃ and 400℃. As a result of observing the SEM cross section of the film in the pictures were taken, the reaction of membrane and substrate caused by TiN-Ti-TiN buffer layers, and the abnormality was not detected in the boundary surfaces. As a result of checking of the X-RD film crystallization, the crystallization is best at 550℃ sintering and at 600℃ upper the over sintering is made on the both of Pt substrate and Pt/TiN-Ti-TiN/Si substrate. As a result of observing the D-E hysterisis curve, in the thin film the strong dielectricity was found and coercive field was 28.8 ㎸/㎝, the remanent polariztion was 18.3 μC/㎠. Ⅰ-Ⅴ characteristic chart is as following ◁표 삽입▷(원본을 참조하세요) As a result of measuring the C-V characteristic curve of the three compound piezoelectric thin film, the relative dielectric constant was ①(50:40:10)→406, ②(50:30:20)→1084, ③(45:35:20)→723, ④(40:40:20)→316.

진동 센서용 압전 박막의 제조 및 그 특성 분석

윤화중,서일환,구경환,임무열,이진호 경북대학교 센서기술연구소 1993 연차보고서 Vol.1993 No.-

졸-겔 spin-coating법을 이용하여 PZT 압전 박막을 제작하고 그 물리적 및 전기적 성질을 평가하여 진동 측정용 센서로서의 적용 가능성을 검토하였다. PZT의 원료로는 Pb-acetate, Zr-propoxide 그리고 Ti-propoxide를 사용하였다 SEM 단면사진의 결과 하부전극 금속이 silicate화 하였고, SIMS 분석결과 Si와 하부전극의 금속이 PZT 박막의 상층부까지 확산된 것을 알 수 있었다. X-RD로 박막의 결정성을 조사한 결과 하부전극을 Pt로 한 박막과 buffer 층으로 Ti를 증착한 박막에서 강한 perovskite 상이 나타났다. D-E Hysterisis 곡선을 관찰한 결과 강유전성을 나타내며, 항전계는 33.3 ㎸/㎝, 잔유분극은 1.92 C/℃ 이었다. 박막의 비유전율은 57이었다. 박막의 resistance와 impedance의 반공진 주파수는 612 ㎒이고, 이때의 resistance 값은 14 ㏀이었다. 박막의 진동에 대한 주파수 응답 곡선을 측정 결과 12000 ㎐ 이하 저주파 영역에서는 응답 특성이 떨어지고 12000 ㎐ 이상의 어느 정도 높은 주파수 영역에서 응답 특성이 양호하다는 것을 알 수 있었고, 20000 ㎐ 100 ㏈(V)의 진동에 대해 151.4 ㎶의 응답을 나타내었다. PZT thin film was prepared by Sol-Gel spin-coating method and it's physical and electrical caracteristics were appreciated. Pb acetate, Zr propoxide and Ti propoxide used for the starting material to fabricate PZT coating solution. The cross-sectional SEM micrograph showed that the metals of lower electrode was silicated. The SIMS depth profile indicated that the metal of lower electrode and silicon diffused up to the upper part of PZT thin film. For the X-RD data of PZT thin film, the thin film on Pt substrate and with Ti buffer layer had strong perovskite phase. The PZT thin films measured by Sawyer-Tower circuit showed feroelectric characteristic representating D-E hysterisis curve. The remanent polarization and coercive field of the film was 1.92 C/㎠ and 33.3kV/㎝. Dielectric constant of Film is 57. The resistance and impedance antiresonance frequency was 612 ㎒, and the resistance was 14 ㏀ at that frequency. The frequency response curve of PZT film showed that the PZT film responded sensitively at the high frequency, and response voltage of PZT film was 151.4 ㎶ at 20,000 ㎐ 100 ㏈(V) frequency.

도시이미지 제고를 위한 가로경관 색채계획에 관한 연구

이영화(Lee, Young-Wha),지윤범(Chi, Yoon-Beom),박기열(Park, Kee-Yeol),이상호(Lee, Sang-Ho) 한국색채학회 2001 한국색채학회 논문집 Vol.15 No.2

Single incision versus multiport robotic myomectomy, which surgical option will be suitable?

( Sa Ra Lee ),( Ju Hee Kim ),( Young-jae Lee ),( Shin-wha Lee ),( Jeong Yeol Park ),( Dae-shik Suh ),( Dae-yeon Kim ),( Sung Hoon Kim ),( Yong-man Kim ),( Young-tak Kim ) 대한산부인과학회 2021 대한산부인과학회 학술대회 Vol.107 No.-

원발성 위 림프종에서 전환된 Burkitt 림프종 세포 백혈병 1 예

유종훈,이정석,이동윤,이준상,이지현,홍수희,최의혁,윤성준,신원혁,류인열,김지화 대한내과학회 1998 대한내과학회지 Vol.54 No.2

Burkitt's lymphoma is a distinct clinical entity classified as an undifferentiated lymphoma of B-lymphocytic origin. Burkitt's lymphoma cell leukemia occurs when Burkitt's lymphoma cells represent more than 20% of marrow cells and exceed about 5000/ul in blood. We report a case of Burkitt's lymphoma cell leukemia in primary gastric lymphoma in 55-year-old man with 5kg of weight loss for 2 months and epigastric pain for 3 days. Primary gastric lymphoma was diagnosed by biopsies with gastrofiberoscopy and upper abdominal CT scan in this patient. During admission, peripheral blood smear revealed sudden increase in abnormal blasts with multiple vacuoles. Burkitt's lymphoma cell leukemia was diagnosed by peripheral blood, bone marrow aspiration and biopsy, immunophenotyping and cytogenetic analysis in this patient. For its great rarity, we report this case with review of literature.

