LTCC 기술을 이용한 MEMS 소자 진공 패키징

전종인,최혜정,김광성,이영범,김무영,임채임,황건탁,문제도,최원재 한국마이크로전자및패키징학회 2003 마이크로전자 및 패키징학회지 Vol.10 No.1

MEMS 소자는 현재의 전자산업환경에서 여러 요구조건을 만족시킬 수 있는 특징을 갖추고 있으며 이러한 MEMS 소자를 이용한 MEMS 구조물의 packaging 방법에 있어서는 내부 MEMS 소자의 동작을 위한 외부 환경으로부터의 보호를 위하여 Hermetic sealing에 대한 요구를 충분히 만족시켜야 한다. 본 논문에서는 이와 같은 MEMS device의 진공 패키지를 구현함에 있어서 기판내부에 수동소자를 실장할 수 있는 LTCC 기술$^{1)}$ 을 이용하여 진공 패키징하는 방법에 대하여 소개한다. 본 기술을 이용하는 경우 기존의 Hermetic sealing이외에 향후 적층 기판 내부에 수동소자를 내장시켜 배선 길이 및 노이즈 성분을 감소시켜 더욱 전기적 성능을 향상시킬 수 있는 장점이 있게된다. 본 논문에서는 LTCC기판을 이용하여 패키징 시킨 후, 내부 진공도에 영향을 줄 수 있는 계면들에서의 시간에 따른 진공도 변화로부터 leakage rate를 측정 (stacked via : $4.1{\pm}1.11{\times}10^{-12}$/Torr1/sec, LTCC 기판/AgPd/solder/Cu의 여러 가지 계면구조: $3.4{\pm}0.33{\times}10^{-12}$/ Torrl/sec)하여 LTCC 기판의 Hermetic sealing 특성에 관하여 조사하였다. 실제 적용의 한 예로 LTCC 기술을 이용하여 Bolometer를 성공적으로 진공패키징할 수 있었으며 실제 관찰된 이미지를 함께 소개한다. In the current electronic technology atmosphere, MEMS (Microelectromechanical System) technology is regarded as one of promising device manufacturing technologies to realize market-demanding device properties. In the packaging of MEMS devices, the packaged structure must maintain hermeticity to protect the devices from a hostile atmosphere during their operations. For such MEMS device vacuum packaging, we introduce the LTCC (Low temperature Cofired Ceramic) packaging technology, in which embedded passive components such as resistors, capacitors and inductors can be realized inside the package. The technology has also the advantages of the shortened length of inner and surface traces, reduced signal delay time due to the multilayer structure and cost reduction by more simplified packaging processes owing to the realization of embedded passives which in turn enhances the electrical performance and increases the reliability of the packages. In this paper, the leakage rate of the LTCC package having several interfaces was measured and the possibility of LTCC technology application to MEMS devices vacuum packaging was investigated and it was verified that improved hermetic sealing can be achieved for various model structures having different types of interfaces (leak rate: stacked via; $4.1{\pm}1.11{\times}10^{-12}$/ Torrl/sec, LTCC/AgPd/solder/Cu-tube; $3.4{\pm}0.33{\times}10^{-12}$/ Torrl/sec). In real application of the LTCC technology, the technology can be successfully applied to the vacuum packaging of the Infrared Sensor Array and the images of light-up lamp through the sensor way in LTCC package structure was presented.

中共軍 正月政勢時 리지웨이와 彭德懷의 作戰指導

전종순(田鍾?) 국방부 군사편찬연구소 2002 군사 Vol.- No.45

추간판 탈출증으로 단기간 덱사메타손 경막외 신경 차단술 후 발생한 의인성 쿠싱증후군 1예

전종인,김근태 대한내과학회 2019 대한내과학회 추계학술대회 Vol.2019 No.1

성폭력 피해 여성의 지원서비스 이용 경험 연구 - 성폭력 상담소를 중심으로 -

전종설 ( Jong Serl Chun ),심혜선 ( Hai Sun Shim ),김지현 ( Ji Hyun Kim ) 한국가족복지학회 2017 한국가족복지학 Vol.22 No.2

The purpose of this study was to investigate female victims` experiences of support services for sexual assault. We conducted in-depth interviews with four female victims of sexual assault and analyzed the data using qualitative case study methods. Through within-case analysis, the experiences of using support services for sexual assault victims in each case were analyzed. In the cross-case analysis, nine themes were categorized: “Everybody turns a blind eye to the assault and everybody, including the victims and their families, blames the victim,” “Difficult to find support service providers,” “Psychological and emotional support,” “Medical support,” “Legal support,” “Family support,” “Constant pain: support services need to be continuously provided,” “Systematic and integrated management,” and “For a better future.” Nineteen sub-themes were also determined. Based on the results, suggestions have been made to improve the support services for sexual assault victims in terms of social welfare policy and practices.

수중운동이 노인여성의 신체성분과 혈액성분에 미치는 영향

전종귀,조병준,최재청,김동대,한동욱,Jun, Jong-Kui,Cho, Byung-Jun,Choi, Jae-Cheong,Kim, Dong-Dae,Han, Dong-Wook 대한물리치료과학회 2002 대한물리치료과학회지 Vol.9 No.1

The purpose of this study was to investigate the effects of aqua-exercise program on fitness and blood factors in the elderly women. Subjects were fifteen members living in Daejon(15 females), between 65 and 77 years of age. The subjects was put in the aqua-exercise program for 8 weeks, between July and september, 2001. The results of this study were as follows : 1. After the exercise program, there are significant differences of Fat Mass(p<0.05), Fat Distribution(p<0.01), Obesity(p<0.01), Soft Lean Mass(p<0.05). 2. After the exercise program, subjects showed Meaningful increase of SGOT(p<0.01), SGPT(p<0.001).

