http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Cobalt Interlayer 와 TiN capping를 갖는 새로운 구조의 Ni-Silicide 및 Nano CMOS에의 응용
吳淳榮,윤장근,황빈봉,왕진석,이희덕,朴英鎬,池熺奐 대한전자공학회 2003 電子工學會論文誌-SD (Semiconductor and devices) Vol.40 No.12
In this paper, a novel Ni silicide technology with Cobalt interlayer and Titanium Nitride(TiN) capping layer for sub 100 nm CMOS technologies is presented, and the device parameters are characterized. The thermal stability of Ni silicide is improved a lot by applying co-interlayer at Ni/Si interface. TiN capping layer is also applied to prevent the abnormal oxidation of NiSi and to provide a smooth silicide interface. The proposed NiSi structure showed almost same electrical properties such as little variation of sheet resistance,leakage current and drive current even after the post silicidation furnace annealing at 700℃ for 30 min. Therefore, it is confirmed that high thermal robust Ni silicide for the nano CMOS device is achieved by newly proposed Co/Ni/TiN structure. 본 논문에서는 Cobalt interlayer와 TiN capping을 적용한 Ni-Silicide 구조를 제안하여 100 nm CMOS 소자에 적용하고 소자 특성 연구를 하였다. Ni-Silicide의 취약한 열 안정성을 개선하기 위해 열 안정성이 우수한 Cobalt interlayer를 이용하여 silicide의 열화됨을 개선하였고, 또한 silicide 계면의 uniformity를 향상하기 위해 TiN capping을 동시에 적용하였다. 100 nm CMOS 소자에 제안한 Co/Ni/ TiN 구조를 적용하여 700℃, 30분에서의 열처리 시에도 silicide의 낮은 면저항과 낮은 접합 누설 전류가 유지되었으며 100 nm 이하 소자의 특성 변화도 거의 없음을 확인하였다. 따라서 제안한 Co/Ni/TiN 구조가 NiSi의 열 안정성을 개선시킴으로써 100 nm 이하의 Nano CMOS 소자에 매우 적합한 Ni-Silicide 특성을 확보하였다.
오순영,정병용,Oh, Soon-Yong,Jeong, Byung-Yong 대한인간공학회 2005 大韓人間工學會誌 Vol.24 No.1
This paper describes a practical ergonomic approach for the shipbuilding industry that occupies the highest rate of work-related musculoskeletal disorders (WMSD) in Korea. Typical work processes within a shipbuilding operation were surveyed to determine the presence of risk factors associated with musculoskeletal disorders. We used interviews, document analysis, video analysis, and OWAS postural analysis to identify and quantify ergonomic risk factors that workers may be exposed to in the course of their normal work duties. Some ergonomics actions were performed to solve the problems identified in the risk factor analysis. The practical ergonomic approach has resulted in decreases in workers' accident, and increases in productivity. The ergonomic solutions developed in this study could be applied to other sectors of industry that share common features of work with shipbuilding industry.
오순영,조남인 선문대학교 첨단과학기술연구소 1996 첨단과학기술연구소 논문집 Vol.1 No.1
완전공핍된 SOI nMOSFET를 SIMOX 웨이퍼 상에 구현하였으며 전기적인 특성을 조사하였다. 소자의 제작은 기존의 CMOS 공정기술을 사용하였다. SOI 기판의 실리콘 층의 두께는 back gate 전압을 인가하지 않았을때 소자동작시에 능동영역이 모두 공핍되기 위하여 100㎚ 이하로 하였다. 제작된 소자 의 threshold 전압은 능동영역의 불순물 농도의 변화에 의해 조정할 수 있었다. threshold 전압 측정 결과 는 이미 제안된 완전공핍된 SOI 모델에 의한 계산치와 거의 일치하였다. fully depleted SOI nMOSFETs have been implemented by the conventional device process using SIMOX wafer, and their electrical characteristics have been analyzed. The top silicon layer of the SOI was less than 100㎚ in order to maintain the full depletion during the device operation without the application of the back gate voltage. The threshold voltage of the FETs can be controlled by varying the impurity concentration of the active layer. The results of the threshold voltage measurements are in good agreement with the previously proposed fully-depleted SOI model by others.
오순영,류은정 대한종양간호학회 2015 Asian Oncology Nursing Vol.15 No.3
Purpose: The purpose of this study was to explore educational needs for sexual health, to identify relations among educational needs for sexual health, depression and quality of life, and to identify the factors affecting quality of life in patients with prostate cancer aged > 40 years. Methods: A sample of 78 patients was recruited from a university hospital in Seoul. A cross-sectional design was used in which participants completed the questionnaires to assess educational needs for sexual health, depression and quality of life. The data were analyzed using the t-test, ANOVA, correlation analysis and stepwise regression analysis. Results: The quality of life of participants differed significantly by occupation status before and after diagnosis, stage at diagnosis, underlying disease, performance status, and in the Gleason sum score. Stepwise regression analysis of the data showed that depression, sexual interaction, Gleason sum score, and occupation since diagnosis were the statistically significant factors associated with quality of life of patients with prostate cancer. This regression model explained 55.1% of the quality of life. Conclusion: These results indicate that depression and sexual interaction had the greatest impact on quality of life in prostate cancer patients. In clinical practice, we recommend that healthcare professionals take the initiative to provide adequate and accurate information about sexual health to prostate cancer survivors.