좌심방에 발생한 원발성 미분화 육종-1례 보고-

이석열,이승진,이만복,염욱,이길노,최두호,이동화,Lee, Seock-Yeol,Lee, Seung-Jin,Lee, Man-Bok,Youm, Wook,Lee, Kihl-Rho,Choi, Doo-Ho,Lee, Dong-Wha 대한흉부심장혈관외과학회 1998 Journal of Chest Surgery (J Chest Surg) Vol.31 No.8

원발성 심장종양은 대단히 희귀하며 원발성 심장종양가운데 25%정도가 악성종양이다. 저자들은 희귀한 원발성 좌심방 미분화 육종을 보고하는 바이다. 환자는 28세 여자로 임신32주에 호흡곤란을 주소로 내원하였다. 심초 음파와 자기공명영상에서 좌심방의 80-90%를 차지하는 종양이 발견되어 점액종으로 진단하고 응급수술을 시행 하였다. 수술은 먼저 제왕절개술을 통하여 태아를 분만후에 체외순환하에 좌심방 절개를 하였다. 좌심방내의 심내막일부를 포함하여 종양절제후에 병리소견상 미분화 육종으로 판명되어 방사선치료후 현재 추적관찰중이다. Primar99y cardiac tumors are rare and about 25% of primary cardiac tumors are malignant. A primary undifferentiated cardiac sarcoma, which very rare, is presented as follows: A 28-year old woman at the 32th week of pregnancy was admitted to the hospital because of dyspnea. A large intracardiac (left atrium) tumor was found with cardiac echocardiography and MRI. Emergency operation was performed under the diagnosis of left atrial myxoma. After Cesarean section, LA-tomy was done under the cardiopulmonary bypass. Tumor removal including endocardium of left atrium was done and final pathologic diagnosis was primary undifferentiated laft atrial sarcoma. After adjuvant radiotherapy, she has been followed up in out patient bases without problems up to now.

선천성·전신성 세포비대성 봉입체병(Cytomegalic inclusion disease)의 1례

이혜경,김미화,김종열,안상윤,한혜경,나창수,이혜경 최신의학사 1991 最新醫學 Vol.34 No.7

치어기 넙치 사료내 생균제 첨가효과

정창화 ( Chang Wha Jeong ),최희정 ( Hee Jung Choi ),유광열 ( Gwang Yeol Yoo ),이승형 ( Seung Hyung Lee ),김영철 ( Young Chul Kim ),이준호 ( Jun Ho Lee ),전경동 ( Kyoung Dong Jun ),최세민 ( Se Min Choi ),김강웅 ( Kang Woong Kim 한국수산과학회 2006 한국수산과학회지 Vol.39 No.6

The efficacy and safety of pegylated liposomal doxorubicin monotherapy and combination therapy with carboplatin in Korean patients with recurrent ovarian, fallopian tube, or primary peritoneal cancer: a single-institution experience

( Young-jae Lee ),( Yong-man Kim ),( Shin-wha Lee ),( Jeong-yeol Park ),( Dae-yeon Kim ),( Dae-shik Suh ),( Jong-hyeok Kim ),( Young-tak Kim ),( Joo-hyun Nam ) 대한산부인과학회 2017 Obstetrics & Gynecology Science Vol.60 No.5

Objective This study aimed to evaluate the efficacy and safety of pegylated liposomal doxorubicin (PLD) with or without carboplatin in Korean patients with recurrent ovarian cancer (ROC), fallopian tube, or primary peritoneal cancer. Methods This retrospective study included 52 patients with ROC, fallopian tube, or primary peritoneal cancer who received PLD (50 mg/m²) between 1^st December 2014 and 31^th July 2016. Results The mean number of chemotherapy cycles was 3.8 (range, 2 to 9) in the PLD monotherapy group and 7 (range, 2 to 13) in the PLD combined with carboplatin (PLD-C) group. In overall response rates and clinical beneficial rates, PLD monotherapy group shows 5.0% and 17.5%, and PLD-C group shows 33.3% and 75.0%. The mean progression-free survival (PFS) was 5 and 13 months in the PLD monotherapy and PLD-C groups, respectively. At 6 months after treatment initiation, absence of disease progression was confirmed in 6 (15%) and 10 (83.3%) patients in the PLD monotherapy and PLD-C groups. Hematological adverse events (e.g., neutropenia and thrombocytopenia) were more common in the PLD-C group (P <0.001, P =0.004). The incidence of anemia and non-hematological adverse events, including mucositis, hand-foot syndrome, and allergic reactions, was similar in both groups. Conclusion This study demonstrated the efficacy and safety of PLD monotherapy and PLD-C combination in Korean patients with ROC. This study would be helpful to consider the degree of worry about side effects and treatment expectations after treatment. Further retrospective studies with larger samples are required to confirm the efficacy of PLD monotherapy in Asian patients with platinum-resistant ROC.