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Growth of Silicon Nitride Film by Controlling Plasma Ion Energy and Duty Ratio at Room Temperature
김병환,이수진 대한금속·재료학회 2010 METALS AND MATERIALS International Vol.16 No.4
Silicon nitride (SiN) films were deposited using a radio frequency (rf) pulsed-plasma deposition system in a SiH4-N2 plasma at room temperature. The effects of rf bias power and duty ratio on SiN deposition were investigated. The bias power and duty ratio were experimentally varied in ranges of 50 W to 90 W and 30 % to 90%, respectively. An ion energy analyzer was utilized to collect ion energy and ion energy flux. Little variations in low and high energies, respectively with the duty ratio was observed at a duty ratio of over 60 %. In contrast, ion energies sharply decreased with a decrease in the duty ratio to a range of 30 %to 60 % range. Modest variations in high and low energy fluxes were observed at duty ratio of over 40 %and 60%, respectively. Decreasing the bias power increased ion energy fluxes. In general, higher ion energy fluxes were observed at lower bias powers. The deposition rate strongly correlated with a low ion energy flux at 90 W. This was noted in a duty ratio range of 30 % to 50 % at 70 W. A high correlation with a high ion energy flux was also observed at 50 W. For all variations, the deposition rate ranged from158 Å/min to 185 Å/min.
Plasma Etching of Silicon Oxynitride in a Low Pressure C2F6 Plasma
김병환,이병택,박재영,Jeong Kim,이수홍 한국물리학회 2005 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.47 No.4
Silicon oxynitride films were etched at a low pressure of 6 mTorr in a C2F6 inductively coupled plasma. The examined etching characteristics included the etch rate, the profile angle, the surface roughness, and microtrenching. For comparison, etch data were collected at a high pressure of 12 mTorr. Irrespective of the pressure level, etch rate variations with either the source power or the bias power were identical. Larger etch rates and smaller surface roughnesses were observed at lower pressures. Increasing the bias power or the source power was beneficial for obtaining a smaller surface roughness. A profile angle variation just over microtrenching was effective in interpreting microtrenching variations.
배출가스 직접반응을 통한 CO2 포집 및 대량활용 저장기술
김병환,김정헌,강필선,유승관 한국공업화학회 2015 한국공업화학회 연구논문 초록집 Vol.2015 No.0
본 개발은 화력발전소 등 연소 배출가스에 포함되어 있는 이산화탄소를 화학적 중화반응에 의하여 포집 제거하고, 이 과정에서 발생하는 포집부산물을 산업용 소재로 재이용하는 기술이다. 배출가스 내에 이산화탄소는 약 10~15%정도 포함되어 있고, 이 배출가스가 직접포집장치를 통과시 이산화탄소를 선택적으로 포집하여 제거한다. 직접포집장치로 유입되는 약제는 광물계 또는 폐기물계 Ca를 함유하고 있고, 반응 약제와 유입 CO2가 직접포집정치 내부에서 반응하여 침강성 탄산칼슘으로 전환된다. 기존의 탄산화 연구는 CO2 포집에 주안점을 두고 있어, 반응전환물 최종 처분과 온실가스 감축실적과의 연계가 어려웠다. 그러나 본 연구에서는 이과정에서 발생하는 CO2포집물 (침강성 탄산칼슘)을 대량 활용이 가능한 토목 및 건축소재로 재활용하고, 포집된 CO2를 반영구 저장과 연계시켰다. 본 발표는 연소배출가스를 대상으로 10톤 CO2/일 규모의 직접포집공정 Pilot Plant 운영결과와, 이때 발생하는 CO2 포집물을 토목 및 건축 소재로 활용사례를 포함한다.
김병환 한국중국학회 2003 中國學報 Vol.47 No.-
This paper proposes to discuss the ethics of human cloning from the Confucian perspectives. The prospect of human cloning burst into the public consciousness in 1997, following the announcement of the successful cloning of Dolly the sheep. It has since captured much attention and generated great debate in the world. Many are repelled by the idea of producing children who would be genetically virtually identical to pre-existing individuals, and believe such a practice unethical. But some see in such cloning the possibility to do good for infertile couples and the broader society.In this paper I examined a series of specific ethical issues and objections to cloning human children. (1) problems of identity and individuality ; (2) concerns regarding manufacture ; (3) the prospect of a new eugenics ; (4) troubled family relations etc.If one accept the fact that the human is the complex creation by the interaction between the human and the environmental elements, it is quite clear that the cloned man is not the same individual with the original person. The genetic identity does not correspond to the individual identity.In conclusion, cloning-to-produce-children can be accepted in terms of human procreative freedom. The Confucians would allow that couples with fertility problems use the somatic cell nuclear transfer technology to have biologically related children. According to the principle of sheng sheng 生生 of Confucianism, the dangers of human cloning to children do not weigh the value of human procreative freedom.