조선 시대 고을 사직단의 경관 구성과 복원 방향 - 부평 사직단을 중심으로 -

전종한 한국문화역사지리학회 2020 문화 역사 지리 Vol.32 No.2

The Sajikdan is an altar for the god[Sa] of the earth and the god[Jik] of grains. During the Joseon Dynasty, they created also local Sajikdan nationwide. In the Joseon Dynasty, ‘Sajik’ was soon recognized as the state itself in that ‘sa’ is related to the governing territory and ‘Jik’ is related to people’s lives. Each local Sajikdan was an essential landscape element that constituted the ‘Eupchi’ landscape. In addition to the altar, each local Sajikdan was a landscape composed by landscape elements such as ‘Yu’, ‘Shinsil’, and ‘Dansu’. The size and format of each local Sajikdan was differentiated from that of the national Sajikdan. From today’s point of view, each local Sajikdan is a landscape that contains traditional thoughts, rituals, and hidden strategies, as well as a profound memory of historical stories, and is a heritage of reconstruction value. For our present reconstruction of local Sajikdan, it is necessary to approach from the viewpoint of the entire landscape, not that of the fragmentary elements, so beyond the meaning of the individual landscape elements, to the world of the broader narrative created by the connection and harmony between them. We should try to put it in our reconstruction enterprise. 사직단은 토지 신인 ‘사(社)’와 곡식 신인 ‘직(稷)’을 위한 제단으로 조선왕조에는 국가 사직단 외에도 전국적으로 고을 사직단을 조영하였다. 사는 다스리는 영토와 관련되고 직은 백성의 삶과 관계된다는 점에서 사직은 곧국가 그 자체로 인식되었다. 고을 사직단은 조선 후기 전국의 읍치 경관을 구성해간 필수 경관 요소였다. 고을 사직단은 중앙부의 제단 외에도 유, 신실, 단수 등의 세부 경관 요소들이 집합적으로 창출하는 하나의 경관이었다. 고을사직단의 규모와 형식은 국가 사직단의 그것과 차별적으로 규정되었다. 오늘의 관점에서 고을 사직단은 전통 사상과 의례, 숨겨진 전략 등을 내포한 경관이자 역사의 질곡까지 이야기하는 심오한 기억의 장소로서 현재적 복원 가치를 지닌 헤리티지이다. 오늘날 고을 사직단을 복원함에 있어서는 단편적 경관 요소를 살피는 관점이 아닌 전체경관의 관점에서 접근할 필요가 있고, 따라서 개별 경관 요소의 의미를 넘어 그들 간의 연결과 조화가 만들어내는더 넓은 내러티브의 세계까지 복원 작업에 담아낼 수 있도록 힘써야 한다.

고추 재배 시 칼슘화합물 엽면살포가 배꼽썩음과 발생 및 생육에 미치는 영향

전종옥(Jong Ok Jeon),박재호(Jae Ho Park),신세균(Se Kyun Shin),윤태(Tae Yun),김진한(Jin Han Kim) 한국원예학회 2002 한국원예학회 학술발표요지 Vol.2002 No.6

고추 양액재배 시 유인방법이 생육 및 수량에 미치는 영향

전종옥(Jong Ok Jeon),박재호(Jae Ho Park),신세균(Se Kyun Shin),윤태(Tae Yun),김진한(Jin Han Kim) 한국원예학회 2002 한국원예학회 학술발표요지 Vol.2002 No.3

유산소 운동이 비만인의 신체구성과 혈중지질대사에 미치는 영향

전종귀,김선호 忠南大學校體育科學硏究所 2002 體育科學硏究誌 Vol.20 No.1

The purpose of this experiment was to recognize the influence executed aerobics for eight weeks, and what kind of influence were having on body compositions, metabolism of blood lipids according to sports disposition period, and the object of this experiment was university students who were being obesity. The object of this experiment was 12-man-university students who were having at least 25% deal of fat mass(fat%), had no special sport experiences, and their health state was desirable, and they were divided two groups, one was exercise-group and the other was non-exercise-group, each group had 6 members. By pre-experiment, the experiment was executed on treadmill during 50 minutes with HRmax 75%. Blood gathering was done when the object was stability and after the exercise immediately, and the blood which were gathered, was analyzed for blood lipid. After 8 weeks aerobics, though exercise group lessen their weight, fat mass, and the rate of fat in comparison with opponent, they didn't greatly differ from non-exercise group in body compositions. However, after the aerobics executed for many hours, in comparison with non-exercise-group, exercise-group had been increased the rate of HDL, but decreased the rate of TC and TG. The result of this experiment is the aerobics effects body composition, blood lipid and makes them are changed. The reason is aerobics makes our body to be increased ability of metabolism and lipolysis, and amount of muscles, adipose tissue, and the rate of energy consumption, and using of adipose. Therefor, aerobic that execute for many hours increase the energy consumption, so it prevents obesity phosphorus from chronic disease. In conclusion, aerobics is an effective exercise to maintain our good health.

18세기 프랑스문학과 예수회

전종호 서강대학교 인문과학연구소 2007 서강인문논총 Vol.21 No.-